DIGITAL FLOW SWITCH, DIGITAL FLOW SWITCH, F27, 103 lb

Please contact us for the latest version.sales@ocaire.com, CYL, FREE MT, W/VACUUM, ACTUATOR, ZCU COMPACT CYLINDER, EE, 10MM ZCU DBL-ACT AUTO-SW, .40417 lb, ModelBore size (mm)Cylinder stroke (mm) 510152025304050ZC(D)UKC1063(68)69(79)75(85)81(91)87(97)93(103)??

Please contact us for the latest version.sales@ocaire.com, CYL, FREE MT, W/VACUUM, ACTUATOR, ZCU COMPACT CYLINDER, GE, 16MM ZCU DBL-ACT AUTO-SW, .44958 lb, ModelBore size (mm)Cylinder stroke (mm) 510152025304050ZC(D)UKC1063(68)69(79)75(85)81(91)87(97)93(103)??

Please contact us for the latest version.sales@ocaire.com, CYL, FREE MT, W/VACUUM, ACTUATOR, ZCU COMPACT CYLINDER, HE, 20MM ZCU DBL-ACT AUTO-SW, .88184 lb, ModelBore size (mm)Cylinder stroke (mm) 510152025304050ZC(D)UKC1063(68)69(79)75(85)81(91)87(97)93(103)??

Please contact us for the latest version.sales@ocaire.com, CYL, FREE MT, W/VACUUM, ACTUATOR, ZCU COMPACT CYLINDER, HE, 20MM ZCU DBL-ACT AUTO-SW, 1.98416 lb, ModelBore size (mm)Cylinder stroke (mm) 510152025304050ZC(D)UKC1063(68)69(79)75(85)81(91)87(97)93(103)??

Please contact us for the latest version.sales@ocaire.com, CYL, FREE MT, W/VACUUM, ACTUATOR, ZCU COMPACT CYLINDER, HE, 20MM ZCU DBL-ACT AUTO-SW, 1.21277 lb, ModelBore size (mm)Cylinder stroke (mm) 510152025304050ZC(D)UKC1063(68)69(79)75(85)81(91)87(97)93(103)??

Clean Air Module

58 70 SF 1 A Valve open and locked position 508 10 10 SFD 95 (Lever operating direction) Max. 132 Connection part Rc 3/8 (NPT 3/8) LLB LLB A Hand valve Valve closed position AD Air operated valve 3.5 GD Clean regulator With flow adjuster Pressure outlet port Rc 1/8 One-touch fitting 12 Digital flow switch PA pilot port Rc 1/8 Restrictor (36.5) Clean air filter Note) One-touch fitting 12 103

0.01

Throttle needle SUP port SUP port Rc, NPT, G 1/4 P U L L Rc, NPT, G 1/4 6 118 143 144 0.1 0.1 0 MP 0 178 162 DIN connector 64.4 Manual lock DIN connector 25 43.6 41.6 Conduit terminal 82 Conduit terminal 97 With regulator + 2 port solenoid valve With 2 port solenoid valve SUP port on the right 97 Conduit terminal 82 Conduit terminal DIN connector DIN connector 0 T E S 9 0.3 133 128 0.4 103

0.5

Fine particles are generated due to wear of emitters and motor sliding during operation. 26 IZF10/IZF10R Series Dimensions 96 82 80 79 39 37 110 121 96.5 94 103 Holding bolt Bracket 60.3 6.5 46 1 Power supply switch LED indicators Balance adjustment trimmer IZF10R 98.9 Air flow adjustment switch 64.1 Without bracket (39) 30 3 x 5.5 through 33.5 1.5 4 23 25 24.5 (46) 50 12.5 66.8 5.5 5.5 30

Nozzle Type Ionizer

120 40 60 20 80 100 Flow rate [L/min (ANR)] Ionizer 21 Made to Order IZN10E Series Dimensions Energy saving static neutralization nozzle IZN10E-01-X367 (107) 16 92.5 5 9.5 12 Variable nozzle direction 46 3.5 A 18.5 6 11 6 A 12.4 8 5 6 A-A 27.7 40 M3 x 0.5 thread depth 4 (Ground terminal) 86.4 Air blow port 8 6 2 x M3 x 0.5 thread depth 10 26 34.7 11 High flow rate nozzle IZN10E-02-X367 (103

Clean One-touch Fittings For Driving Air Piping KPQ/KPG Series

Relation between Operating Temperature and Maximum Operating Pressure Particulate Generation Classifications 105 1.2 Particle concentration (Particles/m3) Maximum operating pressure MPa ISO class 6 1.0 104 ISO class 5 0.8 103 ISO class 4 0.6 102 ISO class 3 0.4 10 0.2 0.1 0.5 1 1 0 -5 0 20 40 60 Operating temperature C Particle diameter (m) Note) Refer to SMC Pneumatic Clean Series (CAT.E02

