IDX-OM-W010

Terminal connecting screw: M5 Connector width: 9.5mm or less Applicable electrical wire: 1.25mm2 or more To the users machine L ,N: Power supply N L Ground fault display button (white) Test button (gray) 4) Connect the grounding cable. AC100V: Connect the ground line to M4 screw on the left side of the GFCI (with the name plate).

IDX-OM-W011

304 33 73 31 36 154 21 330 226 410 413 125 240 15 38 150 IDF2E Rc3/8 51 232 138 24 327 IDF4E / IDF6E / IDF8E / IDF11E ( 10 :0.8m) [ AC100V ] [ AC200V ] (:1.9m) [ AC200V ] (17) mm A B C D E F G H J K L M N P Q IDF4E Rc1/2 453 13 498 568 31 42 283 355 80 230 32 15 284 15 240 80 275 IDF6E Rc3/4 455 270 485 IDF8E Rc3/4 300 IDF11E Rc3/4 IDF Series 6-3 6 3 IDX-OM-W011 6 IDF15E1 mm 603 41

IDX-OM-O004E

Ground Fault Circuit Interrupter To the users machine Terminal connecting screw: M5 Connector width: 9.5mm or less Applicable electrical wire: 1.25mm2 or more L ,N: Power supply N L Ground fault display button (white) test button (gray) 121 12. Specification for Option R 3) Connect the power cable to the terminal of the GFCI. 4) Connect the ground line.

IDX-OM-O004C

INOUT () 5 2 6. 6 6.1 IDF15E1-10 IDF15E1-20 550 MPa 0.151.0 () 240 (85%) 50Hz 2.8 (ANR) 1) 60Hz 3.1 m 3/min 50Hz 2.9 2) 60Hz 3.2 MPa 0.7 35 32 10 () AC100V(50Hz) AC100,110V(60Hz) 3) AC200V(50Hz) AC200,220V(60Hz) 3) (50/60Hz) W 420/480 (50/60Hz) A 4.3/4.6 3.4/3.1 4 ) A 10 R134a(HFC) () Rc1 kg 46 1 2 () kW 15 1(ANR)[2065%] 2[32] 3() 430mA 6 1 6. 6.2 IDF15E1 mm 603 41

EX500-GPR1A.eng

TS M12 connector ( socket ) /10 pcs. 40 41 Item No. Solution/Corrective action PROFIBUS DP compatible communication Field wireable connector Communication cable (With one side connector) Terminal plug PCA-1557727(Plug, B-coded) SOL LED is turned on 4 Check the power for solenoid valves/output ( DC24V ) is supplied.

Digital Flow Switches

Pin description Load is an analog input equipment such as a voltmeter, ammeter. 1 DC(+) PF2A7H-(-M) 68 69 2 Analog output 3 DC() Accumulated pulse output wiring examples 4 OUT1 4-I thread with depth J 40 Max. 30 V 80 mA or less OUT1 Load Black H 0 V or Blue 50 msec 50 msec PF2A7H-(-M) 28 29 B C D E F G H I J A Model Brown PF2A703H PF2A706H PF2A712H 55 160 40 92 67 55 Rc1, NPT1, G1 36 M5 x

Exhaust Cleaner for Clean Rooms AMP Series

Port size 3 Symbol 2 02 03 04 06 1/4 3/8 1/2 3/4 Models AMP220 AMP320 AMP420 Model 1000 (35) 200 (7) 500 (17.5) Max. flow capacity l/min (ANR)(SCFM) 1/2, 3/4 1/4, 3/8 3/8, 1/2 Port size (nominal size B) 1.15 (2.54) 0.43 (0.95) 0.68 (1.50) Weight kg (lb) Specifications Fluid Compressed air Element upstream pressure 0.1MPa or less (14.5 psi or less) Ambient and fluid temperature 5 to 50C (41

Sine Rodless Cylinder Series REA

SN-032B SN-040B Applicable bore size (mm) 25, 32 40 8 M26 x 1.5 32 37 11 M32 x 2.0 41 47.3 H B 6

Piping: 41 (Base Mounted Common SUP Common EXH), Stations: 16 Stations, A B Port Size: M5 (M5X0.8)

