JXCx-OMT0001CN

12.5 ([5m ] (a) (b) L E C P * B -* A B-1 2 A A-1 1 L B B-2 6 B A-2 5 1 1.5m COM-A/COM B-3 3 3 3m COM-B/ A-3 4 (c) 5 5m Shield Vcc B-4 12 GND A-4 13 A B-5 7 A A-5 6 B B-6 9 B A-6 8 3 (d) S 4 + B-1 5 A-1 1 + B-3 2 A-3 (8) (a) (b) (14.2) B1 A1 (17.7) 2 1 (14) (18) 6 (10.2) B6 5 A6 2 1 B1 A1 B3 A3 (d) (5.7) 15 16 (c) L (11) (30.7) 12.6 ([820m] (a) (b) LE CP * B A B-1

High Power Cylinder Series RHC

1-C 2-A 2-B 1-C 2-B 1-C 2-B 1-C 2-B 1-C 2-B 1-C 2-B 1-C 2-B 1-C 2-B 1-C 2-B 1-C 2-B 2-B 2-B 1-A 1-B 1-C 2-A 2-B 1-C 2-A 2-B 2-B 2-B 2-B 2-B 1-A 1-B 1-C 2-A 2-B 2-B 2-B 2-B 2-B 2-B 6 1/8,1/4 500 1.5 0 1,000 2,000 3,000 6 1/4, 3/8 10 1/4, 3/8 Maximum speed Vmax [mm/s] 1000 3 25 20 1500 4.5 Composite effective area So [mm] Composite effective area So [mm] Composite effective area So [mm] 10

Conforming to ISO Standard Solenoid Valve (with M12 Connector) Series EVS7-6/7-8/7-10 (Size 1) (Size 2) (Size 3) 1

B 20 14 12 P = 43 A P = 43 PA 23 A A B B 14 12 A PA PA L1 L2 L2 L1 B B B 14 12 A A A A B 14 A A PA B B (2n 1/8) 4n-1/4, 3/8 2, 4 port PA L-side R-side L-side R-side D-side D-side 89 3 89 16 141 (Single) 141 (Single) 55 44 186 (Double) 186 (Double) 196 (3 position) 196 (3 position) 77.5 Bottom ported M12 connector L: Dimensions n: Stations 141.5 L n 1 Formula 2 3 4 5 6 7 8 9 10 121 5 1 12

48

B-1 A-1 B-2 A-2 B-3 A-3 Cable color Signal Nil 2 1 6 5 3 4 A A B B COM-A/COM COM-B/ Brown Red Orange Yellow Green Blue S Standard cable Cable color Connector D terminal no. Shield 12 13 7 6 9 8 3 Brown Black Red Black Orange Black Vcc GND A A B B B-4 A-4 B-5 A-5 B-6 A-6 Connector B terminal no.

VZS

Single solenoid type A side solenoid Black: A Red: COM Double, 3 position type A side solenoid Black: A Red: COM Valve B side solenoid White: B Red: COM Lead wire color Lead Wire Color Single solenoid type A side solenoid Black: A Red: COM Double, 3 position type A side solenoid Black: A Red: COM Valve (1) B side solenoid White: B Red: COM Lead wire color Lead wire length: 0.6 m 3-7-4 5 Series

CLK1

Hs B 16 14 14 26 29 (36) D-C73C 8.5 A D-H7C 8.5 A Hs B B Hs 14 36.7 38.2 D-G5NT D-B5, B6 B A Hs Hs B A 24.5 24.5 13 33 13 33 Hs D-A3 D-G3, D-K3 B A 49 B Hs A 49 34 56 18 36 18 36 B D-A4 Hs A 34.5 56 18 36 Minimum Strokes for Auto Switch Mounting Minimum strokes are as follows based on the space required for mounting auto switches.

