Electric Actuator / Guide rod Slider

Electric actuators / Common precautions . 27 5.1 Design and selection . 27 5.2 Mounting . 28 5.3 Handling . 29 5.4 Operating environment . 30 5.5 Maintenance . 31 5.6 Precautions for actuator with lock . 31 6. Electric actuators / Guide rod Slider Common precautions . 32 6.1 Design and selection . 32 6.2 Handling . 32 6.3 Mounting . 33 6.4 Precaution on maintenance . 34 7.

VFR4000-OMH0003

P 1= 0.7 MPa/P 2=0.5MPa PB 31 31 24 Although A, B+ and B marks are indicated on the terminal 55 Effective area at exhaust side(mm 2) AEA block, VFR4000 can be used as either +COM or COM. 45 S at P 2 = 0.5 MPa BEB solenoid valve.

Digital Flow Switch (Remote type sensor unit)

Refer to the "Applicable fluid list" on page 31. 2: The operating pressure range and proof pressure vary depending on the fluid temperature.

Cylinder with Turntable Series MGT

80 100 Individual -X 25, 50st Larger than 50st 25, 50st Larger than 50st 25, 50st Larger than 50st 25st Larger than 100st 114 134 160 180 75st, 100st Larger than 100st 50st 75st, 100st Larger than 100st 37 57 63.5 64 75st, 100st 93 25st 50st 25st 50st 147 168 188 41 45.5 46 118 142 162 106.5 115 137 172 198 233 20 25 30 16 160.5 171 208 29.5 18.5 21 25 30 36 109.5 121 130 147 13 5 33.5 31

Escapements Series MIW/MIS ø8, ø12, ø20, ø25, ø32 1

8.5 8.5 41 29 MIS8-20D MIS20-10D MIW32-32D 6 4 4 2 18.5 31 6.5 20.5 51 8.5 8.5 39 29 MIW12-12D MIS20-20D MIS32-30D 3.5 1.5 4 2 18.5 29 6.5 20.5 61 8.5 8.5 59 29 MIS12-10D MIS20-30D MIS32-50D 3.5 1.5 4 2 18.5 39 6.5 7.5 33 21 MIS12-20D MIW25-25D 3.5 1.5 10-11-16 16 Series MIW/MIS Specific Product Precautions 1 Be sure to read before handling.

3

Auto Switch Mounting Height (mm) D-F7/J79 D-F7W D-J79W D-F7BA D-F79F D-F7NT D-A7H D-A80H Auto switch model D-F7V D-F7WV D-J79C D-A7 D-A80 D-A73C D-A80C D-A79W D-M9V D-A9V D-P3DWA Bore size U 25.5 28 36 38 43.5 48.5 U 25 28 28.5 32 37.5 42.5 U 23 26 26.5 30 35 40.5 U 27.5 30.5 26.5 40 45 50.5 U 30 32.5 39.5 42.5 48 53.5 U 24.5 27.5 34 37.5 43 48 U 31 34 40.5 43.5 49 54.5 U 28 31 37.5 40.5

Mechanically Jointed Rodless Cylinder with Brake, Hy-rodless Cylinder Series ML1C ø25, ø32, ø40

Shock absorber model Applicable bore (mm) CLS ML1-A25H ML1-A32H ML1-A40H ML1C25 ML1C32 ML1C40 101 90 25 20 11 72 67.3 12 31 39.5 Max. 16.5 4.5 3 RB1412 120 107 30 25 16 93 73.2 15 38 49 Max. 20 5.5 6 CLQ RB2015 147 129 30 31 16 105.5 73.2 15 40.5 54.5 Max. 25 5.5 6 MLGP Side Support RLQ Side support A MLU ML1C D-X 20Data Side support B A B C D E F G H J Part no.

