SMC Wireless System PROFINET compatible

point/0 byte I/O unit layout mode: Mode 1 1-byte output 2-byte 1-byte 0-byte output (Output side) input input Remote construction (Wireless channel 002) Input data: [Unit 1] Digital input unit (EX600-DX#D): 2 bytes occupied [Unit 2] Digital input unit (EX600-DX#B): 1 byte occupied Output data: [Unit 0] Digital output unit (EX600-DY#B): 1 byte occupied [Unit 3] Remote (EX600-WSV#): 0 byte

C76

0 Head cover F Aluminum alloy 1 White anodized 2B Spring holder Carbon steel 1 Zinc chromate !1 Head cover Y Aluminum alloy 1 Clear anodized 2D Bumper A Urethane 1 !2 Cylinder tube Stainless steel 1 e Bumper B Urethane 1 !3 Piston rod Carbon steel 1 Hard chrome plated r Piston gasket NBR 1 !4 Piston Aluminum alloy 1 Chromate t Piston seal NBR 1 !

C76

2 Cylinder tube Stainless steel 1 e Bumper B Urethane 1 !3 Piston rod Carbon steel 1 Hard chrome plated r Piston gasket NBR 1 !4 Piston Aluminum alloy 1 Chromate t Piston seal NBR 1 !5 Bush Sintered bronze 1 y Rod end nut Carbon steel 1 Nickel plating !6 Retaining ring Stainless steel 1 u Mounting nut Carbon steel 1 Nickel plating !

ISO Standard Hydraulic Cylinder

4.5 7 6 8 10 14.5 A 15.5 24 24 26 29 32.5 B 9.5 12 11 13 15 19.5 A 16 16 18 21 24.5 B 4 3 5 7 11.5 A 12.5 12.5 14.5 17.5 21 B 0.5 0 1.5 3.5 8 A 16.5 16.5 18.5 21.5 25 B 4.5 3.5 5.5 7.5 12 32 40 50 63 80 100 32 40 50 63 80 100 Note 1) D-M9, M9V, M9W, M9WV, M9A, M9AV cannot be mounted to 100.

Series CQS Compact Cylinder Compact Type ø12, ø16, ø20, ø25

32UNC #8-32UNC #10-32UNF 1/4-28UNF 8 8 8 9.5 6.8 6.8 6.9 8.1 11.5 11.5 12.5 14.5 Basic A B A B Without auto switch With auto switch (All dimensions are common expect "A" and "B".)

Rotary Table Vane Style Series MSU Size: 1, 3, 7, 20 1

22.5 52h9 0 0.074 +0.030 0 +0.052 0 43 30H9 3-4H9 depth 4 5 4 ( A , B , C ) 3-R2 3-R2 2-6.6 through 21.5 10.5 16 5 53.5h9 0 0.074 7 6 43 23 10.5 46 4 13 Angle adjustment bolt 2-6.6 through 72 13 Adjustment: Max. 10.3 6 2 M5 x 0.8 2 8 A port 1 B port +0.030 0 3-4H9 long groove depth 3 8 g6 0.005 0.014 ( A , B , C ) 16h9 0 0.043 4-M6 x 1 depth 11 50 0 0.074 53.5h9 48 11-5-14 14 Series MSUA

CHKD/CHKG

Dimensions CHKDB--XC61 F with effective thread depth G Width across flats f C D d a Width across flats E b e g H h + Stroke X with thread depth Y Note) J C B + Stroke Rod end male thread A + Stroke A B C D d E F G H J X Y Bore size (mm) 20 53 43 10 12 11 10 M6 x 1 8 5.5 6.5 M6 x 1 12 25 56 45 11 14 13 12 M8 x 1.25 10 6.5 7.5 M6 x 1 12 32 63 51 12 18 15 13 M10 x 1.5 12 7 8.5 M8 x 1.25 16 40

Rotary Table/Vane Style Series MSU

Adjustment: Max. 10.3 6 2 x M5 x 0.8 2 8 A port 1 +0.030 0 B port 3 x 4H9 long groove depth 3 8g6 0.005 0.014 ( A , B , C ) 16h9 0 0.043 4 x M6 x 1 depth 11 50 0 0.074 53.5h9 48 160 Series MSUA Rotary Table: High Precision Type Vane Style These drawings indicate the condition when the B port is pressurized.

