VCC

-2 VND Mounting nut assembly A-o Mounting nut Aluminum 1 VCC VCC VCC12-2A-1 1 set unit Switching display cover A-!

Valve for Water and Chemical Base Fluids (2/3 Port Air Operated Valve)

2 A-!

Parallel Seal Type Slit Valve

In Fig. 2A shows Slit valve opens and Slit of the body is released. So it is a state where the work piece can be transported. Figure 2C shows a state in which Gate is clamped and Seal surface is sealed by Sealing material of Gate . 3-2 Construction In Figures 1 and 2, Piston rod integrated with Piston and Moving base are connected by a displaceable mechanism.

VEX-OMO0001

-Safety JIS B 8370: JIS B 8361: JIS B 9960-1: (1 : ) JIS B 8433-1993: *2) 1. 2. 3. 1. 2. 3. 4. 2 -2VEX-OMO0001 1 1 1 1 1 1 1 1 3 3 3 3) ) ) ) *3) *3) *3) *3) 1 1 1 1 1 1 1 1 () -3VEX-OMO0001 3 0 VEX1 3 Series / / / / / / / / Nm , 1.5~2 1/6~1/4 2 (P.2.3) , (P.2.3) 1 1 1 1 P P P P 2 2 2 2 A A A A . . . . -4VEX-OMO0001 3 0 VEX1 3 Series / / / / / / / / ( ( ( ( ) ) ) ) -5VEX-OMO0001

END PLATE W/FITTINGS, 4/5 PORT SOLENOID VALVE

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The VQC series has five standard wiring packages bringing a world of ease to wiring and maintenance work, while the protective enclosures of three of them conform to IP67 standards for protection from dust and moisture. The use of multi-pin connectors to replace wiring inside manifold blocks provides flexibility when adding stations or changing manifold configuration. The VQC series

The VQC series has five standard wiring packages bringing a world of ease to wiring and maintenance work, while the protective enclosures of three of them conform to IP67 standards for protection from dust and moisture. The use of multi-pin connectors to replace wiring inside manifold blocks provides flexibility when adding stations or changing manifold configuration. The VQC series

The VQC series has five standard wiring packages bringing a world of ease to wiring and maintenance work, while the protective enclosures of three of them conform to IP67 standards for protection from dust and moisture. The use of multi-pin connectors to replace wiring inside manifold blocks provides flexibility when adding stations or changing manifold configuration. The VQC series

3 Port Solenoid Valve Metal Seal/Rubber Seal Body Ported VQZ100/200/300

size {2(A)port} (A) 2 N.C.

IDX-OM-W028

. 2 2 2 2 1 Location . 2 2 2 2 2 Anchorage . 2 2 2 2 3 Air piping . 2 2 2 2 4 Drain Tube . 2 3 2 2 5 Electric wiring . 2 3 2 3 Cautions about reinstallation . 2 5 Chapter 3 Operation / Shutdown 3 1 Check points before operation . 3 1 3 2 Operation . 3 1 3 3 Shutdown . 3 2 3 4 Cautions about restart . 3 2 3 5 Check points before restart . 3 2 3 6 Precautions for long-term non-operation .

IDX-OM-W029

rules and safety requirements for systems and their components *2) JIS B8370 URLhttps://www.smcworld.com/ i i-1 . i-1 i-1-1 . i-2 i-2 . i-3 i-2-1 . i-3 i-2-2 . i-4 i-2-3 . i-4 i-2-4 . i-4 i-2-5 . i-4 i-2-6 . i-5 i-2-7 . i-5 i-2-8 . i-6 i-2-9 . i-6 i-3 . i-7 i-4 . i-8 1 1-1 . 1-1 2 2-1 . 2-1 2-2 . 2-1 2-2-1 . 2-1 2-2-2 . 2-2 2-2-3 . 2-2 2-2-4 . 2-2 2-2-5 . 2-3

