[Option] 3 Port Solenoid Valve Direct Operated Poppet Type VT317 Series Rubber Seal

Exhaust port type 1 Common exhaust 17 17 stations Manifold Specifications Common exhaust Manifold type B mount 17 stations Note) Max. number of stations Applicable solenoid valve VO325-00(-Q) Port location/Port size Port direction P Exhaust port type P R A A R Base Base Base Common Side Side/Bottom Side 1 4 3 8 , 1 4 3 8 , 1 4 3 8 , Option Blanking plate (With gasket, screw) DXT083-21A

Compact End Lock Cylinder Series CBQ2

With front lock Bore size (mm) L L1 A A FV M 80.5 73 7 28.5 32 90 79.5 7 28.5 40 4-FD FT L 92.5 82.5 8 33.5 50 B + Stroke A + Stroke FZ FX 94 88 8 33.5 63 Rod end male threads Dimensions other than A, L and L1 are the same as the front flange type.

Vacuum Pad with Ejector ZHP Series Pad Diameter: ø63, ø80 ZK2 ZQ Ejector and pad are integrated. ZR Space saving and reduced piping labor! Bellows type with groove ZB ZA Two-stage ejector ZX More efficient ejector 30% reduced 50% increased ZM Air Suction

Note 8 Pad ZP3E-mmm Flat/Bellows type with groove r 9 Plate ZHP1-PLm-A 10 Holder ZM u e 11 Plug TB00148 Included for metric size ZL TB00055 Included for inch size q w 12 One-touch fitting KJHm-C2 ZH 13 Ejector assembly ZK2-EJmW-A A A 14 Silencer assembly ZHP1-SA1-A ZH 15 Lock screw CA00284 Included ZH -X267 3 pieces are included in one product. (The part numbers are for 1 piece.) !

AMH

Option J: With drain guide Bracket (Option) female thread T: With element service indicator Maintenance space Drain Element service indicator Dimensions with mounting bracket Model Port size (Nominal size B) A B C D E F G H 10 10 10 10 10 10 10 10 10 I 56 66 66 80 80 90 90 100 150 J 15 20 17 22 19 25 21 30 40 K 5 8 8 8 8 10 10 10 15 L 9 12 12 14 14 14 14 16 20 M 5.5 6 6 7 7 9 9 9 11 N 35

AMF

198 I 56 66 66 80 80 J 15 20 17 22 19 K 5 8 8 8 8 L 9 12 12 14 14 N 35 40 40 50 50 O 54 66 66 80 80 P 70 84 84 100 100 Q 26 28 28 34 34 R 4.5 5 5 5 5 S 1.6 2.0 2.0 2.3 2.3 1 8 1 4 3 8 , , 7.5 4 4 5 5 AMF150 5.5 6 6 7 7 139 152 158 184 190 13 13 16 16 19 55 66 72 92 98 63 76 76 90 90 63 76 76 90 90 10 10 10 10 10 1 4 3 8 , AMF250 1 2 3 8 1 2 , AMF350 3 4 14-20-46 6 Odor Removal Filter Series

AME

1/4, 3/8 1/2 3/8, 1/2 3/4 5.5 6 6 7 7 139 152 158 184 190 13 13 16 16 19 55 66 72 92 98 63 76 76 90 90 7.5 4 4 5 5 63 76 76 90 90 10 10 10 10 10 AME150 AME250 AME350 AME150SAME, #1 AME350SAME, #3 AME250SAME, #2 4.6-25 Super Mist Separator Series AME Dimensions: AME450 to AME850 HAl AT IDl AMG AFF M Dimensions with mounting bracket Model Port size (Nominal size B) A H AMl B C D E F G I 221

Rubber Seal 5 Port Solenoid Valve Series SY3000/5000

4.68 (0.26) A/BR 4.68 (0.26) C8: PA/B 12.6 (0.7) A/BR 12.6 (0.7) A, B port piping specifications SY3000 SY5000 SY3000 Operating pressure range External pilot operating pressure range MPa 2 position single Pilot pressure range 2 position double 0.25 to 0.7 Port size 3 position A/B ports Ambient and fluid temperature C Maximum 50 10 3 5 3 SY5000 2 position single, double 3 position Max. operating

CYV

Note 3) A particulate generation test has been conducted in a vacuum environment of 10-Pa. a t e l u g c 2 Stainless steel linear guide & low particulate generation vacuum grease e i t n r a e p r a 0.0 10 0 20 10 w t i o o n L Operation cycles a t e l u g c e 1 i t n r a e Particulate generation from the linear guide unit has been reduced with the use of a stainless steel linear guide and

Soft Start-up Valve AV2000/3000/4000/5000

duty cord O.D.: 6, 8 K A Manual override (locking lever type) A M 300mm (lead wire length) I With indicator light/ surge voltage suppressor G G Manual override (locking lever type) Pressure gauge mounting bore 1/8 Port size Indicator light ON OFF OFF ON B B H H N P A P A 37 37 Q Q C C Pressure gauge mounting bore 1/8 4-R R 4-R 36.8 E 36.8 E R P P D D + + MADE IN JAPAN MADE IN JAPAN Model

EX510-GMJ1.eng

/CLR, number of stations occupied and mode are performed with SW2. 10 9 8 7 6 5 4 3 2 1 ON ON Station number setting (Switch No.1 to 7) Set tens digit of station number 10, 20 and 40, and set ones digit of station number 1, 2, 4 and 8.

