Compact Vacuum Unit

Also, do not use the filter when these chemicals are present in the atmosphere. 2 Series ZB How to Order Manifold S 01 ZZB 08 M5 Stations Pressure Sensor/Vacuum Pressure Switch Mountable Note) Sensor/switch non-mountable base Sensor/switch mountable base Nil S 01 02 1 station 2 stations Note) Select S when the model with either the pressure sensor or the vacuum pressure switch is selected

PSE200

CH kPa MPa kPa MPa MPa kPa kPa MPa kPa MPa OUT1 OUT2 CH 1 2 3 4 P R E S S U R E Copy function (page 14) Each channel's information can be copied to another channel.

VNB

Note) In the case of body options S and L, the materials of the part nos. e and r are as follows: (Example): VN1-A3BA However all brackets of valve element VNB 1 to 4 are made of stainless steel. (No need to add options S and L.)

Title not found

Sweden SMC Pneumatics Sweden AB Denmark SMC Pneumatik A/S Norway SMC Pneumatics Norway AS Russia SMC Pneumatik LLC Poland SMC Industrial Automation Polska Sp.z.o.o Netherlands,Belgium SMC Pneumatics B.V.(Associated company) Finland SMC Pneumatiikka OY (Associated company) Greece S. Parianopoulos S.A. (Distributor) Turkey Entek Pnomatik San.ve Tic.Ltd.Sti.

VKF300

Grommet type (G) Without light Without light Without light With light With light With light S Non-locking push type (tool required) AC Hole dia. 5 Z None S 12 VDC or less 9 None Z There are manual overrides in 2 directions, on the top and on the side (solenoid side).

Process Pump

P Panel mount union U Union Ordering Example OUT side Tube size 4 x 3 LQ1U22-S Union SMC PB1313AS-1S07 Process pump PB1313AS-1S07 1 LQ1E21-S (Union elbow) 1 LQ1U22-S (Union) 1 LQ1E21-S Union elbow Tube size 6 x 4 Note) Fittings ordered together with the process pump will be shipped in a separate package.

3

(15 to 35C) 5% F .S. (0 to 50C) 2% F .S.

Clean Room Rodless Cylinder Series CYP ø15, ø32

Data L R S Piping Port Locaition Nil Operating direction Left Right L R S a b h g d c f e Note) Plugs are installed in ports other than those indicated for the model. Applicable Auto Switch/Refer to page 8-30-1 for further information on auto switches.

VZS2000

Other dimensions are the same as the grommet type. 3-7-12 5 Port Pilot Operated Solenoid Valve Metal Seal, Plug-in/Non Plug-in Series VZS2000 Non Plug-in 2 position double, 3 position closed center/exhaust center/pressure center Grommet 2 position double: VZS2250-G H(S)-01 3 position closed center: VZS2350-G H(S)-01 3 position exhaust center: VZS2450-G H(S)-01 3 position pressure center:

2-Color Display Digital Pressure Switch Series ZSE80(F)/ISE80(H)

Leakage 1 x 10 -10Pam3/s 1 x 10 -10Pam3/s 1 x 10 -5Pam3/s VCR compliant Swagelok compliant 1 x 10 -5Pam3/s Confirmation of the atmospheric pressure of a load lock chamber Applicable Fluid Examples VCR and Swagelok are registered trademarks of Swagelok Company.

Silencer Series AN

I O N S SERIES NAN SILENCER S Y M B O L S Model A B NAN101-N01 22.5 11 NAN110-N01 38 13 NAN120-M3 9 6 NAN120-M5 17 8 SERIES (N)AN SILENCER 14~2 Over 30 dB noise reduction Low back pressure Compact and easy mounting T E C H N I C A L SPECIFICATIONS S Y M B O L S Max Operating Pressure 1MPa / 145PSI Noise Reduction 30dB or more Ambient & Fluid Temperature 5~60C / 40~140F H O W T O O R D E R

