ZCUK

C S D 16 D 20 ZC UK M9B With auto switch Auto switch Built-in magnet Nil Without auto switch Style (Tubing method in vacuum side)/ (Rod end shape) Refer to the table below for applicable auto switches.

2

New Products Guide 2 Air Preparation Equipment, Modular F. R. L., Air Tanks Fittings and Tubing Flow Control Equipment, Exhaust Filters Switches/Sensors Process Valves High Vacuum Equipment Temperature Control Equipment Pneumatic Instrumentation Process Gas Equipment Equipment CAT.E00-7A INDEX New Products Guide 2 Air Preparation Equipment/ Modular F. R. L./Air Tanks Refrigerated Air Dryer

REA/REB

For 10, 15, 20 CE2 Lead wire length (m) Load voltage Indicator light Pre-wire connector Special function Type Electrical entry Wiring (Output) ML2B Applicable load AC DC Auto switch model 0.5 (Nil) 3 (L) 5 (Z) 3-wire C J G5-S Reed switch Solid state switch Reed switch Solid state switch A96 5 V IC circuit Yes Yes Grommet (NPN equivalent) 100 V 24 V 12 V A93 M9N M9P M9B F9NW F9PW F9BW 3-

Stopper Cylinder

Load voltage Auto switch model Lead wire length [m] Pre-wired connector Applicable load DC AC Perpendicular In-line 0.5 (Nil) 1 (M) 3 (L) 5 (Z) None (N) Indicator light Type Special function Electrical entry Wiring (Output) M9NV M9N IC circuit 3-wire (NPN) 5 V, 12 V Solid state auto switch 3-wire (PNP) M9PV M9P 2-wire 12 V M9BV M9B 3-wire (NPN) 5 V, 12 V M9NWV M9NW IC circuit 3-wire (PNP)

MXQ

light Lead wire length (m) AC DC Auto switch model Applicable load Pre-wire connector Special function Type Electrical entry Wiring (Output) 5(Z) 0.5(Nil) 3(L) Perpendicular In-line Reed switch Solid state switch IC circuit 3-wire (NPN equivalent) A96 A96 5 V Grommet Yes Relay, PLC 2-wire A93V A93 100 V 24 V 12 V M9NV M9N 3-wire (NPN) IC circuit 5 V, 12 V M9PV M9P 3-wire (PNP) M9BV M9B

Mechanically Jointed Rodless Cylinder With Protective Cover Series MY1  W ø16, ø20, ø25, ø32, ø40, ø50, ø63 1

Lead wire length (m) Indicator light Indicator light Auto switch model Pre-wire connector Applicable load Perpendicular In-line Load voltage Electrical entry Special function Wiring (Output) Type 0.5 (Nil) 3 (L) 5 (Z) DC AC A96V A93V M9NV M9PV M9BV F9NWV F9PWV F9BWV A96 A93 M9N M9P M9B F9NW F9PW F9BW 3-wire (NPN equivalent) 2-wire 3-wire (NPN) 3-wire (PNP) 2-wire 3-wire (NPN) 3-wire (PNP)

MHQG2

Operating system Double acting, Single acting Auto switch (Option) Solid state auto switch: D-M9N(V), D-M9P(V), D-M9B(V) Refer to pages 761 to 809 for the detailed specifications of auto switches.

Air Slide Table/Long Stroke Type Series MXY

Lead wire length (m) Applicable load Pre-wired connector Load voltage Auto switch model Indicator light Wiring (Output) Electrical entry Type 0.5 (Nil) 3 (L) 1 (M) 5 (Z) Special function Perpendicular In-line AC DC M9NV M9PV M9BV M9NWV M9PWV M9BWV M9N M9P M9B M9NW M9PW M9BW 3-wire (NPN equiv.) 3-wire (NPN) 3-wire (PNP) 2-wire 3-wire (NPN) 3-wire (PNP) 2-wire 5 V, 12 V IC circuit Solid state

Aluminum One-touch Connection and Release High Vacuum Angle Valve Normally Closed/Bellows Seal XLAQ Series

Without auto switch (Without built-in magnet) Remarks Symbol Heater Temperature 16 D-M9N(M)(L)(Z) D-M9P(M)(L)(Z) D-M9B(M)(L)(Z) D-A90(L) D-A93(M)(L)(Z) M9N(M)(L)(Z) M9P(M)(L)(Z) M9B(M)(L)(Z) A90(L) A93(M)(L)(Z) M9// Nil H0 H4 H5 5 to 60C None None With 100C heater With 120C heater Solid state auto switch 5 to 150C Reed auto switch (Not applicable to flange size 16) Note) Size 16 is not

ø 20, ø 25, ø 32, ø 40, ø 50, ø 63, ø 80, ø 100 Series C55 ISO Standards [ISO/21287] Compact Cylinder

ISO Standards [ISO/21287] Compact Cylinder 20,25,32,40,50,63,80,100 Series C55 How to Order B 20 10 C55 B 20 10 M9B S CD55 With auto switch Number of auto switches With auto switch (Built-in magnet) 2 pcs. 1 pc. n pcs.

