Solenoid Valve (with M Connector) Conforming to ISO 15407-1 Series EVS1-01, 1-02

5 (R1) 3 (R2) Side-ported 1/8 (A) 4 (B) 2 Side-ported 1/4 FHG Number of solenoids 1 (P) 5 (R1) 3 (R2) Sealing type S D (A) 4 (B) 2 Single Nil R Metal seal Double FJG Rubber seal 1 (P) 5 (R1) 3 (R2) Rated coil voltage (A) 4 (B) 2 Option 3 4 24VDC FIG 12VDC Nil None 1 (P) 5 (R1) 3 (R2) Voltage other than above (50VDC or less) Indicator light with surge voltage suppressor 9 Z A02 VS1 01

DOC1023125

(Unit: %) H 140 80 80 Sets the position loop P constant. *Please perform the actuator operation after changing this parameter setting under the responsibility of the user. Position loop P constant A 140 110 110 1 to 200 B 100 80 80 C 110 80 80 H 80 140 140 Sets the speed loop P constant.

Series AP3500

Please refer to P.125. Specifications AP3200 Normally closed (N.C.)

SRP

P-80 (YG)

SRP

P-80 (YG)

RZQ

RB RZQ Mounting Bolt J C CR D 110 135 160 120 145 170 130 155 180 135 160 185 CH Model RZQB32-25RZQB32-50RZQB32-75RZQB40-25RZQB40-50RZQB40-75RZQB50-25RZQB50-50RZQB50-75RZQB63-25RZQB63-50RZQB63-75Mounting bolt M5 x 110l M5 x 135l M5 x 160l M5 x 120l M5 x 145l M5 x 170l M6 x 130l M6 x 155l M6 x 180l M8 x 135l M8 x 160l M8 x 185l D9.5 8 -X 10 8.5 20Data 16.5 11.5 3 17.5 12.5 3.5 10-10-5 6

SY3000/5000/7000/9000 Series (Pilot Valve:V100)

Applied voltage When connecting fittings to valves, tighten as indicated below. 1) M3, M5 types 1. When using SMC fitting, follow the guidelines below. After tightening by hand, tighten an additional 1/4 (M3), 1/6 (M5) turn with a tightening tool. However, if miniature fittings are used, tighten an additional 1/4 turn with a tightening tool after tightening by hand.

Electric Actuator / Slider Type 《 AC Servo Motor 》

rev) n [Type of Motor: S6,S7,S8] Absolute 18bit encoder (Resolution: 262144 p/rev) Encoder [Type of Motor: T6,T7,T8] [With LECSB-T/LECSS-T] Absolute 22bit encoder (Resolution: 4194304 p/rev) [With LECSC-T] Absolute 18bit encoder (Resolution: 262144 p/rev) Type Note 5) No excitation operating type unit Lock spec Holding force [N] 78 131 255 131 197 385 220 330 660 Power consumption [W] at

GA342

8.4 NO X X PE NC 30.5 30.5 116.1 98.6 91.6 91.6 2(A) 3(R) 66.8 57.6 1(P) 43.8 43.8 34 34 71 (P port) Rc 1/2, 3/4, 1 (R port) Rc 1/2, 3/4, 1 (A port) Rc 1/2, 3/4, 1 5-5-12

5 Port Solenoid Valve Body Ported Series VQZ1000/2000/3000 Plug Lead Unit Single Unit [Option] Made to Order How to Order Valve (For details, refer to page 975.) SJ VQZ 1 1 2 5 M 1 C6 1 SY CE compliant IP65 compliant Series SV — — Nil Nil 1 VQZ1000 body w

SZ Type of actuation 2 position single 3 position pressure center Port size [4(A), 2(B) port] VP4 (A) 4 (B) 2 (A) 4 (B) 2 Note 1) 5 VQZ3000 VQZ2000 VQZ1000 Symbol Port size 1 C3 C4 C6 C8 C10 M5 02 3.2 one-touch fitting 4 one-touch fitting 6 one-touch fitting 8 one-touch fitting 10 one-touch fitting M5 thread Rc 1/4 1 (P) 3 (R2) 5 (R1) 5 (R1) 1 (P) 3 (R2) S0700 2 position double 3 port for

PFxx-OMK0003CN

PF-OMK0003CN-E 11.5mm , , , , IN 500kPa /KQ2 mm KQ2H04-M5 KQ2S04-M5 4 M50.8 KQ2L04-M5 /KJ mm KJH04-M5 KJS04-M5 4 M50.8 KJL04-M5 /M mm 4 M-5AN-4 M50.8 6 M-5AN-6 -16No. PF-OMK0003CN-E FG DC(+) OUT() DC(-) 15V 1k -17No. PF-OMK0003CN-E DC(+)DC(+) (OUT1) IN (20 ) -18No.

