Table of Contents whichever is smaller of 1.5 mm amplitude or 98 m/s2 acceleration, Vibration resistance in X, Y, Z directions, for 2 hours each (De-energized) 980 m/s2 in X, Y, Z directions, 3 times each (de-energized) Impact resistance Temperature characteristics 2% F.S. or less (based on 25C) Piping Specifications R04 N01 Model M3 M5 01 R06 IM5 IM5H M5 female thread, through type (with mounting hole) 4 NPT1/8 R1
whichever is smaller of 1.5 mm amplitude or 98 m/s2 acceleration, Vibration resistance in X, Y, Z directions, for 2 hours each (De-energized) 980 m/s2 in X, Y, Z directions, 3 times each (de-energized) Impact resistance Temperature characteristics 2% F.S. or less (based on 25C) Piping Specifications R04 N01 Model M3 M5 01 R06 IM5 IM5H M5 female thread, through type (with mounting hole) 4 NPT1/8 R1
ISA11-4L-01BG ZSE2 ISE2 ISA15-1-01G ZSP ISl ZSM Accessories (Optional) PFl Bracket ISA-1-A Gauge G33-3-01 DIN rail ISA-2-1 to 7 IFl Gauge/G33-3-01 Bracket /ISA-1-A DIN rail/ISA-2-1 to 7 Material: SPC (Nickel plated) Material: Aluminum 10 hex. 100 110 q w e r t L 90 10 25 5 4-4.5 7.5 30 R1/8 34 42 28 4.5 35 27 9 16.5 13 5.6 L Applicable model Part No. 105 140 175 210 245 280 315 Description
Current output 4~20mA2.5% F.S. or less Repeatability 0.2% F.S. 2digit or less 0.2% F.S. 1digit or less response time 2.5ms or less (With anti-chattering function:20ms, 160ms and 640ms selection) Hysteresis Hysteresis mode and window comparator mode selection Port size R1/8 (with M5 female) Enclosure IP40 43 Vacuum Regulator Series IRV 60 l/min (ANR) Note) 100 l/min (ANR) Note) 150 l/min (
Model VQZ100 VQZ200 VQZ300 Suitable tightening torque 0.13 to 0.19Nm 0.25 to 0.35Nm 0.5 to 0.7Nm Circuit with light AC circuit DC circuit 1 2 1 2 NL: Neon light R: Resister LED: Emitting diode R: Resister NL R R LED Fitting and Silencer Part Number for P,R Ports When Using Valve as an Individual Unit Screw Silencer for 3(R2,R), 5(R1) One-touch fitting for 1(P) port Silencer AN120-M5 INA-25
(X) ptus B A ir_r r-r--r1 qla.\1tr R P F (X) plus B A Voltage leakge Pipins $Make sure that chips, cutting oil, dust, etc, are cleaned up before piping. Owhen using a NVJ33OO or NVJA33OO closed center type, make sure there's no leakage bet\iveen the fitting and valve, cylinder ports or the piping. x Leakage voltage must be no more than 37o of the rated voltage.
$r @ r1|l{l 1352t PABTS IIST sld. 6. y.-C.Era. ol lpel .nd dstnd.t.d -odd a o dns! DtitENsrolrs SERIES DTRECTIOXALAIRVALVES DIMENSIONS/PARTS LIST D.C. SOLENOIDS NVS NVS NVS 4324, 43U,4iJ44 vs4424,443/',4 PAR18 UAT -'@ D r_19 o g r1.35 (289) 325 32.5) (24 (9) 2,52 t30al 2.52 331 (34) 6,02 033) ell oo) 2.42 t.) t6,rl {,42n} 2.43 (t4 (le) 4.50 t2r6) 't.22 (31t 114 2,') i?t) Mlh.r*1.
br'l l $ 4> (Special order only) Indicator llght aM surge voltage supprossor With Indicaior liqht aird surge volhge suppiessor With surge voltage suppressor 4:3 position exhaust center Voltage ' Not avail. lor grommel type. t Specielorder For type 20, 21 manifold i I r r r , t , , r . i r i , l Body opton For type 40, 41, 42 manifold o 0lT:With 'aNPTF O2TrWith 14 NPTF subplate subplate /R1
Manual override Nil: Nonockins push type 'oltage suppressor wrh ---'l ,hl wth sfige voftageJUepresd B: Lock ng iype (s oned) lD tr]]i\ -r1.LrF-r }pos lDn qhausl cn1er . t_tr-r fll, r-itr'Lt lir. ,L]! gpos ton pressure center ]]-trr\i rt it, rN !fT.",d""d_l I nuonerseat IIE t i r ; \ 1 . 1 r q t l 6. r': 6) G) ( : . : 6 ?
(X) ptus B A ir_r r-r--r1 qla.\1tr R P F (X) plus B A Voltage leakge Pipins $Make sure that chips, cutting oil, dust, etc, are cleaned up before piping. Owhen using a NVJ33OO or NVJA33OO closed center type, make sure there's no leakage bet\iveen the fitting and valve, cylinder ports or the piping. x Leakage voltage must be no more than 37o of the rated voltage.
