5 Port Air Operated Valve Series SYA3000/5000/7000 1

Model/Series SYA540 (Base mounted) Valve model Type of actuation Port size Flow characteristics Note 1) Pilot port size (Nominal size) b 4/2 5/3 (A/B EA/EB) 1 4/2 (P A/B) Weight Note 2) (g) C [dm3/(sbar)] C [dm3/(sbar)] Cv b Cv 105 (42) 110 (47) Single Double Closed center 2 position 0.66 2.4 0.41 0.64 2.8 0.29 SYA540-02 M5 x 0.8 1 4 0.72 [0.37] 0.47 0.55 0.47 0.44 0.50 3.0 [1.2] 1.8

SYA3000/5000/7000

Model/Series SYA540 (Base mounted) Valve model Port size Flow characteristics Note 1) Type of actuation Pilot port size b 4/2 5/3 (A/B EA/EB) 1 4/2 (P A/B) Mass Note 2) (g) Cv b Cv C [dm3/(sbar)] C [dm3/(sbar)] 105 (42) 110 (47) Single Double Closed center 2 position 2.4 0.41 0.64 2.8 0.29 0.66 SYA540-02 M5 x 0.8 1 4 0.55 0.47 0.44 0.50 3.0 [1.2] 1.8 0.33 [0.48] 0.40 0.72 [0.37] 0.47

5 Port Air Operated Valve SYA3000/5000/7000 Series

VTA Model/SYA540 Series (Base mounted) VGA Valve model Port size Flow rate characteristics Note 1) Type of actuation Pilot port size b 4/2 5/3 (A/B EA/EB) 1 4/2 (P A/B) Weight Note 2) (g) VPA C [dm3/(sbar)] C [dm3/(sbar)] Cv b Cv 105 (42) 110 (47) Single Double Closed center 2 position 2.4 0.41 0.64 2.8 0.29 0.66 VPA3 SYA540-02 M5 x 0.8 1 4 0.55 0.47 0.44 0.50 3.0 [1.2] 1.8 0.33 [0.48

AZ1000

Material Code Body Poppet 316L SS Diaphragm 316L SS Nozzle Seat material S Material PCTFE (Standard) PTFE 3) Code 316L SS 316L SS Hastelloy C-22 Hastelloy C-22 No code TF SHP 3) PTFE recommended for applications such as within a process tool.

Speed Controller with One-touch Fitting Stainless Series Series AS-FG Elbow Type/Universal Type 1

Size ASF Model d T Weight (g) H D1 D2 L1 L2 L3 L4 A Model d T Weight (g) H D1 D2 L1 L2 L3 L4 A Max.

Speed Controller with Residual Pressure Release Valve with One-touch Fitting AS  FE Series

L1 D L2 L3 L4 L5 L6 L8 Model Port size AS2000E-01 10 4.5 17 16 5 57 30 61.5 40 15.5 1/8 AS2000E-02 12 4.5 23 20 5 59 30 63.5 40 17 1/4 AS3000E-02, 03 5.5 25 26 5.25 69 45.5 76 56 20.6 13.25 1/4, 3/8 Note 1) Reference dimensions AS4000E 2 x 1/4 to 1/2 72 (Max. 80) (1) Effective thread depth 6 2 x M4 x 0.7 664

5 Port Air Operated Valve Series VFA3000 1

-F VFA3130-02 2 1 4 3 VFA3430-02-X1 5 1 8 VFA3140-02 2 1 4 (2) 3 VFA3440-02-X1 5 VFA3140-03 2 3 8 3 VFA3440-03-X1 5 Note 1) Port size of the exhaust ports on body ported type are all 1/8.

Table of Contents

D-sub Connector. Series SV D-sub Connector. How to Order . Manifold Electrical Wiring. Dimensions . Series SV1000 for D-sub Connector. Series SV2000 for D-sub Connector. Series SV1000 for D-sub Connector. Series SV2000 for D-sub Connector. Series SV3000 for D-sub Connector. Series SV4000 for D-sub Connector. Flat Ribbon Cable Connector . Series SV Flat Ribbon Cable Connector.

