Microspeed Cylinder

Use the correct plyers (C type snap ring mounting tool) for installation and removal. 1. Replacement parts/Seal kits To order the kits, use the order numbers for each bore size. 2. Be careful even when using the correct plyers (C type snap ring mounting tool).

ITV-E

0 2 I nput si gnal 010VD C I TV 0 3 Preset i nput t ypeI TV 0 4 Pow er suppl y 24VD C I TV 0 04 Brow n 1215VD C I TV 0 14 + Bl ue Pow er suppl y Fi g. 1 Rel at i on bet w een preset pressure and sw i t ch S1 W hi t e Preset pressure P_1 P_2 P_3 P_4 Bl ack S2 S1 O FF O N O FF O N S2 O FF O FF O N O N 5 W i ri ng di agram M oni t or out put CAU TI O N W hen t he m oni t or out put i

Compact Low Friction Cylinder Series MQQ ø10, ø16, ø20, ø25, ø30, ø40

2-M5 x 0.8 2 x 4-OA effective depth RA 2 x 4-OB Depth of counterbore RB F Q Y I 4-N through 0.2 D E M L B + Stroke K 0.2 A + Stroke M E 25, 30, 40 H effective thread depth C 2-Rc1/8 (NPT1/8, G1/8) F Q Y 2 x 4-OB Depth of counterbore RB 2 x 4-OA effective depth RA J I 4-N through 0.2 D W E M K L B + Stroke 0.2 A + Stroke M E (mm) Bore size (mm) Stroke range (mm) Note) A OA B C D E F H RB I

CEx-OMQ0010

No.CE-OMQ0010-C CE2 CE2 SMC 1 2 2 2-1. 89 2-2 10 2-2-1. 10 2-2-2. 11 3 1213 4 4-1. 14 4-2. 14 4-3. () 15 5 5-1. 16 5-2. 16 5-3 17 5-4 1718 6 6-1. 18 6-2 19 6-3. 19 7 7-1. 20 7-2. 2021 8 8-1 21 8-2. 2122 8-3. 22 8-4. 23 8-5. 2324 1 1) (ISO/IEC)(JIS) 2) *1) ISO 4414:Pneumatic fluid power General rules relating to systems.

Digital Flow Switch (Manifold type)

Repeatability 2%F.S.

Precautions 1

(n 2) 2 D-C7 D-C80 15 + 45 10 15 50 50 + 45 (n 2) (n = 2, 4, 6...) D-H7 D-H7W D-H7NF (n 2) 2 15 + 45 10 15 60 60 + 45 (n 2) (n = 2, 4, 6...) D-C73C D-C80C D-H7C (n 2) 2 15 + 50 10 15 65 65 + 50 (n 2) (n = 2, 4, 6...) (n 2) 2 D-B5/B64 D-G5NTL 15 + 50 75 + 55 (n 2) 10 15 75 (n = 2, 4, 6...) (n 2) 2 20 + 50 D-B59W 75 + 55 (n 2) 15 20 75 (n = 2, 4, 6...)

CUJ

Refer to page 2. 11 3.5 2-M3 x 0.5 (port size) M3 x 0.5 (Relief port: 10 See above) (Vacuum port: 11 See above) 3.5 3 C + Stroke B + Stroke A + Stroke (mm) Without auto switch With auto switch A B C A B C Bore size (mm) 24 18 29 23 11.5 16.5 6, 8, 10 4 Series CUJ Construction Double acting !3 w e q !1 r y o e t !2 For 4 Built-in magnet Without magnet Single acting u i r y o e w i e u !

5 Port Solenoid Valve, Body Ported Type/Flip Plug-in Unit, Series VQ1000

How to Order Applicable Valves VQ 2 0 5 0 Y 1 B Series VQ2000 A B C D Type of actuation Function Manual override Non-locking push type (tool required) Slotted locking type (tool required) Knob locking type (manual type) C D A Specifications Symbol 1 2 3 4 5 2 position single 2 position double 3 position closed center 3 position exhaust center 3 position pressure center DC Nil B C Nil Standard

Digital Pressure Switch

Panel mount adapter E ZS-35-D ZS-35-F Panel mount adapter + Front protective cover F ZS-35-G Accessories 1 / Part numbers Part number Option 1 ZS-24-A Bracket A with 2 mounting screws each of M3 x 5 L, M4 x 5 L ZS-24-B Bracket B with 2 mounting screws M4 x 5 L ZS-24-D Bracket D with 2 mounting screws each of M3 x 5 L, M4 x 5 L ZS-35-C Panel mount adapter (piping specification: 01, N01) ZS

O

0 2 I nput si gnal 010VD C I TV 0 3 Preset i nput t ypeI TV 0 4 Pow er suppl y 24VD C I TV 0 04 Brow n 1215VD C I TV 0 14 + Bl ue Pow er suppl y Fi g. 1 Rel at i on bet w een preset pressure and sw i t ch S1 W hi t e Preset pressure P_1 P_2 P_3 P_4 Bl ack S2 S1 O FF O N O FF O N S2 O FF O FF O N O N 5 W i ri ng di agram M oni t or out put CAU TI O N W hen t he m oni t or out put i

