,

P-EX01-2A Solenoid Valve (with M Connector) Conforming to ISO 15407-1 , , ISO 15407-1 Interface Large capacity Size 01 (EVS1-01) and Size 02 (EVS1-02) Interface conforms to ISO 15407-1 Flow rate Cylinder driving size EVS1-01 (Size: 01) EVS1-02 (Size: 02) 100 80 1000L/min (ANR) 400L/min (ANR) Accommodates enclosure IP65 Dust/Splashproof type Light weight Size 01 (3-position): 0.26kg Size 02

Solenoid Valve (with M Connector) Conforming to ISO 15407-1 Series EVS1-01, 1-02

Solenoid Valve (with M Connector) Conforming to ISO 15407-1 , , ISO 15407-1 Interface Large capacity Size 01 (EVS1-01) and Size 02 (EVS1-02) Interface conforms to ISO 15407-1 Flow rate Cylinder driving size EVS1-01 (Size: 01) EVS1-02 (Size: 02) 100 80 1000L/min (ANR) 400L/min (ANR) Accommodates enclosure IP65 Dust/Splashproof type Light weight Size 01 (3-position): 0.26kg Size 02 (3-position

Series SYJ300/500/700 3 Port Solenoid Valve Rubber Seal

Stations S42R Type Coil is located on same side as the A port. 2 stations 02 Coil is located on same side as the A port. S ... ...

3 Port Air Operated Valve Series SYJA300

Nil Applicable blanking plate assembly SYJ300-10-2A 02 2 stations Pilot valve is on the A port side.

4/5 Port Air Operated Valve Series SYJA3000

Valve mounting direction Stations P, R port thread type 02 2 stations Single solenoid coil is on opposite side as the A, B port. Nil : : Nil Rc Single solenoid coil is on same side as the A, B port.

Clean Gas Filter

2) SFA102SFA202SFA302 Connection Model (A) (B) SFA102-02 Tube 89 76 TSJ1/4 SFA202-02 Swage 93 96 SFA302-02 Joint 101 120 ()Reference dimensions 3) SFA103SFA203SFA303 Connection Model (A) (B) SFA103-02 Union 117 76 UOJ1/4 SFA203-02 O Ring 122 96 SFA303-02 Joint 130 120 ()Reference dimensions -8- 3.

Process Pump

For AIR EXH: AN20-02 (: Either Nil or N is entered as a thread symbol.)

A_HEC-OM-J017

Temperature setting (without writing EEPROM) No 02 31 32 35 30 30 03 3F 38 0D 06 0D Set at 25.0 deg.C 31 32 Reading internal sensor No 05 32 33 32 0D 02 32 32 35 30 32 03 3F 3B 0D Answer 25.02 deg.C 33 Reading external sensor No 05 33 33 33 0D 02 33 33 30 30 32 03 3F 38 0D Answer 30.02 deg.C 34 Reading alarm status No 05 34 33 34 0D 02 34 30 38 30 03 3C 3C 0D Answer ERR11 Answer -1.52 deg.C

VQ4000

03 02 03 VVQ4000-P-1(Plug-in type) 163 (Plug-in type) VVQ4000-P-5(Plug lead type) 115.5 (Plug lead type) 25 12.5 73 By mounting individual SUP spacers on a manifold block, it is possible to provide individual supply ports for each valve. 26.4 1(P) 4(A) Rc 3/8 2(B) 1(P') 5(R1) 3(R2) Circuit diagram Plug-in type Plug lead type Individual EXH spacer 02 03 VVQ4000-R-1(Plug-in type) 163 (Plug-in

Manifold Specifications

01 02 VK VZ Block plate Individual SUP spacer VF VFR VP4 VZS Double check spacer Plug-in type: VVZS3000-22A-1 Non-plug-in type: VVZS3000-22A-2 VFS RC 1/8, 1/4 VS4 SUP port VQ7 Individual EXH spacer Plug-in type: VVZS3000-R-02-1 Non plug-in type: VVZS3000-R-02-2 EVS VFN Double check spacer Individual EXH spacer EXH port ( ): Plug-in type 3-7-37 Series VZS3000 Exploded View of Manifold Non

Direct Operated Solenoid Valve Metal Seal Series VS4
10 1

Description AXT336-1A-1 01 02 01 02 01 02 02 03 02 03 02 03 02 03 Manifold block assembly AXT336-1A-2 AXT336-1A-3 AXT336-2A-1AXT336-2A-2AXT336-3A-1AXT336-3A-2q End plate (U side) assembly w End plate (D side) assembly e Terminal assembly Junction cover assembly Tie-rod r t y Replacement Parts No. u Description Material Carbon steel NBR NBR Part no.