KT10

MPa) 100 to 10 psig (0.7 to 69 MPa) Operating Parameters Delivery pressure Gas Source pressure Select compatible materials of construction for the gas SS body (Material code C or S): 69 MPa (10 psig) 2), Brass body (Material code B): 41.4 MPa (6000 psig) 750 psig (5.1 MPa) 1200 psig (8.2 MPa) 2250 psig (15.5 MPa) 3750 psig (25.8 MPa) 6000 psig (41.4 MPa) 9000 psig (62.1 MPa) 15000 psig (103

Suction Filter with Case FH99 Series

M16 x 2 Thread depth 30 M16 x 2 Thread depth 30 280 145 140 273 210 80 120 130 78 78 130 20 5 20 4B Weight (kg) S T U V W X Model Threaded without flange With flange FH990-04 FH990-06 FH990-08 FH990-10 FH990-12 FH990-16 FH991-20 FH991-24 FH991-28 FH991-32 23 M8 x 1.25 Thread depth 8 35 6 84 180 2.4 3.4 28 35 M8 x 1.25 Thread depth 8 50 8 91 240 3.6 5.0 44 50 M8 x 1.25 Thread depth 9 62 10 103

Series AP3500

Vespel is a registered trademark of DuPont. 103 Air operated type (For high pressure) Diaphragm Valve for Ultra High Purity Series AP3000 Suitable for UHP gas supply line Body material: 316L SS secondary remelt Pneumatically actuated normally closed High pressure type: Max. 3000 psig (20.7 MPa) LOTO option available as an option Indicator switch available as an option How to Order (Inlet)

Manifold Regulator ARM1000/2000 Series

plug) IR IRV VEX SRH (Pitch) IN (Individual IN) IN (Common IN) SRP SRF Symbol Model Dimensions ITV C 34 43 D 21 28 E 18 27 F 56 70 G 16 20 H 9 11.5 J 18 24 K 19 28 M 52 66 P 9 11.5 Q 11.5 16.5 R 4.8 4.8 A 4.5 4.5 B 25 34.5 ARM1000 ARM2000 IC ITVH Dimensions by the Number of Stations Manifold stations (n) ITVX Model Symbol 1 36 27 48 39 2 55 46 76 67 3 74 65 104 95 4 93 84 132 123 5 112 103

AS-FPQ/AS-FPG

Operating Pressure Particle Generation Classification Flow Direction Symbols on Body 105 1.2 Particle concentration (particles/m3) Meter-out type Meter-in type ISO Class 6 Max. operating pressure MPa 1.0 104 Indication symbol ISO Class 5 0.8 103 ISO Class 4 0.6 102 ISO Class 3 Symbol 0.4 10 0.2 0 0.1 0.5 1 1 -5 0 20 40 60 Operating temperature C Particle diameter (m) Note) Refer to back page

Series 12-CY3B Magnetic rodless cylinder ø15, ø20, ø25, ø32, ø40

D X NA R Mounting nut N W K N F S + Stroke F ZZ + Stroke H B E G Mounting nut NN NA F N 12CY3B15 (mm) L 57 66 70 80 92 J 6 6 8 8 10 K 11 8 10 15 16 I 12 15 18 23 G 5.5 7.5 7.5 8 11 H 13 20 20.5 22 29 F 10 13 13 16 16 E 2 2 2 2 3 NN M10 x 1 M20 x 1.5 M26 x 1.5 M26 x 1.5 M32 x 2 D 16.6 21.6 26.4 33.6 41.6 MM M4 x 0.7 M4 x 0.7 M5 x 0.8 M6 x 1 M6 x 1 B 35 36 46 60 70 N 11 18 18.5 20 26 ZZ 103

AS-FPQ/AS-FPG

Operating Pressure Particle Generation Classification Flow Direction Symbols on Body 105 1.2 Particle concentration (particles/m3) Meter-out type Meter-in type ISO Class 6 Max. operating pressure MPa 1.0 104 Indication symbol ISO Class 5 0.8 103 ISO Class 4 0.6 102 ISO Class 3 Symbol 0.4 10 0.2 0 0.1 0.5 1 1 -5 0 20 40 60 Operating temperature C Particle diameter (m) Note) Refer to back page

AS-FPQ/AS-FPG

Operating Pressure Particulate Generation Grade Classifications 1.2 104 Average particle concentration Particles/ft3 Max. operating pressure MPa Grade 4 1.0 103 0.8 Grade 3 102 0.6 101 Grade 2 100 0.4 Grade 1 10-1 0.2 0 5 0 20 40 60 1 0.1 0.2 Particle size m or less 0.3 0.5 Operating temperature C 15-17-3 4 Series AS-FPQ/FPG How to Order AS 2 1 1 2 F P Q 01 06 Body size 1 2 3 4 M5 standard

C95Series

HI , 32 7 0 43 78 t 40 '8 0 43 82.5 SO 8 0 43 87.5 63 23 0 43 94 80 13 0 43 103 100 23 0 43 11 3.5 0syC 19 Series C95 MounUng AccesSOt'ies Part number rri~~ Pescriptlot) , . _,C9S1132 C95ia40 /, C95850 C951163 / C9511180 C951l1100 Tmnniol'lIncuitilgbl'acllet Nae'l MB-S03 MB-S04 MB-S06 MB-S10 fMoo.m; pI!