SMC Corporation of America
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This is a legacy product. Please contact us for the latest version.sales@ocaire.com, SPEED CONTROL W/FITTING, AIRLINE EQUIPMENT, FLOW CONTROL W/FITTING, A5, AS***F M5 CLEAN-ROOM, 1.79968 lb, Applicable tubing O.D. (mm)Connection threadsModel Elbow typeUniversal type Meter-outMeter-inMeter-outMeter-in3.2M5 x 0.8AS1201FG-M5-23AS1211FG-M5-23AS1301FG-M5-23AS1311FG-M5-23

M5 01 02 03 04 M5 x 0.8 R R R R 1 8 1 4 3 8 1 2 Symbol Specications -X12 Lubricant: Vaseline -X21 Grease-free (Seal: Fluorine-coated) + Throttle valve (Without check valve) -X214 Throttle valve (Without check valve) Note)M5size:S(withseal)isnotnecessary. 611 A

ARM Nil Standard Machined bleed port M5 thread Set pressure ARP X201 0 1 0.005 to 0.2 MPa 0.01 to 0.4 MPa X206 With bleed port fittings (Applicable tube O.D.: 4) IR-A Gauge port orientation IR Nil: Standard Port size IRV OUT IN Piping port size M5 x 0.8 Rc 1/8 Symbol M5 01 VEX Knob Gauge port SRH R: R specifications Symbol Gauge port SRP SRP OUT IN SRF Gauge port positions are indicated

(mm)Connection threadsModel Elbow typeUniversal type Meter-outMeter-inMeter-outMeter-in4M5 x 0.8AS1201FG-M5-04AS1211FG-M5-04AS1301FG-M5-04AS1311FG-M5-04

(mm)Connection threadsModel Elbow typeUniversal type Meter-outMeter-inMeter-outMeter-in6M5 x 0.8AS1201FG-M5-06AS1211FG-M5-06AS1301FG-M5-06AS1311FG-M5-06

Note 2) Applicable up to 2000 mL/min by using a solenoid valve with a large Cv value (Cv value of 0.5 or more). Note 3) With low operating cycles, even a valve with a small Cv value can be operated. 584

) 12 16 20 25 (mm) C1 9 10 12 15 H1 M5 x 0.8 M6 x 1.0 L1 14 15.5 18.5 22.5 X 10.5 12 14 17.5 M8 x 1.25 M10 x 1.25 Standard Bore size (mm) Stroke range (mm) A 25.5 25.5 29 32.5 (mm) Without auto switch With auto switch C D E F H I K L M N OA OB Q RA RB T B 22 22 24.5 27.5 A 30.5 30.5 39 42.5 B 27 27 34.5 37.5 12 16 20 25 5 to 30 5 to 30 5 to 50 5 to 50 6 8 7 12 6 8 10 12 25 29 36 40 5 5 5.5

Vacuum pressure switches There will be no change in performance if a pressure of approximately 0.5 MPa is applied momentarily (when releasing vacuum), but care should be taken that pressures of 0.2 MPa or more are not applied on a regular basis. Operating Environment Warning 1.

A B C D E F G H J 1.6 M5 2.3 3.2 For other special options, refer to page 462.

For details, refer to page 102. * S: A right-hand auto switch is shipped. ** Nil: A right-hand switch and a left-hand switch are shipped. Nil Side ported E Axial ported Applicable Auto Switches/Refer to pages 797 to 850 for further information on auto switches.

JAS Series How to Order Port size M3 M3 x 0.5 M5 M5 x 0.8 U10 10-32UNF JAS L E A 04 M5 JAS L E A S 04 01 Seal method Type L Elbow Nil Without sealant S With sealant Control type1 Port size E Meter-out S Meter-in 01 1/8 1 Meter-out and meter-in types can be visually identified by the color of the knob.

