Magnetically Coupled Rodless Cylinder Basic Type Series NCY3B ø6(1/4"), ø10(3/8"), ø15(5/8"), ø20(3/4"), ø25(1"), ø32(1-1/4"), ø40(1-1/2"), ø50(2"), ø63(2-1/2")

23 23 23 22 20 500 20 17 17 17 Theoretical thrust (Ibf) 63 (2-1/2") 15 400 10 300 5 200 0 6 (1/4") 10 (3/8") 50 (2") 63 (2-1/2") 15 (5/8") 20 (3/4") 25 (1") 32 (1-1/2") 40 (1-1/2") 50 (2") 100 Bore size [mm (inch)] Note) Values show when the cylinder is driving without load. 0 25 50 75 100 Supply pressure (PSI) Weight Main Material Unit: oz (inch-nominal) 6 10 15 20 25 32 40 50 63 (mm) Bore

Toggle Type Air Gripper

Bore size (mm) 32 40 50 63 Action Double acting Fluid Air Operating pressure 0.1 to 0.6 MPa Auto switch is attachable. 5 to 60C Ambient and fluid temperature Lubrication Not required 3 to 28 3 to 27 2 to 23 2 to 23 Finger opening angle (Total) Weight (g) 790 1070 1890 2720 Gripping moment Note) 12.4 36.0 63.0 106 (Effective value) (Nm) Note) At the pressure of 0.5 MPa JIS Symbol Double acting

Compact Slide Series MXH

0.4 0.6 MXP Roll moment Mr (Nm) MXH10 MXY 0.09 MTS 0.08 0.07 0.06 0.05 0.04 0.03 0.02 0.01 0 0 0.2 1.0 1.2 1.4 0.8 0.6 0.4 Roll moment Mr (Nm) MXH16 0.06 0.05 Displacement (mm) Displacement (mm) 0.04 0.03 0.02 0.01 0 0 0.5 1.0 1.5 2.0 2.5 3.0 Roll moment Mr (Nm) MXH20 0.1 0.09 0.08 0.07 0.06 0.05 0.04 0.03 0.02 0.01 0 D0 0.75 1.5 2.25 3.0 3.75 4.5 5.25 -X Roll moment Mr (Nm) Individual -X 23

Electronic Pressure Switch Series (Separate Type)

Adsorption Confirmation 2 Sensor installed close to the pad (No. 2) 1 Sensor installed close to the pad (No. 1) Series PSE54 + PSE200 Series PS1100 16-3-23 16-3-1 16-5-1 Pad adsorption can be confirmed easily. Response delays, caused by piping, will not be a factor due to the close proximity of the sensor to the pad.

70pvvna

is VO307-DZ. 17-4-6 3 Series VNA Process Valve: 2 Port Valve For Compressed Air and Air-hydro Circuit Control Model Flow characteristics Measured by air Measured by water Note) Weight (kg) Orifice size (mm) Air operated Model Port size Rc Cv Av x 10-5 m2 b External pilot solenoid C [dm3/ (barsec) ] VNA1-6A VNA1-8A 1 8 1 4 10 0.88 1.5 1.9 3.8 4.8 7.5 25 41 51 110 130 210 3.5 5.9 7.9 16 23

VNC

VN5-A3CA VN5-A3CB VN6-A3CA VN6-A3CB VN7-A3CA VN7-A3CB VN3-A3CA VN3-A3CB VN4-A3CA VN4-A3CB VN4-12CA VN4-12CB NBR VN1-A3CA VN1-A3CB VN2-A3CA Plate ass'y Valve material e FKM NBR VN2-A3CB VN2-12CA VN2-12CB Valve material t Valve cover AS568-010 AS568-011 AS568-012 (32A to 50A are O-ring.) i Pilot solenoid valve SF4--23 FKM VO301-00T-X302 (Refer to page 17-4-29 for part no.)

