SMC Corporation of America
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SMC Corporation of America SMC Corporation Akihabara UDX15F , 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021, Japan Phone: 03-5207-8271 Fax: 03-5298-5361 URL http://www.smcworld.com 10100 SMC Boulevard, Noblesville, Indiana, 46060, U.S.A.

Akihabara UDX 15F, 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021, JAPAN Phone: 03-5207-8249 Fax: 03-5298-5362 https://www.smcworld.com 2019 SMC Corporation All Rights Reserved Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 1st printing AA printing AA 0AA Printed in Japan. D-G

Example: SS5YJ3-20-03 1 set (Manifold base) SYJ3120-5G-M3 2 sets (Valve) SYJ3000-21-1A 1 set (Blanking plate assembly) SS5YJ3-S41-03-C4 1 set (Manifold base) SYJ3140-5LZ 2 sets (Valve) SYJ3000-21-2A 1 set (Balnking plate assembly) The asterisk denotes the symbol for assembly. Prefix it to the part nos. of the solenoid valve, etc.

REGULATOR TYPE Constant Bleed, Relieving WETTED MATERIALS Polysulfone, Silicone, Stainless steel SUPPLY CONSUMPTION See Graph MAX SUPPLY 35 PSI (242 kPa) TEMPERATURE RANGE 40 150 F (4 66 C) EFFECT OF SUPPLY VARIATION < 0.02 PSI (0.14 kPa) per 1 PSI (6.89 kPa) supply change when dead-ended REPEATABILITY < +/0.05 PSI (.35 kPa) DRIFT < .03 PSI (.21 kPa) after 24 hours RECOMMENDED FILTRATION

fluid Max. operating pressure Burst pressure Operating temperature Material Hardness Air, Water 174psi (1.2MPa) at 68F (20C) Refer to burst pressure characteristics chart Air: 4 to 140F (20 to 60C), Water: 32 to 140F (0 to 60C) Flame resistant Nylon (UL-94 standard V-O) Shore D 48 Burst Pressure Characteristics Chart 1450 1305 TRS0603, TRIS07 Burst pressure psi Oth 1015 er t han TR S06 725 03

OVERRIDE OVERRIDE LIGHT LIGHT OVERRIDE OVERRIDE LIGHT LIGHT E E ALL DIMENSIONS ARE IN MILLIMETERS ALL DIMENSIONS ARE IN MILLIMETERS A B D C E F 188.5 188.5 103 103 38 38 19 19 65 65 150.5 150.5 SIZE 1 SIZE 1 SIZE 2 SIZE 2 SIZE 3 SIZE 3 205 205 228 228 110.5 110.5 25 25 32 32 50 50 64 64 67.5 67.5 175 175 198 198 122 122 71 71 10 Series VS R8 Rubber Seal S ISO SIZE 1 SUB-BASE VS8-1-w 02/03

Akihabara UDX 15F, 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021, JAPAN Phone: 03-5207-8249 Fax: 03-5298-5362 URL http://www.smcworld.com 2009 SMC Corporation All Rights Reserved Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 1st printing LY printing NX 12200SZ Printed in Japan.

RUSSIA SMC Pneumatik LLC. 1-16-4 Shimbashi, Minato-ku, Tokyo 105-8659 JAPAN Tel: 03-3502-2740 Fax: 03-3508-2480 URL http://www.smcworld.com 2004 SMC Corporation All Rights Reserved Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 1st printing HV printing IW 120KS Printed in Japan.

Akihabara UDX 15F, 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021, JAPAN Phone: 03-5207-8249 Fax: 03-5298-5362 URL http://www.smcworld.com 2008 SMC Corporation All Rights Reserved Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 1st printing MW printing MW 16400DN Printed in Japan.

