Vacuum Unit

Y1 None Cannot be selected when e is P , T, or N Port exhaust B Port exhaust Single unit N None When N is selected for e High-noise reduction silencer exhaust High-noise reduction silencer exhaust e Pressure switch for vacuum/Pressure sensor G Specifications NPN PNP With unit selection function3 2 outputs A Symbol Type Pressure range [kPa] Direct exhaust Complex exhaust2 V V B V None (SI

RSQ

B 48 52.5 54 N 5.5 5.5 6.6 O1 M6 x 1 M6 x 1 M8 x 1.25 R 10 10 14 Model RSQA32 RSQA40 RSQA50 These 3 figures show the piston rod extended.

Rotary Actuator/Vane Style Series CRB1

Key Position and Rotation Range Single vane type Double vane type 90 180 270 90 n o r ti n a r o a a ti n n a g n o t r g a ti o t n e a e o g t r o r e 2 1 r y y 7 9 8 y e e 0 0 e Key 0 K K K + 4 0 + 4 0 + 4 0 + 4 0 Key Key (45) 0 9 Standard Option Key e g n a r n o ti a t o r (90) y e K (45) (45) A port B port A port A port A port B port B port B port 100 190 280 100 n r a o n r a o

AC Servo Motor Driver ( ＳＳＣＮＥＴⅢ Type ）

LECSS (2 axis) (Note 7) SW1 CN1A (Note 8) SW2 CN1B 2 1 LE-CSS-S MR-J3-B (Note 7) LECSS (3 axis) (Note 6 ) SSCNET cable (option) SW1 CN1A SW2 (Note 8) CN1B 2 1 MR-J3-B (Note 7) LECSS (n axis) SW1 CN1A (Note 9) Cap SW2 (Note 8) CN1B 2 1 3 6 3.

AW

Clearance For Maintenance W E G A AC-B AA M J N F (2) P1 (Port Size) C B Q Q V IN OUT K P2 (Gauge Port Size) Bracket and Relief Valve (Optional) U Min.

air-filter-e

A B How to Order Standard Elements B 200 E N 002 Model Determination Element symbol Symbol Element seal material/Operating temperature range Element seal material Non-asbestos Fluororesin Operating temperature range(C) 0 to150 0 to120 A Note) T N V 4 A NBR FKM 0 to 80 Symbol Element material 0 to 120 Industrial Filters Replacement Procedure Actuators Modular F.R.L.

Air Preparation Equipment

A B How to Order Standard Elements B 200 E N 002 Model Determination Element symbol Symbol Element seal material/Operating temperature range Element seal material Non-asbestos Fluororesin Operating temperature range(C) 0 to150 0 to120 A Note) T N V 4 A NBR FKM 0 to 80 Symbol Element material 0 to 120 Industrial Filters Replacement Procedure Actuators Modular F.R.L.

4/5 Port Solenoid Valve Series SYJ3000/5000/7000

(Pitch) P = 10.5 For (Built-in one-touch fitting) C4 N3 For M5 14.5 Manual override 32.5 14.8 0.5 2.7 91.9 [96.3] 1/8 (P port) 78.8 [83.2] 10 A A A A A 53.9 [56.1] 54.7 [56.9] 31.7 25 25 P 35 P B B B B B 34.9 18.9 2-4.5 (For mounting) 4 L2 L1 (4.4) (Light/surge voltage suppressor) (Station n) (Station 1) (Station n) (Station 1) + + + + + (Light/surge voltage suppressor) + + + + + B B B B

Rotary Actuator/Vane Style Series CRB2

Single vane type Double vane type , 0 5 Chamfer +4 0 a a r r n n 9 0 n n e g g 0 o o g e e i i n t t 1 2 a a 0 a 8 7 t t r o o 1 +4 0 0 0 n R R o e +4 0 +4 0 i t g 0 a n 9 t o a e r R g n n o a ti r a n t o o R ti a t o R Chamfer Chamfer Chamfer Chamfer A port B port A port B port A port B port A port B port For size 40 actuators, a parallel keyway will be used instead of chamfer.

51

D-A9 30 Note 1) 15 5 (n = 2, 3, 4, 5) (n = 2, 4, 6) Note 3) (n 2) 2 35 + 35 (n 2) 20 + 35 D-M9V 35 20 5 (n = 2, 3, 4, 5) (n = 2, 4, 6) Note 3) (n 2) 2 25 + 35 (n 2) 15 + 35 D-A9V 25 15 5 (n = 2, 3, 4, 5) (n = 2, 4, 6) Note 3) (n 2) 2 D-M9WV D-M9AV 35 + 35 (n 2) 20 + 35 35 20 10 (n = 2, 3, 4, 5) (n = 2, 4, 6) Note 3) (n 2) 2 D-C7 D-C80 60 + 45 (n 2) 20 + 45 60 20 5 (n = 2, 3, 4, 5

Digital Flow Switch (Integrated display type) ( compatible)

PD intercept b F32 N 2012 0x07DC 0 R Temp. peak value S16 0 N 0xFF9C to 0x044C (-100 to 1100) Can be displayed only when a temperature sensor is connected. 2013 0x07DD 0 R Temp. bottom value S16 0 N Accumulated PDAccumulated value conversion factor = Current accumulated flow value 2021 0x07E5 0 R Accumulated PD U16 0 N 0x0 to 0x270F (0 to 9) -84No.PF-OMV0006-B 1: "R" means Read and "W" means

4/5 Port Solenoid Valve Rubber Seal Series SYJ3000 For details about certified products conforming to international standards, visit us at www.smcworld.com.

