Magnetically Coupled Rodless Cylinder Slider Type: Ball Bushing Bearing CY1L Series ø 6, ø 10, ø 15, ø 20, ø 25, ø 32, ø 40

Standard Stroke Bore size (mm) Standard stroke (mm) Maximum available stroke (mm) Made to Order: Individual Specifications (For details, refer to pages 1538 and 1539.) 6 10 300 500 50, 100, 150, 200 50, 100, 150, 200, 250, 300 50, 100, 150, 200, 250, 300, 350 400, 450, 500 Symbol Specifications -X116 -X168 -X322 -X431 Hydro specifications 15 750 Helical insert thread specifications 20 25

Compact Vacuum Ejector Series ZA

C () White Reset (Vacuum suspension) B DC negative common Lead wire colors Set (Vacuum generation) Simultaneous energization protection circuit COM. (+) Red () Black SOL. A C (+) White Reset (Vacuum suspension) B AC type Lead wire colors 100 VAC, 200 VAC Set (Vacuum generation) Yellow Yellow A 3.

How to Order Series ZM Vacuum Ejector With Valve and Switch For details about certified products conforming to international standards, visit us at www.smcworld.com. 1

EXH system Common SUP system Common, Individual Vacuum Ejector Specifications Fluid Air 0.7 MPa 84 kPa 0.2 to 0.55 MPa 0.25 to 0.55 MPa 5 to 60 C 5 to 50 C Main valve Pilot valve Poppet VJ114, VJ324M Maximum operating pressure Maximum vacuum pressure Without valve With valve Without valve With valve Supply pressure range Operating temperature range Maximum air suction volume increased

Cooling capacity: 300 W, 500 W, 750 W ; Temperature range setting: 10 to 60°C ; Temperature stability: ±0.1°C ; Power supply requirement: single phase 180 ~ 242 VAC, 50/60Hz ; Circulating fluid: Various liquid chemicals, see catalog (fluororesin compatible) ; Standards: Ce, SEMI S2-0706, F47-0706, RoHS

Cooling capacity: 300 W, 500 W, 750 W ; Temperature range setting: 10 to 60°C ; Temperature stability: ±0.1°C ; Power supply requirement: single phase 180 ~ 242 VAC, 50/60Hz ; Circulating fluid: Various liquid chemicals, see catalog (fluororesin compatible) ; Standards: Ce, SEMI S2-0706, F47-0706, RoHS

BP1000

compatible materials of construction for the gas Gas Proof pressure (Inlet) Burst pressure Ambient and operating temperature Cv 15 psig (0.105 MPa) 30 psig (0.2 MPa) 45 psig (0.3 MPa) 90 psig (0.6 MPa) 150 psig (1.05 MPa) 300 psig (2.1 MPa) 300 psig (2.1 MPa) 600 psig (4.1 MPa) 450 psig (3.15 MPa) 900 psig (6.2 MPa) 14 to 160F (40 to 71C) (No freezing) 1) 0.3 2 x 10-11 Pam3/sec 2 x 10-10

Clean Air Module

or less (12 VDC), 600 or less (24 VDC) P2: Analog output 1 to 5 V Allowable load resistance 100 k or more P6: Analog output 4 to 20 mA Allowable load resistance 300 or less (12 VDC), 600 or less (24 VDC) 339 LLB Series Refer to the operation manual for how to set and to operate.

AMC

ANR: 20C atmospheric pressure, relative humidity 65% 200 300 1,000 1 4 3 8 1 4 3 4 1 2 , , 0.12 AMC-EL2 BE20 0.2 AMC-EL3 BE30 0.5 AMC-EL5 BE50 VEX How to Order AN 5 1 0 AMC 06 AMC Thread Body size Suffix Port size 1 4 std. 3 8 std. 3 4 1 std. std. 1 2 2 std. 2 std. 3 5 6 8 9 B With bracket 1 2 14 20 1 1 02 Female Female Male Female Female Male 1 Male thread 10 1 4 Male Male Male D Drain piping

Exhaust Cleaner Series AMC

Bracket model no. 300 1,000 3,000 6,000 10,000 Exhaust of oil mist 3 8 3 4 1 2 1.7 1 2 1 A Drain cock (Standard) 0.2 AMC-EL3 BE30 0.5 AMC-EL5 BE50 0.7 AMC-EL6 BE60 1.2 AMC-EL8 D Drain piping AMC-EL9 Thread type Applicable to drain piping ANR: 20C atmospheric pressure, relative humidity 65% Rc NPT G Nil N F Model/Female Thread Type Model Specifications Effective area (mm2) AMC220 AMC320

Direct Operated Precision Regulator Modular Style Series ARP3000 1

0.25 0.25 0.20 0.20 AMR 0.15 0.15 ITV 0.10 0.10 IC 0.05 0.05 0 0 50 100 150 200 250 300 350 400 450 500 0 0 50 100 150 200 250 300 350 400 450 500 VBA Flow rate (/min (ANR)) Flow rate (/min (ANR)) VE VY1 G Pressure Characteristics PPA Inlet pressure: 2.0 MPa Outlet pressure: 0.8 MPa Flow rate: 60 /min (ANR) Inlet pressure: 2.0 MPa Outlet pressure: 0.3 MPa Flow rate: 60 /min (ANR) AL ARX20

