Environment

LEFB/Belt Drive Horizontal 4 Work load: W [kg] LEFB25 2 LEFB16 0 0 500 1000 1500 2000 Speed: V [mm/s] 42 Model Selection LEF Series Step Motor (Servo/24 VDC) Servo Motor (24 VDC) Clean Room Specification * This graph shows the amount of allowable overhang (guide unit) when the center of gravity of the workpiece overhangs in one direction.

Manifold Regulator Modular Type ARM2500/3000 Series

B C D E F G H I J K L M N O P Symbol Model A ITVH ARM2500 ARM3000 6 17 44 56 42 126.5 58 45 17 21 38 42 29 48 68 33.5 ITVX 7 21 54 68 55 153.5 70 53 23.5 27.5 48.5 55 35 59 85.5 42.5 PVQ Manifold stations Dimensions by the Number of Stations 10 Model Symbol VY1 9 8 7 6 5 4 3 2 L1 454 412 370 328 286 244 202 160 118 VBA VBAT ARM2500 L2 442 400 358 316 274 232 190 148 106 L3 420 378 336 294

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Standard Strokes Accessories (Option) Description Series CK1A _ Series CKl B Bore (mm) Standard strokes (mm) 40 50, 75, 100, 125, 150 Single knuckle joint CKA4D-17-101 A CKB4D-17-102A 50 50,75, 100, 125, 150 Double knuckle joint(With pin and split pin) CKA40-18 -206A CKB40-1 8-207A 63 50, 75, 100, 125, 150 Li mit switch mount CKM040-48-1 5070A Cam CKM040-42-1 5070 For 75 stroke CKA40-40-

Pin Clamp Cylinders

.: 11.5 or more) 490.1 5 CK1 (6.4) 590.05 CLK2 2 x 6H7 through +0.012 0 CLKG (216) 17.5 50.5 7 4 x 6.6 through 59 CKQ CLKQ Rc1/8 Unlocking port 57.5 42 15.5 Clamp arm position CK CLK CK CLK A Same as the port side B Opposite side of the port Dustproof cover 2 x Rc1/8 CKQ Arm A B Port 68 5.5 Hole diameter of workpiece C D d K SR Q Model number Hole diameter of workpiece C D d K SR Q Model

Series MHL2 11- ø10, ø16, ø20, ø25, ø32, ø40 22- Parallel Type Wide Opening Air Gripper

60 D 67 83 101 B C 36 52 70 A MHL2-10D MHL2-10D1 MHL2-10D2 11221122112296 124 162 38 54 72 MHL2-16D 1122A B C +0.025 3H9 0 depth 3 D 2 x M5 x 0.8 thread depth 7 (Mounting thread) 10 2 x 5.5 through (Hole for mounting body) 42 When closed E When closed J 4 x M5 x 0.8 thread depth 10 (Mounting thread) 4 +0.025 3H9 0 depth 3 K cross view (Closed) +0.052 23H9 0 depth 1.5 Auto switch mounting

Series MHR2 11- 2 Finger Rotary Actuated Air Gripper 22- Size: 10, 15, 20, 30

0.5 thread depth 6 (A, B common view) Vacuum suction port 31 Auto switch mounting groove 2 x 4.2 0 9h9-0.036 4.7 1 9.6 2-3 4.7 3 10 19 (35) 32 8 15.5 2 2 8-0.05 0 3-0.02 0 3-0.02 0 13.4 Open: 16, Closed: 10 2 x M3 x 0.5 thread depth 6 (Thread for mounting attachment) 12 12 4 4 4 4 934 Rotary Actuated Air Gripper MHR2 1122Without Auto Switch: MHR2-15R 1122B 1122MHR2-15E port location 44 42

Series MHZ2 11- ø10, ø16, ø20, ø25 22- Air Gripper

Model Gripping force per finger Gripping force Note 1) Open/ Close stroke (Both sides) mm Bore size mm 10 16 20 25 Note 2) Weight g Model External Internal 60 125 250 455 4 6 10 14 17 40 66 104 9.8 30 42 65 11-MHZ2-10D 11-MHZ2-16D 11-MHZ2-20D 11-MHZ2-25D In-line electrical entry Lead wire type Explanatory drawing L Note 1) Values based on pressure of 0.5 MPa, gripping point L = 20 mm, at

Slide Unit Series CX2/CXWM/CXWL

Refer to front matters 42 and 43 for Safety Instructions and pages 3 to 11 for Actuator and Auto Switch Precautions. Handling on Shock Absorber Service Life and Replacement Period of Shock Absorber Caution Caution 1.

Steam Valve

18 Port size: 10A, 15A, 20A, 25A M G (Valve open) Q N R Pilot port 12(P1) Indicator (Option) 1 8 2 x (Back side 10(P2)) VNA P1 4 x P S VNB F U D E SGC Bracket (Option) A B 15 SGH VNC 1(A) (Back side 2(B)) Main port T C Port size: refer to table below A B VNH VND VND Main port 1(A), 2(B) A B C D E F G M N P Q R S T U Model VCC VND20D-10A VND20D-15A VND30D-20A VND40D-25A 3 8 1 2 3 4 1 63 42

Two Hand Control Valve

10.4 2 x 6.5 2 x 6.5 42 8 54 66 Back side mounting Bottom mounting 1684 VR51 Series Specific Product Precautions 1 Be sure to read this before handling the products.

ZSE30A(F)/ISE30A

ISE30A (Positive pressure) 1 0.001 0.01 0.01 0.1 The ZSE30A (vacuum pressure) and ZSE30AF (compound pressure) will have different setting and display resolution when the unit is set to MPa. 42 ZSE30A(F)/ISE30A Series Made to Order Please contact SMC for detailed dimensions, specifications and lead times.

