Digital Flow Switch (Remote type monitor unit)

Input of set values P2dH P2AH n2AH P2AL n2AL Setting of P2L/n2L P2H/n2H Setting of tnL/tPL Setting of P_2/n_2 Setting of tn/tP n2dH P2dL n2dL tnH/tPH H_2 H_t H2 Ht (Page 37) (Page 39) (Page 37) (Page 39) (Page 38) 4. Completed [F 2] Setting of OUT2 is completed. -35No.PF-OMN0012-H 1.

PF3W7x-X445.eng

[F30] Storing of accumulated flow OFF [not held] Rc(NPT)1 36 to 38 Nm System error Turn the power off and turn it on again. If the failure cannot be solved, contact SMC for repair. [F80] Setting of power saving mode No setting [display is turned on] Rc(NPT)11/4 40 to 42 Nm Switch ON Switch OFF Do not touch the terminals and connectors while the power is on.

Process Pump

Description PA5010 Diaphragm kit KT-PA5-831 Check valve kit KT-PA5-836 Switching valve parts kit KT-PA5-37 Pilot valve kit KT-PA5-38 Manual cap assembly kit KT-PA5-45 14 Piping and Operation Caution Mounting posture of the pump is set with the mounting foot facing downward. Air to be supplied to the air supply port should be cleaned and filtered through AF filter, etc.

Process Pump

Description PAX112 Diaphragm kit KT-PAX1-31 Check valve kit KT-PAX1-36 Switching valve parts kit KT-PAX1-37#1 Pilot valve kit KT-PA5-38 Pulsation attenuator control valve kit KT-PAX1-39 Piping and Operation Caution Mount the pump so that the reset button faces upward. Air to be supplied to the air supply port should be cleaned and filtered through AF filter, etc.

High Vacuum L Type Valve

part) 2 5 Body (Material: A6063) Valve (Material: SUS304) 6 Valve seal 2 (Maintenance part) 3 (Valve seal 2) Nut assembly (Maintenance part) (Set of a nut and a washer) 9 Washer (Material: SUS304 or equivalent) Nut (Material: SUS304 or equivalent) (Shaft) 11 XL-OMS0001-B 5-2.Dimensions C E C E E (KF flange) Fd (K flange) Fn D H B A G A Unit: mm Model A B C D E Fn Fd G H XLA-16-2 40 108 38

XL-OMY0001

1600/100 2400/150 XL1A25-60S-3 XL1A25-60S-2 1 2 H5 AC100V 600/130 800/180 / AC200V 2400/130 3200/180 1[W] 216 PTC 200V PTC 200 150 100V PTC 0 5 10 15 20 25 30 ( 30 10 XL-OMY0001 5 5-1 1 , SUS304 8 4 SUS304 10 , SUS316L 7 5 A6063 2 1 6 SUS304 3 2 9 2 SUS304 SUS304 11 XL-OMY0001 5-2 C E E E KF K Fd Fn C D H B A G A mm A B C D E Fn Fd G H XLA-16-2 40 108 38

High Vacuum L Type Valve

2 5 Body (Material: A6063) Valve (Material: SUS304) 6 3 Valve seal 2 (Maintenance part) Nut assembly (Maintenance part) (Set of a nut and a washer) 9 (Valve seal 2) Washer (Material: SUS304 or equivalent) Nut (Material: SUS304 or equivalent) (Shaft) 11 XL-OMV0007 5-2.Dimensions Size 16, 25, 40 E C E (KF flange) Fn C E D J H B A G A Unit: (mm) Model A B C D E Fn Fd G H J XLC-16-2 40 108 38

High Vacuum L Type Valve

Maintenance part) 2 Valve (Material: SUS304) 6 3 Valve seal 2 (Maintenance part) Nut assembly (Maintenance part) (Set of a nut and a washer) 9 (Valve seal 2) Washer (Material: SUS304 or equivalent) Nut (Material: SUS304 or equivalent) Shaft (Material: SUS304) 7 11 XL-OMV0017 5-2.Dimensions C E C E E (KF flange) (K flange) Fd Fn D H B A G A Unit: mm Model A B C D E Fn Fd G H XLF-16-2 40 108 38

XLA Series

Magnet (option) Pilot Port (opened by applying pressure) Bellows holder (material: SUS304) Heater (option) 7 External seal (maintenance part) 3 Bellows (material: SUS316L) 6 Valve (material: SUS304) 5 Valve seal (maintenance part) 2 Body (material: A6063) 4 C D C E E (K flange ) (KF flange) Fd Fn Heater (option) Auto switch (option) H G B A A Unit: mm Model A B C D E Fn Fd G H XLA-16 40 103 38

XLA- ∗ -F7NJ ∗ - ∗ Series

(Option) Thermal resistance magnet (for auto switch) Pilot port 7 Heater (Option) Bellows holder (Material: SUS304) External seal (Maintenance part) 3 6 Bellows (Material: SUS316L) 5 Valve (Material: SUS304) 2 Valve seal (Maintenance part) C D J 4 C E E Body (Material: A6063) (KF flange) (K flange) Fd fn Heater (Option) Auto switch (Option) G H B A A Unit: mm Model n Fd XLA-16 40 103 38

