SET 12 Series PSE Operation : Special Setting 3 Auto shift Refer to C Auto shift function on page 14 for details.
40 V3 L 1 H 2 4 10 40 Connections Temperature range NPT 1/4 inch 40 to 140F (40 to 60C) (No freezing) 25% to 75% of the scale: 2%F.S.
Crean class Amount of Type Speed recommended vacuum (mm/s) ISO 14644-1 Fed.Std.209D aspiration 6 1000 10 5 100 20 4 10 30 6 1000 50 5 100 60 4 10 70 6 1000 20 5 100 30 4 10 50 6 1000 30 5 100 70 4 10 90 600 11-LEJS40 1200 600 *Please aspirate it from the port on both sides when aspirating 50/min(ANR). Please select "D" about the type. 11-LEJS63 1200 * Based on SMC test condition.
Port size Lubrication Model Rubber Air 10-MGF40 10-MGF63 10-MGF100 1/8 Relief type (Both sides) Double acting 30, 50, 75, 100 1/4 Non-lube Non-standard intermediate strokes (in 5 mm increments) are available by attaching a spacer of 5, 10, 15, 20 or 25 mm width.
: 201 to 300mm 80 40 50 50 20 20 Load weight m (kg) Load weight m (kg) Load weight m (kg) 20 10 10 10 63 63 63 5 5 5 50 50 50 [Example ] 40 40 40 1 1 1 70 100 300 500 1000 70 100 300 500 1000 70 100 300 500 1000 Stroke (mm) Stroke (mm) Stroke (mm) 2.
10, 25, 40, 50, 80, 100, 125, 160, 200 16 20 10, 25, 40, 50, 80, 100, 125, 160, 200, 250, 300 1000 25 Refer to pages 101 to 111 for cylinders with auto switches.
(packaged together) 50 80 650 F 40 550 G 10 300 H 4 200 J Filter (IN port) 100 Nil Without lter F With lter Note) Note) Flow reduction rate 50 L/min: 5% or less 100 L/min: 5 to 10% 150 L/min: 10 to 15% 80 600 K 40 500 L 10 250 M 4 150 150 Specications Flow rate (L/min) [at 0.25 MPa] 50 100 150 Power consumption (W) 80 40 10 4 80 40 10 4 80 40 10 4 Type of actuation 2-position 2 port N.C.,
zoo ~ ) 2 ~ i 100 E 12 z ,; 2 ~ E , E :; 100 V ~ " I ~ , , " , f< ' ~ 0 u: , ' l ~ ~ 0 w 0 5 10 ~ V " ~ 0 ] w 0 5 10 Needle revolullOOs (RevolutIOns) Needle revolutions (Revolutions) ASP530F ASP630F 12. 1500 'E 20 E 12 11~14:l~ z ~ ~ ~IOOO 15 . , g j " . 000 14 'E ' , ' h E cr z 12 ,; "'500 . l/ : 4 i 1,(" 0 to, 1~ OS, D9 10 ~ E ~ " , "' g 10 : ; ~.; 0 --:' 500 ~ ~ 5 :J" ~ -r ~ 0 w
0 Repair kit for main valve Kit includes parts from 10-1 to 10-5. !0 10-3 !1 G85(B) O-ring Material: NBR Note) When changing parts, follow the instruction manual. Do not disassemble other parts. 10-4 10-5 OUT Precautions Be sure to read before handling.
(Adjustable) 1 to 10% of set prss. (Variable) 3% F .S. or less (Fixed) 1 to 10% of set prss.
) 1.3 x 10-8 Internal 1.3 x 10-10 (FKM) 1.3 x 10-8 DNil A B C Sealmaterial XSA 1.3 x 10-8 1.3 x 10-10 (FKM) 1.3 x 10-8 Symbol Nil N1 Seal material FKM EPDM Barrel Perfluoro Compound no. 1349-80 2101-80 1.3 x 10-10 (FKM) XVD Note 1) Values at ambient temperatures, excluding gas permeation.
Cold resistant cylinder (40 to 70C) w/o auto switch only Low-speed cylinder (10 to 50 mm/s) Standard Strokes Intermediate stroke (Exclusive body type) Pneumatic type Intermediate stroke (Spacer-installed type) (mm) Bore size 12, 16 20, 25 32, 40 50 to 100 Standard stroke Long stroke (Air-hydro type only) 5, 10, 15, 20, 25, 30 5, 10, 15, 20, 25, 30, 35, 40, 45, 50 5, 10, 15, 20, 25, 30, 35
N01 NPT1/8 12 C4HC6HN7H 2.5 A B C4H 15.6 8 C6H 16.5 10 N7H 16 10.3 C4LC6LN7L C A B C D C4L 15.2 17.5 4 8.2 C6L 15.2 18.3 4 10.4 N7L 20.9 20.6 6 11.1 -64No.PS-OMS0006CN-G A B -65No.PS-OMS0006CN-G 0.5~7 + 0.5~7 -66No.PS-OMS0006CN-G 2 (n ) <> <> (n -1) (n -1) -67No.PS-OMS0006CN-G Revision history A B [2016 9 ] C [2018 6 ] D [2020 2 ] E [2021 2 ] F [2022 1 ] G [2022 10 ] 4-14-1, Sotokanda
P FR (2) 6 8 12 16 20 25 10, 20, 30, 40, 50 10, 20, 30, 40, 50, 75 10, 20, 30, 40, 50, 75, 100 10, 20, 30, 40, 50, 75, 100, 125 10, 20, 30, 40, 50, 75, 100, 125, 150 10, 20, 30, 40, 50, 75, 100, 125, 150 FP Note 2) W/ end lock is not available in Series MXQ6.
Ratio of resistance [k m] 100 10 50 Particle ratio [number/cc] 1 0 5 10 15 20 25 30 Duration of flow [min] 2 or 3 particles/cc Tube 00 10 20 30 40 50 60 70 Duration of flow [min] The data was obtained by performing an actual 10 minutes supersonic cleaning using an average 16Mcm of deionized water at class 10 clean room (1l/min flow rate).
Rotation angle rad Inertia moment kgm For equiangular acceleration, the angular velocity, , after t seconds are obtained using the following equations. ) 1 ( ) 2 ( C : Integration constant Because the displacement angle in t=0 becomes =0, it becomes C=0.
(Values at the initial period) 10 - 4.
Intermediate stops heat generated by the valve. 10.
C08 8 mm C10 10 N07 1/4 N09 5/16 inch N11 3/8 Accessories1 Accessory is included in the same container Nil No accessory B With Bracket L With Bottom Bracket 6 - Single sided connections C Body size Accessories2 10 The maximum flowing quantity 140l/min(ANR) Accessory is included in the same container 20 The maximum flowing quantity 240l/min(ANR) Nil No accessory(Note1) GN With
Note 10) Mass in the dry state without circulating fluids. 80