ZSE1/ISE1

x 0.8 depth 5 Piping port M5 x 0.8 depth 5 Piping port 2-3.5 Mounting hole T1: NPTF 1/8 01: R 1/8 13 13 16-6-5

New New Process Gas Diaphragm Valve For wide variety of applications from semiconductor to general. Multiple port available in various configurations Compression, Rc, R, NPT Cleaned for O2 service Air Operated Type Series AK3542/4542  Compact and light

The connection M5 thread. Tighten thread to recommended torque value. 3. After installation, check internal leakage (leakage across seat) with inert gases. Perform a helium leak test depending on applications. Maintenance Warning 1.

Compact Pressure Switch Series ZSE1 (For Vacuum)/ISE1 (For Positive Pressure)

x 0.8 depth 5 Piping port 2 x 3.5 Mounting hole T1: NPTF 1/8 01: R 1/8 M5 x 0.8 depth 5 Piping port 2 x 3.5 Mounting hole T1: NPTF 1/8 01: R 1/8 13 13 777

3 Position Cylinder Series RZQ

RZQB32-25RZQB32-50RZQB32-75RZQB40-25RZQB40-50RZQB40-75RZQB50-25RZQB50-50RZQB50-75RZQB63-25RZQB63-50RZQB63-75M5 x 110 L 110 M5 x 135 L 8 9.5 135 M5 x 160 L 160 RZQ32-12-S7515 2 pcs. M5 x 120 L 120 M5 x 145 L 8.5 10 145 M5 x 170 L 170 M6 x 130 L 130 JIS flat washer M6 x 155 L 155 11.5 16.5 3 Nominal size 6 M6 x 180 L 180 4 pcs.

Smooth Vent Valve

x 0.8 Weight (kg) 0.5 Dimensions 40 Not available to mount 40 Holding screw for main air supply (M2.5) 16 Main air suppy flow adjustment screw Initial air supply flow adjustment nut 11 Holding screw for initial air supply (M5) 82.5 9 MODEL M port M5 x 0.8 PRESS. 0.2MPa~10Pa 0.4~0.7MPa OPERATING PRESS IN Main air supply valve port TEMP. 5~60C S port M5 x 0.8 Initial air supply valve port

CJ2Q

Bore d C B H NTJ-015A 10 16 8.1 9.2 7 8 3.2 4 M4 X 0.7 NTJ-010A M5 X 0.8 * Refer to p.1.3-12 for details of the mounting nut. (mm) ND NN Bore 10 16 A B C D F GA GB H MM NA NB S Z 0 0.022 0 0.022 15 12 14 4 8 8 5 28 M4 X 0.7 12.5 9.5 M8 X 1.0 46 74 75 8 15 18 20 5 8 8 5 28 M5 X 0.8 12.5 9.5 M10 X 1.0 47 10 Refer to p.1.3-8 to 1.3-10 for dimensions of each mounting bracket.

KK/KK13

P-80 (D)

3 Port Solenoid Valve Series VQZ100/200/300 Single Unit [Option]

Option (A) 2 1 Nil: F: None With bracket 1 (P) 3 (R) Body type Bracket Function AC Symbol Specifications DC Port size [2(A) port] (0.35 W) p (0.9 W) p Note 3) Nil p Standard C3 C4 C6 M5 3.2 one-touch fitting 4 one-touch fitting 6 one-touch fitting M5 thread (Replaceable type) R Note 1, 2) K Note 1) High pressure type p p External pilot type KR Note 1, 2) (0.9 W) p High pressure/External

Digital Pressure Switch

2.00 to -5.00 to -10.00 to Pressure spec. 1.000 kPa 2.00 kPa 5.00 kPa 10.00 kPa Display/Set pressure range -525 to 525 Pa -1.050 to -2.10 to -5.25 to -10.50 to 1.050 kPa 2.10 kPa 5.25 kPa 10.50 kPa Display/Min. setting unit 1 Pa 0.001 kPa 0.01 kPa 0.01 kPa 0.01 kPa Proof pressure 2.5 kPa 5 kPa 10 kPa 25 kPa 50 kPa Electrical Power supply voltage 12 to 24 VDC (10%), and power supply ripple (p-p