Series 10-MGF ø40, ø63, ø100 Guide Table

8.7 120 X T V 1/4 1/4 1/8 40 P 46 46 38 PP 70 50 M12 x 1.75 M10 x 1.5 M8 x 1.25 N H GA C M6 M6 M5 18.5 KA KB 100 63 30, 50, 75, 100 40 78 73 58 66.5 61.5 48.5 4 4 3.5 8 100 90 120 160 1/8 1/8 1/8 8 200 160 20 20 11.5 11.5 9.5 846 Guide Table 10-MGF Specific Product Precautions Be sure to read this before handling.

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Z direcMn (3 1imes for each direc1lon) a o Weight 45g Oncl.O.6mlong lead wire) Note I , , c l V Port size OLR (PTI 1I8.M5XO.8 T' :NPTFl I8.M5 X O .8 Alrnosphenc pressure Rated pressure Pressure The hystelesls is 3 digits.so separate PI from P2 by 7 digits or more and set them. *1 digit IS the mmimum pressure display unit. (See the table above.)

HRX-OM-S004

C, use a 15% aqueous solution of ethylene glycol. Tap water may be frozen in the thermo-chiller which may damage the product. 3.5 Circulating Fluid Supply HRS Series 3-32 HRX-OM-S004 Chapter 3 Transport and Setting Up 15% aqueous solution of ethylene glycol When a 15% aqueous solution of ethylene glycol is used, prepare the ethylene glycol aqueous solution separately.

High Vacuum L Type Valve

E C E E (KF flange) Fd (K flange) Fn D H B A G A Unit: mm Model A B C D E Fn Fd G H XLA-16-2 40 108 38 20 30 17 44 XLA-25-2 50 121 48 27 12 40 26 44 XLA-40-2 65 171 66 39 11 55 41 67 XLA-50-2 70 185 79 46 11 75 52 72 XLA-63-2 88 212 100 55 11 87 95 70 76 XLA-80-2 90 257 117 65 11 114 110 83 104 12 XL-OMS0001-B 6.

XL-OMY0001

E E E KF K Fd Fn C D H B A G A mm A B C D E Fn Fd G H XLA-16-2 40 108 38 20 30 17 44 XLA-25-2 50 121 48 27 12 40 26 44 XLA-40-2 65 171 66 39 11 55 41 67 XLA-50-2 70 185 79 46 11 75 52 72 XLA-63-2 88 212 100 55 11 87 95 70 76 XLA-80-2 90 257 117 65 11 114 110 83 104 12 XL-OMY0001 6. 200 []1 1.5 1 200 FKM 110Pa <> 13 XL-OMY0001 7 7-1. 2 2P5P6 14 XL-OMY0001 7-2 1 2 1 3 1 1 2 4 1 0.4MPa

HRX-OM-W032

Ambient temperature (C) Recommended circulating fluids 10 to 45 Tap water, ethylene glycol aqueous solution 15(wt)% -5 to 10 Ethylene glycol aqueous solution 15(wt)% Circulating fluid temperature(C) Recommended circulating fluids 10 to 35 Tap water, ethylene glycol aqueous solution 15(wt)% 5 to 10 Ethylene glycol aqueous solution 15(wt)% (2) And following instructions must be executed.

Series 10-MGF Guide table ø40, ø63, ø100

M12 x 1.75 M10 x 1.5 M8 x 1.25 M Bore size Standard stroke (mm) 170 140 10 10 38 38 36.5 E B F KC GB D A 11 11 8.7 120 X T V M6 M6 M5 18.5 KA KB 46 46 38 PP 70 50 M12 x 1.75 M10 x 1.5 M8 x 1.25 N H GA C 1/4 1/4 1/8 40 P 100 63 30, 50,75, 100 40 78 73 58 66.5 61.5 48.5 4 4 3.5 8 100 90 120 160 1/8 1/8 1/8 7.5 200 160 20 20 11.5 11.5 9.5 96 Guide table10-MGF Air cylinder Rotary actuator Air

SY3000/5000/7000 Series Plug-in Type

Leakage voltage Take note that the leakage voltage will increase when a resistor is used in parallel with switching element or a C-R circuit (surge voltage suppressor) is used for protecting a switching device because of the passing leakage voltage through the C-R circuit. The suppressor residual leakage voltage should be 3% or less of the rated voltage. 6.

SY3000V-OMY0001

-2SY3000-OMY0001 / 1 1.5 *3) 3)1 1 () -3SY3000-OMY0001 SY Series 5 / / () ( ) () 1 DC DC N.O.( 33 AB , 3 , , () 3 EXH 0.1 2 () () C-R ( ) C-R 3 3 1) 2 , 4 No.SY3000V-OMY0001 SY Series 5 / / 2) ,1V & -10 ,1 1 3 1) M5 () 1/61/4 11.5Nm ) 2)Rc N m Rc 1/8 35 Rc 1/4 812 Rc 3/8 1416 5 No.SY3000V-OMY0001 SY Series 5 / DC () m [] ()ISO VG32 (MSDS) IP65 IP67(IEC60529

SY3000-OMH0002

( ) C-R ( ) 3 3 EXH ( ) ( ) 3 DC 3% AC 20% (SSR )AC 1) (C-R ) OFF 2)() 4 No.SY3000-OMH0002 SY Series 3 3 3 3 5 5 5 5 / / / / -10 1V () (1) ()COM COM ( 2) 5 No.SY3000-OMH0002 SY Series 3 3 3 3 5 5 5 5 / / / / 2)Rc ( ) Nm Rc 1/8 79 Rc 1/4 1214 Rc 3/8 2224 Rc 1/2 2830 DC / Best Pneumatics No. 1 1 ()ISO VG32 MSDS 1 1 M5 1/61/4 11.5Nm ) 6 No.SY3000-OMH0002 SY Series 3 3

