3/5 Port Solenoid Valve Metal Seal/Rubber Seal Base Mounted VQZ1000/2000/3000

L 285.5 21 273 310.5 23 298 22 335.5 25 323 24 360.5 27 348 26 385.5 29 373 28 410.5 31 398 30 435.5 33 423 32 460.5 35 448 34 485.5 37 473 36 39 498 38 40 510.5 Fitting blank plug KQP-23-X19 KQP-04-X19 KQP-06-X19 KQP-08-X19 KQP-10-X19 L A Dimensions (mm) Applicable fitting d Part number A L D D KQP-23-X19 KQP-04-X19 KQP-06-X19 KQP-08-X19 KQP-10-X19 3.2 4 6 8 10 16 16 18 20.5 22 31.5 32

5 Port Solenoid Valve Metal Seal/Rubber Seal Body Ported

A L D VQZ D KQP-23-X19 KQP-04-X19 KQP-06-X19 KQP-08-X19 KQP-10-X19 3.2 4 6 8 10 16 16 18 20.5 22 31.5 32 35 39 43 3.2 6 8 10 12 VQD Color: White VZS VFS EXH port silencer VS 63 Silencer is installed in the EXH port.

3 Port Solenoid Valve Metal Seal/Rubber Seal Base Mounted VQZ100/200/300

SY SYJ VK Blank plug KQP-23-X19 KQP-04-X19 KQP-06-X19 KQP-08-X19 KQP-10-X19 VZ L Dimensions VT (mm) A One-touch fitting d Part No.

ZCUK

ZPT U N 02 B4 ZP U N 04 X11 Dia. (mm) Vacuum entry (Mounting thread diameter) Dia. (mm) 02 04 06 08 10 13 16 20 25 32 40 50 2 4 6 8 10 13 16 20 25 32 40 50 Pad type 02 04 06 08 10 13 16 20 25 32 40 50 2 4 6 8 10 13 16 20 25 32 40 50 Pressure gauge position Thread dia.

SMC high purity series LVA valve has three types of body materials (SUS/PPS/PFA) that can be selected based on the customers application. Special diaphragm construction insures gentle opening and closing that prevents the formation of micro-bubbles. A unique guide ring on the piston rod eliminates lateral motion of the poppet, greatly increasing seal life and reducing particle formation.

Regulator manifold series ARM is available in standard size 1000 & 2000 and the modular style is available in sizes 2500 & 3000. Standard models are available with 4 connection methods and have backflow function availability. Modular styles can be freely mounted on a manifold station and have easy set up using the new handle. Regulator block, common supply type, OUT piping type: straight

Regulator manifold series ARM is available in standard size 1000 & 2000 and the modular style is available in sizes 2500 & 3000. Standard models are available with 4 connection methods and have backflow function availability. Modular styles can be freely mounted on a manifold station and have easy set up using the new handle. Regulator block, common supply type, OUT piping type: straight

Regulator manifold series ARM is available in standard size 1000 & 2000 and the modular style is available in sizes 2500 & 3000. Standard models are available with 4 connection methods and have backflow function availability. Modular styles can be freely mounted on a manifold station and have easy set up using the new handle. Regulator block, individual supply type, IN/OUT fittings: straight

Speed controller with one-touch fittings, Body sizes: M5, 01, 02, 03, 05, Metal body elbow style, Meter-in or meter-out control, Port sizes: M5, 01, 02, 03, 04, Tube O.D.: 04, 06, 08, 10, 12 FLOW CONTROL. SPEED CONTROLLER. 126.00000 lb. SVD.

Pad Diameter: 04 (Flat Style), Pad Styles: U (Flat Style), Material: S (Silicon Rubber), Rotation: K (Non-rotating), Stroke: 10mm, Vacuum Entry: 04 (One-touch Fitting Ø4), Mounting Thread: A8 (M8X1, Available for UT, CT for Diameter size 10, 13, 16 Only)

Pad Diameter: 04 (ø4), Pad Styles: U (Flat Style), Material: GN (Conductive NBR), Vacuum Entry: 04 (One-touch Fitting Ø4), Mounting Thread: B5 (Female Thread M5X0.8)

Pad Diameter: 04 (Flat Style), Pad Styles: U (Flat Style), Material: U (Urethane Rubber), Rotation: K (Non-rotating), Stroke: 15mm, Vacuum Entry: 04 (One-touch Fitting Ø4), Mounting Thread: A8 (M8X1, Available for UT, CT for Diameter size 10, 13, 16 Only)

Pad Diameter: 04 (ø4), Pad Styles: U (Flat Style), Material: GS (Conductive Silicon Rubber), Vacuum Entry: 04 (One-touch Fitting Ø4), Mounting Thread: B5 (Female Thread M5X0.8)

Pad Diameter: 04 (Flat Style), Pad Styles: U (Flat Style), Material: N (NBR), Vacuum Entry: 04 (One-touch Fitting Ø4), Mounting Thread: A6 (M6X1)

Pad Diameter: 04 (Flat Style), Pad Styles: U (Flat Style), Material: S (Silicon Rubber), Vacuum Entry: 04 (One-touch Fitting Ø4), Mounting Thread: B5 (Female Thread M5X0.8)

Pad Diameter: 04 (Flat Style), Pad Styles: U (Flat Style), Material: U (Urethane Rubber), Vacuum Entry: 04 (One-touch Fitting Ø4), Mounting Thread: B5 (Female Thread M5X0.8)

Pad Diameter: 04 (Flat Style), Pad Styles: U (Flat Style), Material: S (Silicon Rubber), Rotation: J (Rotating), Stroke: 6mm, Vacuum Entry: 04 (One-touch Fitting Ø4), Mounting Thread: A8 (M8X1, Available for UT, CT for Diameter size 10, 13, 16 Only)

Pad Diameter: 04 (Flat Style), Pad Styles: U (Flat Style), Material: N (NBR), Vacuum Entry: 04 (One-touch Fitting Ø4), Mounting Thread: B5 (Female Thread M5X0.8)

Pad Diameter: 04 (Flat Style), Pad Styles: U (Flat Style), Material: N (NBR), Rotating or Non-rotating: K (Non-rotating), Stroke: 25mm, Vacuum Entry: 04 (One-touch Fitting Ø4), Mounting Thread: A8 (M8X1)

Pad Diameter: 04 (Flat Style), Pad Styles: U (Flat Style), Material: N (NBR), Rotating or Non-rotating: K (Non-rotating), Stroke: 10mm, Vacuum Entry: 04 (One-touch Fitting Ø4), Mounting Thread: A8 (M8X1)