VN-OMP0001

Safety JIS B 8370: JIS B 8361: JIS B 9960-1: 1 JIS B 8433-1993: *2) 1. 2. 3. 1. 2. 3. 4. 2 VN-OMP0001 / / / / 1 1 1 1 1 1 1 1.5 .5 .5 .5 *3) *3) *3) *3) 1 1 1 1 1 1 1 1 () 3 VN-OMP0001 VNC VNC VNC VNC VNH VNH VNH VNH / / / / ( ( ( ( ) ) ) ) ( ) IP54 IP54 IP54 IP54 4) 4) 4) 4) 1) 1) 1) 1) 50mm 2/s 80100 1) 1) 1) 1) 2) 2) 2) 2) 5m 3) 3) 3) 3) , , , , 4 VN-OMP0001 VNC VNC VNC VNC

MHx-OMZ0003

No.MH*-OMZ0003 / / JMHZ2-16D-X7400B-TM . 2 1. . 4 2. . 5 3. . 6 3-1. . 6 3-2. . 7 3-3. . 8 3-4. . 9 3-5. () . 10 3-6. . 11 3-7. . 12 4. . 13 4-1. . 13 4-2. 3 . 14 4-3. . 15 5. . 16 5-1 . 16 5-2. . 16 5-3.

Process Gas Diaphragm Valve

4 x 10-9 Pam3/s 1) Ra 10 in.(0.25 m) Face seal, Tube weld Bottom mount 0.06 in3 (1.07 cm3) 0.22 kg 2) Leak rate Across the seat leak Surface finish Connections Installation Internal volume Weight Knob 1/4 turn indicating round knob with a raised rectangular section 1) Tested with Helium gas inlet pressure 125 psig (0.9 MPa). 2) Weight for AZ3652S2PMV4MV4 including individual boxed weight

MHx-OMY0001

-3- / 1 1.5 *3) 3)1 1 () -4- 1. MHM-16D MHM-25D MHM-32D MHM-50D M5x0.8 Rc1/8 2mm 0.20.6MPa >2mm 0.20.6MPa 0.350.6MPa 0.9MPa -1060 :2mm 50N 160N 250N 400N :6mm 50N 200N 500N 1000N 0.3N 2 2-1. () ()() () / -5- 2-2. -6- 1. (Nm) L(mm) MHM-16D M3x0.5 0.63 5 MHM-25D M4x0.7 1.5 7 MHM-32D M5x0.8 3 8 MHM-50D M6x1 5.2 9 2.

Clean Air Filter

Dimensions P.9 1 Document No.DOC1018377 Safety Instructions These safety instructions are intended to prevent hazardous situations and/or equipment damage. These instructions indicate the level of potential hazard with the labels of Caution, Warning or Danger.

IR10-OM00007

No. o S o1 T P2 U Q3 V R4 W Z12 -6- (1) Nm 1/8 (2) (3) (4) -7- (1) (2) (3) (4) (1) (2) (3) (1) (2) 3 (3) 1 3 1 (4) P.5 0 (5) 0 (6) 0.6Nm -8- (1) (2) (3) 12.5Nm (4) ()ON-OFF (5) 79Nm (6) (7) (1) AF AM AFM (2) (1) ( (2) 1.52 (1) -9- 6 (1) 1 1.5 (2) , (3) (4) [][] -10- 8 2 6 3 2 () 5 2 2 (80-) (80-) 2 2 9 EXH 2 2 ON-OFF 1 1 7 2

Air Gripper for Collaborative Robots

Product Specifications . 6 3-1. How to order . 6 3-2. Specifications . 6 3-3. Auto switch . 7 3-4. Gripping force . 8 3-5. Gripping point . 9 3-6. Dimensions . 10 3-7. Air Gripper . 11 3-8. Center of gravity . 12 4. Product Specifications . 13 4-1. Attachment . 13 4-3. Mounting to NEXTAGE . 15 4-4. Piping . 16 4-5. Speed controller . 16 4-6.

IR20-OM00008

d (4)[][] -10- 8 2 6 3 2 () 5 2 2 (80-) (80-) 2 2 9 EXH 2 ON-OFF 1 1 7 2 2 2 No.

Air Gripper for Collaborative Robots

Product Specifications . 6 3-1. How to order . 6 3-2. Specifications . 6 3-3. Auto switch . 7 3-4. Gripping force . 8 3-5. Gripping point . 9 3-6. Dimensions . 10 3-7. Air Gripper Single Unit .11 3-8. Center of gravity . 12 4. Product Specifications . 13 4-1. Attachment . 13 4-2. Protection cover . 14 4-3. Mounting to duAro flange . 15 4-4.

