Cylinder with Lock Series CNG

(186) 30 22 55 5 6 M8 x 1.25 24 1/8 21.5 2 65 5.5 6 52 25 65 3 12 M4 x 0.7 Stroke x 215 (223) 31 151 (159) 40 193 (201) 30 24 62 5.5 8 M10 x 1.25 29 1/8 26.5 2.5 73 5.5 7 60 30 75 3 12 M5 x 0.8 218 (226) 38 154 (162) 40 196 (204) 35 24 62 5.5 10 M10 x 1.25 35.5 1/8 26.5 2.5 73 6.6 7 60 30 75 3 12 M5 x 0.8 241 (250) 47 169 (178) 50 221 (230) 35 25 70 6 14 M14 x 1.5 44 1/8 28 2.5 81 6.6 8 66

Process Pump

(Comparison with current PB series) Weight Weight 0. 0.11kg kg Weight 0.11kg PB1013A/Air-operated type without foot 37 37 mm mm 52 mm 37 mm 52 52 mm mm 66 66 mm mm 66 mm Actual size (PB1013A) Application Examples Application Examples Application Examples Space saving (Air operated) Car washing machine Printing machine Semiconductor/ LCD equipment Analyzer for medical and biochemistry Water

End Lock Cylinder Series CBM2/ø20, ø25, ø32, ø40 Series CBA1/ø40, ø50, ø63, ø80, ø100 CL Locking of door Prevention of dropping at the rising end MLG With front lock With rear lock CNA CNG MNB CNS Maintains the cylinder’s CLS original position even if t

3.2 131 34 30 37 107 30 9 14 133 142 8 10 32 32 52 36 108 116 118 450 300 300 450 300 9 10 19 47 4 40 55 20 8 25 7 4 60 75 6.8 28 102 3.2 135 40 37 41 111 30 9 14 137 146 9 10 40 40 60 40 112 120 122 MGC 450 300 300 450 300 9 10 19 47 4 40 55 20 8 25 7 4 60 75 6.8 28 104 3.2 137 40 37 41 113 30 9 14 139 148 9 10 40 40 60 40 114 122 124 500 300 300 500 300 10 15 30 54 4 55 75 23 27 7 5 66

AIR COMBINATION

type Metal bowl With Round type With With auto drain Metal bowl Metal bowl Metal bowl Model pressure gauge with level gauge pressure gauge barb fitting drain guide with drain guide with level gauge with drain guide (with color zone) H H B B B B B B B J J AC20C-A 58.5 59.5 37.5 37.5 104.9 87.4 93.9 91.4 AC25C-A 58.5 59.5 37.5 37.5 156.8 117.6 122.1 137.6 142.1 123.6 121.9 AC30C-A 65 66

End Lock Cylinder Series CBM2/ø20, ø25, ø32, ø40 Series CBA1/ø40, ø50, ø63, ø80, ø100 CL MLGC CNA CB CV/MVG Maintains the cylinder’s CXW original position even if the CXS air supply is interrupted. CXT MX

D-C80C D-A3A D-G39A D-K39A D-A44A D-H7W D-H7BAL D-H7F D-G5NTL D-C73C D-C80C D-H7 D-H7C D-B5 D-B6 D-B59W MGG MGC A 1(0) 1(0) 2(0) 7 B 0(0) 0(0) 0.5(0) 5.5 A 6(4) 6(4) 7(5) 12 B A B 1.5(0) 1.5(0) B 0(0) 0(0) 1(0) 6 B 5(3) 5(3) 6(4) 11 A 7(5) 7(5) 8(6) 13 A B 6(4) 6(4) 7(5) 12 A 4(2) 4(2) 5(3) 10 B 3(1) 3(1) 4(2) 9 A 0.5(0) 0.5(0) 1.5(0) 6.5 Hs 22.5 25 28.5 32.5 Hs 25 27.5 31 35 Hs 60 62.5 66

Low Friction Cylinders Series MQ

x LD LS + Stroke LT 16 10 to 60 51.2 34 10 6.6 4 24 LX LZ 20 10 to 60 54.7 37.5 10 6.6 4 26 A + Stroke 25 10 to 50,75,100 61.2 42 12 6.6 4 30 30 10 to 50,75,100 67.7 48.5 12 6.6 4 33 25, 30, 40 L B + Stroke 40 10 to 50,75,100 70.2 50 12 9 5 39 Bore size (mm) LS LT LX LY LZ X Y M LY 10 19.5 2 38 33.5 48 8 5 LH 16 22 3.2 48 42 62 9.2 5.8 X X LG Y Y LS + Stroke 4 x LD LT 20 22.5 3.2 52 46 66

