The manifold for the VXA21/22 series is available in a common SUP style or individual SUP style (for vacuum use). The VXA31/32 series manifold is individual ported.

The manifold for the VXA21/22 series is available in a common SUP style or individual SUP style (for vacuum use). The VXA31/32 series manifold is individual ported.

Manifold Base for VX21/22/23 series solenoid valves for air, Base material: aluminum , 1/8 or 1/4 individual port size, 2 - 10 stations available as standard, Options: Rc, G or NPT threads, oil-free, MFLD BASE, VX2100 SERIES, VALVE, VVX* MANIFOLD VX SERIES, PJ, VVX* BASE MT 1/4, .58960 lb, SizePort sizeOrifice diameter (mm?)

Precision Regulator Series IR1000/2000/3000

15.5 M5 depth 7 Rc 1/2 Exhaust port 66 9 68 66 IN 2 x Rc 1/4 to 1/2 Port size 2 x Rc 1/8 Pressure gauge port Bleed 22 76 144 43 EXH(3) OUT(2) SUP(1) 68 66 Rc 1/2 Exhaust port 66 2 x Rc 1/4 to 1/2 Port size 2 x Rc 1/8 Pressure gauge port 556 Precision Regulator Series IR1000/2000/3000 Series IR1000 Flow Characteristics Relief Characteristics Pressure Characteristics Testing methods conform

Digital Flow Switch (Integrated display type)

Bit offset Item Notes 0 OUT1 output 0: OFF 1: ON 1 OUT2 output 0: OFF 1: ON 8 Measurement diagnostics 0: Within range 1: Out of range (HHH/LLL) 14 Fixed output 0: Normal output 1: Fixed output 15 Error Diagnosis 0: Error not generated 1: Error generated 16 to 31 Flow measurement value With sign: 16 bit Bit offset 31 30 29 28 27 26 25 24 23 22 21 20 19 18 17 16 Item Flow measurement value

High Vacuum Slit Valve

And the gate opens and makes the slit 23 of the body 21 able to transfer workload. 3-2-6 End lock (Not shown in Figure) In the case of sudden loss of operating pressure while the gate is in the opened or closed position, a pin of end lock extends out and comes into an end lock groove 24 of the actuating base 22.

Sine Cylinder Series REC

When re-tightening, tighten approximately 2 degrees more than the original position. 16, 18 and 22 are non-replaceable parts, so they are not included in the seal kit. 174

New New 2-Color Display Digital Flow Switch ® (200 L type only) Applicable fluid Air, N2 Expanded flow range! Wide range of flow measurement with one product (100: 1) (100: 1) Setting resolution: 1 L/min Flow ratio Flow ratio is 10: 1 for current PF2A

Description Note Material 1 Sensor body PPS 2 Gasket HNBR 3 Flow rectifier Stainless steel 304 4 Sensor chip Silicone 5 Printed circuit board GE4F 6 Gasket HNBR 7 Body PPS 8 Mesh Stainless steel 304 9 Spacer PPS 10 O-ring HNBR 11 O-ring HNBR 12 Coating Attachment ADC 5 2-Color Display Digital Flow Switch Series PFMB7 Dimensions PFMB7201-C8 68 48 18 OUT1 OUT2 10.2 DC () DC (+) 1 43 22 14.8

Manifold Base for VX21/22/23 series solenoid valves for air, Base material: aluminum , 1/8 or 1/4 individual port size, 2 - 10 stations available as standard, Options: Rc, G or NPT threads, oil-free 2 PORT VALVE. Manifold Base, VXE Series. 590.00000 lb. K56.

Slide Unit/Double Rod Type Series CX2 Slide bearing:

Contents Model CX2N10-PS CX2N15-PS CX2N25-PS CX2N10 CX2N15 CX2N25 CX2N10-PS CX2N15-PS CX2N25-PS @0 @1 22 @3 Rod seal Set of left nos. @0, @1, @3 22 is a non-replaceable part, so it is not included in the seal kit. Piston seal NBR Piston gasket Seal kit includes @0, @1, @3. Order the seal kit, based on each bore size. (The piston gasket @2 is not replaceable.)

Remote Type Pressure Sensors/Pressure Sensor Controllers Series PSE

ISE4 GND terminal Blue DC () (Black) ZSE5 ISE5 ZSE6 ISE6 Dimensions ZSE3 ISE3 GS 3000 30 25.5 12 7 PS ISA PSE510-01 DC12 to 24V ANALOG1 to 5V GND 1MPa MADE IN JAPAN RED(+) WHITE(1) BLACK() MAXPRESS 13 10 ZSE1 ISE1 7 ZSE2 ISE2 01, T01 ZSP ISl (20) 24 ZSM Width across flats 12 PFl 01: R(PT) 1/8 T01: NPTF 1/8 13 IFl M5 X 0.8, depth 5 Reference dimensions after thread installation M5 10 19 22

VM

One way roller lever VM220-02-02 VM230-02-02 VM220-02-02S VM230-02-02S JIS Symbol 2 port 17 polyacetal or hard steel roller 3 port EXH port (3 port only) 0.5 MPa supply 7.0 mm P.T. 22 N F.O.F. 5.0 mm O.T. 2-5.5 mounting hole 12.0 mm T.T.