387 PF2D Series Dimensions: Remote Type Monitor Unit for Deionized Water and Chemical Liquids (4-channel Controller) PF2D200/201 40.1 (7.5) 40 6 2.5 L L/min 36.8 OUT1 CH FLOW SMC SET Sensor connector (option) Front protective cover + Panel mounting 53 9.4 (2) 47 42.4 46.4 Panel mounting adapter Front protective cover Waterproof seal Panel Panel fitting dimensions 55 or more 37.5 +0.1 -0.2 R1
Corner: R3.5 or less 311 A Series PF2W Dimensions: Remote Type Monitor Unit For Water (4-channel Flow Monitor) PF2W200, 201 40.1 (7.5) 40 6 2.5 L L/min 36.8 OUT1 CH FLOW SMC SET Sensor connector (option) Front protective cover + Panel mount adapter 53 9.4 (2) 47 42.4 46.4 Panel mount adapter Front protective cover Waterproof seal Panel Panel fitting dimensions 55 or more 37.5 +0.1 -0.2 R1
when using an M12 connector for IO-Link communication Connector pin assignment Pin no. 7 N.C. 8 N.C. 1 Brown: L+ Sheath O.D. 3.5 Connector size M12 2 White: CH1_OUT2 6 N.C. 5 N.C. 4 White CH1_OUT2 3 Black C/Q (CH1_OUT1) 2 Blue L 1 Brown L+ 4 Black: 3 Blue: L C/Q (CH1_OUT1) 100 42.5 Front protection cover + Panel mount adapter 53 55 or more 47 37.5 +0.1 0.2 (2) 9.4 42.4 46.4 55 or more 4 x R1
Dimensions 46.5 Cover 26.5 12 14 Turn counterclockwise until the cover stops. 42 Pull R1/4 2) Use a flat head screwdriver (with a 2.9 mm blade width) to set the limit indicator. Be careful not to bend other needle or damage the dial plate.
IN IN Material 30 40 VDW30-CP7 VDW40-CP10 Stainless steel P7 quick fastener P10 quick fastener R1 L2 Ten pieces come in each set. Quick fastener clip OUT OUT 90 right direction Note) Cannot be reassembled in different combinations. IN Male quick fastener R2 ( Male quick fasteners are not included.)
Part No. 40 50, 63 80 100 D H B C A A1 E1 L1 MM R1 U1 d NDH10 NX 40 50, 63 80 100 I-04 I-05 I-08 I-10 NT-04 NT-05 NT-08 NT-10 +0.070 0 0.1 0.3 25.4 21 69 22 24 55 M14 X 1.5 15.5 20 M14 X 1.5 8 22 12 16 +0.070 0 0.1 0.3 74 M18 X 1.5 11 27 31.2 26 27 28 60 M18 X 1.5 15.5 20 12 16 +0.070 0 0.1 0.3 32 37.0 31 91 37 36 71 M22 X 1.5 22.5 26 M22 X 1.5 13 18 28 +0.084 0 0.1 0.3 39 16 41 47.3 105
Material: Free cutting sulfur steel Applicable bore size (mm) 40 50, 63 80 100 A A1 R1 U1 E1 L1 MM NX NDH10 Part no.
210 220 250 300 32 36 45 50 63 71 90 115 7 9 9 9 12 14 16 18 18 22 22 28 34 40 44 49 73 82.5 90 97.5 110 120 145 170 12 16 16 19 26 26 25 32 12 15 15 18 25 25 25 32 50 85 95 110 140 162 160 200 47 62 74 90 110 130 154 194 64 72 90 100 126 150 180 230 78 90 110 120 154 180 210 265 46 58 68 89 100 114 140 180 32 40 50 63 80 100 125 160 1.12-7 Series C92 Accessories Counter pivot E Bore (mm) R1
With silencer 2 position double EVS 2 K: With foot bracket and silencer (2 position single only) VFN 3(R) port PE port 3 position closed center 3: Common exhaust type for main and pilot valve Note) The bracket and silencer are not assembled. 3 4(A), 2(B) port size M5 M5 x 0.8 C4 C6 One-touch fitting for 4 One-touch fitting for 6 3 position exhaust center 3(R) port PE port Note) 1(P), 5(R1
MIGAKIMARU Polish 16 MXS m l 4 X 25l 76.5 66.5 5 4 MIGAKIMARU Polish 18 L 4 X 25l 83 73 5 4 MIGAKIMARU Polish 20 MXQ 4 X 36l 88 78 5 4 MIGAKIMARU Polish 24 MXF MXW I Type Single Knuckle Joint Rod End Nut (Standard option) NDH10 MXP 30 MM RR1 45 d MG E1 MGP D C U1 NX A1 L1 MGQ H B A MGG Material: Sulful free-cutting steel Material: Rolled steel material (mm) (mm) MGC Bore size (mm) A1 E1 MM R1