IDX-OM-W017

their components *2) JIS B8370 URLhttps://www.smcworld.com/ i i-1 . i-1 i-1-1 . i-2 i-2 . i-3 i-2-1 . i-3 i-2-2 . i-4 i-2-3 . i-4 i-2-4 . i-4 i-2-5 . i-4 i-2-6 . i-5 i-2-7 . i-5 i-2-8 . i-6 i-2-9 . i-6 i-3 . i-7 i-4 / . i-8 1 1-1 . 1-1 2 2-1 . 2-1 2-2 . 2-1 2-2-1 . 2-1 2-2-2 . 2-2 2-2-3 . 2-2 2-2-4 . 2-2 2-2-5 . 2-3 2-3 . 2-4 3 / 3-1 . 3-1 3-2 . 3-1 3-3 . 3-2

IDX-OM-W026

for systems and their components *2) JIS B8370 URLhttps://www.smcworld.com/ i i-1 . i-1 i-1-1 . i-1 i-2 . i-2 i-2-1 . i-2 i-2-2 . i-3 i-2-3 . i-3 i-2-4 . i-3 i-2-5 . i-3 i-2-6 . i-4 i-2-7 . i-4 i-2-8 . i-5 i-2-9 . i-5 i-3 . i-6 i-4 / . i-7 1-1 . 1-1 2-1 . 2-1 2-2 . 2-1 2-2-1 . 2-1 2-2-2 . 2-2 2-2-3 . 2-2 2-2-4 . 2-2 2-2-5 . 2-3 2-3 . 2-4 3 / 3-1 . 3-1 3-2 . 3

IDX-OM-W032

IEC 11-2 AC200V / 2A DC24V / 2A ( 20V / 3mA) 11-3 ON ON/OFF 3 3 5 () IDFA Series 11-1 11 1 IDX-OM-W032 11 T 11-4 1) 2) 3) 4) 1 2 3 PE L.N: PE: M3 6.5mm 2 :1.25mm :17 :17 11-5 3 5-2 IDFA55E/75E-23 IDFA Series 11-4 11 2 IDX-OM-W032 11 T 11-6 IDFA22E, 37E-23-T IDFA55E, 75E-23-T GFCI R GFCI R GFGI For Option R 1 2 3 L N PE L N 1 2 3 PE TB TB MC TDR MC CM C01

IDX-OM-W053

1 . i-2 i-2-2 . i-3 i-2-3 . i-3 i-2-4 . i-3 i-2-5 . i-3 i-2-6 . i-4 i-2-7 . i-4 i-2-8 . i-5 i-2-9 . i-5 i-3 . i-6 i-4 / . i-7 1 1-1 . 1-1 2 2-1 . 2-1 2-2 . 2-1 2-2-1 . 2-1 2-2-2 . 2-2 2-2-3 . 2-2 2-2-4 . 2-2 2-2-5 . 2-3 2-3 . 2-4 3 / 3-1 . 3-1 3-2 . 3-1 3-3 . 3-2 3-4 . 3-2 3-5 . 3-2 3-6 . 3-2 4 4-1 . 4-1 4-2 . 4-1 4-2-1 . 4-1 4-2-2 . 4-1 4-2-3 . 4-1 5

Power Valve Precision Regulator

Note) O-rings cannot be shipped as a single unit. 4 1 PVQ 8 3 3 A B 2 1 Body ported Base mounted 2 1 VY1 4 3 5 VBA VBAT 1 1 2 1 1 4 1 7 1 4 1 AP100 1 2 9 2 Without sub-plate 8 1 2 4 1 Option (2) Part no.



1 2 1 5 4 3 1 1 1 1 2 4 1 1 7 4 1 2 1 9 2 Without sub-plate 8 1 2 4 1 Option Description Part no. 0 3 0 3 0 3 0 3 0 3 0 3 VEX1A33 VEX1B33 VEX113 VEX123 VEX133 VEX153 VEX173 VEX193 B Bracket (With bolt and washer) VEX1-18-1A VEX1-18-1A VEX3-32A VEX5-32A VEX7-32A VEX9-32A VEX1-18-2A VEX1-18-2A F Foot (With bolt and washer) G27-10-R1-X207 G27-10-01 G36-10-01 G46-10-01 G Pressure gauge AN120