VG342

(Normally open) B 4 VP 5 6 24 VDC 12 VDC Thread type VG Rc Nil G F 7 240 VAC, 50/60 Hz 9 Other VP NPT N Option NPTF T Electrical entry S070 G Grommet D DIN terminal Port size VQ 04 06 10 1 2 Rc T Conduit terminal E Grommet terminal 3 4 Rc Rc 1 VKF Light/Surge voltage suppressor VQZ Nil None S With surge voltage suppressor (Only grommet type is only available.)

Vacuum Pad with Ejector ZHP Series Pad Diameter: ø63, ø80 ZK2 ZQ Ejector and pad are integrated. ZR Space saving and reduced piping labor! Bellows type with groove ZB ZA Two-stage ejector ZX More efficient ejector 30% reduced 50% increased ZM Air Suction

20 10 0 100 Suction flow [L/min(ANR)] Air consumption [L/min(ANR)] Vacuum pressure Vacuum pressure [kPa] Vacuum pressure [kPa] 80 60 Suction flow 40 20 Air consumption 0 0 10 20 30 40 Supply pressure [MPa] Suction flow [L/min(ANR)] ZHP-10 ZHP-10 (Supply pressure: 0.35 MPa) 100 90 80 70 60 50 40 30 20 10 0 0 0.1 0.2 0.3 0.4 0.5 0.6 100 90 80 70 60 50 40 30 20 10 0 100 Suction flow [L/min(

AMF

Q 50 R 88 S 3.2 AM 1 2 3 4 , 9 36 205 19 100 106 3 106 10 AMF450 212 22 107 106 3 106 10 36 221 21 10 14 9 90 55 110 50 88 3.2 1 Misc. , , , 1 1 4.5 4.5 6 3 4 257 314 406 30 40 30 10 15 15 16 20 24 9 11 13 100 150 180 65 85 120 130 180 220 60 76 110 102 136 184 44 66 96 239 291 403 22 32 42 128 167 235 122 160 220 3 122 160 220 10 10 10 AMF550 AMF650 AMF850 1 2 1 2 1 2 1 14-20-47 7 Series

Micro Mist Separator Series AMD Model Series AMD can separate and Model AMD450 AMD550 AMD650 AMD850 AMD150 AMD250 AMD350 remove aerosol state oil mist in Rated flow (l/min (ANR))(1) 2000 3500 6000 12000 200 500 1000 compressed air and remove Port size

Options J: With drain guide T: With element service indicator Element service indicator Dimensions with mounting bracket Model Port size (Nominal size B) A B C D E F G H 10 10 10 10 10 10 10 10 10 I 56 66 66 80 80 90 90 100 150 J 15 20 17 22 19 25 21 30 40 K 5 8 8 8 8 10 10 10 15 L 9 12 12 14 14 14 14 16 20 M 5.5 6 6 7 7 9 9 9 11 N 35 O 54 66 66 80 80 88 88 102 136 P 70 84 84 100 100 110

PF2D

A quick recovery time indicates little liquid pool. 50 Ratio of resistance [k m] Particle ratio [number/cc] PFMC 100 2 or 3 particles/cc PFMV 10 00 10 20 30 40 50 60 70 PF2A 1 0 5 10 15 20 25 30 Duration of flow [min] Duration of flow [hour] PF3W The data was obtained by performing an actual 10 minutes supersonic cleaning using an average 16 Mcm of deionized water at class 10 clean room

Series: 3 (VFA3000), Manifold: 30 (VFA1000 P,R Port Size: 1/8; VFA3000 P,R Port Size: 1/4), Stations: 10, Type: 1 (Common Exhaust), Thread: 00T (NPTF)

Series: 1 (VQZ1000), Stations: 10 Stations, Option: D (DIN Rail Mounting), Thread: 00T

Series: 3 (VQZ3000), Stations: 10 Stations, Option: D0 (DIN Rail Mount w/o DIN Rail), Thread: 00T

Series: 3 (VQZ3000), Stations: 10 Stations, Option: D (DIN Rail Mounting), Thread: 00T

Series: 1 (VQZ1000), Stations: 10 Stations, Option: D0 (DIN Rail Mount w/o DIN Rail), Thread: 00T

Series: 2 (VQZ2000), Stations: 10 Stations, Option: None, Thread: 00T

Series: 2 (VQZ2000), Stations: 10 Stations, Option: D (DIN Rail Mounting), Thread: 00T

Series: 3 (VQZ3000), Stations: 10 Stations, Option: None, Thread: 00T

Series: 1 (VQZ1000), Stations: 10 Stations, Option: None, Thread: 00T

Model: 52 (Top Ported), Connector Type: PH (Flat Ribbon Cable, 10 Pins), Connector Entry Direction: 1 (Upward), Wiring Specification: All Double Wiring, Valve Stations: 4 Stations, P, E Port Location: B (Both Sides), Thread: 00T (NPTF)

Model: 52 (Top Ported), Connector Type: F (D-sub Connector, 25 Pins), Connector Entry Direction: 1 (Upward), Wiring Specification: All Double Wiring, Valve Stations: 10 Stations, P, E Port Location: U Side, Thread: 00T (NPTF), Mounting: D0 (DIN Rail Mounting w/o DIN Rail)

Model: 52 (Top Ported), Connector Type: F (D-sub Connector, 25 Pins), Connector Entry Direction: 1 (Upward), Wiring Specification: All Double Wiring, Valve Stations: 10 Stations, P, E Port Location: U Side, Thread: 00T (NPTF), Mounting: D (DIN Rail Mounting w/DIN Rail)

Model: 52 (Top Ported), Connector Type: F (D-sub Connector, 25 Pins), Connector Entry Direction: 1 (Upward), Wiring Specification: All Double Wiring, Valve Stations: 10 Stations, P, E Port Location: D Side, Thread: 00T (NPTF), Mounting: D (DIN Rail Mounting w/DIN Rail)

Model: 52 (Top Ported), Connector Type: F (D-sub Connector, 25 Pins), Connector Entry Direction: 1 (Upward), Wiring Specification: All Double Wiring, Valve Stations: 10 Stations, P, E Port Location: D Side, Thread: 00T (NPTF)

Model: 52 (Top Ported), Connector Type: F (D-sub Connector, 25 Pins), Connector Entry Direction: 1 (Upward), Wiring Specification: All Double Wiring, Valve Stations: 10 Stations, P, E Port Location: U Side, Thread: 00T (NPTF)