Vacuum Equipment

NBR Silicon rubber NBR Silicon rubber NBR Silicon rubber NBR Silicon rubber NBR Silicon rubber NBR Silicon rubber ZP02 ZP04 ZP06 ZP08 ZP10 ZP13 ZP16 ZP20 ZP25 ZP32 ZP40 ZP50 ZP63 ZP80 ZP100 ZP125 5 7 8 2 2 4 4 7 9 11 2 4 5 7 10 4 6 8 10 5 5 10 10 7 9 9 10 13 10 8 13 11 13 11 10 11 16 20 25 32 12 14 9 9 13 15 19 25 33 13 15 20 26 35 14 17 20 24 30 15 18 21 26 33 14 14 13 20 18 12 13 11 17

3 Port Solenoid Valve

Note) Order is accepted in 10 units. 3 Compact Direct Operated 3 Port Solenoid Valve Series S070 Dimensions Base mounted with screws S070B-G-M3 Grommet type 16 3 7 12 18 2-3.4 Mounting hole 5 150 (lead wire AWG#26) 22 6 20.5 19 3 2 1 9.5 6.5 5.5 4.5 12.3 10 10 25 M3 0.5 3 (EXH) port M3 0.5 1 (SUP) port M3 0.5 2 (OUT) port S070B-C-M3 Plug lead type 0.1 W with power saving circuit 150 (lead

Vacuum Ejector Box Type (Built-in Silencer)/Body Ported Type Series ZH 1

-08-02 57 12 3.2 24 Rc 5.8 2 38.5 57 12 3.2 24 5.8 2 38.5 57 12 3.2 24 5.8 2 38.5 57 12 3.2 24 5.8 2 38.5 60 12 3.2 26 5.8 2 39.5 60 12 3.2 26 5.8 2 39.5 75 17 4.2 28 7.5 3 50 75 17 4.2 28 7.5 3 50 Screw-in connection (Mounting hole) Model A 67.5 29.5 16 12 28 5 47 67.5 29.5 16 12 28 5 47 67.5 29.5 16 12 28 5 47 67.5 29.5 16 12 28 5 47 70.5 30.5 18 12 29 5 50 70.5 30.5 18 12 29 5 50 86.5

MY1

M2 M3 m2 m3 16 20 25 32 40 50 63 16 20 25 32 40 50 63 6.0 3.0 1.0 18 7 2.1 10 5.2 1.7 26 10.4 3 15 9.0 2.4 38 15 4.5 MY1MW 30 15 5.0 57 23 6.6 59 24 8.0 84 33 10 115 38 15 120 48 14 140 60 19 180 72 21 6.0 3.0 2.0 18 7 2.1 10 5.0 3.0 25 10 3 15 8.5 5.0 35 14 4.2 30 14 10 49 21 6 MY1CW MY1B 60 23 20 68 30 8.2 115 35 35 93 42 11.5 MY1H 150 50 50 130 60 16 The above values are the maximum allowable

Series VS

Return spring A VF4000-18-2-1 VF4000-18-2-1 VF4000-18-1 VS8060-17-2 VF4000-18-1 VFS3000-17-1 5. Return spring A 6. Return spring B 7. Detent assembly 8. Pilot valve assembly SF4-w F-30 SF4-w F-30 SF4-w F-30 SF4-w F-30 SF4-w F-30 SF4-w F-30 SF4-w F-30 SF4-w F-30 SF4-w F-30 6. Return spring B VF4000-18-2-2 VF4000-18-2-2 7.

1.1

At present, 18 organizations have been recognized as NRTLs.

Rotary Actuator/Vane Style Series CRB1

CRQ2X MSQX M1 M2 Body (B) MRQ N Body (A) 2 x R A port J E2 H E1 F S A port B port N 2 x R Y Y A1 M1 A2 P 6 x Q X A1 (mm) R () E1 (g6) E2 (h9) F (h9) Model A1 A2 B C D G H J K L M1 M2 N P Q S T U V W X Y Z CRB1BW 5026 18 14 M6 x 1 depth 9 0 0.043 0.006 0.017 0 0.052 R6 1/8 67 70 3 10 13 5 50 60 34 66 46 5.5 6.5 78 19.5 39.5 13.5 11 11.9 12 25 CRB1BW 50-E CRB1BW 6321 18 29 22 15 M8 x 1.25

AC Servo Motor Driver (Pulse input type)

CN1 (Note 3, 5) Emergency stop Servo-on Reset Proportion control External torque limit selection Forward rotation stroke end Reverse rotation stroke end EMG SON RES 42 15 19 17 18 43 44 47 (Note 7) CN6 PC 3 1 2 MO1 Analog monitor 1 (Note 12) TL LG LSP LSN MO2 Analog monitor 2 (Note 5) Plate SD DOCOM Upper limit setting P15R 1 2m max.