Air Slide Table

Retraction stroke end E E1 H H G B F (C) A E E1 H H G B MXQR-BT8 MXQR-JT8 A F Stroke adjustment range (mm) A B C F G H J K 1) E E1 Applicable size Model MXQR 6 M2.5 x 9 M6 x 0.75 1 4 8 6 28.5 8.5 19 18 12 MXQR-BT6 1.4 MXQR-BT8 MXQR 8 M3 x 11 M8 x 1 5 12 40.8 8 10 24.5 24 20 7 MXQR-JT8 1.4 6 MXQR-BT12 MXQR12 M4 x 14 M8 x 1 12 40.8 10 14 29 28 18 7 5 MXQR-JT12 1.4 7 46.7 MXQR-BT16 MXQR16 M5

Environment

How to Order 25A-LEFS 25 H R B 200 S 1 6N 1 q r w e t u y i o !0 !1 !

Vacuum System Peripherals:

R L B 01 1 Nil F G Rc 1 8 ... ...

Industrial Filters

tightening type) (mm) A A A B C B C B C Model FGESA FGESB FGESC Port size R Model FGELA FGELB FGELC Port size R Model FGETA FGETB FGETC Port size R 671 850 671 850 366 612 910 1, 2 1, 2 1, 2 554 554 931 1350 931 1325 516 871 1225 1191 1860 1191 1825 647 1133 1620 31 Industrial Filter FGG Series How to Order FGG S B 20 B N 002 A G1 Symbol Option Pressure gauge type G46-10-02M (Brass at wetted

5 Port Solenoid Valve Metal Seal/Rubber Seal Body Ported

center 3 position exhaust center 3 position closed center 3 position pressure center (1) 3 position exhaust center 3 position closed center (A) 4 (B) 2 (A) 4 (B) 2 (A) 4 (B) 2 (A) 4 (B) 2 (A) 4 (B) 2 (A) 4 (B) 2 5 (R1) 1 (P) 3 (R2) 5 (R1) 1 (P) 3 (R2) 5 (R1) 1 (P) 3 (R2) 5 (R1) 1 (P) 3 (R2) 5 (R1) 1 (P) 3 (R2) 5 (R1) 1 (P) 3 (R2) Note 1) Except VQZ1000 and metal seal.

CG1

1 !2 !3 !4 !5 !

CNA

1 o q $8 y $1 r #5 $6 #2 #7 #3 #4 B A CL MLGC CNA CB #1 @8 #6 $0 w #0 $5 $7 $3 $9 %1 $4 @1 @4 !8 @0 !7 !9 @2 @6 $2 @3 !4 %0 !3 #9 CV/MVG A section (Release piston bushing) B section (Piston guide bushing) CXW 100 80 63 50 40 50, 63, 80, 100 CXS @9 CXT !2 !2 MX Description Material Note Component Parts Description Material Note Component Parts MXU No. No.

CLK1

Magnetic Field Resistant Reed Switch (D-P7, D-P8) Clamp side lock (B) 3-Rc 1/4 Unclamp side port Rear cushion valve Top width across flats 3 L + Stroke 3-Rc 1/4 GA 4-M6 x 1 Thread depth 12 52 171010 14 N GB W Clamp side port 3 32 45 45 BX M 3 Approx.

Stroke Reading Cylinder and Counter

9 #0 w #1 #0 t q e @9 #1 @1 !9 t @5@6 @1 #0 q !1 w#1 #0 @2 @9 #1 @1 ML2B #8 12 40 to 63 @0 @4 @8 i u o @3 !1 #1 #2 @8@4 !2 @7 !3#3 r !4 e !6 @6 #7 #6 !5 !9 @5 t @6 y #0 w @1 #0 #5 !7 #4 q @9@2 !8 #1 #2 !7 #5 #4 @1 Component Parts Component Parts Material Note No. Description Material Note No.

Possible to transfer a workpiece at low-speed.

1 !9 !2 @1 @3 e u o t @2 !8 @0 @0 @3 !2 !9 e @0 @1 o t u !8 @0 @2 !1 !4 q w r y !5 !6 i w i !

C95

Rod end nut Tie-rod nut Tie-rod Cushion ring B Cushion ring A 1 6-1 1 6-2 4 u i o !

MNB

D-Y7BAL D-A3 D-A44 D-G39 D-K39 D-A5 D-A6 D-A59W D-F5NTL D-P5DWL Bore size (mm) A B A B A B A B A B A B A B 32 1 3.5 1.5 4 0 0.5 9.5 12 4.5 7 2 4.5 0 0.5 CL 40 1 3.5 1.5 4 0 0.5 9.5 12 4.5 7 2 4.5 0 0.5 50 1.5 4 2 4.5 0 1 10 12.5 5 7.5 2.5 5 0 1 CL1 63 1.5 4 2 4.5 0 1 10 12.5 5 7.5 2.5 5 0 1 80 5.5 7 6 7.5 2.5 4 14 15.5 9 10.5 6.5 8 2.5 4 MLGC 100 5.5 7 6 7.5 2.5 4 14 15.5 9 10.5 6.5 8 2.5