Safety Instructions

Proper tightening torque (Nm) 7 to 9 12 to 14 22 to 24 28 to 30 28 to 30 36 to 38 Thread 1/8 1/4 3/8 1/2 3/4 1 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 2.

Support Guide/11-LEFG Series

Environment Clean Room Specification ISO Class 4*1 (ISO14644-1) Built-in vacuum piping Possible to mount the main body without removing the external cover etc. Body-integrated linear guide specification *1 Changes depending on the suction flow rate.

VFR5000-OMN0001

industrial robots -Safety JIS B 8370: JIS B 8361: JIS B 9960-1: -(1:) JIS B 8433-1993: *2) 1. 2. 3. 1. 2. 3. 4.2 2 VFR5000-OMN0001 / / / / 1 1 3) 3) 1 1 () 3 VFR5000-OMN0001 VFR5000 Series 5 / 1 DC 3 () 0.1 2 C-R () C-R DC 3% AC 20% ( ) () () 3 3 EXH (VVFS5000-R-04-1,2) ( ) () 3 4 No.VFR5000-OMN0001 VFR5000 Series 5 / (SSR )AC 1) (C-R ) OFF 2)() 1 -10 1 1) M5 1/6~1/4 1

ALB900

6 1 1 Bowl assembly O-ring NBR 1: 100 VAC, 2: 200 VAC, 4: 220 VAC, 5: 24 VDC, 9: Others 14-13-18 5 Booster Lube Series ALB900 Dimensions Pressure differential adjustment screw Relay valve F.R.L.

Speed Controller with Uni One-touch Fitting Series AS Elbow Type/Universal Type 1

Note 2) indicates the control type (0 for meter-out and 1 for meter-in). JIS Symbol 15-9-19 2 Series AS How to Order 2 2 1 U02 06 K AS 1F Nil Option Body size 2 3 4 1/8, 1/4 standard 3/8 standard 1/2 standard None Hexagonal lock nut Electroless nickel plated K N If more than one option is required, write option part numbers in the order of K, N. Applicable tubing O.D.

Vacuum Pad

M14 x 1 10 mm/20 mm 6 I N D E X Vacuum Pad 20, 25, 35, 50 M Pad Unit How to Order p. 2 Dimensions p. 2 M Vertical Vacuum Inlet, With Adapter How to Order p. 3 Dimensions p. 3 M Vertical Vacuum Inlet, With Buffer How to Order p. 6 Dimensions p. 6 Construction p. 9 Parts Structure p. 10 Mounting Adapter Part Nos. p. 11 Buffer Assembly Part Nos. p. 12 1 Vacuum Pad 20, 25, 35, 50 Pad diameter

INFORMATION Modular Connection Type Residual Pressure Relief 3 Port Solenoid Valve For connecting to F.R.L. units AC25-A AC30-A AC40-A VP500 IN OUT VP700 Allows for space saving and reduced piping labor. Power consumption: 0.35 W (Without light) EXH Exam

VP500 VP700 Residual pressure relief 3 port solenoid valve (VP700) AW40-A + VP700 AC30C-A + VP500 Residual pressure relief 3 port solenoid valve (VP500) Air filter *1 (AF30-A) Mist separator *1 (AFM30-A) Regulator *1 (AR30-A) Filter regulator *1 (AW40-A) Silencer *1 (AN402-04) *1 Sold separately AC30-A 15-E664 VP500/700 Series VP500/700 Series RoHS How to Order VP 5 1 7 5 D 1 Y Modular connection

Fieldbus System

Hexagon wrench (2.5 mm)1 Manifold valve SI unit Manifold valve SI unit Hexagon wrench (2.5 mm)1 Digital input module Modular adapter2 Digital output module Joint2 End plate (With bracket) 1 Hexagon wrench is not included.

FGE-C

) 1 (2 ) /4 (1 ) () 2-1 2/12.5Nm / 2- 9/12 FGX-OM-L009-B 2) IN/OUT IN/OUT V P36 4 1) () 2) 0.1MPa() P910 5.

EX250-SPR_eng

Side D Side U (SI unit side) Communication connector Output No. 1 3 5 7 9 17 29 31 Solenoid on side B Accessories M12 5-pin Plug A-code 7 5 7 5 Bit No. 1 1 1 3 No. Description Function Valve manifold 2 3 SV24 V 1 +24 V for valve : Output numbers are assigned to stations from side D to U of manifold in order.

Speed Controller: Standard Type Series AS Large Flow In-line Type 1

L3 Max. 1 4 1 2 L1 L2 D Min. L3 Max. Model Port size Model Port size 120 150 AS800 AS900 1 1 , 2 74 93 204 262 192 250 80 94 AS420 AS500 AS600 67.5 74 90 1/4, 3/8, 1/2 3/4 1 38 42 55 122 115 158 112 105 148 50 50 62 15-9-33