(Pitch) P = 10.5 For (Built-in One-touch fitting) C4 N3 For M5 14.5 Manual override 32.5 14.8 0.5 2.7 91.9 [96.3] 1/8 (P port) 78.8 [83.2] 10 A A A A A 53.9 [56.1] 54.7 [56.9] 31.7 25 25 P 35 P B B B B B 34.9 18.9 2-4.5 (For mounting) 4 L2 L1 (4.4) (Light/Surge voltage suppressor) (Station n) (Station 1) (Station n) (Station 1) + + + + + (Light/Surge voltage suppressor) + + + + + B B B B

3/5 Port Solenoid Valve Metal Seal/Rubber Seal Base Mounted VQZ1000/2000/3000

ass'y for 6 C8: One-touch fitting ass'y for 8 Residual pressure release manual override (33) (41.5) 1.5 2-Rc(PT)1/8, 1/4, C6, C8 C6: One-touch fitting ass'y for 6 C8: One-touch fitting ass'y for 8 B B B 2 2 2 A A A 45 65.5 4 4 4 B 25 2 A Dimensions Equation L1=22n+24 n: Station 17.5 37.5 (1.5) 7.5 4 L n 13 1 2 14 16 3 4 5 6 7 8 9 11 15 10 12 46 68 310 332 376 90 112 134 156 178 200 222 266

0.55

Conduit terminal: VP3185-T A B DIN terminal: VP3185-D A B Conduit terminal with indicator light (TL) Light Light position Max. 11 Applicable cable 6 to 12 [ ]: With indicator light (TL) 1500 Made to Order: Series VP3145/3165/3185 Main Valve Double Acting Type: -X80/X81 How to Order 1 D Z A N X 06 5 1 4 VP31 81 CE-compliant Body size CE-compliant Nil 4 6 8 1 2 Q Electrical entry: D/DO only

LEC-OM02904

MO1 1 1 LG 2 14 MO2 2 LE-CSS(6)SSCNET () SD 6 SSCNET CN1A SW1 2m 2m SW1 (8) SW2 CN1B 2 1 (1) MR-J3-B LECSS (2) (7) 2 SW1 CN1A (8) SW2 CN1B 2 1 LE-CSSMR-J3-B LECSS (3) (7) 3 (6) SSCNET () 6 SSCNET SW1 CN1A SW2 (8) CN1B 2 1 MR-J3-B LECSS (n) (7) n SW1 CN1A 9 (9) SW2 (8) CN1B 2 1 3 7 3 1.

IIIIIII

A B c D E F G H J K M N 4.37 : 1 1 1 1 3 . 1 5 (80) 1 . 1 0 (2Al 1.22 (31)0.06 (1.5) ',.12 {3) 1.57 (40) 1.06 (271 1.42 (36) 1.26 (321 1.20 30.5' ).2t (6) Millimeters in Parentheses F O,F 7.05 lbs (3 2 kg) T T 90' '75 PSIG (5 Kgflcm2) A B c D E F G H J K ll N A B c D E F G H J K M N o 4.5() 114.31 3.30 83.8) 1.25 t31.8 1.20 (30.5) 0.89 '22.5) 0.06 (1.s) ). 12 (3) 1.57 (40) .42 (36) 1 2 6

Electric Actuator

With lock L A (Table traveling distance) Note 1) 186 (B: With lock/226) 39 (64) Encoder cable (7) Stroke (66) 2o1 (4) 70 58 47 Lock cable (4.5) 6.7 35 Motor cable (6) 0 8H9 ( ) depth 6 B 30 +0.036 +0.036 0 8H9 ( ) depth 6 n x 6.8 13 140 79 200 C x 200 (=D) E 25 Note 1) Distance within which the table can move when it returns to origin.

NCQ8

Through-hole Both ends tapped Screw clearance hole, front mount Screw clearance hole, rear mount B A E N *Refer to page 36. Number of auto switches Nil S n 2 pcs. 1 pc. n pcs.

Dual Rod Cylinder Series CXSJ/CXS

M L Z I 1 G 0.2 (G) A H E F (Through) N N (I ) (L) (Z) (G) C CX2 NN CXW A B ZZ C D E M F G H I J K L N 2 x M4 x 0.7 with thread depth 6 2 x M4 x 0.7 with thread depth 6 2 x M5 x 0.8 with thread depth 7.5 2 x M5 x 0.8 with thread depth 7.5 NN Q R T U 2 x M5 x 0.8 with thread depth 4 2 x M5 x 0.8 with thread depth 4 2 x M5 x 0.8 with thread depth 4 2 x Rc1/8 with thread depth 5 SS Bore size

Rotary Table Vane Style Series MSU Size: 1, 3, 7, 20 1

Adjustment bolt (A) Adjustment bolt (B) For 90 rotation Single vane (S): 80 to 100 adjustable Double vane (D): 85 to 95 adjustable A B 180 Adjustment range of adjustment bolt (A) Adjustment range of adjustment bolt (B) 10 10 22.5 Size Allowable radial load (N) Allowable thrust load (N) Allowable moment (Nm) 1 10 15 20 0.3 A B Positioning pin hole 3 15 30 40 0.7 7 30 60 50 0.9 Adjustment bolt