SMC Corporation of America
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Type of Actuation: 4 (3 Position Exhaust Center), Manifold Type: 20 (Body Ported Plug-in Integrated), Pilot: Internal Pilot, Specifications: Standard, Voltage: 5 (24VDC), Electrical Entry: MO (M Plug w/o Connector), Lead Wire Length: None, Surge Suppressor: Z (Light & Surge Suppressor), Manual Override: Non-locking Push Style, A, B Port Size: C6 (Body Ported ø6 One-touch Fitting), Thread:

Type of Actuation: 5 (3 Position Pressure Center), Manifold Type: 20 (Body Ported Plug-in Integrated), Pilot: Internal Pilot, Specifications: Standard, Voltage: 5 (24VDC), Electrical Entry: MO (M Plug w/o Connector), Lead Wire Length: None, Surge Suppressor: Z (Light & Surge Suppressor), Manual Override: Non-locking Push Style, A, B Port Size: C6 (Body Ported ø6 One-touch Fitting), Thread

Type of Actuation: 4 (3 Position Exhaust Center), Manifold Type: 20 (Body Ported Plug-in Integrated), Pilot: Internal Pilot, Specifications: Standard, Voltage: 5 (24VDC), Electrical Entry: MO (M Plug w/o Connector), Lead Wire Length: None, Surge Suppressor: Z (Light & Surge Suppressor), Manual Override: Non-locking Push Style, A, B Port Size: C6 (Body Ported ø6 One-touch Fitting), Thread:

Type of Actuation: 1 (2 Position Single), Manifold Type: 20 (Body Ported Plug-in Integrated), Pilot: Internal Pilot, Specifications: Standard, Voltage: 5 (24VDC), Electrical Entry: MO (M Plug w/o Connector), Lead Wire Length: None, Surge Suppressor: Z (Light & Surge Suppressor), Manual Override: Non-locking Push Style, A, B Port Size: N9 (5/16" One touch Fitting), Thread: T (NPTF), Option

Type of Actuation: 1 (2 Position Single), Manifold Type: 20 (Body Ported), Pilot: Internal Pilot, Specifications: Standard, Voltage: 5 (24VDC), Electrical Entry: MO (M Plug w/o Connector), Lead Wire Length: None, Surge Suppressor: Z (Light & Surge Suppressor), Manual Override: Non-locking Push Style, Port Size: C10 (Body Ported ø10 One-touch Fitting), Thread: Rc (or None), Option: F2 (Side

System: Q (Vacuum Pump System for Manifold), Valves: R (Supply Valve; Self-holding, Release Valve; N.C.), Rated Voltage: 5 (24 VDC), Vacuum Sensor: E (Digital Pressure Switch for Vacuum, -100 to 100, NPN 2 Outputs), Connector: L3 (L-type Plug Connector), Vacuum, V Port: 08 (Metric Size, ø8 One-touch Fitting), Bracket: w/o Option, Pump System PE Port Female Thread: C (with Pump System PE Port

Port Female Thread: C (with Pump System PE Port Female Thread), Individual Release Pressure Supply: w/o Option, Vacuum Break Flow Adjustment: w/o Option, Manifold Common Release Pressure Supply: P (Manifold Common Release Pressure Supply Spec.)

Stainless (I include heat exchanger brazing), Aluminum oxide ceramic, SiC, Carbon, PP, PE, POM, FKM, EPDM, PVC (No. copper used) Circulating fluid wetted materials Servieable conductivity: 0.22S/cm or more. (Resistivity: 4.5Mcm or less.) This option doesnt include a function to maintain high resistivity/conductivity. You need ion exchange resin filter (DI filter) for the purpose.

Stainless (I include heat exchanger brazing), SiC, Carbon, PP, PE, POM, FKM, EPDM, PVC (No. copper used) Circulating fluid wetted materials Servieable conductivity: 0.22S/cm or more. (Resistivity: 4.5Mcm or less.) This option doesnt include a function to maintain high resistivity/conductivity. You need ion exchange resin filter (DI filter) for the purpose.

Stainless (I include heat exchanger brazing), SiC, Carbon, PP, PE, POM, FKM, EPDM, PVC (No. copper used) Circulating fluid wetted materials Servieable conductivity: 0.22S/cm or more. (Resistivity: 4.5Mcm or less.) This option doesnt include a function to maintain high resistivity/conductivity. You need ion exchange resin filter (DI filter) for the purpose.

