VXA21/22

* VXA213 0 2 VXA223 VXA224 VXA225 0 2 .!* / 0 0 2 0 2 2( VXA226 0 2 17-3-93 2 The VX series will be revised shortly. Series VXA21/22 Normally Closed (N.C.), Normally Open (N.O.) Fluid JIS Symbol N.C.

VXP21/22/23

-8/ 2 0 # 7 -. ,. 8/ 2 0 ( 7 8 7 # 7 # 7 2 0 -8 73 2 0 # ./ Material VXP227 VXP238 VXP239 2 0 ,,. 8/ 8/ ./ ./ 2 0 ! "#! &*)! '$()! $%&' 2 0 17-3-43 2 The VX series will be revised shortly. Series VXP21/22/23 Normally Closed (N.C.)

Multistage Ejector Series ZL112/212 1

0 Misc.

45

ADDRESS 4632 4632 4632 1 1 1 9 9 9 PW LRUN ON POWER ALARM COMM Name of terminal block, LED Note Cable wiring 2 2 2 1 ON 8 8 8 O N 3 3 3 7 7 7 4632 4 4 4 6 6 6 SD RD LERR. 5 5 5 POWER SEND x 10 x 1 1 2 3 4 5 6 7 8 OFF DG 24 V 0 V D G D G 0 V 24 V 24 V 0 V A B SG FG 0 V 24 V 24 V 0 V +24V 24G DA DB FG Description LED ON for SI unit power supply input Description LED Description LED POWER COMM

45

ADDRESS 4632 4632 4632 1 1 1 9 9 9 PW LRUN ON POWER ALARM COMM Name of terminal block, LED Note Cable wiring 2 2 2 1 ON 8 8 8 O N 3 3 3 7 7 7 4632 4 4 4 6 6 6 SD RD LERR. 5 5 5 POWER SEND x 10 x 1 1 2 3 4 5 6 7 8 OFF DG 24 V 0 V D G D G 0 V 24 V 24 V 0 V A B SG FG 0 V 24 V 24 V 0 V +24V 24G DA DB FG Description LED ON for SI unit power supply input Description LED Description LED POWER COMM

Series VQ1000 Body Ported Plug Lead Unit: Cassette Type For details about certified products conforming to international standards, visit us at www.smcworld.com.

Use the manifold specification sheet to specify. 0 1 2 3 4 5 6 7 8 9 0 1 2 3 4 5 6 7 SI unit output no. SI unit output no.

Speed Controller: Standard Type Series AS In-line Type

How to Order T 01 S AS 2 0 0 2 JIS Symbol Tamper proof Note) Speed controller requires a special tool for flow adjustment. Order separately with part number, AS-T-1. With seal Note) When connecting port is either M5 or 10-32 UNF thread, it is not available with seal. With gasket is provided as standard.

VQ7-6/7-8

0 !0 t t r i u w y e q r i w e q VQ7-8-FG-DVQ7-8-FG-D-R !0 !0 t t r i w y e q r i w e q VQ7-8-D-R FHG FJG FIG VQ7-8-DFHG FJG FIG !0 !0 t t r i w y e q r i w e q VQ7-8-FPG-D!0 t r i w y e q o Replacement Parts (For valve) Description VQ7-8-FG-SVQ7-8-FG-DVQ7-8-FPG-DVQ7-8-FG-S-R VQ7-8-FG-D-R VQ7-8--D-R VQ7-8--DNumber q w e r t y u i o !

ITV_D-E

O R LESS H YSTERESI S 0. 5% F. S. O R LESS PREPEATABI LI TY 0. 5% F. S. O R LESS SEN SI TI VI TY 0. 2% F. S.

Digital Pressure Switch

Press the or button in function selection mode to display [F 0]. Press the button. Move on to display unit selection. Display unit selection Press the or button to select the display unit. Press the button to set. Return to function selection mode. [F 0] Units selection function completed Available display unit and minimum set value Part No.

PSxx-OML0002CN

-25No.PS-OML0002CN-G [F 0] (kPa/MPa) <> [F 0] ZSE ZSE [F 0] ZSE30AF ZSE30A ISE30A MPa 0.001 0.001 0.001 kPa 0.1 0.1 1 kgf/cm 2 0.001 0.001 0.01 bar 0.001 0.001 0.01 psi 0.01 0.01 0.1 InHg 0.1 0.1 mmHg 1 1 -26No.PS-OML0002CN-G [F 1] OUT1 OUT1 ONON OUT1ON,OFF 29 <> [F 1] 22 [P_1] [n_1]"P""n" [P_1] [P1L][P1H] -27No.PS-OML0002CN-G ON OFF ON OFF [F 1] OUT1 1 2 2 -28No.PS-OML0002CN-G

Compact Rotary Actuator Rack-and-Pinion Type/Sizes: 10, 15, 20, 30, 40 Series CRQ2