Mechanically Jointed Rodless Cylinder with Brake, Hy-rodless Cylinder Series ML1C ø25, ø32, ø40 1

Shock absorber model Applicable bore (mm) CLS ML1-A25H ML1-A32H ML1-A40H ML1C25 ML1C32 ML1C40 101 90 25 20 11 72 67.3 12 31 39.5 Max. 16.5 4.5 3 RB1412 120 107 30 25 16 93 73.2 15 38 49 Max. 20 5.5 6 CLQ RB2015 147 129 30 31 16 105.5 73.2 15 40.5 54.5 Max. 25 5.5 6 MLGP Side Support RLQ Side support A MLU ML1C D-X 20Data Side support B A B C D E F G H J Part no.

ML1C

Applicable bore Shock absorber model ML1-A25H ML1-A32H ML1-A40H ML1C25 ML1C32 ML1C40 101 90 25 20 11 72 67.3 12 31 39.5 Max. 16.5 4.5 3 RB1412 120 107 30 25 16 93 73.2 15 38 49 Max. 20 5.5 6 RB2015 147 129 30 31 16 105.5 73.2 15 40.5 54.5 Max. 25 5.5 6 Side Support Side support A 2 x G E E F 2 x H A B Side support B 2 x J A B (mm) A B C D E F G H J Part no.

240

seal Gasket Plug Nickel plating Nickel plating Zinc chromated D-X 23 MXH Series Dimensions: 6 LT 9 15 LA LB 8 J x M3 x 0.5 Depth 5 3 x M4 x 0.7 through Pilot hole dia 3.3 2 x 3 x 6 counterbore depth 3.3 2 x 2 x M5 x 0.8 Cylinder port (With plug for port) 4 x M3 x 0.5 Depth 5.5 2 x M5 x 0.8 Cylinder port 4 x M3 x 0.5 Depth 4.8 5 19 5 17 15 38 39 18 5.5 19 5 18 5.5 16 9 5.5 10 10.5 8.5 4 NS 31

CU

22 25 31 9 10 11 27 22.5 25 14 18 22 12 15.5 19.5 8 10 12 M5 x 0.8 M5 x 0.8 Rc 1/8 Bore size (mm) NN T S Z K KA L MM P Q R Standard strokes 20 25 32 M5 x 0.8 with depth 8 M5 x 0.8 with depth 8 M6 x 1.0 with depth 9 9.3 with depth 8 9.3 with depth 9 11 with depth 11.5 53 51.5 56 72 74.5 83 30 38 48 5 6 7 5 6 8 M6 x 1.0 M8 x 1.25 M10 x 1.25 5.5 5.5 6.6 16 20 24 13 23.5 29 20, 30, 40, 50, 60

Compact Type

Theoretical Output (N) Operating pressure (MPa) Rod size (mm) Bore size (mm) Operating direction Piston area (mm2) 0.15 0.7 0.6 0.5 0.4 0.3 0.2 0.1 8.4 39.2 33.6 28.0 22.4 16.8 11.2 56 OUT CXS6 4 4.6 21.7 18.6 15.5 12.4 9.3 6.2 31 IN 110 94.2 78.5 62.8 47.1 31.4 15.7 157 OUT CXS10 6 70.0 60.0 50.0 40.0 30.0 20.0 10.0 100 IN 247 212 177 141 106 70.6 35.3 353 OUT CXS15 8 176 151 126 101

Electric Actuator with Integrated Guide

No designated speed 31 No speed designation with MOVA or MOVI, and no prior speed designation found. No jump destination 32 No label found at the program designated jump destination. Nesting exceeded 33 Sub-routine nesting (calling a sub-routine from another sub-routine) exceeds 14 levels. No return destination 34 No return destination found for the RET command operation.