A A A . . . . -4VEX-OMO0001 3 0 VEX1 3 Series / / / / / / / / ( ( ( ( ) ) ) ) -5VEX-OMO0001 3 VEX1 3 Series 0 ON-OFF (AF ) (AMAFM ) (P.2.3) [1 P][1P] PE ( ( ( ( ) ) ) ) IR2000 VEX 33 ITV VY 11 (0.5MPa ) (0.1MPa ), 2 Nm 1/6 MPa MPa MPa MPa MPa MPa MPa MPa MPa MPa MPa MPa MPa MPa MPa MPa -6VEX-OMO0001 3 VEX1 3 Series 0 +0.1MPa 2 PE(ASN2-M5) 0.1MPa P1 O M5 P1 O VEX1-A30-3 O

5 Port Solenoid Valve Body Ported/Single Unit Series SY3000/5000/7000/9000 How to Order 5 L SY 5 1 20 01 Series Bracket 3 SY3000 5 SY5000 Nil: Without bracket F1: With foot bracket A, B port size Thread piping 7 9 SY7000 SY9000 2 position single only Symbol Port size M5 x 0.8 SY3000 Applicable series M5 1 8 01 SY5000 1 4 SY7000 02 02 03 Type of actuation Coil specifications 1 4 Standard Nil

CLS M5 x 0.8 Rc NPT G 1/8 1/4 Unlocking port size Symbol Specifications CLQ 1/8 M5 x 0.8 XA 1/4 Change of rod end shape 157 245 402 629 982 1559 2513 3927 Holding force (N) (Maximum static load) XC35 With coil scraper (40 to 100 only) RLQ Equivalent to 0.5 MPa Note) Be sure to select cylinders referring page 812.

Dimensions/20 to 100 Basic/CG1YB GA GB 2-P (Port size) (Rc, NPT, G) 2-TC Section TA/TB Width across flats B1 H1 MM 0 -0.05 I 0 -0.05 TD E D E AL A TA TB 4-TC K F F H TE TF TG NA S + Stroke ZZ + Stroke KA C 0.1 8-J NA Section TA/TB (mm) Bore size (mm) 20 25 32 40 50 63 TC TDH9 TE TF TG M5 x 0.8 4 0.5 5.5 +0.08 0 8 +0.08 0 M6 x 0.75 5 1 6.5 10 +0.08 0 M8 x 1.0 5.5 1 7.5 12 +0.08 0 6 1.25 8.5

Pad Shape: Bellows, Pad Type: Standard / Holder Set, Mounting Method: Recessed, Material: Rubber Group, Rubber Group Material: Fluororubber, Environment: Heat Resistant / Chemical Resistant, Vacuum Outlet Port: Threads, Types Of Connection Screw: Threaded, Connection Screw Diameter: M5, Main Body Type: A Set Of A Pad And A Holder, Pad diameter(ø): 6, Vacuum entry port thread diameter: M5,

Pad Shape: Bellows, Pad Type: Standard / Holder Set, Mounting Method: Recessed, Material: Rubber Group, Rubber Group Material: [Nitrile Rubber] Conductive NBR, Environment: Static Diffusion / Oil Resistant, Vacuum Outlet Port: Threads, Types Of Connection Screw: Threaded, Connection Screw Diameter: M5, Main Body Type: A Set Of A Pad And A Holder, Pad diameter(ø): 6, Vacuum entry port thread

Resistant / Heat Resistant, Vacuum Outlet Port: Threads, Types Of Connection Screw: Threaded, Connection Screw Diameter: M5, Main Body Type: A Set Of A Pad And A Holder, Pad diameter(ø): 6, Vacuum entry port thread diameter: M5, Mounting connection screw: M5 × 0.8, With/without lock ring: -, Type: With adapter, Detachability: Improved detachability (blast specifications)

Pad Shape: Bellows, Pad Type: Standard / Holder Set, Mounting Method: Recessed, Material: Rubber Group, Rubber Group Material: [Nitrile Rubber] NBR, Environment: Oil Resistant, Vacuum Outlet Port: Threads, Types Of Connection Screw: Threaded, Connection Screw Diameter: M5, Main Body Type: A Set Of A Pad And A Holder, Pad diameter(ø): 6, Vacuum entry port thread diameter: M5, Mounting connection