Air cylinder

Construction A 29 Revision history A: All revised contents B: All revised contents 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL http://www.smcworld.com Note: Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 2012 SMC Corporation All Rights Reserved

High Vacuum L Type Valve

Insert the cover. 16 XL*-OMI0011-E Revision E Precaution for mounting added. 2018.8 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL http://www.smcworld.com Note: Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 2012 SMC Corporation All Rights Reserved 17 XL*-OMI0011-E

HRX-OM-K003

IMar. 2021 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL https://www.smcworld.com Note: Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 2021 SMC Corporation All Rights Reserved

MONOSASHI-KUN

Outside dimensions of CE1B12 Outside dimensions of CE1B20 Outside dimensions of CE1B32 Outside dimensions of CE1B40 Outside dimensions of CE1B50 Outside dimensions of CE1B63 Revision history ARevised in July 2000 BRevised in January 2001 CRevised in July 2011 DRevised in May 2013 ERevised in August 2017 FRevised in October 2017 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81

IZ-OMK0015

Installation distance: 50mm 3 2 Installation distance: 10 mm 1 Installation distance: 25mm Installation distance: 25mm 0 -2000 -1500 -1000 -500 0 500 1000 1500 2000 Charged potential [V] Sensor head Installation Detection range distance (mm) (mm) Installation 10 45 distance 25 100 Detection port 50 180 Detection range 30 Doc.No.IZ-OMK0015D Revision history 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101

AIR COMBINATION

July 2018 correction of errors (P16) March 2019 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL http://www.smcworld.com Note: Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 2008 SMC Corporation All Rights Reserved

Air Cylinder

Holding force of trunnion Tube bore Trunnion part Holding force of number trunnion 32 V5032P 3500N 40 V5040P 5000N 50 V5050P 5000N 63 V5063P 11000N 80 V5080P 11000N 100 V5100P 14000N 125 V5125P 14000N Revision history 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL https://www.smcworld.com Note: Specifications are subject to change without

Air cylinder

valve 2 10 Tie-rod 4 11 Retaining ring 2 A 12 Spring washer 8 13 Tie-rod nut 8 14 Wear ring 1 15 Cushion seal 2 16 Rod seal 1 17 Piston seal 1 18 Cushion valve seal 2 19 Cylinder tube gasket 2 20 Piston gasket 1 21 Rod end nut 1 22 Magnet (1) 34 Revision history A XC5 delete Match sentences with the catalog B Corrected the part number of the wear ring 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101

XSA Series

UW 1st printing: SS 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL http://www.smcworld.com Note: Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 2012 SMC Corporation All Rights Reserved 19 XSA-OMS0001-A

ＳＭＯＯＴＨ ＣＹＬＩＮＤＥＲ

Net weight Part no. 5g GR-L-005 10g GR-L-010 150g GR-L-150 23 Revision history Revised by reviewing the description. 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL https://www.smcworld.com Note: Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 2019 SMC Corporation All Rights

VQ4000/5000 (Pilot Valve V100)

Appropriate tightening torque VQ4000 : 0.8 to 1.2Nm VQ5000 : 1.0 to 1.8Nm 17 VQ4000V-OMV0001 Revision history 1st Printing :Wo 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL http://www.smcworld.com Note: Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 2017 SMC Corporation All

Air cylinder

3 Cylinder tube 4 Piston 5 Piston rod 6 Bushing 7 Cushion ring A 8 Cushion ring B 9 Cushion needle 10 Seal retainer 11 Retaining ring 12 Rod seal 13 Piston seal 14 Cushion seal 15 Cushion ring gasket 16 Needle seal 17 Wear ring 18 Bushing for clevis 19 Mounting nut 20 Rod end nut 21 Plastic magnet For CDM2 27 - Revision history AAll revised contents 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101

LUBRICATOR

DIMENSIONS Addition:option, Change: Shape of bracket assembly. 2018.2 C P4 Addition:PipingWARNING P9 Change: company name (grease) P19 Change:bowl tightening torque(AL20-A) P26 Correction: N, S dimensions(AL30~40-A) 2021.12 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL https://www.smcworld.com Note: Specifications are subject to change

REGULATOR

Note 2) Pressure gauge mounting position is above piping center for AR20K-B only. 15 S Revision history 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL http://www.smcworld.com Note: Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 2008 SMC Corporation All Rights Reserved

FILTER REGULATOR

Disassembly drawing: Change note on parts reclassification. '19.6 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL http://www.smcworld.com Note: Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 2008 SMC Corporation All Rights Reserved

AIR COMBINATION

July 2018 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL http://www.smcworld.com Note: Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 2008 SMC Corporation All Rights Reserved

Mechanically jointed rodless cylinder With cam follower guide, With single-axis linear guide With double-axis linear guide

. -16- Revision history 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL http://www.smcworld.com Note: Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 2011 SMC Corporation All Rights Reserved

Mechanically jointed rodless cylinder Basic short type (Rubber bumper), Basic standard type (Air cushion) Slide bearing guide type (Air cushion)

. -17- Revision history SZ Revised to the new format. 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL http://www.smcworld.com Note: Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 2011 SMC Corporation All Rights Reserved

HEC-OM-R008

F Model No. label L Dain port ERR03 Back-up data error Stop 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL https://www.smcworld.com Note: Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 2022 SMC Corporation All Rights Reserved

SYJA5000 Series

If any trouble should happen with the uni,please send it back to the supplier for repair or replacement. 8 No.SYJ5000-OMJ0001-A Revision history A Safety Instructions oP 1st printing : JS 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL http://www.smcworld.com Note: Specifications are subject to change without prior notice and any obligation