Rodless Cylinder for Vacuum Series CYV ø15, ø32

Maximum operating pressure Pv (MPa) 1 5 0.3 Model Allowable load mass mv (kg) Model Cushion Stroke Stroke (mm) CYV15 CYV32 CYV15 CYV32 25 30 8-18-6 Rodless Cylinder for Vacuum Series CYV 15, 32 How to Order MX CYV 15 200 MTS MY CY Standard stroke Bore size MG 15 32 15 mm 32 mm Standard stroke (mm) 100, 150, 200, 250 300, 350, 400, 450 500, 600, 700 Bore size (mm) 15, 32 CX DSpecifications

Series CDU 10-/11- 21-/22- ø6, ø10, ø16, ø20, ø25 Free Mount Cylinder

Fittings & Tubing Air Cylinders Rotary Actuators Relief port 2 x M5 x 0.8 2 x P through M5 x 0.8 R GC GB E GA MM D C J 2.8 2 x P through A 4 x T counterbore E 0.5 B H S Z (mm) 6 depth 4.8 5 S 10 15 20 25 30 5 Z 10 15 20 25 30 Bore size B C D E GA GB GC H J MM P R T A 13 22 3 23 16 15 13 10 3.2 7 M3 x 0.5 31 10 7 6 10 15 24 4 24 33.5 16 15.5 16 11 M4 x 0.7 3.2 9 6 depth 5 64 69 74 79 84 89

SMC Pneumatic Clean Series

LH LT 2-LC (Knock pin position) 4-LD W W X Y M X Y Z LS + Stroke LX LZ ZZ + Stroke (mm) 7 7 6 6 LD 4 4 4 4 LC 3 3 3 3 LT 30 25 22 20 LH 51 53 53 53 LS Z 135 125.5 123.5 118 ZZ 16.5 16 15 15 X 8.5 8 7 7 Y 4 3.5 3.5 3 M B 54 44 36 32 LX 10 10 10 10 W 71 58 49 44 LZ Bore size 63.5 53 52 47 54.5 45 38.5 34 40 32 25 20 50 63 80 100 4.5 4.5 4.5 6 17.5 17.5 20 20 75.5 75.5 95 95 157.5 157.5 188.5

Non-contact Gripper

26.5 MXQ-A827 5 16.5 3 8 3.5 M6 x 1 MXQ-A827-X11 15 26.5 MXQ-A827-X12 25 36.5 MXQ-A1227 5 20 4 12 4 M8 x 1 MXQ-A1227-X11 15 30 MXQ-A1227-X12 25 40 MXQ-A1627 5 24.5 5 14 4 M10 x 1 MXQ-A1627-X11 15 34.5 MXQ-A1627-X12 25 44.5 MXQ-A2027 5 27.5 6 17 5 M12 x 1.25 MXQ-A2027-X11 15 37.5 MXQ-A2027-X12 25 47.5 MXQ-A2527 5 32.5 6 19 6 M14 x 1.5 MXQ-A2527-X11 15 42.5 MXQ-A2527-X12 25 52.5 A B D C M

100

(Recommended tightening torque: 3 to 5 Nm) ZL112A-G With pressure gauge P V 56 Circuit diagram * Tighten to the recommended torque on pages 15 and 16 to mount the body.

Vacuum Pad: Ball Joint Type

Pad dia. 10 13 16 20 25 32 40 50 Buffer stroke 10 mm 20 mm 30 mm 40 mm 50 mm Inclination 15 (Rotation 30 ) 708 Vacuum Pad: Ball Joint Type Vertical Vacuum Entry Without Buffer/Male Thread ZPT Series How to Order ZPT 25 F GN B5 A8 Mounting Pad diameter Symbol Mounting Pad dia. 10 10 A8 M8 x 1 10 to 16 13 13 A10 M10 x 1 20 to 32 16 16 A14 M14 x 1 40, 50 20 20 25 25 Vacuum entry port 32 32 40

Ejector Valve Unit Series ZYY/ZYX

How to Order Electronic Vacuum Pressure Switch 15 130 ZSE1 00 X Output specifications Compatible model 129 For Series ZYX3000 NPN open collector, single output Analog, no output, 3 turn setting 14 130 For Series ZYY3000 NPN open collector, single output Analog, no output, 200 degree setting 15 Wiring specifications NPN open collector, double output Analog, no output, 3 turn setting 16 Lead

Rotary Table Vane Style Series MSU Size: 1, 3, 7, 20 1

Refer to pages 11-11-10 to 11-11-15 for detailed auto switch specifications.