VFR2000-OMM0001

() C-R DC 3% AC 20% (SSR )AC 1) (C-R )OFF 2)() ZNR 1V -10 -5No.VFR2000-OMM0001 5 5 5 5 1.5~2 1) 2)1 ()ISO VG32 MSDS 3)2 ()ISO VG32 M5 1/61/4 1.5Nm Rc Rc1/8 79 Rc1/4 1214 -6No.VFR2000-OMM0001 5 5 5 5 ( ( ( ( ) ) ) ) 5m 3 30 () 1 VG32 2 ()ISO VG32 -7No.VFR2000-OMM0001 G : DC +(+)(-) E T D Y :DIN +-No.1 No.2 T :68mm E :2.32.8mm D :68mm Y :4.57mm AB+ B+COM -COM ET :1.25-31.25-3S1.25Y

VFR5000-OMN0001

() C-R DC 3% AC 20% ( ) () () 3 3 EXH (VVFS5000-R-04-1,2) ( ) () 3 4 No.VFR5000-OMN0001 VFR5000 Series 5 / (SSR )AC 1) (C-R ) OFF 2)() 1 -10 1 1) M5 1/6~1/4 1~1.5Nm ) ( ) 2 Rc Nm Rc 1/8 7~9 Rc 3/8 22~24 Rc 1/2 28~30 Rc 3/4 28~30 5 No.VFR5000-OMN0001 VFR5000 Series 5 / ( ) 5m 1) 2)1 ()ISO VG32 (MSDS) 3) 2 ()ISO VG32 \ 6 No.VFR5000-OMN0001 VFR5000 Series 5 / ( ) 3 30

Series DXT474

Tightening torque Thread Appropriate tightening torque Nm (kgfcm) M3 M5 0.3 to 0.5 (3 to 5) 1.5 to 2 (15 to 20) Wiring 1Polarity When DC power is to be connected to a solenoid valve equipped with light and/or surge voltage suppressor, check for polarity indications.

VY511, VYU5

(Refer to graph A) No AW AMR AWM Graph C: The balance completion time Yes AWD 5 ITV No Is the cylinder speed appropriate? (Refer to graph B) 4 VBA Completion time (sec) 3 VE Yes VY 2 Use graph C as a guide for the balance completion time.

AS

Dimensions Meter-out type Meter-in type F E D B A C J G K H L B Model A MIN. MAX. MIN. MAX.

Series 12-REA ø25, ø32, ø40, ø50, ø63 Sine Rodless Cylinder

Fittings & Tubing Air Cylinders Rotary Actuators 0 L0.1 4 x MM Thread depth J 2 x P (Piping port) A G E H G B NN Effective thread length T (R) D X Mounting nut Width across flats C F N ZZ + Stroke S + Stroke W K N F I NA TT 6 T Model MM L K J I H G F E D C B A S NN NA 34 N R 12-REA25 12-REA32 12-REA40 8 46 32 26.4 2 13 7.5 20.5 8 10 70 15 M5 x 0.8 18.5 30 M26 x 1.5 111 10 8 60 32 33.6 2 16

High Pressure Coolant Valve

Main port 3 (3 port valve only) VNA VNB Flow indicator for 2 port valve SGC Dimensions SGH (mm) Main port 1, 2, 3 2 Port 2 x 2 x Pilot port 12(P1), 10(P2) A B Note) C D E F G H I Model 3 Port 3 x 3 x VNC 3 8 1 2 2 x 3 4 2 x 1 3 8 1 8 VNH1 -10A VNH2 -15A VNH3 -20A VNH4 -25A A B A B A B A B 60 80 100 115 217 (219) 246.5 (248.5) 282 (284) 301 (303) 60 77 96 113 46 60 76 85 34 40 50 60 24 36

Guide Table Series MGF ø40, ø63, ø100 1

0 @2 O-ring C Bumper Urethane NBR !1 @3 Nickel plated Electroless nickel plated Reinforcement ring Hexagon socket head cap screw A Carbon steel Carbon steel !2 @4 Replacement Parts: Seal Kit Bore size (mm) Kit no. Contents 40 MGF40-PS Items !

Centering Unit

This is not a clean room series product. 4 MACM Series Dimensions W (Workpiece loadable range) 4 x D At maximum offset (A + 2 x S) S F DB DA C X114 X115, X116 U B W A H T H Q PB E PA PD P (Unlocking port) PE P (Locking port) P (Relief port) (Option V only) MACM4, MACM6 MACM2, MACM10 PC PC PC PC PE P (Relief port) (Option V only) PD [mm] Dimensions Model A B C D DA DB E F H P PA PB PC PD

Series 12-REA Sine rodless cylinder

x 0.8 x 8 M6 x 1.0 x8 M6 x 1.0 x10 12REA 50/63 0 -0.2 L NA 33 2-Rc, NPT, G 1/4 14 14 E(h8) E(h8) X D I 4-TC 14 14 Effective thread depth R 23 22 K W 23 25 2 4-M8 x 1.25 25 8-Q 14.5 C 0.1 + Effective thread depth 12 Effective thread depth R B S + Stroke 2 ZZ + Stroke Q x R S TC x R Model L 122 110 K 38 32 C 70 60 X ZZ NA E D B 72.2 58.2 I 70 60 W 12-REA63 12-REA50 100 86 66 53 30-0.033 69