Title not found

0.2913 M 0.2950 7.5mm 0.2953 19/64 0.2969 7.6mm 0.2992 N 0.3020 7.7mm 0.3031 7.75mm 0.3051 7.8mm 0.3071 7.9mm 0.3110 5/16 0.3125 8mm 0.3150 O 0.3160 8.1mm 0.3189 8.2mm 0.3228 P 0.3230 8.25mm 0.3248 8.3mm 0.3268 21/64 0.3281 8.4mm 0.3307 Q 0.3320 8.5mm 0.3346 8.6mm 0.3386 R 0.3390 8.7mm 0.3425 11/32 0.3438 8.75mm 0.3445 8.8mm 0.3465 S 0.3480 8.9mm 0.3504 9mm 0.3543 T 0.3580 9.1mm 0.3583 23

MXU

Auto Switch Groove Position D-A, D-A9V W D-M9, D-F9W A D-M9V, D-F9WV W Bore size (mm) Application B A B B W A stroke 6 5 to 30 0 13 3.5 3.5 6.5 17 2.5(5) 17 4.5 5 to 20 13 17 17 10 25 3.5 16 7.5 7.5 2.5 20 1.5 20 0.5 30 15 19 (1) 19 5 23 27 27 10 18 22 22 15 23 27 27 16 4 8 8 2 2 0 A B 20 18 22 22 Bore (mm) 6 10 16 25 23 27 27 (0.5) 10 6.9 30 23 27 27 14 8.8 19 13.9 Note 1) Negative figures

17

23 to 34.5 0 to 12 12 to 24 24 to 36 0 to 16 16 to 32 32 to 48 Stroke adjustment range by Intermediate fixing spacer (mm) MY1 W Stroke adjustment range is applicable for one side when mounted on a cylinder.

Title not found

0.2913 M 0.2950 7.5mm 0.2953 19/64 0.2969 7.6mm 0.2992 N 0.3020 7.7mm 0.3031 7.75mm 0.3051 7.8mm 0.3071 7.9mm 0.3110 5/16 0.3125 8mm 0.3150 O 0.3160 8.1mm 0.3189 8.2mm 0.3228 P 0.3230 8.25mm 0.3248 8.3mm 0.3268 21/64 0.3281 8.4mm 0.3307 Q 0.3320 8.5mm 0.3346 8.6mm 0.3386 R 0.3390 8.7mm 0.3425 11/32 0.3438 8.75mm 0.3445 8.8mm 0.3465 S 0.3480 8.9mm 0.3504 9mm 0.3543 T 0.3580 9.1mm 0.3583 23

High Vacuum Slit Valve

In these figures, the slit valve closes an opening (slit) 23 which transfers workload and a gate (seal material ) does not clamp (seal) a seating face . In Figure 2A, the slit valve opens and makes the slit 23 able to transfer workload.

3 Port Solenoid Valve

Flow Characteristics Port size 12 Flow characteristics Manifold 23 Port 1, 2, 3 C[dm3/(s bar)] C[dm3/(s bar)] b 0.13 0.10 0.26 0.16 b 0.26 0.16 0.13 0.10 Cv 0.007 0.016 0.012 0.020 Cv 0.012 0.020 0.007 0.016 V114 V114A V124 V124A 0.032 0.070 0.050 0.085 0.050 0.085 0.032 0.070 Type VV100-S41 M5 x 0.8 Note) Values when mounted on the manifold base (5 stations).

OMR0031

CN1: Power Supply Plug . 22 5.1 Power supply plug specifications . 22 5.2 Electrical wiring specifications . 22 5.3 Power supply plug wiring . 23 6. CN4: Counter Plug . 24 2 - 6.1 Counter plug specifications . 24 6.2 Counter plug wiring . 24 7.

