Series VC, Series VCS, Direct Operated 2 Port Solenoid Valve for Steam

(mm) Electrical entry P Port size B C D E F H K L M N A Model Grommet: G Conduit: C Conduit terminal: T Q R Q R Q R S U 13.5 28 64 31 6.5 12.5 28 14 12.8 M4 4.5 22 59 44 50 99 50 66 83 1/8 VCS21 18 36 67.5 31 8.5 12.5 28 18 12.8 M4 6 22 62 44 53 99 53 66 86 1/4 22 40 81.5 36.5 11 15 32 20 19 M5 8 24 76 46 66.5 101 66.5 68 99 1/4, 3/8 VCS31 30 50 86 36.5 13.5 15 32 25 23 M5 8 24 80 46 71 101

3 Port Solenoid Valve, VQZ Series, Base Mounted and Body Ported

L 310.5 23 298 22 335.5 25 323 24 360.5 27 348 26 385.5 29 373 28 410.5 31 398 30 435.5 33 423 32 460.5 35 448 34 485.5 37 473 36 39 498 38 40 510.5 EXH port silencer 63 Silencer is installed in the EXH port. 38 22 Dimensions 13 Silencer P/N Type VQZ100 VQZ200 VQZ300 NAN110-N01 NAN200-N02 NAN200-N02 NAN200-N02 NAN110-N01 16 Q Q Q Body Ported Q Q Series VQZ100200300 Q Q Q

Series VC, Series VCL, Direct Operated 2 Port Solenoid Valve for Oil

64 31 6.5 12.5 28 14 12.8 M4 4.5 1/8 VCL21 86 22 23 46 44 44 58 41.5 46.5 99 44 66 18 36 67 31 8.5 12.5 28 18 12.8 M4 6 1/4 99 24 25 56.5 46 54.5 60 52 48.5 101 54.5 68 22 40 81.5 36.5 11 15 32 20 19 M5 8 1/4, 3/8 VCL31 104 24 25 59 46 57 60 54.5 48.5 101 57 68 30 50 84 36.5 13.5 15 32 25 23 M5 8 1/2 107 26 26.5 64.5 48 62.5 62 60 50.5 103 62.5 70 22 45 89 41 11 17 36 22.5 23 M5 8 1/4, 3

Platform Cylinder Series CXT

Dimension l from the guide shaft center to the top surface of the table is indicated below. 11.4 19.3 Slide bearing 25 20 5.60 8.19 Ball bushing bearing 19.8 23.3 Slide bearing 32 30 (mm) 10.1 14.8 Ball bushing bearing l dimension 12 19.5 16 24 20 28 25 31 32 39.5 40 37.3 46.2 Slide bearing 50 Bore size 40 21.3 27.5 Ball bushing bearing 47.5 Allowable Load Only by Adjusting Bolt If only the

Digital Pressure Switch ( compatible)

Function selection mode 28 Default setting 28 F 0 Display units, switch output specifications and diagnostic information selection function 30 F 1 Setting of OUT1 32 F 2 Setting of OUT2 35 F 3 Digital filter setting 37 F 4 Auto-preset function 38 F 6 Fine adjustment of display value 40 F10 Sub display setting 41 F11 Display resolution setting 47 F14 Zero cut-off setting 48 F80 Power saving

AIR FILTER

DISASSEMBLY DRAWING 28-29 11. DIMENSIONS 30 Safety Instructions These safety instructions are intended to prevent hazardous situations and/or equipment damage. These instructions indicate the level of potential hazard with the labels of Caution, Warning or Danger.

One-touch Fittings

.: 4, 6 16 3/8 KQ2H16-03GS 24 22 23.6 33.1 28 20.6 81 67 11 42.4 1/2 KQ2H16-04GS 24 22 23.6 32.1 25.7 20.6 113 67 13 44.6 *1: D is the body diameter. *2: Reference dimensions after installation of R thread 5 Metric Size Stainless Steel One-touch Fittings KQ2-G Series Applicable Tubing: Metric Size, Connection Thread: M, R, Rc Dimensions Hexagon Socket Head Male Connector: KQ2S-G (Gasket

Silencer 40 dB (A): High Noise Reduction Type Series ANA1

P 1 Silencer VEX Solenoid Tightening Torques for Silencers Applicable tightening torque (N.m) 12 to 14 Connection thread AN 1 4 22 to 24 3 8 28 to 30 1 2 28 to 30 3 4 36 to 38 40 to 42 1 4 1 2 48 to 50 48 to 50 R R R R R 1 R 1 R 1 R 2 Inlet pressure for silencer AMC 4.

Compact manifold regulator ARM5 Series

L dimension 21 273 22 285.5 23 298 24 310.5 25 323 26 335.5 27 348 28 360.5 29 373 30 385.5 No.

