Hand Valve Series VH

3 (R) 4 3 3 (Exhaust center) VH301-02, 03 VH311-02, 03 Rc1/4: 17(0.9) Exhaust center 2 (Position) VH302-02, 03 VH312-02, 03 2 1 (A) 2 (B) 4 VH3 1/4, 3/8 0.71 3 (Closed center) VH320-02, 03 VH330-02, 03 Rc3/8: 20(1.1) 1 (P) 3 (R) 3 (Exhaust center) VH321-02, 03 VH331-02, 03 2 (Position) VH322-02, 03 VH332-02, 03 12 3 4 3 (Closed center) VH400-02 to 06 VH410-02 to 06 Rc1/4: 45(2.5) 4 3 3 (Exhaust

Check Valve Series AK 1

Inch size Metric size Port size 4 04 03 5/32 M5 M5 x 0.8 Thread type 6 06 07 1/4 U10/32 10-32 UNF 8 08 09 5/16 Metric thread (M5) 01 1/8 Nil 10 10 11 3/8 Unified thread (10-32 UNF) 02 1/4 12 12 13 1/2 R 03 3/8 N NPT 04 1/2 Check valve free flow direction Applicable Tubing O.D./Port Size Combinations From male thread to One-touch fitting A Metric size Inch size Applicable tubing O.D.

K35-OMW0030

The power supply voltage between the power supply terminal PWR_24V and PWR_GND is outside of DC24 V +/10%. Power supply Use a power supply voltage of DC24 V+/-10%. PWR LED: error PWR signal: 1 Green flashing Continue OFF (Outside of 24 (Cycle: 1 Hz) V+/-10%) The power supply voltage between the power supply terminal PWR_24V and PWR_GND is below 17 V.

Rotary Table: High Precision Type

Specifications Model MSUA1 MSUA3 MSUA7 MSUA20 Vane Type Single vane Rotating angle *1) 90 o 180 o 90 o 180 o 90 o 180 o 90 o 180 o +/10 o +/10 o +/10 o +/10 o +/10 o +/10 o +/10 o +/10 o Fluid Air (Non-lube) Proof pressure 1.05 MPa 1.5 MPa Ambient and fluid temperature 5 to 60 oC Operating pressure range 0.2 to 0.7 MPa 0.15 to 0.7 MPa 0.15 to 1.0 MPa Rotation time adjustment range 0.07 to

Low-Speed Rotary Actuator

Body pin hole Size Tightening torque 10 0.2 to 0.3Nm 15 0.3 to 0.5Nm 20 4.2 to 5.2Nm 30 4.2 to 5.2Nm 40 7.2 to 8.7Nm Size 10 , 15 Cover Assembly End cover Assembly Body pin hole Hexagon socket head bolt Fig.22 Size 20 , 30 , 40 (6) Perform operation test after assembling and check external leakage.

Parallel Type Air Gripper

Model Screw Max. tightening Maximum screw-in depth (L mm) torque (Nm) MHZ2-10 M3 x 0.5 0.9 6 MHZ2-16 M4x0.7 1.6 4.5 MHZ2-20 M5 x 0.8 3.3 8 L L MHZ2-25 M6x1 5.9 10 MHZ2-32 M6x1 5.9 10 MHZ2-40 M8 x 1.25 13.7 13 Model Screw Max. tightening torque (Nm) Maximum screw-in depth (L mm) MHZ2-10 M3 x 0.5 0.69 5 MHZ2-16 M4x0.7 2.1 8 MHZ2-20 M5 x 0.8 4.3 10 MHZ2-25 M6x1 7.3 12 MHZ2-32 M6x1 7.9 13 MHZ2

Electric Slide Table / High Precision Type 《 Battery-less absolute 》

218 210 to 420 Max. speed[mm/s] *1 *3 400 200 100 400 200 400 200 Actuator specifications Pushing speed[mm/s] 20 to 30 10 to 30 5 to 30 20 to 30 10 to 30 20 to 30 10 to 30 Max. acceleration/deceleration[mm/s2] 5000 Positioning repeatability [mm] 0.01 Lost motion[mm] *4 0.1 or less Screw lead[mm] 10 5 2.5 12 6 16 8 Impact/Vibration resistance[m/s2] *5 50/20 Actuation type Ball screw (In-line

IZx-OMR0035

Air flow SW:1 10 10 Air flow SW:10 5 5 Air flow SW:10 0 0 0 200 400 600 800 1000 1200 1400 1600 0 200 400 600 800 1000 1200 1400 1600 Installation distance mm Installation distance mm 28 Doc.