Sizes 10, 15 Sizes 20, 30, 40 Angle adjustment 5 Angle adjustment 5 Angle adjustment 5 Angle adjustment 5 Angle adjustment 5 Angle adjustment 5 Flat Key Port B Port B 0 0 0 0 0 19 1 1 0 to to to 19 0 Port A 0 0 8 8 Port A to e 17 at g 0 n fl ra e 17 of ng n o e at ra ti g ta n fl ra ro on of e n Angle adjustment 5 Angle adjustment 5 ov io ti at e o ta gr ot ng R ey ro K ra ve n oo io at

Regulator for 2 MPa ARX 20

0 100 200 300 400 500 600 700 800 900 1000 0 0 100 200 300 400 500 600 700 800 900 1000 Flow rate l/min(ANR) Flow rate l/min(ANR) ARX21-01 ARX21-02 0.35 0.35 0.30 0.30 Downstream pressure MPa Downstream pressure MPa 0.25 0.25 0.20 0.20 0.15 0.15 0.10 0.10 0.05 0.05 0 0 50 100 150 200 250 300 350 400 450 500 0 0 50 100 150 200 250 300 350 400 450 500 Flow rate l/min(ANR) Flow rate l/min(ANR

Rotary Cylinder Series MRQ

0 !1 !2 !3 !4 !5 !6 !7 !8 !

Filter Regulator IW Series

0 100 300 400 200 500 0 0 100 300 400 200 500 Flow rate [L/min(ANR)] Flow rate [L/min (ANR)] IW215 Flow rate characteristics IW222 Flow rate characteristics Supply pressure: 0.7 MPa 0.5 0.45 0.4 0.35 0.3 0.25 0.2 0.15 0.1 0.05 0 0 100 300 400 200 600 500 Supply pressure: 0.5 MPa 0.25 0.2 Set pressure [MPa] Set pressure [MPa] 0.15 0.1 IP 0.05 IW IW 0 0 100 300 400 200 500 Flow rate [L/min(

INFORMATION Step Motor Controller 5 types of communication protocols New New

Movement mode Speed Position Acceleration Deceleration Pushing force Trigger LV Pushing speed Moving force Area 1 Area 2 In position 0 1: Absolute 100 10 3000 3000 0 0 0 100 0 0 0.50 1 1: Absolute 100 100 3000 3000 0 0 0 100 0 0 0.50 Sequence 1: Servo ON instruction Sequence 2: Instruction to return to origin Sequence 3: Specify step data No. 0 to input the DRIVE

KT10

0.0 0 10 20 30 Flow rate (slpm, N2) 4.30 (109.2) 3.25 (82.6) Clearance For Panel Mounting KT12HF 2000 psig (13.8 MPa) Inlet pressure: 1000 psig (6.9 MPa) 11.0 1600 9.7 1400 Delivery pressure (MPa) Delivery pressure (psig) 8.3 1200 2.97 (75.4) 6.9 1000 800 5.5 2.22 (56.4) 600 4.1 0.28 (7.1) 400 2.8 200 1.4 0 0.0 0 10 20 30 40 50 Flow rate (slpm, N2) 2.80 (71.1) Viton is a registered trademark

Compressed Air Preparation Filter

10 11 12 0 0 5 6 7 8 0 1 2 3 4 0 2 4 6 8 1 3 5 7 9 10 12 14 11 13 15 16 0 2 1 3 4 5 6 7 8 9 Air flow rate [m3/min (ANR)] Air flow rate [m3/min (ANR)] Air flow rate [m3/min (ANR)] 6 AFF/AM/AMD Series Micro Mist Separator AMD Series Standard Specifications Model AMD70D AMD80D AMD90D Fluid Compressed air Operating pressure range [MPa] 0.1 to 1.0 Ambient and fluid temperatures [C] 5 to 60 (No

Speed Controller with Indicator In-line Brass Stainless steel Electroless nickel plated In-line Type “Made to Order” “Made to Order” section has been added. Pages 3, 8 section has been added. ¡Lubricant: Vaseline -X12 The numerical indication of ¡Greas

AS2052FS AS1002FS AS2002FS Inlet pressure: 0.5 MPa 500 Inlet pressure: 0.5 MPa 100 08, 09 Inlet pressure: 0.5 MPa 06, 07 01, 23, 03, 04, 06, 07 Flow rate [L/min(ANR)] Flow rate [L/min(ANR)] Flow rate [L/min(ANR)] 200 400 06, 07 03, 04 300 50 100 200 100 0 0 5 10 0 0 5 10 0 0 5 10 Number of needle rotations Number of needle rotations Number of needle rotations AS3002FS AS4002FS Inlet pressure

CJ2X/CUX/CQSX/CQ2X/CM2X

0 CE2 Operating direction IN Operating direction OUT 2.0 2.0 Clean gas filter Operating direction IN Operating direction OUT 1 ML2B 60 Clean bench (Class 100) 40 Displacement waveform C J G5-S 0.1 Supply rate 28.3 l/min Exhausted by relief port Displacement waveform 20 20 20 sec. 20 sec. 0 CV 0 Laser dust monitor (intake rate 28.3 l/min) 0.01 0.01 0.1 1 10 Particle diameter (m) Time Time