Output Specification: NPN Open Collector 2 Outputs + Analog Voltage Output, Unit Specification: Unit Selection Function, Switches w/Unit Selection not Permitted for Use in Japan, Piping Specification: R 1/8, Lead Wire: Lead Wire w/Connector, 5-core, 2 m Lead Wire, Bracket: None, Operation Manual: Operation Manual, Calibration Certificate

Output Specification: NPN Open Collector 2 Outputs + Analog Voltage Output, Unit Specification: Unit Selection Function, Switches w/Unit Selection not Permitted for Use in Japan, Piping Specification: R 1/8, Lead Wire: Lead Wire w/Connector, 5-core, 2 m Lead Wire, Bracket: None, Operation Manual: w/o Operation Manual, Calibration Certificate

Output Specification: NPN Open Collector 2 Outputs + Analog Voltage Output, Unit Specification: SI Unit Only, Piping Specification: ø6 One-touch Fitting, Elbow Type, Lead Wire: -, Bracket: -, Operation Manual: -

Output Specification: NPN Open Collector 2 Outputs + Analog Voltage Output, Unit Specification: Unit Selection Function, Switches w/Unit Selection not Permitted for Use in Japan, Piping Specification: R 1/8, Lead Wire: w/o Lead Wire, Bracket: Bracket B, Horizontal Mounting, Operation Manual: -

Output Specification: NPN Open Collector 2 Outputs + Analog Voltage Output, Unit Specification: Unit Selection Function, Switches w/Unit Selection not Permitted for Use in Japan, Piping Specification: ø6 One-touch Fitting, Elbow Type, Lead Wire: w/o Lead Wire, Bracket: Panel Mount Adapter, Operation Manual: -

Output Specification: NPN Open Collector 2 Outputs + Analog Voltage Output, Unit Specification: Unit Selection Function, Switches w/Unit Selection not Permitted for Use in Japan, Piping Specification: NPT 1/8, Lead Wire: w/o Lead Wire, Bracket: None, Operation Manual: Operation Manual, Calibration Certificate

Output Specification: NPN Open Collector 2 Outputs + Analog Voltage Output, Unit Specification: Unit Selection Function, Switches w/Unit Selection not Permitted for Use in Japan, Piping Specification: R 1/8, Lead Wire: w/o Lead Wire, Bracket: Bracket A, Vertical Mounting, Operation Manual: -

Output Specification: NPN Open Collector 2 Outputs + Analog Voltage Output, Unit Specification: Unit Selection Function, Switches w/Unit Selection not Permitted for Use in Japan, Piping Specification: ø6 One-touch Fitting, Straight Type, Lead Wire: w/o Lead Wire, Bracket: Bracket A, Vertical Mounting, Operation Manual: -

Output Specification: NPN Open Collector 2 Outputs + Analog Voltage Output, Unit Specification: Unit Selection Function, Switches w/Unit Selection not Permitted for Use in Japan, Piping Specification: R 1/8, Lead Wire: Lead Wire w/Connector, 5-core, 2 m Lead Wire, Bracket: Bracket A, Vertical Mounting, Operation Manual: -

Thermo-chiller

W: 5.1 [kW] r Calculate based on the laser output.

CNG

x 0.8 M4 x 0.7 depth 7 5 6 M8 x 1.25 24 M5 x 0.8 21.5 2 65 11 11 15 (16) 23 30 3 12 151 (159) M6 x 0.75 98 6 5.5 8 M10 x 1.25 29 M5 x 0.8 26.5 2.5 73 11 11 15 (16) 25 30 3 12 M5 x 0.8 depth 7.5 154 (162) 99 6 M8 x 1.0 5.5 10 M10 x 1.25 35.5 Rc(PT) 1/8 26.5 2.5 73 11 10 (11) 15 (16) 28.5 25 3 12 M5 x 0.8 depth 8 169 (178) M10 x 1.25 107 8 6 14 M14 x 1.5 44 Rc(PT) 1/8 28 2.5 81 12 10 (12)