Akihabara UDX 15F, 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021, JAPAN Phone: 03-5207-8249 Fax: 03-5298-5362 http://www.smcworld.com 2012 SMC Corporation All Rights Reserved Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 1st printing QQ printing QQ 7850SZ Printed in Japan. D-DN

Akihabara UDX 15F, 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021, JAPAN Phone: 03-5207-8249 Fax: 03-5298-5362 http://www.smcworld.com 2012 SMC Corporation All Rights Reserved Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 1st printing QY printing QY 8150SZ Printed in Japan. D-G

Akihabara UDX 15F, 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021, JAPAN Phone: 03-5207-8249 Fax: 03-5298-5362 URL http://www.smcworld.com 2010 SMC Corporation All Rights Reserved Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 1st printing LY printing OZ 7150SZ Printed in Japan. D-DN

Refer to flow characteristic chart to select the model with adequate margin for required flow rate. 687 Compact Proportional Solenoid Valve Series PVQ10 How to Order 13 03 M5 5 PVQ L A Base mounted Body / Seal material Valve type / /! & !

(Except double wiring) Note 2) 16 C8 C10 C12 02 03 B CM 16 stations With 8 One-touch fitting With 10 One-touch fitting With 12 One-touch fitting Rc1/4 Rc3/8 Bottom ported Rc1/4 Mixed Note 1) Built-in silencer type does not satisfy IP67. Note 2) Specify wiring type of each station on the manifold In the case of the 16-output SI unit Symbol 01 Stations Note 1 station specification sheet.

Inch size Metric size 01 02 23 2 3.2 4 6 8 10 12 1/8" 5/32" 3/16" 1/4" 5/16" 3/8" 1/2" 03 05 07 09 11 13 Control type 04 06 08 10 12 0 1 Meter-out Meter-in Use 1/8" tube.

(3/8) 02 (1/4) 03 (3/8) Table (2) Solenoid Valve Option AC Note) Note) Seal material Body material/ Shading coil material Note Note) Guide pin material Main valve poppet Coil insulation type Option symbol Fixed sealant Nil C37 Stainless steel Stainless steel DC NBR NBR G Note 1) Option S, Z are not available as surge voltage suppressor is integrated into the AC/Class B coil, as a standard

Body size Port size Thread type Nil N F Symbol Port size Rc NPT G 01 02 03 04 06 10 1/8 1/4 3/8 1/2 3/4 1 A spacer or spacer with bracket is required if the valve is combined with modular FRL. SUP SUP Applicable air preparation equipment Spacer with bracket part no. Pressure relief 3 port valve VHS20 VHS30 VHS40 VHS40-06 VHS50 IN OUT Spacer part no.

Metric thread (M3, M5) Unified thread (10-32 UNF) R NPT M3 x 0.5 M5 x 0.8 10-32 UNF 1/8 1/4 3/8 1/2 ASN M5 Nil U10/32 01 02 03 04 AQ N ASV AK Needle Valve/Flow Characteristics Note) The flow characteristics are representative values.

HowtoOrder 03 ADM200 1 Threadtype Operatingtime/Applicablecompressor Nil N F Rc NPT G Nil 2 sec/min (1 time/min) /3.7 to 37 kW 4 sec/min (2 times/min) /37 to 75 kW 6 sec/min (3 times/min) /75 to 110 kW 8 sec/min (4 times/min) /220 to 370 kW 4 6 8 Portsize Voltage OUT IN Symbol 04 03 3 8 3 8 100 VAC Hz 1 50 60 200 VAC Hz 50 60 240 VAC Hz 50 60 110 VAC Hz 50 60 220 VAC Hz 50 60 24 VDC 12 VDC

Exhaust Cleaner for Clean Rooms Series AMP How to Order AMP 2 0 2 03 Optional specifications Body size None Flow direction RightDown With element service indicator Nil R T 2 3 4 1/4 standard 3/8 standard 1/2 standard Element construction Accessories (optional) Nil None 2 2 stage B With bracket Note) The bracket is not attached.