This fitting is available in 27 different body styles, with connection sizes from M5 to + R(PT), and tube sizes from 4mm OD to 12 mm OD., FITTING, BRANCH MALE ELBOW, ONE-TOUCH FITTING, STAINLESS STEEL, 913, 41 lb

High Vacuum L Type Valve

part) Nut assembly (Maintenance part) (Set of a nut and a washer) 9 (Valve seal 2) Washer (Material: SUS304 or equivalent) Nut (Material: SUS304 or equivalent) (Shaft) 11 XL-OMV0003 5-2.Dimensions Size 16, 25, 40 E C E (KF flange) Fn C E D J H B A G A Unit: (mm) Model A B C D E Fn Fd G H J XLG-16-2 40 108 38 20 30 17 44 19 XLG-25-2 50 121 48 27 12 40 26 44 21 XLG-40-2 65 171 66 39 11 55 41

MICRO MIST SEPARATOR

Recommended torque unitNm Screw M5 1/8 1/4 3/8 1/2 3/4 1 Torque *1 79 1214 2224 2830 2830 3638 *1: First, tighten it by hand , then give it an additional 1/6 turn with a wrench. Do not apply any torsional moment, or bending moment except the weight of the air filter itself. External piping needs to be supported separately.

Series 10-, 21- AF-A Air Filter

q Body size 20 30 40 50 60 Symbol Description w Pipe thread type Nil Metric thread (M5) Rc N Note 1) NPT F Note 2) G + 01 1/8 02 1/4 03 3/8 04 1/2 06 3/4 10 1 + e Port size a Mounting Nil Without mounting option B Note 3) With bracket + Option r Nil Polycarbonate bowl 2 Metal bowl 6 Nylon bowl 8 Metal bowl with level gauge C With bowl guard Note 6) Note 6) Note 6) Note 6) b Bowl 6C

Manifold Regulator Modular Type ARM2500/3000 Series

Note Outlet pressure (MPa) 136413 ARM2500 ARM3000 Hexagon socket head cap screw (M5 x 70) 4 With flat washer 136313 IRV Hexagon socket head cap screw (M6 x 85) 4 With flat washer VEX SRH Option/Bracket Assembly SRP Individual IN type can be used as a single unit regulator.

Series 12-REA ø25, ø32, ø40, ø50, ø63 Sine Rodless Cylinder

Fittings & Tubing Air Cylinders Rotary Actuators 0 L0.1 4 x MM Thread depth J 2 x P (Piping port) A G E H G B NN Effective thread length T (R) D X Mounting nut Width across flats C F N ZZ + Stroke S + Stroke W K N F I NA TT 6 T Model MM L K J I H G F E D C B A S NN NA 34 N R 12-REA25 12-REA32 12-REA40 8 46 32 26.4 2 13 7.5 20.5 8 10 70 15 M5 x 0.8 18.5 30 M26 x 1.5 111 10 8 60 32 33.6 2 16

High Pressure Coolant Valve

Main port 3 (3 port valve only) VNA VNB Flow indicator for 2 port valve SGC Dimensions SGH (mm) Main port 1, 2, 3 2 Port 2 x 2 x Pilot port 12(P1), 10(P2) A B Note) C D E F G H I Model 3 Port 3 x 3 x VNC 3 8 1 2 2 x 3 4 2 x 1 3 8 1 8 VNH1 -10A VNH2 -15A VNH3 -20A VNH4 -25A A B A B A B A B 60 80 100 115 217 (219) 246.5 (248.5) 282 (284) 301 (303) 60 77 96 113 46 60 76 85 34 40 50 60 24 36 41

VZM500

Main valve/Rc (6A) Lubrication VA 1 8 Port size Pilot valve (EXH)/M5 x 0.8 Option Foot bracket (2) VM Weight (Basic) 130 g Please contact SMC for manifold mounting style. Note 1) External pilot type Main valve: 0 to 0.7 MPa Pilot valve: 0.15 to 0.7 MPa Note 2) The standard body can not be retrofitted with a foot bracket. VR VH VHS Model Actuator part no.

Piping: 41 (Base Mounted), Stations: 4 Stations, A, B Port: M5 (M5X0.8)

Piping: 41 (Base Mounted), Stations: 2 Stations, A, B Port: M5 (M5X0.8)

Piping: 41 (Base Mounted), Stations: 6 Stations, A, B Port: M5 (M5X0.8)