Series AS Elbow Type/Universal Type Speed Controller with One-touch Fitting 1

4" 10-32UNF 14.3 17 AS221F-01-01 AS221F-01-06 27.5 27.5 6 20.4 11.6 20.4 36.1 32.1 27.1 13.5 31.1 9.3 1/8" 14.2 12 (12.7) 1/8 16 12.7 AS221F-01-03 AS221F-01-08 32.4 8 20.4 15.2 18.5 19 27.5 25.3 17 9.3 5/32" 12 (12.7) AS221F-01-05 AS221F-01-10 14.2 14.3 40.2 10 23.1 18.5 21 15 21 30.2 36.1 31.1 27.1 33.1 17 32.1 11.4 16.5 3/16" 1/8 AS221F-01-07 AS221F-02-04 23.9 16 34.4 4 10.4 25.2 13.2 31

Table of Contents

Series AS-FG Speed Controller with One-touch Fittin Stainless Series. 5 5 6 7 9 11 11 11 11 12 13 13 13 15 15 16 16 16 17 17 18 19 21 22 22 23 24 25 27 27 27 29 30 31 31 31 32 34 35 35 35 36 36 37 37 37 38 38 39 39 39 41 42 43 43 43 44 45 46 46 Specifications. How to Order . Construction. Dimensions . Series AS-FG Speed Controller with One-touch Fittings Stainless Series In-line Type.

A

105 93 66 1/4 47.5 23.5 65.5 6 M4 x 0.7 Depth 4.5 22 29 0 38 40 31 125 66 1/4 23.5 82.5 23 67.5 10.5 M4 x 0.7 Depth 4.5 22 29 0 38 40 31 125 66 1/4 23.5 84.5 27.5 M5 x 0.8 Depth 5 24 28 2 43 48 36 112 100 76 3/8 50.5 27.5 68.5 M5 x 0.8 Depth 5 24 28 2 43 48 36 132 76 3/8 27.5 85.5 16 70.5 3.5 M5 x 0.8 Depth 5 24 28 2 43 48 36 132 76 3/8 27.5 87.5 20.5 M6 x 1 Depth

Series IDG

temperature IDG10 5 to 50C (23 to 122F) Outlet air atmospheric pressure dew point 20C (-4F) IDG30 JIS symbol 12.5 (0.44) 625 (22.07) 62 (2.19) 125 (4.14) 250 (8.82) 375 (13.24) 725 (25.60) 900 (31.78) 1190 (42.02) 50 (1.77) 100 (3.53) 200 (7.06) 300 (10.59) 500 (17.66) 600 (21.19) 750 (26.49) 1000 (35.31) 2.5 (0.09) 12 (0.42) 25 (0.88) 50 (1.77) 75 (2.65) 125 (4.41) 150 (5.30) 190 (6.70) 31

ITV

0.4 0.3 0.3 0.5 0.2 0.2 0.1 0.1 1.0 0 1000 2000 3000 4000 5000 60007000 0.0 0.0 3000 4000 0 1000 2000 5000 6000 0.4 0.6 0.8 1.0 1.2 Flow rate (l/min (ANR)) Flow rate (l/min (ANR)) Supply pressure (MPa) 1.12-6 Electro-Pneumatic Regulator Series ITV2000/3000 Dimensions ITV20mm Cable connector (4 wire) Cable connector (4 wire) Right angle type Note) Straight type m50 4-7 Mounting hole AC (31

KS/KX

17 23 23 29 38 56 64 82 76 93 1 8 1 4 14 8.6 8.6 4 30 31 32 37.5 38 39.5 40.5 42 1 8 15.2 17 26 6 18.5 21.6 14.9 17 8 1 4 3 8 1 4 3 8 1 2 3 8 1 2 10 18.5 22 31.5 21 30.5 25.0 22 7 24 20.9 24 34 22 8 35.1 35.1 12 Reference dimensions after R(PT) thread installation.

High Purity Fluoropolymer

A B LQ2 E 31 32 Different dia. tubing size (B side) Applicable tubing size (A side) Union elbow 18 Series LQ2 Specifications Model Feature LQ230 LQ220 LQ240 LQ250 Maximum operating pressure (at 20C) 1.0MPa Refer to the withstand pressure and heat resistance performance curves.