MXU tapped) l Model MXU6 MXU10 MXU16 Bolt Maximum tightening torque (Nm) M3 x 0.5 1.1 5 M4 x 0.7 2.5 7 M4 x 0.7 2.5 9.5 Top Mounting l Model MXU6 MXU10 MXU16 Bolt Maximum tightening torque (Nm) M3 x 0.5 1.1 4.8 M4 x 0.7 2.5 6 M4 x 0.7 2.5 6 Axial Mounting (Body tapped) l Model MXU6 MXU10 MXU16 Bolt Maximum tightening torque (Nm) M3 x 0.5 1.1 5 M4 x 0.7 2.5 6 M4 x 0.7 2.5 6 Operating Direction
Rated Flow Range: 20 (2 to 16 L/min), Flow Adjustment Valve: w/o Flow Adjustment Valve, Thread: N (NPT), Port Size: 04 (1/2), Output Specification/Temperature Sensor: L (Out 1: IO-Link/Switch Output, N/P; Out 2: None; Temperature Sensor: None), Lead Wire: Q (w/M12 -M8 Conversion Lead Wire, 0.1 m), Unit Specification: M (Instantaneous Flow: L/min; Accumulated Flow: L; Temperature: °C), Bracket
Rated Flow Range: 20 (2 to 16 L/min), Flow Adjustment Valve: w/o Flow Adjustment Valve, Thread: N (NPT), Port Size: 04 (1/2), Output Specification/Temperature Sensor: L (Out 1: IO-Link/Switch Output, N/P; Out 2: None; Temperature Sensor: None), Lead Wire: Q (w/M12 -M8 Conversion Lead Wire, 0.1 m), Unit Specification: M (Instantaneous Flow: L/min; Accumulated Flow: L; Temperature: °C), Bracket
Rated Flow Range: 40 (5 to 40 L/min), Flow Adjustment Valve: w/o Flow Adjustment Valve, Thread: N (NPT), Port Size: 04 (1/2), Output Specification/Temperature Sensor: L (Out 1: IO-Link/Switch Output, N/P; Out 2: None; Temperature Sensor: None), Lead Wire: Q (w/M12 -M8 Conversion Lead Wire, 0.1 m), Unit Specification: M (Instantaneous Flow: L/min; Accumulated Flow: L; Temperature: °C), Bracket
Rated Flow Range: 40 (5 to 40 L/min), Flow Adjustment Valve: w/o Flow Adjustment Valve, Thread: N (NPT), Port Size: 06 (3/4), Output Specification/Temperature Sensor: L (Out 1: IO-Link/Switch Output, N/P; Out 2: None; Temperature Sensor: None), Lead Wire: Q (w/M12 -M8 Conversion Lead Wire, 0.1 m), Unit Specification: M (Instantaneous Flow: L/min; Accumulated Flow: L; Temperature: °C), Bracket
Rated Flow Range: 20 (2 to 16 L/min), Flow Adjustment Valve: w/o Flow Adjustment Valve, Thread: Rc, Port Size: 03 (3/8), Output Specification/Temperature Sensor: L (Out 1: IO-Link/Switch Output, N/P; Out 2: None; Temperature Sensor: None), Lead Wire: Q (w/M12 -M8 Conversion Lead Wire, 0.1 m), Unit Specification: M (Instantaneous Flow: L/min; Accumulated Flow: L; Temperature: °C), Bracket
Rated Flow Range: 20 (2 to 16 L/min), Flow Adjustment Valve: w/o Flow Adjustment Valve, Thread: Rc, Port Size: 03 (3/8), Output Specification/Temperature Sensor: L (Out 1: IO-Link/Switch Output, N/P; Out 2: None; Temperature Sensor: None), Lead Wire: Q (w/M12 -M8 Conversion Lead Wire, 0.1 m), Unit Specification: M (Instantaneous Flow: L/min; Accumulated Flow: L; Temperature: °C), Bracket
MG Lateral Mounting (Body tapped) CX D-X Front Mounting l1 l Model MXU6 MXU10 MXU16 Bolt Maximum tightening torque (Nm) M4 x 0.7 2.5 12.7 9.4 20M5 x 0.8 5.1 15.6 11.2 M5 x 0.8 5.1 20.6 16.2 Data Vertical Mounting (Body tapped) l Model MXU6 MXU10 MXU16 Bolt Maximum tightening torque (Nm) M3 x 0.5 1.1 5 M4 x 0.7 2.5 7 M4 x 0.7 2.5 9.5 Top Mounting l Model MXU6 MXU10 MXU16 Bolt Maximum tightening
Nozzle Diameter: ø1.3, Body Style: 1 (Single Unit w/Valve + Standard Silencer), Vacuum Port Location: Side/Bottom Entry, Standard Supply Pressure: H (0.5 MPa), Thread Type: T (NPTF), Supply/Release Valve: K (Supply Valve+Release Valve), Solenoid Valve Rated Voltage: 5 (24VDC), Electrical Entry: L (L Plug Connector w/0.3m Lead Wire), Light/Surge Voltage Suppressor: Z (w/Light/Surge Voltage
