High Speed 2 Port Valve SX10 Series

(packaged together) 50 80 650 F 40 550 G 10 300 H 4 200 J Filter (IN port) 100 Nil Without lter F With lter Note) Note) Flow reduction rate 50 L/min: 5% or less 100 L/min: 5 to 10% 150 L/min: 10 to 15% 80 600 K 40 500 L 10 250 M 4 150 150 Specications Flow rate (L/min) [at 0.25 MPa] 50 100 150 Power consumption (W) 80 40 10 4 80 40 10 4 80 40 10 4 Type of actuation 2-position 2 port N.C.,

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zoo ~ ) 2 ~ i 100 E 12 z ,; 2 ~ E , E :; 100 V ~ " I ~ , , " , f< ' ~ 0 u: , ' l ~ ~ 0 w 0 5 10 ~ V " ~ 0 ] w 0 5 10 Needle revolullOOs (RevolutIOns) Needle revolutions (Revolutions) ASP530F ASP630F 12. 1500 'E 20 E 12 11~14:l~ z ~ ~ ~IOOO 15 . , g j " . 000 14 'E ' , ' h E cr z 12 ,; "'500 . l/ : 4 i 1,(" 0 to, 1~ OS, D9 10 ~ E ~ " , "' g 10 : ; ~.; 0 --:' 500 ~ ~ 5 :J" ~ -r ~ 0 w

Related Products: Heavy Duty Auto Drain Series ADH4000

0 Repair kit for main valve Kit includes parts from 10-1 to 10-5. !0 10-3 !1 G85(B) O-ring Material: NBR Note) When changing parts, follow the instruction manual. Do not disassemble other parts. 10-4 10-5 OUT Precautions Be sure to read before handling.

Compact Pressure Switch Series ZSE1 (For Vacuum)/ISE1 (For Positive Pressure)

(Adjustable) 1 to 10% of set prss. (Variable) 3% F .S. or less (Fixed) 1 to 10% of set prss.

Aluminum One-touch Connection and Release High Vacuum Angle Valve Normally Closed/Bellows Seal XLAQ Series

) 1.3 x 10-8 Internal 1.3 x 10-10 (FKM) 1.3 x 10-8 DNil A B C Sealmaterial XSA 1.3 x 10-8 1.3 x 10-10 (FKM) 1.3 x 10-8 Symbol Nil N1 Seal material FKM EPDM Barrel Perfluoro Compound no. 1349-80 2101-80 1.3 x 10-10 (FKM) XVD Note 1) Values at ambient temperatures, excluding gas permeation.

Compact Cylinder: Standard Double Acting, Single Rod Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100

Cold resistant cylinder (40 to 70C) w/o auto switch only Low-speed cylinder (10 to 50 mm/s) Standard Strokes Intermediate stroke (Exclusive body type) Pneumatic type Intermediate stroke (Spacer-installed type) (mm) Bore size 12, 16 20, 25 32, 40 50 to 100 Standard stroke Long stroke (Air-hydro type only) 5, 10, 15, 20, 25, 30 5, 10, 15, 20, 25, 30, 35, 40, 45, 50 5, 10, 15, 20, 25, 30, 35

PSxx-OMS0006CN

N01 NPT1/8 12 C4HC6HN7H 2.5 A B C4H 15.6 8 C6H 16.5 10 N7H 16 10.3 C4LC6LN7L C A B C D C4L 15.2 17.5 4 8.2 C6L 15.2 18.3 4 10.4 N7L 20.9 20.6 6 11.1 -64No.PS-OMS0006CN-G A B -65No.PS-OMS0006CN-G 0.5~7 + 0.5~7 -66No.PS-OMS0006CN-G 2 (n ) <> <> (n -1) (n -1) -67No.PS-OMS0006CN-G Revision history A B [2016 9 ] C [2018 6 ] D [2020 2 ] E [2021 2 ] F [2022 1 ] G [2022 10 ] 4-14-1, Sotokanda

MXQ

P FR (2) 6 8 12 16 20 25 10, 20, 30, 40, 50 10, 20, 30, 40, 50, 75 10, 20, 30, 40, 50, 75, 100 10, 20, 30, 40, 50, 75, 100, 125 10, 20, 30, 40, 50, 75, 100, 125, 150 10, 20, 30, 40, 50, 75, 100, 125, 150 FP Note 2) W/ end lock is not available in Series MXQ6.

