REA/REB

D-Y7 Auto switch model Bore size (mm) D-A9 D-F9 D-Z7 D-Z8 D-Y7W 7 13 10 A B 5 8 15 4 6 20 9 25 7 9 32 6 11 40 6 Note 1) Switches cannot be mounted in some cases.

24

1 pc. 5 *1 5 2 pcs. 10 *1 10 D-A9V 1 pc. 5 2 pcs. 10 D-Z7 D-Z80 1 pc. 5 *1 5 2 pcs. 10 D-Y59 D-Y7P 1 pc. 5 *1 5 2 pcs. 10 D-Y69 D-Y7PV 1 pc. 5 2 pcs. 5 D-Y7W D-Y7WV 1 pc. 5 *2 2 pcs. 10 *2 D-Y7BA 1 pc. 5 *2 2 pcs. 10 *2 D-P3DWA 1 pc. 15 2 pcs. 15 D-P4DW 1 pc. 5 *2, 3 2 pcs.

ZP

(Female thread) 63 80 ZPT HB-B (Female thread) 100 125 70 Width across flat 60 4 x M5 x 10 G G E F 11 Width across flat 37 45 4 x M4 x 8 E 10 F Y Y 8 10 34 40 C C A A B B D D Dimensions A Dimensions A B C D E F G Y Model ZPT63HB-B8 ZPT63HB-B10 ZPT63HB-B12 ZPT63HB-B16 ZPT80HB-B8 ZPT80HB-B10 ZPT80HB-B12 ZPT80HB-B16 B C D E F G Y Model ZPT100HB-B12 ZPT100HB-B16 ZPT125HB-B12 ZPT125HB-B16 M8 x

5 Port Pilot Operated Solenoid Valve VFS1000/2000/3000/4000/5000/6000 Series

D U D side mounting U side mounting Port size 2 2 stations Symbol 04 06 M A, B P, R1, R2 Rc 1/2 Rc 3/4 Mixed 10 10 stations Rc 3/4 Note 1) Max. 10 stations.

CY1

D-F7LF Note 2) D-A72 D-A7H/A80H D-A73C/A80C D-F7/J79 D-J79C D-F7V D-A72 D-A7H/A80H D-A73C/A80C D-F7/J79 D-J79C D-F7V D-F7W/J79W D-F7WV D-F7LF Note 2) D-A73/A80 D-A73/A80 D-F7NTL D-F7NTL D-F79F D-F7BAL D-F79F D-F7BAL Bore size (mm) 6 27.5 28 40.5 40 32 36 33 35 10 35 35.5 45 44.5 39.5 40.5 40.5 39.5 15 34.5 35 62.5 62 39 58 40 57 20 64 64.5 50 49.5 68.5 45.5 69.5 44.5 25 44 44.5 71 70.5 48.5

Sine Rodless Cylinder Series REA/REB

Note 2) D-A9 cannot be mounted on D of 10.

ZP

4 2 2.6 4.6 1.2 0.3 7 3.5 4.3 7.8 1.8 0.5 10 4 5 11 2 0.8 ZPT3507U ZPT4010U b c d e Y Dimensions of D, E, G are the same.

Table of Contents

Applicable tubing O.D. d AK ASS ASR ASF L4 A Note) M1 Weight (g) 4 6 6 8 6 8 8 10 10 12 Applicable tubing O.D. d T L3 L2 H D1 D2 L1 Model Max.

LJ1H

20 12 10 20 20 20 40 LJ1H10 LJ1H20 LJ1H30 LJ1H10 LJ1H20 LJ1H30 LJ1H10 LJ1H20 LJ1H30 LJ1H10 LJ1H20 LJ1H30 2 Horizontal 8 25 25 18 Standard motor 8 12 8 12 24 5 10 5 10 Vertical 32 10 12 10 20 10 12 10 20 40 High rigidity direct acting guide LJ1H 20 20 40 44 Horizontal 50 25 25 60 Non-standard motor 8 12 8 12 66 5 10 5 10 Vertical 74 10 10 82 Options Page 100 Made to Order 101 Clean room

High Vacuum Angle Valve

Rear flange surface M9N(M)(L)(Z) M9P(M)(L)(Z) M9B(M)(L)(Z) A90(L) A93(M)(L)(Z) M9// D-M9N(M)(L)(Z) D-M9P(M)(L)(Z) D-M9B(M)(L)(Z) D-A90(L) D-A93(M)(L)(Z) 3 Solid state auto switch Seal material changed part Flange: Reed auto switch Leakage (Pam3/s or less) Note) Internal 1.3 x 10-9 (FKM) 1.3 x 10-7 1.3 x 10-9 (FKM) 1.3 x 10-7 Symbol Changed part External Without auto switch (with built-in

VFR

is D side mounting only. 10 Note) 10 stations Note) Base 01T/10/40: 2 to 10 stations Base 01C/01F: 2 to 8 stations Including stations of control unit.