), Manual Override: Non-locking Push Style, Vacuum Switch Model: M21 (1 Output w/o Analog Output, Diaphragm 18 Rotation Setting, Reed 100 VAC), Vacuum Switch Electrical Entry: L (Grommet Lead Wire 3m: ZSE1, ZSM1), Release Flow Rate Adjusting Needle: Without Lock Nut, Made to Order: None, CE Compliant: Q (CE compliant)
), Manual Override: Non-locking Push Style, Vacuum Switch Model: E15 (1 Output w/o Analog Output, 200° Setting), Vacuum Switch Electrical Entry: L (Grommet Lead Wire 3m: ZSE1, ZSM1), Release Flow Rate Adjusting Needle: Without Lock Nut, Made to Order: None, CE Compliant: Q (CE compliant)
Nozzle Diameter: ø0.7, Body Style: 1 (Single Unit w/Valve + Standard Silencer), Vacuum Port Location: Side/Bottom Entry, Standard Supply Pressure: H (0.5 MPa), Thread Type: Rc, Supply/Release Valve: K (Supply Valve+Release Valve), Solenoid Valve Rated Voltage: 5 (24VDC), Electrical Entry: L (L Plug Connector w/0.3m Lead Wire), Light/Surge Voltage Suppressor: Z (w/Light/Surge Voltage Suppressor
), Manual Override: Non-locking Push Style, Vacuum Switch Model: M21 (1 Output w/o Analog Output, Diaphragm 18 Rotation Setting, Reed 100 VAC), Vacuum Switch Electrical Entry: L (Grommet Lead Wire 3m: ZSE1, ZSM1), Release Flow Rate Adjusting Needle: Without Lock Nut, Made to Order: None, CE Compliant: Q (CE compliant)
Nozzle Diameter: ø1.3, Body Style: 3 (Manifold w/Common SUP Valve), Vacuum Port Location: A (Side Entry), Standard Supply Pressure: M (0.35 MPa), Thread Type: Rc, Supply/Release Valve: K (Supply Valve+Release Valve), Solenoid Valve Rated Voltage: 5 (24VDC), Electrical Entry: L (L Plug Connector w/0.3m Lead Wire), Light/Surge Voltage Suppressor: Z (w/Light/Surge Voltage Suppressor), Manual
Nozzle Diameter: ø1.3, Body Style: 1S (Single Unit w/Valve + High Noise Reduction Silencer), Vacuum Port Location: Side/Bottom Entry, Standard Supply Pressure: H (0.5 MPa), Thread Type: Rc, Supply/Release Valve: K (Supply Valve+Release Valve), Solenoid Valve Rated Voltage: 5 (24VDC), Electrical Entry: L (L Plug Connector w/0.3m Lead Wire), Light/Surge Voltage Suppressor: Z (w/Light/Surge
Override: Non-locking Push Style, Vacuum Switch Model: E15 (1 Output w/o Analog Output, 200° Setting), Vacuum Switch Electrical Entry: L (Grommet Lead Wire 3m: ZSE1, ZSM1), Release Flow Rate Adjusting Needle: Without Lock Nut, Made to Order: None, CE Compliant: Q (CE compliant)
), Manual Override: Non-locking Push Style, Vacuum Switch Model: E15 (1 Output w/o Analog Output, 200° Setting), Vacuum Switch Electrical Entry: C (Connector Lead Wire Length 0.6m), Release Flow Rate Adjusting Needle: L (With Lock Nut), Made to Order: None, CE Compliant: Q (CE compliant)
), Manual Override: Non-locking Push Style, Vacuum Switch Model: M21 (1 Output w/o Analog Output, Diaphragm 18 Rotation Setting, Reed 100 VAC), Vacuum Switch Electrical Entry: L (Grommet Lead Wire 3m: ZSE1, ZSM1), Release Flow Rate Adjusting Needle: Without Lock Nut, Made to Order: None, CE Compliant: Q (CE compliant)
50～, Suction Flow(l/min): 30, Body Material: Aluminum, Nozzle Diameter: 0.7mm, Combination of supply valve and release valve: With supply valve (N.C.) and release valve, Electrical entry: L-type plug connector, with 0.3‑m lead wire, Light/surge voltage suppressor: With light/surge voltage suppressor, Manual: Non-locking push type, Vacuum switch type: 1 output, without analog, 200° setting
50～, Suction Flow(l/min): 50, Body Material: Aluminum, Nozzle Diameter: 1.0mm, Combination of supply valve and release valve: With supply valve (N.C.) and release valve, Electrical entry: L-type plug connector, with 0.3‑m lead wire, Light/surge voltage suppressor: With light/surge voltage suppressor, Manual: Non-locking push type, Vacuum switch type: 1 output, without analog, 200° setting