Free Mount Cylinder Series CU

Elbow/Universal Type Air Flow/Effective Area Model AS121FM-M5 AS131FM-M5 AS221FM-01 AS231FM-01 AS221FM-02 AS231FM-02 6, 8 3.2, 4 8, 10 3.2, 4, 6 Metric size 6 4 Tubing O.D. 1/8", 5/32", 3/16" 1/4" 3/16", 1/4" 5/16" 1/4", 5/16" 3/8" 1/8", 5/32" Inch size 5/32" 3/16" 7 12 Air flow (l/min (ANR)) 38 Controlled flow 0.1 0.2 Effective area (mm2) 0.6 230 180 460 100 Flow rate (l/min (ANR)) 260 390

Clean Gas Filter Clean Gas Strainer

Case, Cover Stainless steel 316 (Interior/Exterior: Electrolytic polishing) SFB10PTFE membrane Filter medium Main material SFB20-02 Stainless steel 316 sintered metal Seal Fluororubber (FKM) Packaging Antistatic sealed double package -7- 2-3 Dimensions 1) SFB100-02,SFB200-02: Rc1/4 SFB101-02,SFB201-02: NPT1/4 SFB104-M5: M5 2) SFB102-02,SFB202-02: TSJ1/4 (Tube Swage Joint) 3) SFB103-02,SFB203

Series 12-CY3B Magnetic rodless cylinder ø15, ø20, ø25, ø32, ø40

Operation of the cylinder with its body fixed will damage the wear ring, resulting in increase of particle generation or malfunction. 12-REA40 10-AS2001F-06-X214 10-AS2301F-02-06-X214 10-AS2201F-02-06-X214 12-REA50 10-AS3001F-08-X214 10-AS3301F-02-08-X214 10-AS3201F-02-08-X214 12-REA63 10-AS3001F-08-X214 10-AS3301F-02-08-X214 10-AS3201F-02-08-X214 Although speed adjustment is possible with

2-Color Display Digital Flow Switch Series PFM

A B A B 4 (5/32") 10.1 8.1 4 (5/32") 10.1 36.1 6 10.3 8.3 6 10.3 36.3 8 (5/16") 12 10 8 (5/16") 12 37 1/4 10.3 8.3 1/4 10.3 36.3 PFM S-01/02--X693 PFM S-01/02--X694 7 5 7 5 10.2 10.2 (34.2) 43 1 43 1 A PFM A 51.5 (Max. 58.5) 51.5 (Max. 58.5) PFMV IN OUT 3 (34.2) PF2A 13 3 13 PF2W PF2D C 18 C 18 OUT IN B 48 20 20 48 B IF 2 x 3.4 2 x 3.4 C (Width across flats) C (Width across flats) A B A B

Ionizer Nozzle type IZN10 Series IZS

Maintenance detection signal ON OFF Output Requirement for maintenance detected ON OFF Input External switch signal 1, 2 455 IZN10 Series Dimensions 06 07 06 07 Energy saving static neutralization nozzle/IZN10-01 High flow rate nozzle/IZN10-02 20 Note 1) (110) 16 100 5 5 46 A 3.4 18.5 11 6 5 6 A 8 7 (Tap for ground wiring) M3 x 0.5 depth 4 40 25 12 A 93.6 A-A (mm) A Model 01 02 01 02 IZN1006

Series AP500

2PW Delivery pressure Bonnet option Delivery pressure 1 to 30 psig (0.007 to 0.2 MPa) 2 to 60 psig (0.014 to 0.4 MPa) 2 to 100 psig (0.014 to 0.7 MPa) 5 to 150 psig (0.034 to 1.0 MPa) Code Bonnet Standard Panel installation 4) Code 02 06 10 15 No code P Connections (Inletq, Outletw) 4) Panel mounting hole: dia. 1.56 inch (39.6 mm).

5 Port Air Operated Valve Series SYA3000/5000/7000 1

1 5 Port Air Operated Valve Series SYA3000/5000/7000 How to Order SA One-touch fitting (Inch size) A, B port size Thread type VA Thread piping Nil Rc Symbol Port size Applicable series M5 01 02 Symbol Port size Applicable series N3 N7 N3 N7 N9 N7 N9 G F SA 5 32" SYA3000 SYA5000 SYA7000 One-touch fitting for M5 x 0.8 N NPT SYA3000 1 4" 1 8 1 4 One-touch fitting for NPTF T VA 5 32" One-touch

SYA3000/5000/7000

5 Port Air Operated Valve Series SYA3000/5000/7000 How to Order One-touch fitting (Inch size) A, B port size Thread type Thread piping Rc Nil Symbol Port size Applicable series M5 01 02 Symbol Port size Applicable series N3 N7 N3 N7 N9 N9 N11 G F 5 32" SYA3000 SYA5000 SYA7000 M5 x 0.8 One-touch fitting for N NPT SYA3000 1 8 1 4 Except for M5 1 4" One-touch fitting for NPTF T 5 32" One-touch

5 Port Air Operated Valve SYA3000/5000/7000 Series

5 Port Air Operated Valve SYA3000/5000/7000 Series How to Order A, B port size Thread type Thread piping One-touch fitting (Inch size) Nil Rc Symbol Port size Applicable series M5 01 02 Symbol Port size Applicable series N3 N7 N3 N7 N9 N9 N11 G F 5 32" SYA3000 SYA5000 SYA7000 One-touch fitting for M5 x 0.8 N NPT SYA3000 1 4" 1 8 1 4 Except for M5 One-touch fitting for NPTF T 5 32" One-touch