Stainless (I include heat exchanger brazing), SiC, Carbon, PP, PE, POM, FKM, EPDM, PVC (No. copper used) Circulating fluid wetted materials Servieable conductivity: 0.22S/cm or more. (Resistivity: 4.5Mcm or less.) This option doesnt include a function to maintain high resistivity/conductivity. You need ion exchange resin filter (DI filter) for the purpose.

Part Number Description: VALVE AIR PILOT   Product Line: V   Product Line Description: VALVE   Family Code: 301   Family Description: VFA AIR OPERATED VALVE   Class Code: PE   Part Code: 1   Reference Code:  K   PDF Documentation: PDF   Click here to report information errorImage shown may not match exact part number, VALVE AIR PILOT, VALVE, VFA AIR OPERATED VALVE, PE, VFA BASE MT 1

Since PE port is the exhaust port of the pilot valve, do not attach a plug or reduce the port diameter. 2. X port is the pressure supply port of the pilot valve and PE port is the exhaust port of the pilot valve. Avoid mismatching when piping. 3. The manual portion contains a breather hole for the core.

A filter has alreadv been installed to the Pilot exhaust (PE.) port, so iJ a-silencer is to be added, first remove the filter. 4. Use proper clamp torque ot piping. t!-=.'==__-==:"]i Voltage leakage Seal tape Environment 1. Keep away from corrosive gas, chemical solutionq sea water, rain, and steam. 2.

pe: NVEF212O, NVEF312O toessureType: ItlVEP3lzO AO.27 " -0.45" I d 6.8 -1 1.smm') Flor Rate T!pe: NVEF213O Florir Rate Typei NVEF214O, NVEF314O Prassurc Type: NVEP814O Supply Exhaust t! UJ I 2-Forled \bBion DIMENSIONS A B c o E F G H J K M P R s T 1.57 (40) 2.52 (64) 2.20 (56) 1.77 (45) 4.80 (1221 1.97 {50} 0.98 (25) 1 . 1 0 (28) 0.51 (13) 4.45 (113) ?

A side: Orange (for supply valve) B side: Green (for release valve) Release flow adjustment needle (With light/surge voltage suppressor) 33.3 4.4 Pressure setting trimmer Pilot valve exhaust port Hysteresis setting trimmer (M3: Port PE) Silencer (AN203-KM8) 57.1 62.1 47.5 39.7 29.5 21 33.6 23.5 10 Vacuum port (5.25) (13.5) 3.75 (8.25) 6 One-touch fitting Port V Supply port 16.75 88 19 Button

To prevent an electric shock, always connect the protective earth (PE) terminal (marked ) of the driver to the protective earth (PE) of the cabinet. 2. Connect the diode in the correct direction. If it is connected reversely, the driver will malfunction and will not output signals, disabling EM2 (Forced stop 2) and other protective circuits. 3.

) 12 VFR3000-OMJ0001-A No. 1(ISO VG 32) [3(EB),5(EA),PE] X(30.20.9MPa0.10.9MPa) 1. 2. 3. 4. 5. 6. 7. 13 VFR3000-OMJ0001-A Revision history A Renewal Qo 1st printing:JX 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL http://www.smcworld.com Note: Specifications are subject to change without prior notice and any obligation on the part of

AC ( )() DC24V 16Nm 9 VFR6000-OMQ0001 VFR6000 Series/ / / / ) DIN DIN DIN DIN / / / / DIN 90 10 VFR6000-OMQ0001 () X () [3(EB)4(EA) ] () (PE) 11 VFR6000-OMQ0001 o. 1(ISO VG 32) [3(EB),5(EA),PE] X(30.2~0.9MPa0.1~0.9*MPa) 1. 2. 3. 4. 5. 6. 7. 12 VFR6000-OMQ0001 Revision history 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL http://www.smcworld.com

Part Number Description: VALVE SOL   Product Line: V   Product Line Description: VALVE   Family Code: 285   Family Description: VSP4 SOL VALVE 4/5 PORT   Class Code: PE   Part Code: 1   Reference Code:  J   Click here to report information errorImage shown may not match exact part number, VALVE SOL, VALVE, VSP4 SOL VALVE 4/5 PORT, PE, VSP4 BASE MT 1/4, 3.52000 lb