Magnetically Coupled

Stroke Note 1) 50, 63: L 0 0.008 8-V Effective thread length Y H A B G H B G NN (R) NA Q N F I NA F N CC0.1 NCY3B50, 63 NCY3B6 to 15 (inch) Model Symbol L K J I H G F D A B NN C MM CC N NA P NCY3B6 NCY3B10 NCY3B15 NCY3B20 NCY3B25 NCY3B32 NCY3B40 NCY3B50 NCY3B63 1.38 1.50 2.24 2.60 2.76 3.15 3.62 4.50 5.00 0.19 0.19 0.37 0.31 0.38 0.51 0.56 1.00 1.00 0.16 0.18 0.24 0.24 0.31 0.31 0.39 0.47

Support Guide/11-LEFG Series

64 (102) 3H9 (+0.025 0 ) depth 3 4 x M5 x 0.8 thread depth 8.5 38 50 3.5 3H9 (+0.025 0 ) depth 3 A (Table traveling distance) L 51 (52) 10 10 58 38 48 38.5 (48) 26 24 n x 4.5 Vacuum port Rc1/8 48 120 F D x 120 (= E) B Dimensions [mm] Dimensions [mm] Model L A B n D E F 11-LEFG25-S-50 180 57 160 4 20 11-LEFG25-S-100 230 107 210 Model L A B n D E F 11-LEFG25-S-450 580 457 560 10 4 480 35

Large Flow Air Filter AF800/900 Series

Dimensions Option Port size A D OUT IN C B Metal bowl Metal bowl with level gauge Without drain cock B B B Drain cock barb fitting Drain cock thread piping With drain guide E Maintenance space B B B 1/4 Barb fitting Applicable tubing T0604 1/4 Width across flats 17 Option/Dimensions N.O N.C B (With auto drain) Model A B C D N.O N.C E AF800 AF900 150 200 408 488 33 46 140 170 448 528 448 528

XL-OMY0002

3 b b Nm a Nm 1 2 4 XLD-25 1.5 0.3 -40 2.5 -50 6 -63 6 -80 15 -100 20 -160 102 a M M0.2MPa b b O a 19 XL-OMY0002 Revision history 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL https://www.smcworld.com Note: Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 2020 SMC Corporation

4 Port Direct Operated Poppet Solenoid Valve Series VQ D1000

M plug connector (M) VQ D side U side VQ4 Stations 1 2 3 4 5 n Direct manual override VQZ (Non-locking) 2n-C4, M5 (A, B port) C4: 4 One-touch fitting M5: M5 thread VQD VZS 2(B) 2(B) 27.5 VFS 20 15 4(A) 4(A) 5 VS 46 12.5 P=11 VS7 L plug connector (L) n: Station Dimensions n L 2 39 31 3 50 42 4 61 53 5 72 64 6 83 75 7 94 86 8 105 97 9 116 108 10 127 119 11 138 130 12 149 141 13 160 152 14

Rotary One-touch Fittings Manifold Series KM

Series KM Rotary One-touch Fittings Manifold Construction KM11 KM12 Port A: One-touch fitting Port B: One-touch fitting Port A: One-touch fitting Port B: NPT or Rc (PT) female thread KM14 KM13 Port A: One-touch fitting Port B: One-touch fitting Port A: One-touch fitting Port B: One-touch fitting, R(PT) male thread KM16 KM15 Port A: One-touch fitting Port B: One-touch fitting stud Port A:

VZM400

3 EA EA y A A P P r q B EB B !4 EB !7 !1 !2 t Component Parts Aluminum alloy NBR Note No. !0 Description Material No. PBT ADC Material Note q Description Black zinc chromated Metallic plated Pilot body Body Piston guide B Valve Metallic plated !1 !2 w e Return spring Cushion Cushion Valve spring Return spring Piston B Head cover r Stainless steel Spool/sleeve Stainless steel ZDC !

Cylinder with Turntable Series MGT ø63, ø80, ø100 1

QQ section detail drawing CX DNotch spring force adjustment bolt 4-OA through L 4-MM depth ML QQ section 22.5 4-OB counterbore depth OL B-NN depth NL XX section -X Z WA 20Q 45 RA X0.02 Data RB RC T VB U X PW VA H NL HB HA: T groove for hex. bolt XAH7depth XL DB 2-P GB GA GC 6+0.05depth 6 o PB K J G (Plug) 30 S PA + Stroke C + Stroke FA FB SB SA FC B + Stroke A + Stroke AA + Stroke 60 Turntable

EtherNet/IP TM Compatible Fieldbus System

(See fig. b) 45 No.EX-OMS0014-A Separate power supply It is possible to provide a separate power supply to the SI unit and valves using a Y branch connector. Separate connector pin layout M12, 4 pin, plug No.