KQ2

(mm) Note) Mass (g) Model D L Q M1 M2 D 6 8 10 4 6 8 KQ2T06-04 KQ2T08-06 KQ2T10-08 10 15 25 12.8 15.2 18.5 21 24 26.5 5.3 6 6.8 17 18.5 21 16 17 18.5 6.4 13.4 25.6 4.4 10.6 17.7 M2 D 12 KQ2T12-10 20.9 28.5 7.5 22 40 28.4 29 10 21 D Note) D: Max. diameter Applicable tubing a 8 4.2 M1 Applicable tubing a M1 Cross: KQ2TW Applicable tubing O.D.

C76

Same side Different sides Same side Different Same side sides D-A7/A80 D-A7H/A80H D-A73C/A80C D-F7/F7V D-J79/J79C 15 + 45 (n = 2, 4...) ( n 2) 2 D-C7 D-C80 10 15 50 50 + 45(n 2) ) 10 + 35 (n = 2, 4...) ( n2 2 10 5 D-C73C D-C80C D-H7C D-H7 D-H7W D-H7BAL D-H7NF 15 + 50 (n = 2, 4...) ( n 2) 2 10 15 65 65 + 50(n 2) D-A79W, D-J79W D-F7W, D-F7BAL D-F79F, F7WV D-F7BAVL ) 15 + 35 (n = 2, 4.

C76

Same side Same side Different sides Different Same side sides D-A7/A80 D-A7H/A80H D-A73C/A80C D-F7/F7V D-J79/J79C 15 + 45 (n = 2, 4...) ( n 2) 2 D-C7 D-C80 10 50 50 + 45(n 2) 15 ) 10 + 35 (n = 2, 4...) ( n2 2 10 5 D-C73C D-C80C D-H7C D-H7 D-H7W D-H7BAL D-H7NF 15 + 50 (n = 2, 4...) ( n 2) 2 10 65 65 + 50(n 2) 15 D-A79W, D-J79W D-F7W, D-F7BAL D-F79F, F7WV D-F7BAVL ) 15 + 35 (n = 2, 4.

SX

SX5000-38-16 A SX7000-39-16 A SX7000-38-16 A Dimensions Applicable fittings size d 4 Model A L D KQ2P-04 16 32 6 6 KQ2P-06 18 35 8 8 KQ2P-08 20.5 39 10 10 5/32" 1/4" 5/16" 3/8" Thread type Nil Rc G F KQ2P-10 KQ2P-03 KQ2P-07 KQ2P-09 KQ2P-11 12 6 8.5 10 11.5 43 32 35 39 43 22 16 18 20.5 22 N NPT NPTF T Bolt and gasket part no.

Modular Design with Uniform Body Style

For AC20-D For AC30-D For AC40-D For AC40-06-D For AC50-D For AC60-D For AC20A-D For AC30A-D For AC40A-D For AC40A-06-D For AC50A-D For AC60A-D For AC20B-D For AC30B-D For AC40B-D For AC40B-06-D For AC50B-D For AC60B-D For AC20C-D For AC30C-D For AC40C-D For AC40C-06-D For AC20D-D For AC30D-D For AC40D-D For AC40D-06-D Model Section Description Round type Standard G36-10-m01 G46-10-m01

7.5

Mounting position D-sub connector Flat ribbon cable 26 pins Flat ribbon cable 20 pins Flat ribbon cable 10 pins Note Symbol FD PD PGD PHD 16 SUP/EXH block mounting position Specify the valve stations not exceeding the maximum stations. U D B M U side (2 to 10 stations) D side (2 to 10 stations) Both sides (2 to 16 stations) Special specifications SUP/EXH block fitting spec.

Dual Rod Cylinder Series CXSJ/CXS

A C Auto Switch Proper Mounting Position D-M9, D-M9W D-M9AVL D-A93 D-A90, D-A96 D-M9V, D-M9WV Bore size (mm) A B C D A B C D A B C D A B C D CXSJ15 to 32 B D 6 10 15 20 25 32 15.5 13.5 5.5 15.5 11 8 19.5 0.5 9.5 9.5 19.5 0.5 11.5 7.5 25.5 23.5 3 25.5 21 5.5 29.5 3 19.5 7 29.5 3 21.5 5 31.5 6 29.5 4 31.5 6 27 1.5 35.5 10 25.5 0 35.5 10 27.5 2 39 9 37 7 39 9 34.5 4.5 43 13 33 3 43 13 35

Pin Clamp Cylinder Series C(L)KQG/C(L)KQP

port (Port on the clamp side) P Head end cylinder port (Port on the unclamp side) Clamping height: LOW type 71 32 64 L K C G E d H D L K C G E d H D Hole diameter of workpiece Hole diameter of workpiece SR W Z SR W Z LOW type HIGH type LOW type HIGH type HIGH type LOW type HIGH type LOW type 10 9 8 8 7 9 8 8 7 7 10 9 8 8 7 10 9 8 8 7 10 9 8 8 7 10 9 8 8 7 10 9 8 8 7 Without shims 400.05

VFS

P D Nil D side mounting None 01T, 10 1 2 Rc Rc Rc M Mixed U 01C, 01F 3 4 3 4 U side mounting For bottom ported, Rc is only available.