ML2B

51 59 E 138 168 204 F 93.5 107.5 130.5 II 16 19 23 I 76.5 91 110 Model ML2B25 ML2B32 ML2B40 MM 16 21.5 24.5 MA M5 x 0.8 M6 x 1 M8 x 1.25 NN 22 26 37.5 LC 9.5 12 12 LB 9.5 16 15 LD 5.5 6.5 8.5 MC M5 x 0.8 M6 x 1 M8 x 1.25 PA Rc 1/8 Rc 1/8 Rc 1/4 MD 9 11 14 KK 15 16 17.5 MB M6 x 1 M8 x 1.25 M10 x 1.5 ND 5.6 6.8 8.6 LL 28 30.5 37.5 PB Rc 1/16 Rc 1/16 Rc 1/8 OO 9 10 23 PP 56 62.5 77 QQ 34.5 42

MY1

1.1 WX 17.5 Bottom port (ZZ) (Applicable O-ring) 2-10 Y Bore size (mm) 50 63 GC 12 15 J M14 x 2 M16 x 2 MM M8 x 1.25 A 212 245 B 17 19 C 10.5 12.5 CH 41.5 47.0 G 27.0 29.5 GA 25.0 27.5 GB 37.5 39.5 H 124 149 K 28 32 L 250 290 LD 11 14 LH 57 65 LL LW 168 200 M 15 16 N 47 50 NC 44 60 NE 122 147 NH 60 70 087 100 M10 x 1.25 Bore size (mm) 50 63 NW 118 142 PA 120 140 PB 186 220 PG 10 12 PP 26 42

Special Specifications:

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Volume Inside Filter A Volume inside filter (Reference value) (cm3) Model Dimensions of Element AFF2B, AM150 AMD150, AMH150 250 Dimensions of element (Reference value) Model 300 AFF4B, AM250 AMD250, AMH250 A B AFF2B, AM150 AMD150, AMH150 42 49 600 AFF8B

Rotary Table Rack & Pinion Style Series MSQ Size: 1, 2, 3, 7, 10, 20, 30, 50, 70, 100, 200 1

FU) (mm) AA AB A AV AW AX AY BA BB BC BD BE CB D DD DE DF DG FA FB FC FD H J JA JB Size 70 100 200 90 92 84 42 25.5 27 8 17 75 44.5 110 57 36 88h9 90h9 46H9 16 22H9 12.5 5 3.5 9 22 10.4 17.5 10.5 101 102 100h9 95 50 29.5 27 8 17 85 50.5 130 66 42 98h9 56H9 19 24H9 14.5 6 3.5 12 27 10.4 17.5 10.5 119 120 116h9 118h9 113 60 36.5 36 10 24 103 65.5 150 80 57 64H9 24 32H9 16.5 9 5.5 15 32 14.2

MK

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com R + Clamp stroke RHC MK(2) (mm) (mm) Ah9 B Model MK20-F MK25-F D E C Model MKG20 MKG25 RS Q G 0 0.043 0 0.043 0.1 0.15 13 39 60 0.1 25.5 0.15 48 15 42 64 28 52 RS H A RZQ Arm for width across flats Rod end width across flats: MK -M 20 25 MI W S With arm

ML2B

51 59 E 138 168 204 F 93.5 107.5 130.5 II 16 19 23 I 76.5 91 110 Model ML2B25 ML2B32 ML2B40 MM 16 21.5 24.5 MA M5 x 0.8 M6 x 1 M8 x 1.25 NN 22 26 37.5 LC 9.5 12 12 LB 9.5 16 15 LD 5.5 6.5 8.5 MC M5 x 0.8 M6 x 1 M8 x 1.25 PA Rc 1/8 Rc 1/8 Rc 1/4 MD 9 11 14 KK 15 16 17.5 ND 5.6 6.8 8.6 MB M6 x 1 M8 x 1.25 M10 x 1.5 LL 28 30.5 37.5 PB Rc 1/16 Rc 1/16 Rc 1/8 OO 9 10 23 PP 56 62.5 77 QQ 34.5 42

CXWM/CXWL

Note 2) For 25 stroke, 2 magnets for auto switches are installed in the housing. 8-26-43 42 Series CXWL 25 Basic Type: CXWL25Stroke/25 to 200 2 x 2-5.2 through 2 x 2-9.5 counterbore depth 5 (6H7 hole pitch) 6H7 depth 4 +0.012 0 4-M6 x 1.0 thread depth 12 4 positions for set screws for fixing shock absorbers (M5) 2 x 2-Rc 1/8 Plug (R 1/8) 6H7 depth 8 +0.012 0 Courtesy of Steven Engineering

CNS

For details, refer to page 9-15-42. 9-8-22

Mechanically Jointed Rodless Cylinder With Protective Cover Series MY1  W ø16, ø20, ø25, ø32, ø40, ø50, ø63 1

M2 3.0 5.2 9.0 15 24 38 60 3.0 5.0 8.5 14 23 35 50 M3 1.0 1.7 2.4 5.0 8.0 15 19 2.0 3.0 5.0 10 20 35 50 m2 7 10.4 15 23 33 48 72 7 10 14 21 30 42 60 m3 2.1 3 4.5 6.6 10 14 21 2.1 3 4.2 6 8.2 11.5 16 16 20 25 32 40 50 63 16 20 25 32 40 50 63 MY1MW MX MTS MY MY1CW CY MG Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside