5 Port Solenoid Valve, Body Ported Type/Flip Plug-in Unit, Series VQ1000

How to Order Manifolds VV5Q G 0 J 1 1 08 C6 B U0 Base mounted plug-in Series VQ1000 1 2 4 3 Kit designation Electrical entry Stations 1 3 02 2 stations Note 1) Top entry Side entry Kit Stations U0 S0 0 Flat cable kit with terminal block (20P) without cable Flat cable kit (20P) without cable 2 to 8 (16) G kit J kit 16 16 stations The minimum and maximum number of stations differ depending

Vacuum Pad

ZP3P-20PTSF ZP3P-25PTSF ZP3P-35PTSF ZP3P-50PTSF p. 2 q Pad unit With Buffer p.6 e Buffer assembly Pad diameter Part no. 20 25 35 50 Dimensions ZPB2(J/K)10-B5 V V ZPB2(J/K)20-B5 V V ZPB3(J/K)10-B01 V V ZPB3(J/K)20-B01 V V p. 12 e Buffer assembly w T female thread adapter Pad diameter Part no. 20 25 35 50 Dimensions ZP3PA-T1-B5 V V ZP3PA-T2-B8 V V w T female thread adapter p. 11

Counter/Extension Cable

COM RS Q G 1 k ( ) or Control signal input RS H A 2.2 k (Select Reset/ Hold/Bank) Power supply (24 or 12 VDC) RZQ MI W S CEP1 CE1 CE2 ML2B C J G5-S CV MVGQ CC RB J D-X 20Data 10-12-29 Series CEU CEU5 Operation Parts description External power supply Pulse input terminals Control signal input A COM COM COM B 12 VDC GND F.G. R.S.

Table of Contents

Load factor: ((Load weight x 9.8)/Theoretical force) x 100% VS4 VQ7 EVS Conditions VFN Base mounted Series MB Series CS1 6A x 1 m AS4000-02 AN200-02 10A x 1 m AS420-03 AN300-03 6A x 1 m AS4000-02 AN200-02 10A x 1 m AS420-03 AN300-03 Base mounted Series MB Series CS1 10A x 1 m AS4000-03 AN300-03 15A x 1 m AS420-04 AN400-04 10A x 1 m AS4000-03 AN300-03 15A x 1 m AS420-04 AN400-04 SGP (Steel

5 Port Solenoid Valve Series SY3000/5000/7000/9000

CS1 SGP10A x 1 m AS420-03 AN300-03 SY9120-03 Tubing bore x Length Speed controller Silencer SY7140-03 Tubing bore x Length Speed controller Silencer SGP15A x 1 m AS420-04 AN400-04 SY9140-04 Tubing bore x Length Speed controller Silencer 102 Valve Variations Note 1) Electrical entry Actuation Voltage Light/surge voltage suppressor 2 position 3 position DC AC 100 V 50/60 Hz 110 V 50/60 Hz

11- Series MXP/MXPJ6 Air slide table 22- ø6, ø10, ø12, ø16

2.4 Z Section AA 3.5 Depth 2 2.5 +0.030 0 7 +0.030 0 Depth 2 2.5 Q QL 11-/22-MXPJ6-10 4M3 x 0.5 depth 3 F (mm) E F H J M Q QL S Z Model 23 25 38 27 37 28 8 5 44 11-/22-MXPJ6-51 30 35 53 42 47 37 11 10 59 11-/22-MXPJ6-10 100 Air slide table MXP/MXPJ6 11221122Dimensions: MXP6 Air cylinder Rotary actuator Air gripper Directional control valve Fittings & Tubing Pressure switch Clean gas filter

Electric Actuators

P JOG and constant rate movement, return to origin, test operation and testing of forced output can be performed. 32 Series LEC Teaching Box/LEC-T1 RoHS How to Order LEC T1 3 J G Enable switch (Option) Teaching box Enable switch S None Equipped with enable switch Nil Cable length [m] 3 3 Interlock switch for jog and test function Stop switch Initial language J E Japanese English Stop switch

ZPT/ZPX

63.5 85.5 160.5 211.5 27.5 75-B01-A18 75-B01-A18 183.5 234.5 196.5 247.5 ZPX HBJ-B01-A22 (Male thread) 100 125 Hexagon width across flats 17 M22 x 1.5 9.5 50 Hexagon width across flats 30 Width across flats 19 Rc 1/8 9.5 10 Hexagon width across flats 21 J Width across flats 60 70 4-M5 x 0.8 I 11 H G F E Y 4 40 C A B D Dimensions (mm) Model B A C D E F G H I J Y ZPX100HBJ25-B01-A22 141.5

Vacuum Unit Series ZK2

P Single unit Note 4) Vacuum pump system J N.C. None Note 5) Self-holding release valve linked For manifold Q R N.C. Note 7) N None None Silencer exhaust A Note 3) Only non-locking type is available for the manual override for K, J, R. Note 4) When J is selected for vacuum pump system, install a release valve or vacuum breaker.

Air Cylinder: Standard Type Double Acting, Single Rod Series CM2 ø20, ø25, ø32, ø40 How to Order Mounting style Cylinder stroke (mm) T B Basic style (Refer to “Standard Stroke” on page 129.) Head side trunnion style Clevis integrated style Axial foot styl

Rubber bumper 0.4 J 0.65 J 1.2 J Allowable kinetic energy 0.54 J (11.0) 0.78 J (11.0) 1.27 J (11.0) 2.35 J (11.8) Air cushion (Effective cushion length (mm)) CG1 With air cushion MB Standard Stroke MB1 Bore size (mm) Maximum stroke (mm) Standard stroke (1) (mm) Made to Order Specifications (For details, refer to pages 1373 to 1498.)

Tie-rod Type Low Pressure Hydraulic Cylinder Double Acting/Double Rod Series CHAW

LH 0.2 C B W W D E d d D E LY MM MM 4-LD Width across flats G Width across flats G LT LT NA NA Y X Y X LX B S + Stroke LS + Stroke ZZ + 2 strokes (mm) Bore size (mm) LD LH LS LT LX LY A a B B C d E F G GA J K M MA MM NA D H 0 -0.062 0 -0.062 0 -0.074 0 -0.074 0 -0.074 0 -0.074 0 -0.087 0 -0.018 0 -0.021 0 -0.021 0 -0.021 0 -0.025 0 -0.025 0 -0.025 40 9 47 168 8 44 77 23 10 60 60 44 18 45

IZx-OMP0064

Installation Distance and Discharge Time (Discharge Time from 1000V to 100V) Applicable models: IZS40, IZS41 Applicable models: IZS41 with feedback sensor (The Installation height of the sensor is 25mm) 1) Without air purge For IZS40-1120/J/V, IZS41-1120/J/V 2) With High speed static neutralization cartridge, With air purge, For IZS40-1120, IZS41-1120 10 3 0.8 2.5 8 0.1MPa Discharge time

240

Dimensions [mm] Model L1 L2 A B C D E F G J K LEPS10-25 138 152.5 61.8 20 22 30 29 20 29 39 88.2 LEPS10-50 163 177.5 24 43 34 50 24 50 60 113.2 LEPS10L-25 124 138.5 47.8 20 22 30 29 20 29 39 88.2 LEPS10L-50 149 163.5 24 43 34 50 24 50 60 113.2 394 LEPY/LEPS Series Specific Product Precautions 1 Be sure to read this before handling the products.

15

Select [Applicable tubing O.D.: 4 or more, Connection thread: Rc1/8]. 10.5 Motorless Motorless FK LAT Dimensions [mm] LZ Size Stroke range [mm] B C D EH EV H J K L M O1 R S T U LC3F2 63 50 to 200 123 21 40 76 82 M16 x 2 44 36 33.4 60 M8 x 1.25 16 78 83 5 205 to 500 158 505 to 800 193 The L measurement is when the unit is at the retracted stroke end position.

Refrigerated Air Dryer

IDFB3E IDFB4E to IDFB11E B Q A D E Compressed air inlet Illuminated switch Compressed air outlet Evaporation thermometer G F J Ventilation direction Ventilation direction C Ventilation air outlet Drain tube (O.D.: 0.4 [10 mm], Length: 31.5 [0.8 m]) H 4 x 0.5 [4 x 13 mm] N M L K Power cable with plug (Length: 110 [2.8m]) Dimensions Unit: inch [mm] A B C D E F G H J K L M N Q Model Port size

Series MXP/MXPJ6 11- ø6, ø10, ø12, ø16 22- Air Slide Table

3 M3 x 0.5 Vacuum suction port Z Max. 9.5 (Rubber stopper) 2.4 3.5 depth 2 2.5 +0.030 0 7 +0.030 0 depth 2 2.5 Q QL Without magnet and switch rail 2 2 x M2 x 0.4 depth 2.2 12 11-/22-MXP6-10 Metal stopper Max. 10.5 F 4 x M3 x 0.5 depth 3 12 2 x M2 x 0.4 depth 3 (mm) E F H J M Q QL S W Y Z AA Model 23 25 38 33.5 37 28 8 5 42 23.5 45 2 11-/22-MXP6-51 30 35 53 48.5 47 37 11 10 42 30 60 9.5 11

5 Port Pilot Operated Solenoid Valve VFS1000/2000/3000/4000/5000/6000 Series

04 03 04 No.

VFS

04 03 04 q Description No.

0.55

controller AS3002F-06 AN30-03 Silencer AN302-03 Body Ported [when using SGP (Steel Piping)] Body ported Series CS1 Tubing x Length SGP10A x 1 m VF5120-03 Speed controller AS420-03 Silencer AN30-03 Base Mounted Base mounted Series CJ2 Series CM2 Series MB, CA2 Series CS1 Tubing x Length T0604 x 1 m T1075 x 1 m T1209 x 1 m VF3140-03 Speed controller AS3002F-06 AS4002F-10 AS4002F-12 Silencer

VFR

-01T-081-03-AP5 1 set (Manifold base part no.)