Cooling Method: W (Water-cooled Refrigeration), Pipe Thread: N (NPT, w/Rc-NPT Conversion Fitting), Power Supply: 20 (3-phase 200 VAC, 50Hz; 3-phase 200 to 230 VAC, 60Hz), Option: M (Applicable to Deionized Water Piping)
Rated Flow Range: 05 (0.05 to 5 L/min), Flow Adjustment Valve: None (Straight), Port Size: C4 (ΓΈ4), Output Specification: B (Out 1: PNP; Out 2: PNP), Lead Wire: Lead Wire w/Connector, Unit Specification: M (SI Unit Only)
.; Release Valve: N.C.), Rated Voltage: 5 (24VDC), Light/Surge Voltage Suppressor: U (Light: Yes; Surge Voltage Suppressor: Yes; Common Spec: Non-polar), Pressure Sensor: T1 (-100 to 100 KPa), Option: M [Plug for Individual Supply, (Blocking the Air Supply Passage to D Side)]
.; Release Valve: N.C.), Rated Voltage: 5 (24VDC), Light/Surge Voltage Suppressor: U (Light: Yes; Surge Voltage Suppressor: Yes; Common Spec: Non-polar), Pressure Sensor: T2 (-100 to 200 KPa), Option: M [Plug for Individual Supply, (Blocking the Air Supply Passage to D Side)]
.; Release Valve: N.C.), Rated Voltage: 5 (24VDC), Light/Surge Voltage Suppressor: U (Light: Yes; Surge Voltage Suppressor: Yes; Common Spec: Non-polar), Pressure Sensor: T2 (-100 to 200 KPa), Option: M [Plug for Individual Supply, (Blocking the Air Supply Passage to D Side)]
.; Release Valve: N.C.), Rated Voltage: 5 (24VDC), Light/Surge Voltage Suppressor: U (Light: Yes; Surge Voltage Suppressor: Yes; Common Spec: Non-polar), Pressure Sensor: T1 (-100 to 100 KPa), Option: M [Plug for Individual Supply, (Blocking the Air Supply Passage to D Side)]
.; Release Valve: N.C.), Rated Voltage: 5 (24VDC), Light/Surge Voltage Suppressor: U (Light: Yes; Surge Voltage Suppressor: Yes; Common Spec: Non-polar), Pressure Sensor: T2 (-100 to 200 KPa), Option: M [Plug for Individual Supply, (Blocking the Air Supply Passage to D Side)]
.; Release Valve: N.C.), Rated Voltage: 5 (24VDC), Light/Surge Voltage Suppressor: U (Light: Yes; Surge Voltage Suppressor: Yes; Common Spec: Non-polar), Pressure Sensor: T1 (-100 to 100 KPa), Option: M [Plug for Individual Supply, (Blocking the Air Supply Passage to D Side)]
.; Release Valve: N.C.), Rated Voltage: 5 (24VDC), Light/Surge Voltage Suppressor: U (Light: Yes; Surge Voltage Suppressor: Yes; Common Spec: Non-polar), Pressure Sensor: T2 (-100 to 200 KPa), Option: M [Plug for Individual Supply, (Blocking the Air Supply Passage to D Side)]
.; Release Valve: N.C.), Rated Voltage: 5 (24VDC), Light/Surge Voltage Suppressor: U (Light: Yes; Surge Voltage Suppressor: Yes; Common Spec: Non-polar), Pressure Sensor: T1 (-100 to 100 KPa), Option: M [Plug for Individual Supply, (Blocking the Air Supply Passage to D Side)]
.; Release Valve: N.C.), Rated Voltage: 5 (24VDC), Light/Surge Voltage Suppressor: U (Light: Yes; Surge Voltage Suppressor: Yes; Common Spec: Non-polar), Pressure Sensor: T2 (-100 to 200 KPa), Option: M [Plug for Individual Supply, (Blocking the Air Supply Passage to D Side)]
.; Release Valve: N.C.), Rated Voltage: 5 (24VDC), Light/Surge Voltage Suppressor: U (Light: Yes; Surge Voltage Suppressor: Yes; Common Spec: Non-polar), Pressure Sensor: T2 (-100 to 200 KPa), Option: M [Plug for Individual Supply, (Blocking the Air Supply Passage to D Side)]
.; Release Valve: N.C.), Rated Voltage: 5 (24VDC), Light/Surge Voltage Suppressor: U (Light: Yes; Surge Voltage Suppressor: Yes; Common Spec: Non-polar), Pressure Sensor: T1 (-100 to 100 KPa), Option: M [Plug for Individual Supply, (Blocking the Air Supply Passage to D Side)]
.; Release Valve: N.C.), Rated Voltage: 5 (24VDC), Light/Surge Voltage Suppressor: U (Light: Yes; Surge Voltage Suppressor: Yes; Common Spec: Non-polar), Pressure Sensor: T1 (-100 to 100 KPa), Option: M [Plug for Individual Supply, (Blocking the Air Supply Passage to D Side)]
.; Release Valve: N.C.), Rated Voltage: 5 (24VDC), Light/Surge Voltage Suppressor: U (Light: Yes; Surge Voltage Suppressor: Yes; Common Spec: Non-polar), Pressure Sensor: T1 (-100 to 100 KPa), Option: M [Plug for Individual Supply, (Blocking the Air Supply Passage to D Side)]
.; Release Valve: N.C.), Rated Voltage: 5 (24VDC), Light/Surge Voltage Suppressor: U (Light: Yes; Surge Voltage Suppressor: Yes; Common Spec: Non-polar), Pressure Sensor: T2 (-100 to 200 KPa), Option: M [Plug for Individual Supply, (Blocking the Air Supply Passage to D Side)]
.; Release Valve: N.C.), Rated Voltage: 5 (24VDC), Light/Surge Voltage Suppressor: U (Light: Yes; Surge Voltage Suppressor: Yes; Common Spec: Non-polar), Pressure Sensor: T2 (-100 to 200 KPa), Option: M [Plug for Individual Supply, (Blocking the Air Supply Passage to D Side)]
.; Release Valve: N.C.), Rated Voltage: 5 (24VDC), Light/Surge Voltage Suppressor: U (Light: Yes; Surge Voltage Suppressor: Yes; Common Spec: Non-polar), Pressure Sensor: T2 (-100 to 200 KPa), Option: M [Plug for Individual Supply, (Blocking the Air Supply Passage to D Side)]
.; Release Valve: N.C.), Rated Voltage: 5 (24VDC), Light/Surge Voltage Suppressor: U (Light: Yes; Surge Voltage Suppressor: Yes; Common Spec: Non-polar), Pressure Sensor: T1 (-100 to 100 KPa), Option: M [Plug for Individual Supply, (Blocking the Air Supply Passage to D Side)]
.; Release Valve: N.C.), Rated Voltage: 5 (24VDC), Light/Surge Voltage Suppressor: U (Light: Yes; Surge Voltage Suppressor: Yes; Common Spec: Non-polar), Pressure Sensor: T2 (-100 to 200 KPa), Option: M [Plug for Individual Supply, (Blocking the Air Supply Passage to D Side)]