2-Color Display Type High-Precision Digital Pressure Switch Series ZSE30/ISE30

2-Color Display Type High-Precision Digital Pressure Switch Series ZSE30/ISE30 How to Order Option 1 Without lead wire Nil Lead wire with connector (Lead wire length: 2m) L ISE30 01 25 M For positive pressure ZSE30 01 25 M For vacuum/Low pressure Option 2 Piping specification R 1/8 (with M5 female thread) NPT 1/8 (with M5 female thread) 01 T1 None Bracket Nil A Output specification NPN output

Dedicated Controller Series LC1 Uniaxial Type

Mounting bracket Ass'y Mounting screws Controller model M3 x 0.5 LC1-1-N3 LC1-1B-N3 M5 x 0.8 LC1-1-N5 LC1-1B-N5 M3 LC1-1-L3 LC1-1B-L3 M5 LC1-1-L5 LC1-1B-L5 Note) This controller comes with either the T-nuts or T-brackets as accessories.

3

flow ratio to be b = 0.3.

High Power Cylinder:

1-C 2-A 2-B 1-C 2-B 1-C 2-B 1-C 2-B 1-C 2-B 1-C 2-B 1-C 2-B 1-C 2-B 1-C 2-B 1-C 2-B 2-B 2-B 1-A 1-B 1-C 2-A 2-B 1-C 2-A 2-B 2-B 2-B 2-B 2-B 1-A 1-B 1-C 2-A 2-B 2-B 2-B 2-B 2-B 2-B CE2 6 1/8, 1/4 1.5 500 0 1,000 2,000 3,000 ML2B Max. speed Vmax (mm/s) 6 1/4, 3/8 3 1000 Graph 3:25 ML1C 10 1/4, 3/8 20 (1/4) 4.5 1500 20 10 1/4, 3/8 REA Composed effective area So (mm2) Composed effective area

5 Port Solenoid Valve Series SQ1000/2000

4 A 4 A 4 A 4 A R 62 41.5 (58) 39.5 P B 2 B 2 B 2 B 2 B 2 B 2 B 2 B 2 25.5 1 21 44.5 63.5 P = 17.5 2n-C4,C6,C8 A, B port Dimensions Formulae L1 = 17.5n + 52 L2 = 17.5n + 74.5 n: Stations (max. 16 stations) L n 1 69.5 92 112.5 123 2 87 109.5 137.5 148 3 104.5 127 150 160.5 4 122 144.5 175 185.5 5 139.5 162 187.5 198 6 157 179.5 200 210.5 7 174.5 197 225 235.5 8 192 214.5 237.5 248 9 209.5

AWG

Metal bowl with level gauge With drain guide Drain cock with barb fitting With drain guide Metal bowl B B B B B B N.O.: Black Dimensions B B N.C.: Gray O S 1/8 10 One-touch fitting O 1/4 S Barb fitting Applicable tubing: T0604 Width across flats 17 Width across flats 17 M5 x 0.8 Standard specifications Accessory specifications Bracket mount Model Port size A B C D E G H J K M N P Q R AWG20

LEF-OM002xx

300 400 500 600 V(mm/s) V (mm/s) V(mm/s) LEFS16 LEFS25 LEFS32 Vertical Transfer 12 50 B B B 20 A 10 A A 40 H W(kg) W(kg) H 8 W(kg) 15 30 6 10 20 4 5 2 10 0 0 0 0 200 400 600 800 1000 1200 0 100 200 300 400 500 600 0 200 400 600 800 1000 1200 V (mm/s) V (mm/s) V(mm/s) LEFS16 LEFS25 LEFS32 50 12 B B 20 B A 10 A 40 H H A W(kg) W(kg) W(kg) 15 8 30 6 10 20 4 5 10 2 0 0 0 0 100 200 300 400 500

CM2

0() 0() A 6(4) 6(4) 7(5) 12 B B 0() 0() 1(0) 6 Hs 22.5 25 28.5 32.5 B 5(3) 5(3) 6(4) 11 A 7(5) 7(5) 8(6) 13 Hs 25 27.5 31 35 A B 6(4) 6(4) 7(5) 12 Hs 60 62.5 66 70 A 4(2) 4(2) 5(3) 10 Hs 69.5 72 75.5 79.5 B 3(1) 3(1) 4(2) 9 A 0.5() 2.5(0.5) 1.5(0) 0.5() 2.5(0.5) 1.5(0) 0.5(0) 5.5 2.5(0.5) 7.5 1.5(0) 6.5 3.5(1.5) 8.5 ( ): Denotes the values with air cushion.