E-P HYREG ® Series VY1

AV Tightening Torque when Piping Connection thread Applicable torque (Nm) M5 x 0.8 1.5 to 2 1/6 rotation 7 to 9 12 to 14 22 to 24 28 to 30 28 to 30 36 to 38 40 to 42 48 to 50 48 to 50 AU Rc 1/8 Rc 1/4 Rc 3/8 Rc 1/2 Rc 3/4 Rc 1 Rc 1 1/4 Rc 1 1/2 Rc 2 AF Model Connection R AN120 AN110 AN200 AN300 AN400 AN500 AN600 AN700 AN800 AN900 Effective area (mm2) AR M5 x 0.8 1 8 1 4 3 8 1 2 3 4 5 35

Vacuum Ejector Series ZM

ZZM Number of ejectors S Silencer location A: Release flow rate adjusting needle with lock nut 10 72 84 (Needle fully open) Pitch P = 16 4 x 5.6 Mounting hole 14 L1 1/4 (Rc, NPTF, G) Common air pressure supply port (P) 2 x M5 Common pilot pressure exhaust port (PE) 1/8 (Rc, NPTF, G) Individual air pressure supply port (P) A 119 77 63 52 8 2 x Rc1/8 (1/8-27NPTF, G1/8) Vacuum port (V) 10 22

Space Saving Vacuum Ejector/Vacuum Pump System Series ZQ

Circuit diagram PV PS PE V V ZQ1000U2 E F Q N F 22 Space Saving Vacuum Pump System Series ZQ Dimensions Manifold type (with PD port) ZZQ1 OC ZQ1000MCommon vacuum pressure supply (PV) port (One-touch fitting: Applicable tubing O.D. 8) Supply valve Common pilot pressure exhaust (PE) port (One-touch fitting: Applicable tubing O.D. 4) Release to the atmosphere.

Digital Flow Switch (Integrated display type)

No.PF-OMJ0006-J PRODUCT NAME Digital Flow Switch (Integrated display type) MODEL / Series / Product Number PFM7## Table of Contents Safety Instructions 2 Model Indication and How to Order 10 Summary of Product parts 13 Mounting and Installation 14 Installation 14 Piping 16 Wiring 17 Flow Setting 20 Function Setting 22 Default settings 22 F0 Unit selection function 23 F1 Setting of OUT1 24

Slit Valve XGT Series

Slit Valve XGT Series RoHS How to Order XGT 22 2 46236 1 C Auto switch and the connector (Refer to the table below) High vacuum slit valve Valve size Gate O-ring material Number of axis Two axes bellows One axis bellows Applicable wafer size 200 mm 300 mm Symbol 22 31 Material FKM Kalrez 4079 Symbol 1 2 Opening window size Width Applicable wafer size Symbol 32 Note) Height x width (mm) 32

LVQ

Air Operated Type Integral Fitting Type (Hyper Fittings) Series LVQ How to Order LVQ 2 0 07 S Option (2) Applicable option Symbol Note 8 v v v 9 v v v 7 v v v 1 v v v v 24 v v v 2 v v v 6 v v v v 3 v v v 4 v v v 5 v v v v Body class Nil J K N Symbol 2 3 4 5 6 Body class 2 3 4 5 6 Orifice dia. 4 8 10 16 22 For high temperature Pilot port thread type Buffer material FFKM Nil M R N LQ1

Operating Pressure: 02 [1 to 30 psig (0.007 to 0.2 MPa)], Material: SH (Body: 316L SS Secondary Remelt; Nozzle: Hastelloy® C-22; Diaphragm: Hastelloy® C-22), Surface Finish: 15 μin. (0.4 μm) Standard, Ports: 3PW [3 Ports (1-In; 2-Out; 3-Gauge Port In)], Connections, Inlet: FV4 (1/4 Inch Face Seal, Female), Connections, Outlet: FV4 (1/4 Inch Face Seal, Female), Gauge Port Inlet: 0 (No

Manifold Base for VX21/22/23 series solenoid valves for air, Base material: aluminum , 1/8 or 1/4 individual port size, 2 - 10 stations available as standard, Options: Rc, G or NPT threads, oil-free, VVX* BASE MT 1/4, VALVE, VVX* MANIFOLD VX SERIES, PJ, VVX* BASE MT 1/4, 1.54874 lb