Electric Actuator Series LJ1H/LJ1S Made to Order Specifications

115 MR-C10A1 Without brake (Horizontal specification) Non-standard Mitsubishi Electric Corporation motor HC-PQ053 50 200/230 MR-C10A R 100/115 MR-C10A1 With brake (Vertical specification) HC-PQ13B 100 200/230 MR-C10A 100/115 SGME-A5BF12 SGDE-A5BP Without brake (Horizontal specification) Non-standard Yaskawa Electric Corporation motor 50 200/230 SGME-A5AF12 SGME-01BF12B SGDE-A5AP SGDE-01BP Y

Output Specification: Y (PNP Open Collector 2 Outputs + Copy Function), Unit Specification: P (Unit Selection Function, Initial value psi), Piping Specification: 01 (R 1/8), Lead Wire: w/o Lead Wire, Bracket: None, Operation Manual: Y (w/o Operation Manual, w/o Calibration Certificate)

Output Specification: PNP Open Collector 2 Outputs + Copy Function, Unit Specification: SI Unit Only, Piping Specification: Female Thread, Lead Wire: w/o Lead Wire, Bracket: None, Operation Manual: w/o Operation Manual, w/o Calibration Certificate

Output Specification: Y (PNP Open Collector 2 Outputs + Copy Function), Unit Specification: M (SI Unit Only), Piping Specification: M5 (Female Thread), Lead Wire: w/o Lead Wire, Bracket: None, Operation Manual: Y (w/o Operation Manual, w/o Calibration Certificate)

Rated Vacuum Range: F (-100 to 100 kPa), Output Specification: Y (PNP Open Collector 2 Outputs + Copy Function), Unit Specification: M (SI Unit Only), Piping Specification: M5 (Female Thread), Lead Wire: w/o Lead Wire, Bracket: None, Operation Manual: Y (w/o Operation Manual, w/o Calibration Certificate)

SMC Pneumatic Clean Series

With air cushion B 15 LH LT 2-LC 4-LD W W (Knock pin position) X Y M X Y Z LS + Stroke LX LZ ZZ + Stroke (mm) B 54.5 70.5 82.5 30 LH 4 LC 60 LS 3 LT 54 LX 4 M 16.5 X 8.5 Y Z 63.5 75.5 75.5 144 ZZ 7 LD 71 LZ 10 W Bore size 40 50 63 10 12 4.5 4.5 17.5 17.5 169.5 169.5 67 67 40 45 5 5 66 82 5 5 22 22 11 13 86 106 Other dimensions are the same as basic style. 37 2122CG1/ CG1 1011Air cylinder

CNS

Symbol Bore size (mm) 125 140 160 H A L1 H1 3.5 Y type double knuckle I type single knuckle Y-12 110 50 100 156.5 I-12 Y-14 110 50 105 161.5 I-14 Y-16 120 56 110 170.5 I-16 L1 H1 A, H Dimensions When Mounting a Single/Double Knuckle Joint together with a Rod End Nut A H Bore size (mm) 125 140 160 65 125 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-

Electric Actuator High Rigidity and High Precision Slider Type Circular arc grooves allow for high rigidity and high precision. Moment resistance*1 *2 61% Improved by up to Table displacement*1 50% Reduced by up to With internal battery-less absolute e

Calculate the load factor for each direction. x = Xc/Lx, y = Yc/Ly, z = Zc/Lz 5. Confirm the total of x, y, and z is 1 or less. x + y + z 1 When 1 is exceeded, please consider a reduction of acceleration and work load, or a change of the work load center position and series. Acceleration [mm/s2]: a Work load [kg]: m Work load center position [mm]: Xc/Yc/Zc z y 1. Horizontal 3.

MU

E1 NDH10 Size A1 E1 MM Size L1 L1 MM A1 +0.058 0 +0.058 0 +0.058 0 +0.070 0 8 10 10 14 10.5 12 14 18 16 18 20 28 27 31 36 46 M10 X 1.25 M12 X 1.25 M14 X 1.5 M18 X 1.5 10.5 12 14 18 14 18 20 28 27 31 36 46 M10 X 1.25 25 32 40 50, 63 25 32 40 50, 63 I-MU02 I-MU03 I-MU04 I-MU05 Y-MU02 Y-MU03 Y-MU04 Y-MU05 M12 X 1.25 M14 X 1.5 M18 X 1.5 Applicable pin NDH10 NL U1 U1 Part No. NO Part No.

80

Body material: Aluminum, PPS resin, Brass, Stainless steel Body material: PPS resin (One-touch fitting type) u y t r e w q u y t r e w q OUT 2 IN 1 OUT 2 IN 1 i Component Parts Component Parts No. Description Solenoid coil Fixed armature Tube Return spring Armature assembly Seal Body No.

Series CJ2Y ø 10, ø 16 Smooth Cylinder Double Acting, Single Rod

Applicable bore size A1 L L1 MM Y-J010C 10 8 15.2 21 M4 x 0.7 Part no. Applicable bore size B1 C1 d H1 Part no. Applicable bore size B2 C2 d H2 SNJ-010C 10 11 12.7 M8 x 1.0 4 NTJ-010C 10 7 8.1 M4 x 0.7 3.2 Y-J016C 16 11 16.6 21 M5 x 0.8 SNJ-016C 16 14 16.2 M10 x 1.0 4 Part no.

RSQ

5 y q r !6 e !0 !3 w @1 @2 !5 t y q r e !0 !3w #0 @9 #3 @8 @7 o @0 !6 i !9 !8 u o @0 !7 i !9 !

MLU

Y-MU02 Y-MU03 Y-MU04 Y-MU05 Part no. I-MU02 I-MU03 I-MU04 I-MU05 +0.058 0 +0.058 0 +0.058 0 +0.070 0 8 10 10 14 MLGP RLQ Knuckle pin and snap ring are included. MLU Clevis pin and knuckle pin Rod end nut ML1C D30 d Dd9 -X d 20D C l m m t t L H B Data (mm) (mm) Part no.

CE

2r e y @4@8 !0 @0 oi @3 u@4 @8@7@2r !9 #0 w #1 #0 t q @9 e #1 @1 !9t@5 @6 #0@1q!1w#1#0@2@9#1@1 40 to 63 @4@0@8oiu@3!1#1#2@8@4!2@7!3#3r!4@6!6e #7 #6 !5 !9t@5 @6 y#0@1w#0#5!7#4q@9@2!8#1#2!7#5#4@1 Parts list Parts list Description Material Note No. No.

Series PF2D Digital Flow Switch For Deionized Water and Chemicals

Use after putting the unit label other than l/min, l. r Unit display/Orange e OUT1 CH r t y u Displays the selected channel. Channel display/Red t u UP button ( button) Use to change the mode or to increase the set value.

Cylinder with Lock Series CNS

Symbol Bore size (mm) 125 140 160 H A L1 H1 Y type double knuckle I type single knuckle Y-12 110 50 100 156.5 I-12 Y-14 110 50 105 161.5 I-14 Y-16 120 56 110 170.5 I-16 L1 H1 A, H dimensions when single/double knuckle joint and rod end nut are mounted together A H Bore size (mm) 125 140 160 65 125 65 125 76 140 Single knuckle joint and double knuckle joint should be used separately. ( Fasten

M8/M12 Connector PCA/EX9/EX500 Series EX260 Type 1 EX123/124/126 EX500 Type 2 EX600 EX245 Type 3 EX250 EX120/121/122 ¡Communication Cable/Connector EX140 Type 1 EX180 EX510 Type 2 M8/M12 ATEX

(2 x M12 (5 pins)-M12 (5 pins)/SPEEDCON) Y connector For sensor #7 PCA-1557798 Y connector (2 x M8 (3 pins)-M12 (4 pins)/SPEEDCON) 219 M8/M12 Connector PCA/EX9/EX500 Series Other Accessories (EX500/EX9) p. 240 to 242 E B Cable with M12 connector Output block Seal cap (For socket) Power block EX260 EX123/124/126 EX500 EX600 EX245 EX250 EX120/121/122 EX140 EX180 EX510 M8/M12 ATEX Type 1 Type

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Red Black Red Black Red Black Red Black Red Black Red Black Red Shield Black Red Black Red Black Red Black Red Black Red Black Red Black A1 Light brown Light brown Y ellow Light green Light green Gray Gray White White Light brown Light brown Y ellow Y ellow Light green Light green Conductor size: AWG28 A2 A3 A4 A5 A6 A7 A8 A9 A10 A11 A12 A13 Y ellow Y ellow Light green Light green Gray Gray

CY1F

Coordinates and Moments z M3: Yawing M1: Pitching y x M2: Rolling Static moment Ceiling mounting Horizontal mounting Wall mounting M1 M2 M2 M1 M2 M3 y X x Y y z X x Y X x Z m1 x g m2 x g m3 x g Vertical mounting Mounting orientation Horizontal Ceiling Wall Vertical m1 m2 m3 m4 Static load m M3 M1 m1 x g x X m2 x g x X m4 x g x Z Static moment M1 m1 x g x Y m2 x g x Y m3 x g x Z y z M2 z Y