VDW

1 e r w e u r u t t y q y q Component Parts Description Material No.

CRBU

M3: L = 6mm (mm) (mm) Size 15 20 30 Size 15 20 30 Q Q M3 M3, M4 M3, M4, M5 X 1.5 to 18 1.5 to 20 2 to 22 Y 1.5 to 19 1.5 to 10 2 to 13 M3 M3, M4 M3, M4, M5 Symbol: A3 Symbol: A4 Symbol: A5 The shaft can be further shortened by machining male threads on the long end of the shaft. (If the shaft is not to be shortened, leave the Y dimension blank.)

Angle Seat Valve /

In the case of liquids: DP Q = 1.9 x 106Av (9) G Q : Flow rate [L/min] Av : Flow coefficient [m2] DP : Pressure difference [MPa] G : Relative density [water = 1] In the case of saturated aqueous vapor: Q = 8.3 x 106Av DP(P2 + 0.1) (10) Q : Flow rate [kg/h] Av : Flow coefficient [m2] DP : Pressure difference [MPa] P1 : Upstream pressure [MPa]: DP = P1 P2 P2 : Downstream pressure [MPa] 11

rep-filter-e

Fit the grooved part of gasket w into the flange part of case q. b. Place element e in case q. Element e must be positioned at the center of case q. c. Set clamp ring t to case q. The tapered part of clamp ring t must be facing downward. d. Set seal part of the element e to the cover r while the flange part of case q is being placed on clamp ring t. e.

3

Without arm Q R M MK MK 20 MK2T 8 19 CK1 17 0.1 0.2 Q (mm) CLK2 Q (mm) Rod state Clamp stroke 10 mm Model Q 10 mm 20 mm Clamp stroke CLKG Rod state Bore size 50 mm 20 mm 30 mm 50 mm Retracted 146.5 175.5 166.5 205.5 186.5 235.5 226.5 295.5 R M Q 82 82 83 83 91.5 91.5 85 85 96.5 96.5 100 100 R 33.5 63 35.5 65 50 85 57.5 92.5 65.5 104.5 65 104 M Q 126.5 126.5 130 130 R 95.5 164.5 95 164 M MK63

VM

Component Parts w q Description Brass Brass t r Description Stainless steel Material Note No. Material Note No.

Direct Operated 2 Port Solenoid Valve For Water, Oil, Steam, Air Series VX21/22/23 1

Base material: Aluminum Fluid: Air Base material: Aluminum Fluid: Air Common SUP type Individual SUP type Common SUP type Individual SUP type u u e t u e t u w w t e y r q y i OUT t e y r q y i w i w i y r q y r q Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com o

ITV

9 u 12 NBR O-ring 13 NBR Seal q Resin 14 Bowl assembly @2 Silicone rubber y 15 Resin Sub-plate OUT SUP 16 NBR Seal !

Industrial Filters Replacement Procedure

Fit the grooved part of gasket w into the flange part of case q. b. Place element e in case q. Element e must be positioned at the center of case q. c. Set clamp ring t to case q. The tapered part of clamp ring t must be facing downward. d. Set seal part of the element e to the cover r while the flange part of case q is being placed on clamp ring t. e.

High Purity Chemical Valve

Lock nut Locks the adjustment knob position. 463 Series LVC Construction Standard type N.C. type N.O. type Double acting type q q q PB PB PB e w e w e w PA PA PA A B A B A B r t y With reducer With flow rate adjustment With bypass u i PB i PA t y A B Suck back (single type) Suck back (unit type) i i i e P P q e P t y e t y e B A A B r w w r With indicator o Parts list No.

Compact

q Check the actuator label for model number.

AR20-B to AR60-B

IN OUT t e q r IN OUT w r w AR30(K)-B/AR40(K)-B q t AR50(K)-B/AR60(K)-B e IN OUT q t r w e IN OUT r w Component Parts No.

EXxx-OMW0014CN

LED EX245-LA1/LB1 LED LED . 9-15 4 (C/Q) LED No.0,2,4,6 LED Port deactivated (L+) (ON/OFF1Hz) IO-Link IO-Link (ON/OFF2Hz) IO-Link Device IO-Link (L+C/Q) OFF Digital input ON (L+) OFF Digital output ON (L+C/Q) . 9-16 2 (I/Q) LED No.1,3,5,7 (EX245-LA1A) LED status Description I/Q OFF Digital input (I/Q) I/Q ON . 9-17 2 (P24) LED No.1,3,5,7 (EX245-LB1B) LED status Description

Air Slide Table Series MXP

5 i q w !0 !3 o r !4 u Component Parts Component Parts Note No. Description Note No.

VCW

Grommet: G Conduit: C Approx. 300 Approx. 280 D D Q F Q F C C G (PF) 1/2 R R E E A H 2-P Port size 2-M B B A H 2-P Port size 2-M L L K K DIN connector: D Conduit terminal: T Cable 6.8 to 10 27.5 F F Q (Q) S 34 25 U R C R C (44) G (PF) 1/2 E B A H D 2-P Port size (S) E G (PF) 1/2 B A H D 2-M 2-P Port size 2-M L L K K N.C.

VXA21/22

Refer to table q for configuration.

Modular Type Filter Regulator Series AW

q q e IN OUT IN OUT IN OUT y y y e e r r r u u u Drain Drain Drain Parts list Material No.

Series VC, Direct Operated, 2 Port Solenoid Valve for Water, Series VCW

Grommet: G Conduit: C Approx. 300 Approx. 280 D D Q F Q F C C G (PF) 1/2 R R E E A H 2-P Port size 2-M B B A H 2-P Port size 2-M L L K K DIN connector: D Conduit terminal: T Cable 6.8 to 10 27.5 F F Q (Q) S 34 25 U R C R C (44) G (PF) 1/2 E B A H D 2-P Port size (S) E G (PF) 1/2 B A H D 2-M 2-P Port size 2-M L L K K N.C.

Environment

How to Order w e r t q y u i o !0 !1 !2 !

RZQ

x PA+w x PC F=q x PA+(e-q) x PC F=-q x PA+r x PB+(w-e) x PC F=q x PA q, w and e are piston areas.