Cylinder with Lock Series CNG

x 0.8 141 (149) 88 5.5 M4 x 0.7 depth 7 5 6 M8 x 1.25 24 M5 x 0.8 21.5 2 65 11 11 15 (16) 23 30 3 12 M6 x 0.75 151 (159) 98 6 M5 x 0.8 depth 7.5 5.5 8 M10 x 1.25 29 M5 x 0.8 26.5 2.5 73 11 11 15 (16) 25 30 3 12 M8 x 1.0 154 (162) 99 6 M5 x 0.8 depth 8 5.5 10 M10 x 1.25 35.5 Rc(PT) 1/8 26.5 2.5 73 11 10 (11) 15 (16) 28.5 25 3 12 M10 x 1.25 169 (178) 107 8 M6 x 1 depth 12 6 14 M14 x 1.5 44

CJ2X/CUX/CQSX/CQ2X/CM2X

1/4 Cylinder side M5 x 0.8 10-32 UNF NPT 1/8 NPT 1/4 R 1/8 Port size ML2B Rc 1/4 Rc 1/8 Tube side Air flow (l/min (ANR)) 38 7 12 Controlled flow Effective area (mm2) C J G5-S 0.6 0.1 0.2 Flow rate (l/min (ANR)) 420 105 280 Free flow Effective area (mm2) CV 6.5 1.6 4.3 Note) Supply pressure: 0.5 MPa, Temperature: 20C MVGQ Dual Type CC Air Flow/Effective Area RB ASD230FM-M5 ASD330FM-01 ASD430FM

CJ2X/CUX/CQSX/CQ2X/CM2X

1/4 Cylinder side M5 x 0.8 10-32 UNF NPT 1/8 NPT 1/4 R 1/8 Port size ML2B Rc 1/4 Rc 1/8 Tube side Air flow (l/min (ANR)) 38 7 12 Controlled flow Effective area (mm2) C J G5-S 0.6 0.1 0.2 Flow rate (l/min (ANR)) 420 105 280 Free flow Effective area (mm2) CV 6.5 1.6 4.3 Note) Supply pressure: 0.5 MPa, Temperature: 20C MVGQ Dual Type CC Air Flow/Effective Area RB ASD230FM-M5 ASD330FM-01 ASD430FM

17

R R L L L R Standard piping/Centralized piping (mm) L R WXX Y S d D R Applicable O-ring Model Operating direction Centralized piping MY1B25 MY1B32 MY1B40 15.5 16.2 5.5 6 11.4 1.1 C9 20 20.4 5.5 6 11.4 1.1 L R 23.5 25.9 6 8 13.4 1.1 C11.2 DO-ring R R R Centralized piping (mm) R R R L L L WX SS Model L -X MY1B25 MY1B32 MY1B40 R R 26.5 10 Centralized piping Piping tube 40 5.5 Note) Refer to

ZSE1/ISE1

1/8 M5 x 0.8 depth 5 Piping port M5 x 0.8 depth 5 Piping port 2-3.5 Mounting hole T1: NPTF 1/8 01: R 1/8 13 13 16-6-5

NVKF

(M5) 01T r/ NPTF {A port onl ' Special order Notel) Indicale in parentheses al end of parl # Ex.

Compact Pressure Switch Series ZSE1 (For Vacuum)/ISE1 (For Positive Pressure)

x 0.8 depth 5 Piping port 2 x 3.5 Mounting hole T1: NPTF 1/8 01: R 1/8 M5 x 0.8 depth 5 Piping port 2 x 3.5 Mounting hole T1: NPTF 1/8 01: R 1/8 13 13 777

3 Way Direct Acting NVKF 300 Series

(M5) 01T r/ NPTF {A port onl ' Special order Notel) Indicale in parentheses al end of parl # Ex.

Microspeed Cylinder

Elbow Type (Metal Body) Flow rate and effective area AS220M-02 Model AS120M AS220M-01 R 1/4 Cylinder side Tubing side M5 x 0.8 10-32UNF NPT1/8 NPT1/4 R 1/8 Port size Rc 1/4 Rc 1/8 l/min (ANR) (CFM) Flow rate 38 (1.33) 7 (0.25) 12 (0.42) Controlled flow 0.6 (0.03) 0.1 (0.006) 0.2 (0.01) Effective area mm (cv) l/min (ANR) (CFM) 420 (14.7) Flow rate 105 (3.7) 280 (9.8) Free flow 6.5 (0.36) 1.6