VT307

Flow Characteristics/Weight Flow characteristics 1 2 (P A) 2 3 (A R) 3 2 (R A) 2 1 (A P) Port size Weight Valve model Grommet C [dm 3/(sbar)] b Cv C [dm 3/(sbar)] b Cv C [dm 3/(sbar)] b Cv C [dm 3/(sbar)] b Cv VT307 VT307V (Vacuum spec. type) VT307E (Continuous duty type) VT307Y (Energy-saving type) VT307W (Energy-saving, Vacuum spec. type) VT307 VT307V (Vacuum spec. type) VT307E

VT325

Cv C [dm 3/(sbar)] b Cv C [dm 3/(sbar)] b Cv C [dm 3/(sbar)] b Cv VT325 VT325V (Vacuum spec. type) VT325 VT325V (Vacuum spec. type) 0.55 kg (For AC) 0.60 kg (For DC) Note) Values for a single valve unit.

3-Screen Display Multi-channel Digital Sensor Monitor Up to 4 pressure sensors can be connected!

A B PF3W504 0 4 PF3W520 0 16 PF3W540 0 40 PF3W511 0 100 Display A Set A and B to the values shown in the table on the left.

Turntable Cylinder Series MGT

c d e XAH7 XC XL (mm) X X0.02 a b c d e Bore size (mm) XX section detail drawing 63 80 100 11 17.8 10 7 18.5 13.3 20.3 12 8 22.5 2-R3 15.3 23.3 13.5 10 30 8 6+0.05 0 6 WB Z WA XX section T groove dimensions QQ section detail drawing Notch spring force adjustment bolt 4-OA through L 4-MM depth ML QQ section 22.5 4-OB counter bore depth OL B-NN depth NL XX section Z WA Q 45 RA X0.02 RB RC T

Series 10-VQD1000 4 Port Direct Operated Poppet Solenoid Valve

Symbol (B) 2 (A) 4 1 (P) 3 (R) Flow Rate Characteristics C [dm3/(sbar)] b Cv C [dm3/(sbar)] b Cv 14/2(PA/B) 4/25/3(A/BEA/EB) Flow rate characteristics Valve model Port size Body ported 10-VQD1121(V)-L M-M5 10-VQD1121 -L M-M5 10-VQD1151(V)-L M-M5 10-VQD1151W-L M-M5 0.05 0.07 0.06 0.07 Base mounted (With sub-plate) 0.22 0.27 0.22 0.27 0.16 0.24 0.10 0.25 0.05 0.07 0.05 0.07 0.19 0.28 0.22 0.27

INFORMATION Modular Connection Type Residual Pressure Relief 3 Port Solenoid Valve For connecting to F.R.L. units AC25-A AC30-A AC40-A VP500 IN OUT VP700 Allows for space saving and reduced piping labor. Power consumption: 0.35 W (Without light) EXH Exam

C [dm3/(sbar)] b Cv C [dm3/(sbar)] b Cv VP517Y G3/8 8.8 0.14 2 8.2 0.15 1.8 VP717Y G1/2 13.8 0.11 2.9 12.9 0.18 2.9 2 VP500/700 Series Spacer Center of F.R.L. body D C B Model A B C D Y300-A 4.2 43.4 21.7 57.9 Y400-A 5.2 53 26.5 68.5 A (Spacer width) Seal Y400-A Spacer with Bracket D K Center of F.R.L. body J H F G E E C B Seal A (Spacer width) Y400T-A Model A B C D E F G H J K Y300T-A 4.2

CVRA1-E

At this time, magnet B goes out of the movement range of auto switch B, causing auto switch B to turn OFF. Furthermore, the piston moves to the right, causing magnet A to enter the movement range of auto switch A. As a result, auto switch A turns ON.

Digital Pressure Switch

The set values for OUT1 are displayed in auto-preset mode as follows: Normal output Reversed output P_1 = A (A B)/4 n_1 = B + (A B)/4 A = Max. pressure H_1 = (A B)/2 H_1=(A B)/2 B = Min. pressure The display of set values of OUT2 is changed at the number after "_", i.e. "P_2", "n_2" and "H_2". -33No.PS-OMM0003-J [F 9] Power saving mode Power saving mode is selectable.

VFR4000-OMH0003

P 1= 0.7 MPa/P 2=0.5MPa PB 31 31 24 Although A, B+ and B marks are indicated on the terminal 55 Effective area at exhaust side(mm 2) AEA block, VFR4000 can be used as either +COM or COM. 45 S at P 2 = 0.5 MPa BEB solenoid valve.

PSE550/300

Work 1 Work 2 Work n Atmosphere A = Maximum pressure value B = Minimum pressure value P-1 = A (A B) / 4 H-1 = (A B) / 2 For compound pressure PSE533 PSE543 PSE563 For low differential pressure For low pressure For vacuum For positive pressure Pressure range C Display calibration function This function eliminates slight differences in the output values and allows uniformity in the numbers

4

Flow-rate Characteristics/Weight Flow-rate characteristics 1 2 (P A) 2 3 (A R) 3 2 (R A) 2 1 (A P) Port size Weight Valve model Grommet C[dm 3/(sbar)] b Cv C[dm 3/(sbar)] b Cv C[dm 3/(sbar)] b Cv C[dm 3/(sbar)] b Cv VT307 VT307V (Vacuum spec. type) VT307E (Continuous duty type) VT307Y (Energy-saving type) VT307W (Energy-saving, Vacuum spec. type) VT307 VT307V (Vacuum spec. type) VT307E