AC Servo Motor Driver (CC-Link Type)

Parameter Configuration using Setup software (MR Configurator2TM) . 18 5.1Setup software (MR Configurator2TM) . 18 5.1.1 Installation Method . 18 5.2 Basic driver set-up for Initial Test Drive . 18 5.2.1 Start up the Setup software (MR Configurator2TM) . 19 5.2.2 System Settings . 20 5.2.3 Model Selection . 20 5.2.4 Driver ON LINE Check . 21 5.2.5 Help Function . 21 5.3 Parameter Settings

AC Servo Motor Driver (CC-Link Type)

Parameter Configuration using Setup software (MR Configurator2TM) . 18 5.1Setup software (MR Configurator2TM) . 18 5.1.1 Installation Method . 18 5.2 Basic driver set-up for Initial Test Drive . 18 5.2.1 Start up the Setup software (MR Configurator2TM) . 19 5.2.2 System Settings . 20 5.2.3 Model Selection . 20 5.2.4 Driver ON LINE Check . 21 5.2.5 Help Function . 21 5.3 Parameter Settings

SI Unit for Vacuum Manifold

(Maintenance demanded) Power supply for logic/sensors (PWR) is low. (< approx. 18 VDC) The Supply valve type parameter does not match the actual ejector specification. The Pressure parameter value does not meet the conditions. Valve protection function is operating. Orange ON --One of the following may have occurred.

IDX-OM-Z004

(17) 17) 40 (K16K) JIS 65A 10K 479 127 1276 51 (14~18) 1418) 1375 1,3 -W4 -W4 (-W4) (-W4) Y1/2 Y1/2 () R1/2 R1/2 36 129 20 7122 350 700 752 1,3 -W5 (-W5) -W5 (-W5) R1/2 R1/2 IDF100F150F-W 6 4 IDX-OM-Z004 6 IDF150F-30-W K16K (10, 0.7m) () (10, 2m) JIS 80A 10K (10,0.7m) ) (10 ( (K16K) JIS 80A 10K 2m) 20 18 t 268 217 t 20 18 t 8x23 8x19 A A 8x23 8x19 20 4x 75 A 1056

High-precision Digital Pressure Switch ( compatible)

Used as IO-Link device 18 to 30 VDC, including ripple (p-p) 10% Current consumption 35 mA or less Protection Polarity protection Display accuracy 2%F.S.1 digit (at ambient temperature 253 oC) Accuracy Repeatability 0.5%F.S. Temperature characteristics (25 oC standard) 5%F.S. Output type Select from NPN or PNP open collector output.

Compact Rotary Actuator Rack-and-Pinion Type/Sizes: 10, 15, 20, 30, 40 Series CRQ2

Refer to air consumption on page 18. 13 Rotary Actuator Technical Data 1 and 2 Effective Torque/Moment of Inertia Effective Torque Unit: Nm Effective torque values are typical values and are not guaranteed. Use them as guide values in actual applications.

Escapements Series MIW/MIS

Finger options Nil: Basic type (Standard type) 1: Tapped on upper and lower faces 2: Tapped on all faces (5 surfaces including end surface) Applicable auto switches/Refer to pages 14 through 18 for detailed specifications of auto switches.

Compact End Lock Cylinder Series CBQ2

FV FX FZ A B A B FV M 82.5 65.5 75 58 5.5 8 48 56 65 32 92 75 81.5 64.5 5.5 8 54 62 72 40 4FD FX FZ FT L B + Stroke A + Stroke 93.5 75.5 83.5 65.5 6.6 9 67 76 89 50 95 77 89 71 9 9 80 92 108 63 Rod end male threads Bore size (mm) L L1 M 32 17 38.5 34 40 17 38.5 40 50 18 43.5 50 63 Rod end nut L1 18 43.5 60 Rear flange type/CBQ2G, CDBQ2G (mm) Rear flange type With rear lock With front lock

Slide Tables MX Series

MXQ 6 MXQ 8 MXQ12 MXQ16 MXQ20 MXQ25 2.1{21.4} 2.1{21.4} 4.4{44.9} 7.4{75.5} 7.4{75.5} 18{180} 8 8 10 12 12 16 M4 x 0.7 M4 x 0.7 M5 x 0.8 M6 x 1 M6 x 1 M8 x 1.25 2. Side through hole mounting These conditions could lead to malfunctions.

Air Slide Table Series MXQ

Ma = K Mmax Work piece mounting coefficient K: Fig. 3 Allowable moment coefficient : Graph 2 Max. allowable moment Mmax: Table 4 Mar = 36 Mrmax = 36 K = 1 = 1 ' = 0.39/36 = 0.011 May = 1 x 1 x 18=18 Mymax = 18 K = 1 = 1 = 0.39/18 = 0.022 Find the load factor of the static moment.

Shock Absorbers and Rate Controls

5 .38 .71 .65 t 1 t.37 .71 .63 .n SLA 9/l6ll Ex.50 stA ir r34 (rR)0rM.35 .5 to .63 tl5 18 lJNt .31 r.55 .tl .63 .18 SlAVl-|6 x-50 5tA 338{7 trRl0Eril.5 .5 .94 .55 V,r . 16 Uflt .43 r.64 .98 .88 ,28 SLAl -l2xl 5ta 33848 (rRloEMt.01.0 1.50 1.80 I,r2 UNt .59 2.88 1.42 1.25 .39 \oles: L To bp used d t r -or D-fio1 -odpl\ ontt 2.

Heavy Duty Stopper Cylinder Series RSH/RS1H

Note 2) The figure shows an extended piston rod. 7 Heavy Duty Stopper Cylinder Series RSH/RS1H Auto Switch Proper Mounting Position Auto switch B A Auto switch proper mounting position D-Z7 D-Z80 D-Y59 D-Y7P D-Y7W Auto switch models D-Y69 D-Y7PV D-Y7WV D-Y7BAL Bore size (mm) A B A B A B 20 8(6.5) 18 18 9.5 18 2 32 10.5(9) 13.5 13.5 12 13.5 4.5 50 12(10.5) 22 22 13.5 22 6 63 15.5(14) 24.5