11- Series MXP/MXPJ6 Air slide table 22- ø6, ø10, ø12, ø16

1122Series MXP/MXPJ6 Air slide table 6, 10, 12, 16 How to Order Clean series 11 Vacuum suction type MXP 11 12 15 M9N MXP 22 12 15 M9N Copper, fluorine and silicon-free + low particle generation Number of auto switches Nil s n 2 pcs. 1 pc. n pcs. 22 Vacuum suction type Bore size Stroke mm Type of auto switch 6 10 12 16 5, 10 10, 20 15, 25 20, 30 Nil Without auto switch Refer to the table

SI Unit for Vacuum Manifold

Vacuum/ReleaseInstruction Table 4-10.

Servo Motor Controller (24 VDC)

) Side (10) No.

Digital Pressure Switch

For detecting fine pressures, warm up the product for 10 to 15 minutes. Check if the product satisfies the specified accuracy after 10 minutes warm up time. Insufficient warm-up time Product failure Replace the product. -69No.PS-OMU0003-D Problem No.

Vacuum Pad: Large/Heavy Duty Type Series ZPT/ZPX

9 M18 x 1.5 9 H M18 x 1.5 10 H Width across flats 16 45 Width across flats 16 Width across flats 37 28 4 x M4 x 0.7 Width across flats 24 3 x M3 x 0.5 G G 10 10 F F E E Y Y 3 3 18 34 C C A A B D B D Dimensions (mm) Dimensions (mm) A B C D E F G H Y A B C D E F G H Y Model Model ZPT40HBJ25-01-A18 ZPT63HBJ25-01-A18 72 127.5 83 138.5 50-01-A18 50-01-A18 107 162.5 118 173.5 40 41 28 43 20.5

Electric Actuator / Guide type 《 Battery-less absolute (Step motor 24VDC) 》

Electric Actuators Precautions . 10 2.1 Wiring/Cables . 10 2.2 Design/Selection . 11 2.3 Mounting . 12 2.4 Handling . 13 2.5 Operating Environment . 15 2.6 Maintenance . 15 2.7 Actuator with Lock . 16 2.8 Design/Selection . 17 2.9 Handling . 17 2.10 Mounting . 18 2.11 Power Supply . 19 2.12 Grounding . 19 2.13 Wiring . 19 2.14 Maintenance . 20 3.

LEC-OM032xx

LED display.31 9. 1 LED display.31 9. 2 Controller IF communication status and LED display.32 10. Mode.33 10. 1 Outline.33 10. 2 Step data input mode .33 10. 3 Numerical data input mode.33 10. 4 Data writing mode.35 11. Memory map .36 11.1 Memory assignment.36 11.2 Controller IF flagIN Data.40 11.3 Gateway unit status flagIN Data.40 11.4 Gateway unit control flagOUT Data.42 12.

HEC-OM-U015

Wetted materials Stainless steel, EPDM, NBR, Ceramic, PPE, PPS, Carbon, Polyethylene, POM 10 Temperature Alarm Common cable connected to this connector. Required flow rate 10 to 15 L/min Facility water 11 Temperature Alarm b contact 3.3.2 Heating Capacity Temperature range 10 to 35 C 5 (CLOSE During Alarm) system Only trained personnel should handle or operate the product.

Series MLGP

Manual unlocking P14 10. Maintenance P16 10-1. Disassembly/ Replacement 10-2. Maintenance 10-3. Construction 11. Auto switch P19 11-1. Applicable auto switches 11-2. Minimum auto switch mounting stroke 11-3. Auto switch proper mounting position (detection at stroke end) and its mounting height 11-4. Auto switch operating range 11-5.

IDX-OM-V020

Option L . 10-1 10.1 SAFETY INSTRUCTIONS FOR USE . 10-1 10.2 SPECIFICATIONS . 10-1 10.3 MOUNT THE HEAVY DUTY AUTO DRAIN . 10-2 10.4 MAINTENANCE . 10-2 Chapter 11 Option R .11-1 11.1 SAFETY INSTRUCTIONS FOR USE . 11-1 11.2 EARTH LEAKAGE BREAKER SPECIFICATION . 11-1 11.3 CONNECTION OF POWER SUPPLY . 11-2 Chapter 12 Option T . 12-1 12.1 SAFETY INSTRUCTIONS FOR USE . 12-1 12.2 OPERATION / ERROR

Digital Pressure Switch

For detecting fine pressures, warm up the product for 10 to 15 minutes. Check if the product satisfies the specified accuracy after 10 minutes warm up time. Insufficient warm-up time Product failure Replace the product. -71No.PS-OMU0009-D Problem No.

Digital Pressure Switch

For detecting fine pressures, warm up the product for 10 to 15 minutes. Check if the product satisfies the specified accuracy after 10 minutes warm up time. Insufficient warm-up time Product failure Replace the product. -70No.PS-OMU0006-D Problem No.