ISO Standards C85 Series ø 8, ø 10, ø 12, ø 16, ø 20, ø 25 Air Cylinder: Standard Double Acting, Single Rod C85 C85W C85 C85K C85K C85R C75 C75W C75 C75K C75K C75R Single Acting, Spring Return/Extend Single Acting, Spring Return/Extend Single Acting, Spr

M9BV M9B V V V v v Connector H7C J79C V V V V 3-wire (NPN) 5 V, 12 V M9NWV M9NW M9NWV M9NW V V V v v IC circuit 3-wire (PNP) M9PWV M9PW M9PWV M9PW V V V v v 2-wire 12 V M9BWV M9BW M9BWV M9BW V V V v v Diagnostic indication (2-color indicator) Relay, PLC 24 V Yes 3-wire (NPN) 5 V, 12 V M9NAV*1 M9NA*1 M9NAV*1 M9NA*1 v v V v v IC circuit 3-wire (PNP) M9PAV*1 M9PA*1 M9PAV*1 M9PA*

Series 11-CRA1-Z Rack & Pinion Type Rotary Actuator Size: 30, 50

D-M9B D-M9N, D-M9P D-A93 24 VDC relay, PLC IC circuit, Relay, PLC Relay, PLC 24 VDC (10 to 28 VDC) 28 VDC or less 24 VDC, 100 VAC 2.5 to 40 mA 40 mA or less 5 to 40 mA, 5 to 20 mA Solid state auto switch PLC: Programmable Logic Controller Refer to page 920 for the applicable auto switch list. 905

Series MHR2 11- 2 Finger Rotary Actuated Air Gripper 22- Size: 10, 15, 20, 30

Fittings & Tubing Air Cylinders Rotary Actuators How to Order 11 Vacuum suction type Clean series 11 M D HR 2 10 R M9B S 22 M D HR 2 10 R M9B S Number of fingers Copper, fluorine and silicone-free + Low particle generation Number of auto switches 2 2 fingers 2 pcs. 1 pc.

CJ2Y Series ø 10, ø 16 Smooth Cylinder Double Acting, Single Rod

M9BV M9B V V V v v Connector H7C J79C V V V V 3-wire (NPN) 5 V,12 V M9NWV M9NW M9NWV M9NW V V V v v IC circuit 3-wire (PNP) M9PWV M9PW M9PWV M9PW V V V v v 2-wire 12 V M9BWV M9BW M9BWV M9BW V V V v v Diagnostic indication (2-color indicator) Relay, PLC 24 V Yes 3-wire (NPN) 5 V,12 V M9NAV*1 M9NA*1 M9NAV*1 M9NA*1 v v V v v IC circuit 3-wire (PNP) M9PAV*1 M9PA*1 M9PAV*1 M9PA*1

Cylinder with Turntable ø63, ø80, ø100 Series MGT

3 (L) 5 (Z) Applicable load Type 1 (M) Special function Electrical entry Wiring (Output) DC AC Perpendicular In-line MGC 3-wire (NPN) M9N M9NV 5 V, 12 V IC circuit 3-wire (PNP) MGF M9PV M9P Reed switch Solid state switch Reed switch Solid state switch Lead wire length symbols: 0.5 m Nil (Example) M9NW 1 m M (Example) M9NWM 3 m L (Example) M9NWL 5 m Z (Example) M9NWZ MGZ 12 V 2-wire M9B

MHC2-6/MHCA2-6

MHC D M9B 6 2 6 2 A D MHC Short body (Auto switch not attachable) Made to Order Refer to page 623 for details.

MRHQ

-746 Yes 24V 3-wire (PNP) Grommet D-M9B-746 12V 2-wire MHZ Lead wire length symbols: 0.5 m .

Series MHR3 11- 3 Finger Rotary Actuated Air Gripper 22- Size: 10, 15

Fittings & Tubing Air Cylinders Rotary Actuators How to Order 11 Vacuum suction type Clean series 11 M D H R 3 10 R M9B S 22 M D H R 3 10 R M9B S Copper, fluorine and silicone-free + Low particle generation Number of auto switches 2 pcs. 1 pc.

Parallel Style Air Gripper/2-Finger Type Series MHS2 ø16, ø20, ø25, ø32, ø40, ø50, ø63 How to Order Bore size 20 MHS2 D M9BW ø16 to ø25 Number of fingers Number of auto switches 2 Nil 2 pcs. 2 fingers Auto switch Bore size S 1 pc. Nil Without auto switch

AC Lead wire length (m) Load voltage DC Auto switch model Special function Electrical entry Indicator light Wiring (Output) Pre-wired connector Applicable load Type In-line Perpendicular 0.5 (Nil) 1 (M) 3 (L) 5 (Z) M9NV M9PV M9BV M9NWV M9PWV M9BWV M9NAV M9PAV M9BAV M9N M9P M9B M9NW M9PW M9BW M9NA M9PA M9BA 5 V, 12 V 3-wire (NPN) 3-wire (PNP) IC circuit Solid state switch 12 V 2-wire 3-wire

XLA/XLAV Series Aluminum High Vacuum Angle Valve Normally Closed, Bellows Seal

(M)(L)(Z) D-M9B(M)(L)(Z) A90(L) D-A90(L) Reed auto switch (Not applicable to flange size 16) A93(M)(L)(Z) D-A93(M)(L)(Z) M9// Without auto switch (with magnet) H0 5 to 150C H4 With 100C heater H5 With 120C heater Hightemperature type * Size 16 is not applicable to H4, H5.