Table of Contents - Tubing

lines in clean room environments TPH 06 04 B 20 Tube O.D.

Solenoid Valve

-B 25 No.VQC1000V-OMM0001-B 26 No.VQC1000V-OMM0001-B 27 No.VQC1000V-OMM0001-B 28 No.VQC1000V-OMM0001-B 29 No.VQC1000V-OMM0001-B 30 No.VQC1000V-OMM0001-B When the valve is failing, use this flow chart to clarify the cause of the failure and take countermeasures appropriate for the cause.

CXT

22.5 17 19 22.5 24.5 27 30.5 9 9.5 13 14 12.5 16 MG Bore size (mm) MGP MGQ MGG Reed switch Solid state switch @ HS A B D-F7NWV D-F7BWV D-F7NV D-F7PV D-F7BV D-J79C D-A72 D-A73 D-A80 D-A73C D-A80C D-A79W MGC MGF 32, 40 CY1 MY1 (mm) D-A72 D-A73 D-A80 D-A73C D-A80C D-A79W D-F7NV D-F7PV D-F7BV D-J79C D-F7NWV D-F7BWV Auto switch model A B Hs A B Hs A B Hs A B Hs A B Hs A B Hs Symbol Standard stroke

Hydraulic Cylinder 7MPa Nominal Pressure Series CHN

Hs Auto switch 24.5 A B 49.5 A 33 B Proper auto switch mounting positions (mm) D-G39 D-K39 D-A3 D-A44 D-H7 D-H7C D-H7W D-H7BAL D-C7 D-C80 D-C73C D-C80C D-B5 D-B64 D-G5NTL D-H7F D-B59W Bore size (mm) A B A A A A A A B B B B B B 16 15.5 7.5 12 14 17.5 12.5 11 19 20 8 4 6 9.5 4.5 25 17.5 13.5 17 7 15.5 19 10.5 14 20.5 7.5 3.5 5.5 9 4 32 20.5 16.5 9 20 18.5 22 23.5 12.5 17 9.5 5.5 7.5 11 6 40

Round Type Low Pressure Hydraulic Cylinder Series CH
M

HS Auto switch 36 12 24.5 SMC SMC A 33 B Auto switch 49.5 A B G 1/2 (applicable cable O.D. 6.8 to 11.5) Proper auto switch mounting positions (mm) D-H7 D-H7C D-H7W D-H7BAL D-C7 D-C8 D-C73C D-C80C D-G39 D-K39 D-A33, D-A34 D-A44 D-B5 D-B6 D-G5NTL D-H7F D-B59W Bore size (mm) A A B A A A A B A B B B B B 20 14 10 8.5 12 10.5 14 9 15 13 12 6.5 8.5 12 7 25 14.5 12.5 9.5 9 11 14.5 9.5 12.5 15.5 11.5

Electric Actuator High Rigidity and High Precision Slider Type Circular arc grooves allow for high rigidity and high precision. Moment resistance*1 *2 61% Improved by up to Table displacement*1 50% Reduced by up to With internal battery-less absolute e

20 15 24 24 65 106 Cable length 250 Motor cable Lock cable Cable length 400 65 (85) (2.4) (68.5) 3H9 (+0.025 0 ) depth 3 Cable length 250 Body mounting reference plane (B dimension range)1 4 x M5 x 0.8, thread depth 8.5 65 (2.4) (109) (125.5) 38 (7.5) 3.5 50 Motor cable 3H9 (+0.025 0 ) depth 35 45 64 (102) L A (Table traveling distance)2 (52) 52 40.5 10 [Origin]4 Origin3 2 [(4)]4 54 [