17

Load mass m lbs (kg) 100 100 80 80 100 22 (10) 22 (10) 80 11 (5) 10 100 20 29 30 5051 300 200 11 (5) 10 100 20 29 30 50 51 300 200 Stroke (mm) Stroke (mm) 14 Series MGP Operating Range when Used as Stopper Bore Size: 12 to 25/MGPM12 to 25 (Slide bearing) MGPM12 to 25 (Slide bearing) L 50 mm L 50 mm L 50 mm 220 (100) 25 m m 110 (50) 20 88 (40) Mass of transferred object: m lbs (kg) 66

AW

With auto drain With barb fitting With drain guide Metal bowl Metal bowl with level gauge M 25 30 41 50 50 70 Model AG N 28 34 40 54 54 66 Q 30 44 46 54 56 66 R 4.5 5.4 6.5 8.5 8.5 11 S 6.5 15.4 8 10.5 10.5 13 T 40 55 53 70 70 90 U 2 2.3 2.3 2.3 2.3 3.2 V 18 30 31 35.5 37 W 18.5 28.5 38.5 42.5 42.5 Y 14 19 21 21 Z 6 7 7 7 B Note) B Note) B Note) B Note) B Note) AW10 AW20(K) AW30(K)

Modular Type Regulators Series AR

V W Y Z AW AR10 AR20(K) AR25(K) AR30(K) AR40(K) AR40(K)-06 AR50(K) AR60(K) 4.5 6.5 30 25 28 40 2 18 18.5 44 5.4 15.4 34 30 55 2.3 25 28.5 14 6 AG 15.4 34 44 5.4 30 55 2.3 26 32.5 16 6 8 6.5 41 40 46 53 2.3 31 38.5 19 7 AV 10.5 54 8.5 50 54 70 2.3 35.5 42.5 21 7 8.5 10.5 54 56 50 70 2.3 37 42.5 21 7 AF800 AF900 13 65.8 11 70 66 90 3.2 13 66 65.8 11 70 90 3.2 Note 1) The total length of B

Parallel Style Air Gripper/2 Finger, 3 Finger, 4 Finger Series MHS

XB NB Q 4 x M6 x 1 thread depth 12 (Mounting thread) O 20 20 FX FY FZ (Open DO) CB CA (Closed DC) WA depth WB 4 x M5 x 0.8 thread depth 10 Thread for mounting attachment M5 x 0.8 (Finger opening port) Closed EC Open EO K L J MHZ M5 x 0.8 (Finger closing port) MHF G MHL M (mm) MHR G 37.5 44 FZ 6 7 FX 31 38 FY 28 34.5 EC 22 30 EO 34 46 DC 70 86 DO 82 102 B 70 86 M 2 3 AC 3 4 K 10 11 AA 55 66

ISO Cylinder ISO Standard (15552) CP96 Series ø32, ø40, ø50, ø63, ø80, ø100 C85 15% Weight reduced C85W Up Lightweight C85-S/T to C85K * Compared with the previous CP96 series (ø40, 100 mm stroke) C85K-S/T By adopting a new cushion method (Air cushion

size [mm] Stroke range [mm] A B d11 BG D E EE G H KK L2 L8 L9 L12 PL R RT SL SW VA VD WA WB WH ZZ Without rod boot With rod boot 32 Up to 2000 Up to 1000 22 30 16 12 47 G 1/8 28.9 48 M10 x 1.25 15 94 4 6 13 32.5 M6 x 1 8 10 4 4 4 7 26 146 40 Up to 2000 Up to 1000 24 35 16 16 54 G 1/4 32.6 54 M12 x 1.25 17 105 4 6.5 14 38 M6 x 1 8 13 4 4 5 8.9 30 163 50 Up to 2000 Up to 1000 32 40 16 20 66

3/5 Port Solenoid Valve Metal Seal/Rubber Seal Base Mounted VQZ1000/2000/3000

> Indicator light 77 114 62<67> < >: AC 1.12-43 VQZ1000/2000/3000 Base Mounted Dimensions: VQZ3000 2 position double 0 1 02 03 Grommet(G): VQZ325 (R)lGl 300 116.5 (Lead wire length) 58 28 24.5Mounting holes 10.5(Rc(PT)3/8) 10.5(Rc(PT)3/8) 9(Rc(PT)1/4) 9(Rc(PT)1/4) R5 5 A 4 B 2 18 45 SMC SMC B A 5 1 P 3 R1 R2 Manual override Cover diameter 1.6 Cross section 0.34mm2 66 56 5 (58) 56.5 54.5

