® SEMI Thermo-chiller Series HRW Fluorinated Fluid Type

Facility water system Electrical system Facility water temperature +27F (15C) Circulating fluid temperature Conditions 50 to 95F (10 to 35C) Facility water temperature 7.9 gpm (30 L/min) 1.1 gpm (4 L/min) 10.6 gpm (40 L/min) 10.6 gpm (40 L/min) Circulating fluid rated flow 5.3 gpm (20 L/min) 2.6 gpm (10 L/min) 10.6 gpm (40 L/min) 6.6 gpm (25 L/min) Facility water required flow rate Temperature

MNB

For details about auto switches with pre-wire connector, refer to page 9-15-66. 9-6-8 9 Series MNB Cylinder with Lock Double Acting, Single Rod Model Model Type Action Lock operation Bore size (mm) MNB Non-lube Double acting Spring locking 32, 40, 50, 63, 80, 100 Cylinder Specifications Bore size (mm) 32, 40, 50, 63, 80, 100, Type Non-lube CL Fluid Air CL1 Proof pressure 1.5 MPa Max. operating

Direct Solenoid

rat r t, s.hod@entrv-i"dti*,t .d..ddrloddrg .p'ab. dorail14, (1)i'ddq raR.sn[ly drai 21, 11' dsriir 15, (2)dd*rjl 13, 12) d.blr 17, e*d6u.rwrr'o l'L_t RocsdM.bdd.g Mod oFdde ortE dlajl 15 (varTr"o"&'f', E D e H J x 2.94 (75) 0.64 {16) 1.63 (41) 0.72 (18) (36) 8.56 {216) 3.59 (91) 3.63 (93) (36) 1.08 128) rndkd lghr .smdy(varsTyF'F &'L] MillimeteE in Pareniheses INTERFACE SPEED CONTROL f'SPOIOO

Air Cylinder Series CJ1

D-X Individual -X Bore size (mm) Symbol S Z 5 19.5 10 28.5 15 37.5 20 46.5 5 40 10 49 15 58 20 67 Stroke Technical data 4 19

E-P HYREG

Proper tightening torque (Nm) Connection thread size (R, NPT) 3 to 5 8 to 12 15 to 20 20 to 25 28 to 30 36 to 38 40 to 42 48 to 50 48 to 50 1 8 1 4 3 8 1 2 3 4 Ground nut 1 1 1 2 Washer Retaining screw 1 4 1 2 Grommet (Rubber) Housing Operating Fluid Caution 1.

Series MHR3 11- 3 Finger Rotary Actuated Air Gripper 22- Size: 10, 15

Model Gripping force N (Effective value at 0.5 MPa) Note 1) External Internal Open/Close stroke (Diameter) Port size Lubrication Nominal size Weight g Note 2) Action Model Finger opening width (mm) Finger closing width (mm) Stroke (mm) 11221122125 (130) MHR3-10 MDHR3-10 MHR3-15 MDHR3-15 Vacuum suction type 10 7 6.5 16 22 6 M3 x 0.5 Double acting Non-lube 11221122230 (235) 15 13 12 19 27 8

Dedicated Controller

Description RUN 15 +24V Common The positive common of the input terminal. 1, 14 HOLD 3 The terminal that performs setup operations (actuator starting preparation). 2 Starting preparation STOP 16 SET-UP ALARM RESET 4 The terminal that performs program start. RUN 15 Starting PRO-NO BIT 1 17 17 Pro-no. bit1 The terminal that designates the program to be executed.

Dual Speed Controller with One-touch Fitting Series ASD 1

(Refer to pages 15-6-3 to 15-6-5 for details.)

3 Port Solenoid Valve Metal Seal/Rubber Seal, Body Ported Series VQZ100/200/300 1

L dimension 60.5 3 48 2 85.5 5 73 4 110.5 7 98 6 135.5 9 123 8 160.5 11 148 10 185.5 13 173 12 210.5 15 198 14 235.5 17 223 16 19 248 18 20 260.5 VZ 285.5 21 273 No.

E-P HYREG ® Series VY1 1

7.5 10 V V V VY130-7 VY140-7 VY150-7 2 2 2 4 0 8 12 16 20 mA 4 0 8 12 16 20 mA 4 0 8 12 16 20 mA VY130-8 0 5 10 15 20 VY140-8 0 5 10 15 20 VY150-8 0 5 10 15 20 3 3 3 mA mA mA Command signal Command signal Command signal VY1700 1 VY1900 1 Input signal voltage (current) for starting the operation of a pilot valve VY1D0 (direct operated) (There is dispersion in the following range.) 1 1 Symbol

Clean Room Rodless Cylinder Series CYP ø15, ø32

CY MG Bore size 15 32 15 mm 32 mm CX Auto switch Nil Without auto switch DFor the applicable auto switch model, refer to the table below.