AWM20 to AWM40

O S O S Min. clearance for maintenance Drain G A AWM30, AWM40 AWD30, AWD40 J N T M Panel fitting dimension D F Y W U Bracket (Option) S G B C R IN OUT Z Q V IN OUT AWM30/AWD30: Max. 3.5 AWM40/AWD40: Max. 5 K OUT P2 2-P1 (Port size) (Pressure gauge port size) Min. clearance for maintenance E Drain A Applicable model AWM20, AWM40/AWD20 to AWD40 Digital pressure switch Square embedded type pressure

AWM20 to AWM40

O S O S Min. clearance for maintenance Drain G A AWM30, AWM40 AWD30, AWD40 J N T M Panel fitting dimension D F Y W U Bracket (Option) S G B C R IN OUT Z Q V IN OUT AWM30/AWD30: Max. 3.5 AWM40/AWD40: Max. 5 K OUT P2 2-P1 (Port size) (Pressure gauge port size) Min. clearance for maintenance E Drain A Applicable model AWM20, AWM40/AWD20 to AWD40 Digital pressure switch Square embedded type pressure

New New 2-Color Display Digital Flow Switch ® (200 L type only) Applicable fluid Air, N2 Expanded flow range! Wide range of flow measurement with one product (100: 1) (100: 1) Setting resolution: 1 L/min Flow ratio Flow ratio is 10: 1 for current PF2A

S S OUT IN OUT IN IN IN Bottom With display rotating function One-touch fitting 8 Female thread Rc, NPT, G 1/4 OUT IN OUT IN S S IN 1 IN 1 Functions Bypass structure Sensor unit Protruding part (Refer to page 15 and 16 for details.)

3 Port Solenoid Valve

(Double solenoid) S D Rated voltage 24 VDC 12 VDC 5 6 Common Specification +COM. COM.

CKZ2N

T U 8F7 +0.013 +0.028 through 11 through 5 16 30 0.025 30 0.025 30 0.025 30 0.025 30 0.025 30 0.025 30 0.025 30 0.025 30 0.025 V W X R40 45 155 0.05 M10 x 1.5 1 16 1 R37 30 10.5 R9 30 26 NAAMS code Weight kg (lbs) A B C D E F G H I J K L M N O P Q R S T U V W X Part no.

Air Cylinder/Standard Type: Double Acting, Single Rod Series CG1

CG1N20-S-PS CG1N25-S-PS CG1N32-S-PS CG1N40-S-PS 20 25 32 40 CG1N20-S-PS CG1N25-S-PS CG1N32-S-PS CG1N40-S-PS NBR Piston seal !8 Disassembly/Replacement Caution Since the seal kit does not include a grease pack, order it separately. Grease pack part no.: GR-S-010 (10 g) 1. Do not replace the bushings. The bushings are press-fit.

ZB-OM00301

2 20m/s 2/ 2 150m/s 2 100m/s 110500Hz XYZ 2 () 2XYZ 3 3 1 / 1 ZB1-VQ110UZB1-VQ120UZB1-VQ110LZB1-VQ110N.C. 1 N.C.

Tamper Proof Speed Controller with One-touch Fitting Series AS


1F-T Elbow Type/Universal Type

Cylinder extension speed: 100 mm/s Meter-out needle fully open 100 mm/s Return speed Solenoid valve (Reference) Recommended circuit for high return speed When low extension speed and high return speed are desired, the following circuit using 3-port is recommended. Exhaust port (EA) Supply port (P) Exhaust port (EB) Fig.

Smooth Cylinder Series CQSY

CQSYB12 -30DCM 0.020 0.018 0.016 0.014 0.012 0.010 0.008 0.006 0.004 0.002 0.000 0.0 0.1 0.2 0.3 0.4 0.5 0.6 0.7 Pressure MPa Pressure equivalent to sliding resistance Average speed Average speed 2.52mm/s Speed mm/s Displacement mm Displacement mm 3.0 CA2D50-200N 2.60 mm/s 0 Speed wave form -3.0 Operating direction OUT Operating direction IN CA2YD50-200 30 Displacement wave form 15 5 seconds