Air Suction Filter With One-touch Fittings Series ZFB 1

IN side, OUT side 4 10 22 20 22 30 30 50 30 75 39 75 39 Recommended air flow Tubing size Model ZFB100-04 ZFB100-06 ZFB200-06 ZFB200-08 ZFB300-08 ZFB300-10 6 6 8 8 10 Unrestricted 360 piping tube mounting. The connector for the IN side is a universal joint type that enables a tube to be connected in any direction within 360.

5 Port Solenoid Valve Series SQ1000/2000

A A B A B A B A B A B A B 122.3 4 A SMC 53.6 2 B 37.6 18.5 Approx. 12 Approx. 12 EXH. outlet Applicable connector: Flat cable connector (20P) (conforms to MIL-C-83503) Triangle mark indicator position Approx. 10 D side U side Station 1 2 3 4 5 6 7 8 n C10: R(EXH) port For top ports C10: P(SUP) port 4 A 3 4 A 4 A 4 A 4 A 4 A 4 A 4 A R 62 41.5 (58) 39.5 P B 2 B 2 B 2 B 2 B 2 B 2 B 2 B 2 25.5

CEx-OMQ0013

10m C 15 15m 20 20m A B CD E F G () 16 5. 5-1 17 18 5-2 19 5-3 20 6. 6-1 1 3 4 7 5 2 6 8 9 10 11 6-2 1 11 10 9 2 3 4 5 6 7 8 12 AC DC LCD 21 7. 7-1 7-1-1 1 ISO VG32 060 1m 7-1-2 M4 DIN [050] [25%85%] [1055Hz 0.75mmXYZ 2 ] 7-2 7-2-1 AC100V15AC85VAC115V 50/60Hz DC24V100.4A 2 0.75mm 2D FG0.75mm 100 FG FG 7-2-2 5m 20m5m20m CE1-H0374 22 CE1-R 20m 200m 5m 20m * A DC12V

CU

) Port size Bore size (mm) GA H J JA A B A' C CA CB D E GB 20 25 32 29 32.5 35 19 23 27 16 20 24 12 15 19 26 32 40 42 50 62 20 25 31 22 25 31 9 10 11 27 22.5 25 14 18 22 12 15.5 19.5 8 10 12 M5 x 0.8 M5 x 0.8 Rc 1/8 Bore size (mm) NN T S Z K KA L MM P Q R Standard strokes 20 25 32 M5 x 0.8 with depth 8 M5 x 0.8 with depth 8 M6 x 1.0 with depth 9 9.3 with depth 8 9.3 with depth 9 11 with depth

Speed Controller with Residual Pressure Release Valve with One-touch Fitting AS  FE Series

10 6 8 10 12 12 10 6 8 10 Tubing O.D.

ZSE30A(F)/ISE30A

(Maximum transmission distance 4 m) 1) The sensors are connected by a dedicated lead wire (ZS-38-5L (for master and one slave) or ZS-38-U (for master and up to 10 slaves)). Copying is performed through a dedicated communication line. 2) Select the slave switch which is to be the master, and change it into a master using the buttons.

VXA21/22

1.5 0.4 340 10 4.5 6 8 250 1.0 3 8 (10A) 340 0.4 10 10 1 2 (15A) 420 Note) Refer to Glossary on page 17-3-15 for details of max. operating pressure differential and max. system pressure.

Turntable Cylinder Series MGT

Rc3/8 9 8 8 14 17.5 20 124 156 188 148 198 236 39 41 51 52 52 72 50 54 47 38 42 35 128 128 148 28 28 48 110 140 166 142 180 210 28 25.5 32.5 63 80 100 88 92 85 (mm) Bore size (mm) X XA XB XC XL YY YL Z 24 28 11 8 10 10 6 7 7 5 6 6 80 100 124 4 5 5 20 24 28 63 80 100 M10 X 1.5 M12 X 1.75 M14 X 2.0 (mm) MGTM (Slide bearing) MGTL (Ball bushing) (mm) AA E BD Bore size (mm) AA A E DB Bore size

PSxx-OMU0005CN

HNBR C3604 SUS304NBR POMSUS304NBRC3604 24 g 34 g 36 g 30 g 30 g +39 g 0.15 mm 2(AWG26) 1.0 mm (5 ) 3.5 -78No.PS-OMU0005CN-C M5 7 3.5 01/N01 A 01 R1/8 10 N01 NPT1/8 12 C4LC6L 4 A B C4L 17.5 8.2 C6L 18.3 10.4 -79No.PS-OMU0005CN-C A B -80No.PS-OMU0005CN-C 0.5~7 + 0.5~7 -81No.PS-OMU0005CN-C 2 (n ) <> <> 31n +3.5(n -1) 31n +3.5(n -1) -82No.PS-OMU0005CN-C Revision history A [2018

Mini-rotary Actuator Rack & Pinion Style Series CRJ Size: 05, 1 1

35) 10 (10) 16.5 19.2 18.4 21.6 20.5 23.2 22.4 25.6 05 20 10 A A 30 (25) 10 (10) 1 15 10 For D-F9, D-M9 Operating angle m: Value of the operating range Lm of a single auto switch converted to an axial rotating angle.