Clean Regulator

100 200 300 400 Flow rate L/min Flow rate L/min (ANR) Flow rate L/min (ANR) SRH3100-02 SRH3110-02 SRH3100-02 0.5 0.20 0.20 0.4 Outlet pressure MPa 0.15 0.15 0.3 0.10 0.10 0.2 0.05 0.05 0.1 0 100 200 300 400 0 2 4 6 400 100 200 300 0 Flow rate L/min (ANR) Flow rate L/min (ANR) Flow rate L/min SRH4000-03 SRH4010-03 SRH4000-03 0.5 0.20 0.20 0.4 Outlet pressure MPa Outlet pressure MPa Outlet

Mechanically Jointed Hy-rodless Cylinder with Brake ML1C Series ø 25, ø 32, ø 40

Maximum manufacturable stroke (mm) Standard stroke (mm) Bore size (mm) 25 32 40 2000 2000 2000 Stroke adjustment unit symbol Refer to page 1109 for stroke adjustment unit. 100, 200, 300, 400, 500, 600, 700, 800, 900, 1000 100, 200, 300, 400, 500, 600, 700, 800, 900, 1000 100, 200, 300, 400, 500, 600, 700, 800, 900, 1000 When stroke is required, which is longer than the standard stroke, refer

Magnetic Separator FHM Series

400 500 100 200 300 400 500 100 200 300 400 500 Elimination ratio (%) Elimination ratio (%) Elimination ratio (%) 75 70 60 50 40 30 20 10 0 1 5 10 50 30 100 1 5 10 50 100 Flow-back count Flow-back count Flow-back count Explanation of graph Explanation of graph Example: Elimination ratio and concentration after using the FHM-100 for one hour under the following conditions.

Low torque Metal seal type Rotary joint

(cm3/min). 1000 (300) 0 0 0 . 1 0 . 2 0 . 3 0 . 4 0 . 5 0 . 6 0 . 7 0 . 8 0 . 9 1 Differential pressure [MPa] Change in rotational torque with rotation speed Temperature rise with rotation speed 0.4 30 MQR4 MQR2 MQR1 Temperature rise [C] 0.3 Rotational torque [N.m] MQR12 MQR8 MQR8 20 MQR4 MQR2 MQR12 0.2 10 0.1 MQR1 0 0 0 1000 2000 3000 0 500 1000 1500 2000 2500 3000 Rotation speed [min-1

VFA3000

Max. 60 Not required Lubrication Pilot Pressure Range (Single pilot) Mounting Free Impact/Vibration resistance (m/s2) (1) 300/50 Note 1) Impact resistance: No malfunction from test using drop impact tester, to axis and right angle directions of main valve, each one time when pilot signal is ON and OFF.

VFRA3000

orientation Free Impact/Vibration resistance (m/s2) (2) 300/50 Note 1) Use turbin oil class 1 (ISO VG32) if lubricating.

VFA3000

Lubrication Not required Mounting orientation Impact/Vibration resistance (m/s2) Note) Free 300/50 Note) Impact resistance: No malfunction from test using drop impact tester, to axis and right angle directions of main valve, each one time when pilot signal is ON and OFF .

Mechanically Jointed Rodless Cylinder Cam Follower Guide Type Series MY2C ø16, ø25, ø40

Mechanically Jointed Rodless Cylinder Cam Follower Guide Type Series MY2C 16, 25, 40 How to Order M9BW MY2C Cam Follower Guide Type G L 16 300 Made to Order Refer to page 1099 for details. Guide type C Cam follower guide Number of auto switches Bore size 16 25 40 16 mm 25 mm 40 mm 2 pcs. 1 pc. n pcs.

Low torque Metal seal type Rotary joint Series MQR

(cm3/min). 1000 (300) 0 0 0 . 1 0 . 2 0 . 3 0 . 4 0 . 5 0 . 6 0 . 7 0 . 8 0 . 9 1 Differential pressure [MPa] Change in rotational torque with rotation speed Temperature rise with rotation speed 0.4 30 MQR4 MQR2 MQR1 Temperature rise [C] 0.3 Rotational torque [N.m] MQR12 MQR8 MQR8 20 MQR4 MQR2 MQR12 0.2 10 0.1 MQR1 0 0 0 1000 2000 3000 0 500 1000 1500 2000 2500 3000 Rotation speed [min-1

Piston Material: Stainless Steel, Added Function: N/A, Rod Motion: Double Acting Single Rod, Operating Pressure Range(MPa): 0.15～14, Tube Material: Steel, Piston Speed(mm/sec): 8～300, Piston Packing Material: NBR, Stroke(mm): 300, Cushioning Mechanism: Both Sides, Operating Temperature Range(°C): -10～80, Support Type: [Rod Side Flange] Rod-Side Rectangular-Flanged Type, Standard: JIS Specifications