BP1000

4 10 30 40 V15 V3 L 1 H V2 2 4 10 30 40 -30 in.Hg to 15 psig -30 in.Hg to 30 psig -30 in.Hg to 60 psig -30 in.Hg to 100 psig -30 in.Hg to 160 psig -30 in.Hg to 200 psig 0 to 200 psig 0 to 400 psig 0 to 1000 psig 0 to 3000 psig 0 to 4000 psig -0.1 to 0.1 MPa -0.1 to 0.2 MPa -0.1 to 0.4 MPa -0.1 to 0.7 MPa -0.1 to 1.1 MPa -0.1 to 1.4 MPa 0 to 1.5 MPa 0 to 3 MPa 0 to 7 MPa 0 to 21 MPa 0 to 28

BP1000

BP Diaphragm Valves Check Valves Vacuum Generators Flow Switches Technical Data/ Glossary of Terms Precautions SL AP Recommendations Regulators Wetted Parts Material S 316L SS secondary remelt SH Wetted Parts Body Diaphragm Nozzle Seat Seal Hastelloy C-22 Hastelloy C-22 316L SS 316L SS Viton (Option: Teflon, Kalrez) Teflon Flow Characteristics Dimensions inch (mm) BP1000 BP1000 30 0.21 28

COQ2BP

OJ 1A22x1.5 2. 1I 1 8 --g07D 28-03 ~ , Y-G08 80 71 23 038 SO r.122x15 21 27 lS'g.070 28 ~ 3 ~, 56 84 IV -GOS ~iTt .1 , m_ , m , L , CQ2 Double Rod Clevis Pin (mm) C02 Jam Nut J r ,..,. No. AppI_ bon~.. Dd9 L d I m 1 Soap ring ly-(l05 50,63 14

CE

28 Counter CEU5 Wiring with External Equipment 1.

Compact Hydraulic Cylinder

E F U A B Z M N O P S Bore size (mm) 32 M10 x 1.5 60 4.5 14 8.5 73.5 12 16 45 20 31.5 65 14 34 5.5 9 depth 7 Rc1/8 58.5 40 M10 x 1.5 69 5 14 8.5 75.5 12 16 52 22 35 67 14 40 5.5 9 depth 7 Rc1/8 66 50 M12 x 1.75 86 7 18 11 87 15 20 64 25 41 76 19 50 6.6 11 depth 8 Rc1/4 80 63 M12 x 1.75 103 7 18 11 91 15 20 77 27 47.5 80 19 60 9 14 depth 10.5 Rc1/4 93 80 M16 x 2 132 6 22 11 100 20 25 98 28

Series 11-CRA1-Z Rack & Pinion Type Rotary Actuator Size: 30, 50

D-M9B D-M9N, D-M9P D-A93 Load voltage Load current range Indicator light Application 24 VDC (10 to 28 VDC) 28 VDC or less 24 VDC, 100 VAC 2.5 to 40 mA 40 mA or less 5 to 40 mA, 5 to 20 mA 24 VDC relay, PLC IC circuit, Relay, PLC Relay, PLC Solid state auto switch PLC: Programmable Logic Controller Refer to page 920 for the applicable auto switch list. 905 Rotary Actuator 11-CRA1-Z Rotation

Series MXP/MXPJ6 11- ø6, ø10, ø12, ø16 22- Air Slide Table

M4 x 0.7 Piping port F QL 6 13.5 Prepared hole diameter 3.3 2 x M3 x 0.5 (Plug: M-3P) 170.05 6 (fitting seat surface dimension) M3 x 0.5 Vacuum suction port Stroke: S M 1 Mounting base side B D Piping port A 2 x M3 x 0.5 A 5 5.5 3.2 J 2.4 Z Section AA 3.5 depth 2 2.5 +0.030 0 7 +0.030 0 depth 2 2.5 Q QL 11-/22-MXPJ6-10 4 x M3 x 0.5 depth 3 F (mm) E F H J M Q QL S Z Model 23 25 38 27 37 28

60

Connection thread 1/8 1/4 3/8 1/2 3/4 1 5.2 to 6.6 8.9 to 10.3 16.2 to 17.7 20.7 to 22.1 20.7 to 22.1 26.6 to 28.0 Installation and Adjustment Torque (7 to 9) (12 to 14) (22 to 24) (28 to 30) (28 to 30) (36 to 38) Warning Air Supply 1. Confirm the symbols 1 and 2 before the Warning valve is connected. The port marked 1 is the air inlet and the port marked 2 is the outlet.

3 Port Solenoid Valve/

.: 8, 5/16" (With check valve) (External pilot port) Channel 2 Channel 1 64.5 Safety limit switch (made by OMRON) Part number: D4N-9B31 A M12 x 1 Pg9 34 Applicable cable O.D. 4.5 to 7 175.9 (190.9: For external pilot) (48.2) (75) Vent port 214.1 Should be normally open. 3 x 8.5 Precautions Optional Accessories (Mounting hole) (27.7) (Max. 3) 3 3 (106.6) 21 57.6 28 41.5 (69.5) 2 1 Specific

ZSM1-115/121

Indicator light Lead wire 3 2 R 1/8 Port size 65 g Mass Electrical Specifications ZSM1-115 Supply voltage 4.5 to 28 VDC Output (Open collector) 28 V, Max. 40 mA Current consumption 10 mA or less (24 VDC) ZSM1-121 Supply voltage 100 VAC/DC Max. operating current range 24 V or less: 50 mA, 48 V: 40 mA, 100 V: 20 mA Max. contact capacity AC 2 VA, 2 W DC How to Order ZSM1 1 15 Vacuum switch diaphragm

Rotary Cylinder Series MRQ Size: 32, 40 1

Allowable kinetic energy (mJ) Adjustable rotation time range that ensures stable operation (s/90) Size 32 40 0.2 to 1 23 0.2 to 1 28 Formula of moment of inertia is subject to load shape. Refer to the moment of inertia formula on page 11-10-3. 2.