O

0 2 I nput si gnal 010VD C I TV 0 3 Preset i nput t ypeI TV 0 4 Pow er suppl y 24VD C I TV 0 04 Brow n 1215VD C I TV 0 14 + Bl ue Pow er suppl y Fi g. 1 Rel at i on bet w een preset pressure and sw i t ch S1 W hi t e Preset pressure P_1 P_2 P_3 P_4 Bl ack S2 S1 O FF O N O FF O N S2 O FF O FF O N O N 5 W i ri ng di agram M oni t or out put CAU TI O N W hen t he m oni t or out put i

Fieldbus System

B: Locking type (Tool required) 2-position double (Metal) 4-position dual 3-port valve (B) (A) 4 (B) 2 (A) 4 (B) 2 Note) B 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) N.O. N.O. 2 2-position double (Rubber) 4-position dual 3-port valve (C) (A) 4 (B) 2 (A) 4 (B) 2 C: Locking type (Manual) Note) C 5 (R1) 3 (R2) 1 (P) 1 (P) 5 (R1) 3 (R2) N.C.

Manifold Specifications

Flow Characteristics Port size Manifold C [dm 3/(sbar)] b Cv C [dm 3/(sbar)] b Cv Flow characteristics 1(P), 5/3(R) port 2(B), 4(A) port 1 4/2 (P A/B) 4/2 5/3 (A/B R) VV5Z5-21P-01 VV5Z5-21P-C6 VV5Z5-21P-C8 VZ523 1/4 1/4 1/4 1/8 C6 C8 2.1 1.4 1.8 0.36 0.32 0.37 0.55 0.36 0.50 2.3 2.1 2.1 0.26 0.24 0.20 0.54 0.50 0.50 Note) Value at manifold base mounted, 2 position single operating How

HRX-OM-W002

2 5 4 4 4 1 1 1 1 1 1 21 21 11 9 8 6 3 9 3 3 22 23 25 26 27 28 23 7 5 2 2 5 2 5 35 36 20 12 10 15 16 17 18 19 13 15 10 16 17 4 4 4 34 24 14 2B 1B 2A 3A 1A 3B Main Board PCB2 2/2 1/2 23 22 25 26 27 22 37 38 39 40 32 20 20 21 10 12 13 15 16 15 16 18 24 24 11 14 3 9 8 6 2 7 7 2 5 (CN8) 4 4 1 1 1 5 1 21 11 3 9 8 6 1 23 2 22 25 26 27 1 22 2 2 7 7 6 2 7 5 (CN5) 1 37 2 38 4 39 3 40 32 3 20 2 20

Series CQS Compact Cylinder Compact Type ø12, ø16, ø20, ø25

2, !3 and !

Process Valve

6 to 8 (D, DL) Pg9 Pilot port 12 (P1), 10 (P2) Port size: refer to table below G (Air operated) H (Grommet: G) I (DIN terminal: D, DZ) Manual override (Non-locking push type) P2 P1 F E D B A A J B C Main port 1(A) (Back side 2 (B)) Port size: refer to table below Main port 1(A), 2(B) Pilot port 12(P1), 10(P2) A B C D E F G H I J Model VNB5-32A VNB6-40A VNB7-50A 1 8 1 4 1 4 1 4 1 2 1 1 2

Digital Flow Switch (Integrated display type)

to 92.7 4 to 186 8 to 371 Instantaneous CFM x 10-2 CFM x 10-2 CFM x 10-2 CFM x 10-2 Setting/Display flow range flow CO2 0.8 to 18.5 1.8 to 46.3 4 to 93 8 to 185 CFM x 10-2 CFM x 10-2 CFM x 10-2 CFM x 10-2 Min. setting/display unit 0.1 CFM x 10-2 0.1 CFM x 10-2 1 CFM x 10-2 1 CFM x 10-2 Accumulated Setting/Display flow range 0.0 to 9.0 0.0 to 9.9 0 to 9 0 to 9 ft3 x 10-1 ft3 x 10-1 ft3 x

DOC1023126

Speed loop I constant A 100 100 10 to 200 B 100 80 C 100 100 Positioning time level 2 2 Sets the time to generate the positioning time error alarm. (Unit: s) 0.1 to 25.5 75 - *1 After changing the rotation direction reference and turning on the power again, return to origin is executed with the first movement command.

Air cylinder

Specifications 2. Installation and Handling P4 2-1. Air supply 2-2. Design 2-3. Mounting and Installation 2-4. Environment 2-5. Speed control 2-6. Allowable kinetic energy 2-7. Air cushion 2-8. Control direction 2-9-1.Mounting brackets 2-9-2.Auto switches 3. Maintenance P25 3-1. Checks 3-2. Replacement of seals 3-3. Consumable parts 3-4. Troubleshooting 4.

Profi-E

Pow er suppl y G N D Bl ue connect or ( Pl ug) 2 N . C. N . C. 3 Com m uni cat i on connect or ( Socket ) ( N ot e 2) RXD /TXD _N A G reen 4 5 N . C. 2 RXD /TXD _PB Red N . C. N ot e 1. W i re col or w hen SM C cabl e i s used. N ot e 2. SM C s PCA1557691 ( cabl e w i t h shi el d) i s recom m ended as t he com m uni cat i on cabl e.