Digital Flow Switch for Deionized Water and Chemicals Series PF2D

Ratio of resistance [k m] 100 10 50 Particle ratio [number/cc] 1 0 5 10 15 20 25 30 Duration of flow [min] 2 or 3 particles/cc Tube 00 10 20 30 40 50 60 70 Duration of flow [min] The data was obtained by performing an actual 10 minutes supersonic cleaning using an average 16Mcm of deionized water at class 10 clean room (1l/min flow rate).

CVRA1-E

Rotation angle rad Inertia moment kgm For equiangular acceleration, the angular velocity, , after t seconds are obtained using the following equations. ) 1 ( ) 2 ( C : Integration constant Because the displacement angle in t=0 becomes =0, it becomes C=0.

Standby Regulator

(Values at the initial period) 10 - 4.

VFR3000 Series

Intermediate stops heat generated by the valve. 10.

Vacuum regulator

C08 8 mm C10 10 N07 1/4 N09 5/16 inch N11 3/8 Accessories1 Accessory is included in the same container Nil No accessory B With Bracket L With Bottom Bracket 6 - Single sided connections C Body size Accessories2 10 The maximum flowing quantity 140l/min(ANR) Accessory is included in the same container 20 The maximum flowing quantity 240l/min(ANR) Nil No accessory(Note1) GN With

Thermo-chiller Series HRZ Fluorinated Fluid Type

Note 10) Mass in the dry state without circulating fluids. 80

Compact Guide Cylinder End Lock Type SeriesMGP

B + Stroke A + Stroke FA FB S HR E b a With front lock XAH7 c d e MO XB T-slot dimensions (mm) DM HN XAH7 XC XL Bore size (m) a b c d e End lock mechanism (locking type manual release ) 6.5 10.5 5.5 3.5 9.5 32 Section XX detailed diagram 6.5 10.5 5.5 4 11 40 8.5 13.5 7.5 4.5 13.5 50 11 17.8 10 7 18.5 63 LL With rear lock (mm) Standard strokes (mm) Bore size (mm) ML NN OA B C DA FA FB G GA

Gun Type Ionizer

Loosening and damage of nozzles c. Twists or crushing of connected tubes d. Hardness and deterioration of connected tubes e. Air leakage 192

5 Port Pilot Operated Solenoid Valve Metal Seal, Plug-in/Non Plug-in Series VZS3000 For details about certified products conforming to international standards, visit us at www.smcworld.com.

For details about certified products conforming to international standards, visit us at www.smcworld.com. 5 Port Pilot Operated Solenoid Valve Metal Seal, Plug-in/Non Plug-in Series VZS3000 Model VK 1 4/2 (P A/B) C [dm3/(sbar)] C [dm3/(sbar)] b Cv 4/2 5/3 (A/B R1/R2) Flow characteristics (1) Response time (ms) (2) Weight (kg) (3) Max. operating cycle (CPM) Port size Rc VZ Model Type of

Antistatic Tubing Series TA

(mm) 3.2 4 6 8 10 12 D Tubing I.D.

Clean Tubing: Polyolefin Tubing Series TPH

Note 3) The minimum bending radius indicates the value at a temperature of 20C with an outside diameter rate of change of 10% or less. At higher temperatures the outside diameter rate of change may exceed 10% within the minimum bending radius.

Polyurethane Flat Tubing Series TFU

MS Burst pressure (MPa) 20 to +60C (No freezing) Polyurethane Burst pressure Black T 15 10 10 20 VMG Maximum operating pressure How to Order Operating temperature (C) Precautions 2 TFU0425 B Be sure to read before handling.