Programless Controller (With Stroke Study) ® Specialized for Series LEM Series LECP2

Cable length (L) [m] A1 1 2 5 6 (17.7) (10.2) (14) (18) 1 3 5 8 A B C 1.5 3 5 8 A6 B1 B3 A1 A3 B6 (13.5) 1 2 (5.7) 15 16 Connector B Connector D (30.7) L (11) (14.7) (10) 8 A B C LE-CP/Cable length: 8 m, 10 m, 15 m, 20 m ( Produced upon receipt of order) 10 15 Actuator side Controller side 20 (5.5) (6.3) (5.7) (14.2) Connector C (Terminal no.)

CJ1

Symbol S Z 5 19.5 10 28.5 15 37.5 20 46.5 5 40 10 49 15 58 20 67 Bore size (mm) Stroke 4 6-2-5

Clean Room Rodless Cylinder Series CYP ø15, ø32 1

Allowable load mass mv (kg) Maximum operating pressure Pv (MPa) Cushion Stroke Model Stroke (mm) 25 30 1 5 0.3 Model CYP15 CYP32 CYP15 CYP32 8-17-6 6 Clean Room Rodless Cylinder Series CYP 15, 32 How to Order MX CYP 15 Z73 200 MTS MY Number of auto switches Nil S n 2 pcs. 1 pc. n pcs.

Ozone Resistant

The residual ozone ratio in the lines of lube type reciprocating compressor 100 90 80 70 Residual ozone (%) 60 50 Air with atmospheric dew point: 17C Air with atmospheric dew point: 10C 40 30 20 Ozone depletion is much slower in a non-lube scroll type compressor than in a lube type reciprocating compressor.

MHT2

11 B 6.5 9 12 15 A 9.5 13.5 11.5 14 B 6 8.5 11.5 14.5 A 9 13 11 13.5 32 40 50 63 2.7-6

VND

-25A VND50D-32A VND50D-32F VND60D-40A VND60D-40F VND70D-50A VND70D-50F 1 8 1 4 26 28 31 120 130 240 380 7 0.3 3 8 15 0.6 1 2 3 4 20 0.9 1.4 2.3 5.5 3.6 7.2 5.7 10.8 25 1 VC 1 4 1 440 32 32 1 2 1 VDW 920 40 40 2 VQ 1500 50 50 Note) The companion flange is JIS B 2210 10K (standard) or its equivalent.

VVXA21/22

Port R Operating Fluid and Ambient Temperature Operating fluid temperature (C) (3) Vacuum Ambient temperature (C) Temperature conditions Air (Standard) Oil (Standard) (V) Port P Port A Maximum Minimum 60 5 (1) 40 5 40 40 5 5 (2) Note 1) Dew point: 5C or less Note 2) 500 cSt or less Note 3) V in parentheses is option symbol. Option Material No.

T/TIA

Max. operating pressure Note 1) 2R (MPa) One-touch fittings, Insert fittings, Self-align fittings, Miniature fittings Applicable fittings Note 1) Note 2) Min. bending radius 100 15 25 30 50 65 13 20 24 30 40 50 60 Min. bending radius (mm) Note 3) Fixed end Bending value (Reference) 75 12 20 23 40 48 10 15 18 23 30 40 45 40 to +100C, Water: 0 to +70C (No freezing) Nylon 12 Operating temperature

2-Color Display Digital Pressure Switch Series ZSE80(F)/ISE80(H)

15 4.5 6.5 20 39.7 View A With bracket (Rear ported) ZS-24-D 30 20 1.6 20 43.2 55 4.5 40 11.5 15 4.2 7.2 7.5 22 39.7 With bracket (Bottom ported) 50 40 30 4 x 4.5 49 43 20 30 20 10 60.5 3.5 2 47 25.2 35.5 16.3 40.3 1.5 738 Series ZSE80/ISE80 2-Color Display Digital Pressure Switch For General Fluids Dimensions Panel mount (Rear ported) 56.1 40 25.2 7.5 51.2 ZSE ISE ZSP PS ISA PSE IS 38.6