Modular Type Air Filter Series AF

66 F 30 41 50 50 70 70 E 18 16 17 14 23 23 M5 x 0.8 1/8, 1/4 1/4, 3/8 1/4, 3/8, 1/2 3/4 3/4, 1 1 AF10 AF20 AF30 AF40 AF40-06 AF50 AF60 Optional specification Model With barb fitting B 137 173 177 253 266 With drain guide B 136 172 176 252 265 Metal bowl B 66 97 142 178 182 258 271 Metal bowl with level gauge B 162 198 202 278 291 AF10 AF20 AF30 AF40 AF40-06 AF50 AF60 27 Air Filter

NVZ1000//3000/5000 4,5 Port Solenoid Valve/Rubber Seal Type

.@ (66) 3.35 (85) 4.09 (104) 4.84 (123) (142) 6.34 (161) 7.@ 080) (199) (218) 9.33 t237 ) 10.08 (256) 10.83 1275) 11.57 (294) @ NVZ50OO Type 21 Manifold,/ Top Ported inch (mm Grommet (c) (H) L type plug connector (L) 8 :?

Compact Cylinder/Guide Rod Type Series CQM

1479 1400 1800 1880 1959 2039 2671 3067 739 528 IN 317 40 2674 2776 2571 2365 2468 2880 2983 3086 3188 4574 With Auto Switch (Built-in magnet) 4053 880 628 OUT 377 Unit: g 1150 825 IN 495 50 Cylinder stroke (mm) 1370 982 OUT 589 Bore size (mm) 5 35 30 25 20 15 10 40 45 50 75 100 1960 1400 IN 840 63 12 16 20 25 32 40 50 63 80 100 93 84 77 68 59 52 2184 1560 OUT 936 118 107 97 87 77 66

Table of Contents

66 F 30 41 50 50 70 70 E 18 16 17 14 23 23 M5 x 0.8 1/8, 1/4 1/4, 3/8 1/4, 3/8, 1/2 3/4 3/4, 1 1 AF10 AF20 AF30 AF40 AF40-06 AF50 AF60 Optional specifications Model With barb fitting B 137 173 177 253 266 Metal bowl B 66 97 142 178 182 258 271 Metal bowl with level gauge With drain guide B 136 172 176 252 265 B 162 198 202 278 291 AF10 AF20 AF30 AF40 AF40-06 AF50 AF60 14-2-38 39

REA/REB

For details about auto switches with pre-wire connector, refer to page 10-20-66.

3 Port Solenoid Valve, VQZ Series, Base Mounted and Body Ported

92 300 (Lead wire length) 96 MAX.10 88.5 92.5 Indicator light Pg.7 Applicable cord O.D. 3.5 to 7 64 Cover diameter 1.5 Cross sectional area 0.23mm2 93.5 R P 86 3 1 R P 3 1 M type plug connector (M) 98.5 (Lead wire lengh) 86 69.5 300 82.5 Cover diameter 1.5 Cross sectional area 0.23mm2 Indicator light R P 3 1 Dimensions n: Stations (Max. 20 stations) Equation L1=20n+8 L2=20n+26 L n 2 48 66

Exhaust Cleaner for Clean Rooms AMP Series

80 90 J K L M N O P Q R S F 80 120 180 G 123 169 237 H AMP220 AMP320 AMP420 76 90 106 76 90 106 2 2.3 3.2 6 7 10 8 8 10 10 12 15 40 50 55 66 80 88 84 100 110 28 34 50 5 5 9 26 32 37 37 37 37 108 155 221 13 16 19 20 22 25 1/4, 3/8 3/8, 1/2 1/2, 3/4 1in = 25.4mm 5 Series AMP Model Selection Selection Caution Caution 1.

XLAQ/XLDQ

seal (Maintenance part) r Body (Material: A6063) Valve side exhaust Refer to page 478 for the maintenance parts. 470 XLAQ Series Aluminum One-touch Connection and Release High Vacuum Angle Valve Dimensions C D E E C G H I H V A C F U U M V E A V L Heater (Option) (Maintenance space) Auto switch (Option) B J XLA XL H XLQ XLQ G XM XY DXSA A XVD XGT CYV A (mm) Model A 120 133 178 190 B 38 48 66