XLAQ/XLDQ

Caution Bonnet assembly Bonnet Assembly: Component Part No.: q Model Flange (Valve) size Temperature specifications Indicator 16 25 40 50 XLAQ16-30-1 XLAQ25-30-1 XLAQ40-30-1 XLAQ50-30-1 General use XLAQ16A-30-1 XLAQ25A-30-1 XLAQ40A-30-1 XLAQ50A-30-1 XLAQ XLAQ16-30-1H XLAQ25-30-1H XLAQ40-30-1H XLAQ50-30-1H High temperature XLAQ16A-30-1H XLAQ25A-30-1H XLAQ40A-30-1H XLAQ50A-30-1H General

PFxx-OMU0002

If a button operation is not performed for 30 seconds during the setting, the display will flash.

HRX-OM-Z002

at an ambient temperature of 30 oC.

XL-OMY0002

-1 XLD40-30-1 XLD50-30-1 XLD25-30-1H XLD40-30-1H XLD50-30-1H 63 80 100 160 XLD63-30-1 XLD80-30-1 XLD100-30-1 XLD160-30-1 XLD63-30-1H XLD80-30-1H XLD100-30-1H XLD160-30-1H 1) M9// XLD25-30-1-M9// 2) 3) FKM:No.1349-80XLD25-30-1-XN1 4) S / 25 40 50 AS568-030V AS568-035V AS568-039V AS568-030 ** AS568-035 ** AS568-039 ** B2401-V24V B2401-P42V AS568-227V B2401-V24 ** B2401-P42 ** AS568-227

Rotary Table

Table 9 Port size Size Port size Size Port size A1, B1 A2, B2 10 M5x0.8 10 20 20 A1 30 Rc1/8 30 50 50 M5x0.8 B2 B1 G1/8 70 70 NPT1/8 100 100 Fig. 8 NPTF1/8 200 200 Rotary table ports and plate have a fixed orifice. Do not make the diameter of this hole larger by additional processing.

Low-Speed Rotary Actuator

Body pin hole Size Tightening torque 10 0.2 to 0.3Nm 15 0.3 to 0.5Nm 20 4.2 to 5.2Nm 30 4.2 to 5.2Nm 40 7.2 to 8.7Nm Size 10 , 15 Cover Assembly End cover Assembly Body pin hole Hexagon socket head bolt Fig.22 Size 20 , 30 , 40 (6) Perform operation test after assembling and check external leakage.

JXCx-OMU0026

20 30 20 30 20 Min. speed [mm/s] (Speed tuning control) 38 25 38 25 38 25 -113No.

LEJ-OM002xx

[LECSA] LEJS40 LEJS63 LEJB40 LEJB63 Series Lead symbol H A B H A B T Lead 24 16 8 30 20 10 27 42 Parameter Para.

High Vacuum L Type Valve

Bonnet assembly/construction part number:1 Temperature Valve size specifications 25 40 50 General use XLD25-30-1 XLD40-30-1 XLD50-30-1 High temperature XLD25-30-1H XLD40-30-1H XLD50-30-1H Temperature Valve size specifications 63 80 100 160 General use XLD63-30-1 XLD80-30-1 XLD100-30-1 XLD160-30-1 High temperature XLD63-30-1H XLD80-30-1H XLD100-30-1H XLD160-30-1H Note1) The magnet for auto

SX

SX3000-77-1A SX5000-77-1A SX3000 SX5000 51 80.8 97 26 mm2 SX5000 (10) 30 mm2 1-6-85 86 Manifold Option D-sub connector (25 pins)/Cable assembly D-sub Connector Cable Assembly Terminal No. AXT100-DS25015 030 050 L Terminal no.

70pvpump

LVD PAX1000, PA3000, PA5000 LVQ Proper tightening torque (Nm) Connection threads Rc 1/4 12 to 14 LQ Rc 3/8 22 to 24 LVN Rc 1/2 28 to 30 Rc 3/4 28 to 30 TI/ TIL 3. Ensure space for maintenance. When installing and mounting, be sure to allow the space required for maintenance and inspections. Confirm the necessary maintenance space in the instruction manual for each piece of equipment.