OMR0032

CN1: Power Supply Plug . 22 5.1 Power supply plug specifications . 22 5.2 Electrical wiring specifications . 22 5.3 Power supply plug wiring . 23 6. CN4: Counter Plug . 24 2 - 6.1 Counter plug specifications . 24 6.2 Counter plug wiring . 24 7.

Vacuum Gripper

ModelZPGU-7A-X2 ModelZPGC-7A-X2 (Suction cup formFlat type) (Suction cup formFlat type with ribs) Dimensions Dimensions Model A B D E F Y Model A B D E F Y ZPG10U-7A-X2 10 12 ZPG10C-7A-X2 10 12 1.7 17.5 22 17.5 22 3 13 13 ZPG13C-7A-X2 13 15 1.8 ZPG13U-7A-X2 13 15 ZPG16C-7A-X2 16 18 18 22.5 1.2 ZPG16U-7A-X2 16 18 18 22.5 3.5 ZPG20C-7A-X2 20 23 1.7 ZPG20U-7A-X2 20 23 19.5 24 19.5 24 4 15 ZPG25C

Vacuum gripper

ModelZPGU-7A-X2 (Suction cup formFlat type) ModelZPGC-7A-X2 (Suction cup formFlat type with ribs) Dimensions Model A B D E F Y ZPG10U-7A-X2 10 12 ZPG13U-7A-X2 13 15 ZPG16U-7A-X2 16 18 18 22.5 3.5 ZPG20U-7A-X2 20 23 ZPG25U-7A-X2 25 28 ZPG32U-7A-X2 32 35 20 24.5 4.5 Dimensions Model A B D E F Y ZPG10C-7A-X2 10 12 1.7 ZPG13C-7A-X2 13 15 1.8 ZPG16C-7A-X2 16 18 18 22.5 1.2 ZPG20C-7A-X2 20 23 1.7

Air preparation filter

40 AFF,AM,AMD 80D 1 1/2 404 392 394.5 38 170 160 80 23 40 AFF,AM,AMD 90D 1 1/2 2 470 458 460.5 38 170 160 80 23 40 Model Bracket related dimensions H I J K L M N O P AFF,AM,AMD 70D 124 82 48.4 90 18 9 16 10 2.6 AFF,AM,AMD 80D 148 93.5 58.5 110 22 11 20 12 3.2 AFF,AM,AMD 90D 148 93.5 58.5 110 22 11 20 12 3.2 -22- Doc. no.

EXxx-OMZ0016

1 8 User setting lower level detection 0 9 Detection of the upper limit of the ON/OFF cycles 4 16 Detection of US1 power supply voltage drop 9 17 Detection of US2 power supply voltage drop 8 19 Connection failure between units (during operation) 11 System diagnosis 2 20 Connection failure between units (when power is supplied) 12 22 Detection of system error (when power is supplied) 14 23

4 Port Solenoid Valve Series VQD1000

''()% ,)# % # ## ., & /, '# & , . '0 23/ 414 e u q t r y !0 V100 S070 i VQD o 23/ 4#40 56"4!4 ! VKF w /, 1 !() '!2 VK VT VS & "# # & # ''()% * 8 7 23/ 9 : : 7 23/ : 7 9;9 8 : (; ! (7( :9 : (<8 9( = ' Series VQD1000 # $ % "" "" " ! ! " & ! " * $ & "( ' " ' ( ) " " Series VQD1000 !""#"$$ # !""#"$ $ # VV061 !

End Lock Cylinder Series CBG1

With front lockR (mm) Bore size (mm) W P WA WB WH 20 M5 x 0.8 16 15 (16) 23 30 25 M5 x 0.8 16 15 (16) 25 30 32 Rc1/8 16 15 (16) 28.5 25 40 Rc1/8 16 15 (16) 33 20 50 Rc1/4 18 17 (18) 40.5 20 63 Rc1/4 18 17 (18) 47.5 20 80 Rc3/8 22 22 60.5 20 100 Rc1/2 22 22 71 20 Dimensions inside ( ) are for long strokes.