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Rated Vacuum Range: -101 to 0 kPa, Output Specification: V (PNP Open Collector 2 Outputs + Analog Current Output), Unit Specification: Unit Selection Function, Switches w/Unit Selection not Permitted for Use in Japan, Piping Specification: M5 (Female Thread), Lead Wire: J (Lead Wire w/Connector, 5-core, 2 m Lead Wire), Bracket: A2 (Bracket B, Horizontal Mounting), Operation Manual: T (w/o

Rated Vacuum Range: -101 to 0 kPa, Output Specification: V (PNP Open Collector 2 Outputs + Analog Current Output), Unit Specification: Unit Selection Function, Switches w/Unit Selection not Permitted for Use in Japan, Piping Specification: N01 (NPT 1/8), Lead Wire: w/o Lead Wire, Bracket: A2 (Bracket B, Horizontal Mounting), Operation Manual: K (Operation Manual, Calibration Certificate)

. / N.C.), Rated Voltage: 5 (24 VDC), Vacuum Sensor: C (Digital Pressure Switch for Vacuum / 0 to -101 kPa / PNP 2 Outputs), Connector: C [Common Wiring (plug-in) - w/o Lead Wire with Connector - w/ Lead Wire with Connector for Pressure Switch/sensor], Vacuum, V Port: 06 [ø6 One-touch Fitting (Metric)], Bracket: w/o Option, Individual Release Pressure Supply: w/o Option, Vacuum Break Flow

*If the valve seems to fail, return it to SMC as it is. 9 VN-OMM0001-C A Safety Instructions Po Revision history B Renewal RP C Renewal RW 1st printing: MZ 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL http://www.smcworld.com Note: Specifications are subject to change without prior notice and any obligation on the part of the manufacturer

Body/Exhaust Type: A (Single Unit - Silencer Exhaust), Nominal Nozzle Size: 12 (ø1.2), Supply Valve and Release Valve: R (Self-holding Release Valve Linked / N.C.), Rated Voltage: 5 (24 VDC), Vacuum Sensor: A (Digital Pressure Switch for Vacuum / 0 to -101 kPa / NPN 2 Outputs), Connector: L1 [L-type Plug Connector - w/o Lead Wire with Connector - w/ Lead Wire with Connector for Pressure Switch

CXS Theoretical Output Symbol Specifications XB11 Long stroke type (N) XB13 Low speed cylinder (5 to 50 mm/s) DOperating pressure (MPa) Model Rod size (mm) Piston area (mm 2) X146 Hollow piston rod 0.9 0.8 0.7 0.6 0.5 0.4 0.3 0.2 X138 Adjustable stroke -X CX2N10 CX215 CX225 91 81 71 61 51 40 30 20 101 6 X168 CX helical insert thread 186 166 145 124 104 83 62 41 207 8 X169 2 built-in magnets

JIS Symbol Theoretical Output (N) OUT IN Bore size (mm) Rod size (mm) Operating direction Piston area (mm2) Operating pressure (MPa) 0.7 0.5 0.3 Made to Order Specifications (For details, refer to pages 1373 to 1565.) 84.8 IN 59 42 25 12 6 113 OUT 79 57 34 Symbol Specifications 151 IN 106 75 45 16 8 XA Change of rod end shape 201 OUT 141 101 60 XB6 Heat-resistant cylinder (10 to 150 C) (without

Theoretical Output (N) Bore size (mm) Rod size (mm) Operating direction Piston area (mm2) Operating pressure (MPa) 0.7 0.5 0.3 19.8 14.2 8.49 28.3 OUT 6 3 14.8 10.6 6.36 21.2 IN 55.0 39.3 23.6 78.5 OUT 10 4 46.2 33.0 19.8 66.0 IN Made to Order Specifications (For details, refer to pages 1395 to 1498.) 141 101 60.3 201 OUT 16 6 121 86.0 51.6 172 IN Symbol Specifications 220 157 94.2 314 OUT

both ends MXP12 MXW Reed auto switch (2-wire, 3-wire) Solid state auto switch (2-wire, 3-wire) 2-color indication solid state auto switch (2-wire, 3-wire) Auto switch MXJ +1 0 mm Stroke length tolerance Theoretical Output MXP (N) MXY MXP16 Operating pressure (MPa) Bore size (mm) 6 8 10 12 16 Piston area (mm2) 0.2 6 10 16 23 40 MTS 0.7 20 35 55 79 141 0.6 17 30 47 68 121 0.5 14 25 40 57 101

MRHQ Dimensions MRHQ20 A 48 59 B 78 38.5 4 x M6 x 1 depth 10 51 0 0.074 54h9 26.3 opened +2.2 0.2 8 0 0.1 0 0.05 10 M5 x 0.8 Finger closing port 16.3 closed 0 0.7 4 x M4 x 0.7 (attachment mounting screw ) 5 24.5 20 9 Max. 9.2 51 4 x M6 x 1 depth 9 (two on opposite side) M5 x 0.8 Finger opening port 24 3.4 62 16.5 27 19 26 9 39 36 6.5 2 x 6.5 through 2 x 11 depth of counter bore 2.8 8 46 101

CQS Unit: N Theoretical Output Mass CQ2 Bore size (mm) Operating direction Operating pressure (MPa) Unit: g Without Auto Switch RQ 0.3 0.5 0.7 25 Bore size (mm) Cylinder stroke (mm) 59 42 IN 12 100 35 30 15 20 25 5 10 40 45 50 75 CQM 79 57 OUT 34 12 16 20 25 32 40 50 63 80 100 69 77 86 60 44 52 106 75 IN 45 16 97 108 87 56 67 77 MU 141 101 OUT 60 167 152 92 107 122 137 183 198 213

the value in the graphs below. 0 -0.001 -0.002 -0.003 -0.004 -0.005 -0.006 -0.007 -0.008 -0.009 -0.010 -0.011 -0.012 11-CJ2 11-CM2 11-CQ -0.027 13-MXS16 Vacuum pressure (MPa) Vacuum pressure (MPa) -0.028 13-MJP 13-MXS20 -0.029 11-CU -0.030 13-MXS25 -0.031 11-CXS -0.032 1 2 3 4 1 2 3 4 Piping length (m) Piping length (m) Back matter 6 Akihabara UDX 15F, 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101

[July 2018] 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL http://www.smcworld.com Note: Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 2009-2018 SMC Corporation All Rights Reserved No.PF-OMM0005-N