Series VCS

For sonic range Where P1 = 0.10132 (P2 + 0.1013) Formula based on Cv factor Q = 98.9Cv (P1 + 0.1013) kg/h Formula based on effective area Q = 5.5S (P1 + 0.1013) kg/h 1 5 20 3 4 20 1 0 30 40 30 20 40 20 30 30 40 20 50 60 60 50 40 30 20 3 4 30 40 50 Figures inside [ ] indicate the saturated steam holding heat (kcal/kg). Figures inside ( ) indicate the saturation temperature (C).

Vacuum

How To Order o) -r Same as standard except as noted below: c ; -30 o a o : -ls 6 = r . / c E E E E V 't .= (g< () 15 30 45 60 75 90 Supply Pressure (PSl) e Air Piloted Valve Type . Non-electric unit with pilot port control of internal poppet valves. . Supply valve port only; or supply valve and release valve ports. . All other specitications are same as standard unit.

17

Load Mass Allowable Moment MY1B/M1 MY1B/M3 MY1B/M2 MY1B/m1 200 200 200 300 400 500 20 30 40 50 100 100 50 20 30 40 100 50 10 40 30 20 30 40 50 5 4 3 2 10 Load mass kg Moment Nm Moment Nm Moment Nm 20 5 4 3 2 10 1 10 MY1B40 5 4 3 2 MY1B40 MY1B40 MY1B32 MY1B25 MY1B40 0.2 0.3 0.4 0.5 MY1B32 5 4 3 1 MY1B32 MY1B32 MY1B25 0.5 0.4 1 MY1B25 MY1B25 D0.1 0.3 0.2 2 0.5 0.4 0.3 0.05 0.04 0.03 0.2 -X

Vacuum

How To Order o) -r Same as standard except as noted below: c ; -30 o a o : -ls 6 = r . / c E E E E V 't .= (g< () 15 30 45 60 75 90 Supply Pressure (PSl) e Air Piloted Valve Type . Non-electric unit with pilot port control of internal poppet valves. . Supply valve port only; or supply valve and release valve ports. . All other specitications are same as standard unit.

VPMW-701-30-FM-B85 N.C., 30 PSI, Flush Mount, Nylon 1/8" ID Barbed Fitting VPMW-701-30-FM-P80 N.C., 30 PSI, Flush Mount, Polysulfone 1/16" ID Barbed Fitting VPMW-701-30-FM-P85 N.C., 30 PSI, Flush Mount, Polysulfone 1/8" ID Barbed Fitting VPMW-701-30-FM-OT1 N.C., 30 PSI, Flush Mount, 1/8" O.D.

VPMW-701-30-FM-B85 N.C., 30 PSI, Flush Mount, Nylon 1/8" ID Barbed Fitting VPMW-701-30-FM-P80 N.C., 30 PSI, Flush Mount, Polysulfone 1/16" ID Barbed Fitting VPMW-701-30-FM-P85 N.C., 30 PSI, Flush Mount, Polysulfone 1/8" ID Barbed Fitting VPMW-701-30-FM-OT1 N.C., 30 PSI, Flush Mount, 1/8" O.D.

VPMW-701-30-FM-B85 N.C., 30 PSI, Flush Mount, Nylon 1/8" ID Barbed Fitting VPMW-701-30-FM-P80 N.C., 30 PSI, Flush Mount, Polysulfone 1/16" ID Barbed Fitting VPMW-701-30-FM-P85 N.C., 30 PSI, Flush Mount, Polysulfone 1/8" ID Barbed Fitting VPMW-701-30-FM-OT1 N.C., 30 PSI, Flush Mount, 1/8" O.D.

VPMW-701-30-FM-B85 N.C., 30 PSI, Flush Mount, Nylon 1/8" ID Barbed Fitting VPMW-701-30-FM-P80 N.C., 30 PSI, Flush Mount, Polysulfone 1/16" ID Barbed Fitting VPMW-701-30-FM-P85 N.C., 30 PSI, Flush Mount, Polysulfone 1/8" ID Barbed Fitting VPMW-701-30-FM-OT1 N.C., 30 PSI, Flush Mount, 1/8" O.D.

VPMW-701-30-FM-B85 N.C., 30 PSI, Flush Mount, Nylon 1/8" ID Barbed Fitting VPMW-701-30-FM-P80 N.C., 30 PSI, Flush Mount, Polysulfone 1/16" ID Barbed Fitting VPMW-701-30-FM-P85 N.C., 30 PSI, Flush Mount, Polysulfone 1/8" ID Barbed Fitting VPMW-701-30-FM-OT1 N.C., 30 PSI, Flush Mount, 1/8" O.D.