High Vacuum L Type Valve

Construction and Outer dimensions Indicator Handle Ass'y(Maintenance part) (Including ,,,) 1 Bellows holder (Material: SUS304) 7 Heater(option) Exterior seal (Maintenance part) 3 Bellows (Material: SUS316L) Valve (Material: SUS304) 6 5 Valve seal (Maintenance part) 2 Body (Material: A6063) 4 D C E E F C H B G A A Unit: mm Model H XLH-16 40 100.5 38 1 30 17 35 XLH-25 50 114 48 1 12 40 26 41

XL-OMY0003

. <> 1 Ass 'y () ( ) < SUS304> 7 (SUS304) () () 3 < SUS316L> 6 (SUS316L) < SUS304> 5 (SUS304) () 2 4 (A6063) < A6063> C D E E F C H B G A A mm A B C D E F G H XLH-16 40 100.5 38 1 30 17 35 XLH-25 50 114 48 1 12 40 26 41 XLH-40 65 162.5 66 2 11 55 41 57 XLH-50 70 179.5 79 2 11 75 52 70 8 XL-OMY0003 5 10 []18 12 O 1) FKM M 10 FKM : 110 Pa <> 9 XL-OMY0003 6 6-1. 1 1P4P5

Industrial Filter

Tension bolt Table 3 Guideline of the wing nut tightening amount Model FGES L A FGES L B FGES L C Element size (mm) 65 to 70 250 65 to 70 500 65 to 70 250 65 to 70 750 65 to 70 250 Wing nut tightening amount 26 to 30 40 to 45 33 to 38 51 to 55 27 to 44 Wing nut tightening amount (mm) 11/12 FGX-OM-L008-A 5-4 [Mount O-ring and cover] (1) Set O-ring to the case (2) Rotate the cover clockwise

K35-OMW0030

When the setting of the set point is completed and the calibration signal is turned OFF, the operation mode will change to the target position operation. 38 DIP switch No. 1 setting OFF ON Movement direction Standard Reversed Retracted end Retracted end 4 mA 20 mA Set point Set point 20 mA 4 mA (Stop position) Relationship between the piston rod position (between the retracted end and set

PFxx-OMA1007

Recommended tightening torque Unit: Nm Thread size 1/8 1/4 3/8 1/2 3/4 1 Tightening torque 3 to 5 8 to 12 15 to 20 20 to 25 28 to 30 36 to 38 -7No.PF-OMA1007-B Do not apply torsion or bending moment other than the weight of the product itself. External piping needs to be supported separately as it may cause damage.

Air cylinder (Series compatible with secondary batteries)

Table 7 Auto Switch Mounting Height Auto switch model D-A9-900 D-M9V-900 D-M9-900 D-M9WV-900 D-M9W-900 Bore size(mm) Hs Ht Hs Ht 40 30 30 34 30 50 34 34 38 34 63 41 41 44 41 80 49.5 49 52.5 49 100 56.5 56 61 56 14 Table 8 Minimum Stroke for Auto Switch Mounting n:Number of auto switches(mm) brackets other Center trunnion Number of Auto switch model than autoswitches 40 50 63 80 100 center

CE

122032 405063 12 20 3263 2 1 0.8 JIS B0209 3-2 76 *1 23 14.5mT DC12VDC24V(10) 1 40mA 0.1mmCEU5 *2 (20) 0.2mm Max DC24V,40mA A /B DC500V50M12E 33.3Hz 6.8G X,Y 2 Z 4 JIS D1601 30G X,Y,Z 3 *3 IP-65(IEC60529 *1)SMC CEU5 *2)CEU5 *3) 3-3 3-3-1 J mm 12 20 32 40 50 63 E 0.022 0.055 0.15 0.26 0.46 0.77 3-3-2 g (mm) mm 25 50 75 100 125 150 175 200 250 300 400 500 12 28 33 38

CEx-OML0058

SMC CORPORATION Contents Chapter 1: Read Before Use 38 Chapter 2: Product Summary 2-1. System Configuration 910 2-2. How to Order 11 2-2-1. MONOSASHI-KUN with BRAKE 11 2-2-2. Options 12 Chapter 3: Selection Flow Chart to Confirm Utility 1314 Chapter 4: Specifications 4-1. Cylinder Specifications 15 4-2. Sensor Specifications 15 4-3.

MONOSASHI-KUN WITH BRAKE CONTROLLER

Blinking 38 During initial setup, predictive control is executing. Hence, it is suggested to set the maximum retries to 5 or above. After setting of maximum retries, press WRITE to switch to the next input condition. The display will indicate PRG STEP P4 and the current cylinder bore size, which is blinking. Next, enter appropriate cylinder bore size.

CEx-OMQ0013

9-1-2 PRESET " " " PRG STEP P1 " P1 1000.0 36 WRITE READ PRG STEP P1 " " " UPDOWN LEFTRIGHT WRITE UP 1 DOWN RICHT LEFT 2P2 PRG STEP P2 P2 " " " 9.9mm <> -1.0 +1.0 1.0 1.0 Err9 PRG STEP P3 WRITE " 3P3 " " 9 37 24 5 WRITE PRG STEP P4 4P4 " " " 63 80 100 25 32 40 50 DOWN UP CE240 1002532 1 WRITE 5P5 PRG STEP P5 " " " <> 100 40 50 0 10 20 30 DOWN UP 1 WRITE 38