Speed Controller for Low Speed Operation with One-touch Fitting Series AS-FM Elbow Type/Universal Type (Resin Body) 1

With One-touch fitting Port size For low speed control M5 U10/32 01 02 M5 x 0.8 10-32 UNF 1/8 1/4 Thread type Nil Metric thread (M5) Unified thread (10-32 UNF) R NPT N Needle Valve/Flow Characteristics AS1201FM, AS1211FM AS1301FM, AS1311FM AS2201FM-01, AS2211FM-01 AS2301FM-01, AS2311FM-01 AS2201FM-02, AS2211FM-02 AS2301FM-02, AS2311FM-02 0.8 Inlet pressure: 0.5 MPa Inlet pressure: 0.5 MPa

VSA4

(Value in the initial stage) Note 4) As per JIS C 0920 Manifold possible. When requiring bottom piping, please specify it. JIS Symbol 2 position single 01 02 03 Sub-plate Assembly Part No.: VS4020-SMounting bolt and gasket are not included.

VFRA3000

Cv 1.9 2.2 1.9 2.2 1.6 1.7 2.0 (0.96) 2.4 (0.96) 1.5 1.7 VFRA3111-02 VFRA3111-03 VFRA3211-02 VFRA3211-03 VFRA3311-02 VFRA3311-03 VFRA3411-02 VFRA3411-03 VFRA3511-02 VFRA3511-03 1/4 3/8 1/4 3/8 1/4 3/8 1/4 3/8 1/4 3/8 0.38 0.39 0.41 0.36 0.40 0.39 0.42 0.42 0.33 (0.48) 0.34 (0.47) 1.9 2.2 1.9 2.0 1.8 1.9 1.7 1.8 1.9 (0.69) 2.2 (0.69) 0.61 Single 1/8 2 position 0.71 Double 1/8 Body ported Closed

Clean Gas Filter

Model A TSJ 1/4 TSJ 3/8 AMF SFC102-02 SFC102-03 ZFC SF SF SFC105-02: URJ 1/4 (Union Ring Joint) SFC105-03: URJ 3/8 (Union Ring Joint) SFD 2 x A LLB AD IN 76 B GD C Width across flats 127 Model A URJ 1/4 URJ 3/8 B 22 26.5 C 19 22 SFC105-02 SFC105-03 311 SF Series Made to Order Please contact SMC for detailed dimensions, specifications and lead times.

Body Size: 20, Model Type: A (Filter Regulator + Lubricator), Thread: F (G), Port Size: 01 (1/8), Float Type Auto Drain: C [N.C.

Body Size: 20, Model Type: A (Filter Regulator + Lubricator), Thread: Rc, Port Size: 01 (1/8), Float Type Auto Drain: C [N.C.

Body Size: 20, Model Type: Filter Regulator + Lubricator, Thread: G, Port Size: 1/4, Float Type Auto Drain: C [N.C.

Drain, Pressure Gauge/Digital Pressure Switch: w/o Pressure Gauge, Attachment: without Attachment, Set Pressure: 0.05 to 0.85 MPa Setting, Bowl Type + Lubricator: Standard (Polycarbonate Bowl + Lubricator), Bowl Guard: None, Air Filter Drain Port: w/Drain Cock, Exhaust Mechanism: Relieving Type, Flow Direction: Left to Right, Drain Cock w/Barb Fitting: None, Pressure Unit: Product: MPa, °C;

Digital Pressure Switch: Round Type Pressure Gauge, w/Limit Indicator, Attachment: without Attachment, Set Pressure: 0.05 to 0.85 MPa Setting, Bowl Type + Lubricator: Standard (Polycarbonate Bowl + Lubricator), Bowl Guard: None, Air Filter Drain Port: w/Drain Cock, Exhaust Mechanism: Relieving Type, Flow Direction: Left to Right, Drain Cock w/Barb Fitting: None, Pressure Unit: Product: MPa, °C;

Body Size: 20, Model Type: Filter Regulator + Lubricator, Thread: G, Port Size: 1/4, Float Type Auto Drain: C [N.C.

Body Size: 20, Model Type: A (Filter Regulator + Lubricator), Thread: F (G), Port Size: 02 (1/4), Float Type Auto Drain: C [N.C.

Exhaust Mechanism: Relieving Type, Flow Direction: Left to Right, Drain Cock w/Barb Fitting: None, Pressure Unit: Product: MPa, °C; Pressure Gauge: MPa