REC

2, 4, 6, ) 10 15 60 60 + 45 (n 2) D-C73C D-C80C DH7C 10 15 65 (n 2) 2 15 + 50 ( ) 65 + 50 (n 2) (n = 2, 4, 6, ) (n 2) 2 15 + 50 ( ) D-B5/B64 D-G5NTL 10 15 75 (n = 2, 4, 6, ) 75 + 55 (n 2) (n 2) 2 20 + 50 ( ) D-B59W 15 20 75 (n = 2, 4, 6, ) D-A3 D-A44 D-G39 D-K39 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside

Auto Switch Guide

Weight (g) D-F7BA D-F7BAV Auto switch model 0.5 Lead wire length (m) 3 50 50 Auto Switch Internal Circuit 5 81 81 Dimensions OUT (+) Brown D-F7BAL 3.2 mounting hole Main circuit of switch Indicator light 15 OUT () Blue Indicator light/Display method Most sensitive position Operating range D-F7BAVL 3.2 mounting hole Indication Green Red Red 8 Indicator light 15 Optimum operating position

MGC

View A-A Bore size (mm) Stroke range (mm) AF AE AD AC AB AA A G F E D C B AP H 20 25 32 40 50 75, 100, 125, 150, 200 25 62 15.5 13 11 84 5.6 90 45 24 106 M5 x 0.8 depth 10 9.5 depth 6 22 M6 x 1 depth 10 30 65 16.5 13 15 89 6.8 103 45 26.5 120 11 depth 8 M6 x 1 depth 12 M8 x 1.25 depth 14 27 75, 100 125, 150 200, 250 300 35 70 16.5 13 15 94 6.8 118 50 26.5 135 11 depth 8 M6 x 1 depth 12 M8

MGQ

21 27 33 37 40 2 2 2 2 2.5 2.5 1 1 1 1 1.5 1.5 5 10 10 10 15 15 11 11 12.5 15 18 21 M8 x 1.25 M8 x 1.25 M8 x 1.25 25, 50 75, 100 125, 150 175, 200 124 106 48 122 90 110 M8 x 1.25 M8 x 1.25 M8 x 1.25 140 120 56 138 100 124 M10 x 1.5 M10 x 1.5 M10 x 1.5 150 130 69 148 110 132 M10 x 1.5 M10 x 1.5 M10 x 1.5 188 160 88 185 140 166 M12 x 1.75 M12 x 1.75 M12 x 1.75 224 190 108 221 170 200 M14 x

Auto Switch Guide

Weight (g) D-F7BA D-F7BAV Auto switch model 0.5 Lead wire length (m) 3 50 50 Auto Switch Internal Circuit 5 81 81 Dimensions OUT (+) Brown D-F7BAL 3.2 mounting hole Main circuit of switch Indicator light 15 OUT () Blue Indicator light/Display method Most sensitive position Operating range D-F7BAVL 3.2 mounting hole Indication Green Red Red 8 Indicator light 15 Optimum operating position

Rodless Cylinder for Vacuum Series CYV ø15, ø32 1

Maximum operating pressure Pv (MPa) 1 5 0.3 Model Allowable load mass mv (kg) Model Cushion Stroke Stroke (mm) CYV15 CYV32 CYV15 CYV32 25 30 8-18-6 6 Rodless Cylinder for Vacuum Series CYV 15, 32 How to Order MX CYV 15 200 MTS MY CY Standard stroke Bore size MG 15 32 15 mm 32 mm Standard stroke (mm) 100, 150, 200, 250 300, 350, 400, 450 500, 600, 700 Bore size (mm) Courtesy of Steven Engineering

EXxx-OMW0014CN

SI 2 11.4 1x 2x ( 2.5 mm= 1.3 Nm) . 3-3 IP65 15 No.EX-OMW0014CN-A 3.2.

PFxx-OMP0001CN

V) D NPN (420 mA) E*2 PNP (15 V) *4 (2m) F*2 PNP (420 mA) + () G*2 NPN *3 W H*2 PNP *3 *2 *3 N M8 *4 ZS-33-D 2m ZS-33-F ZS-42-C PFMB7501/7102 (3.04 ) ZS-42-D PFMB7202 (3.04 ) -10No.PF-OMP0001CN-F (OUT) (IN) INOUT LCD (UP) (SET) (DOWN) LCD (OUT1)/ OUT1OUT2 ON ON/OFF (UP) (SET) ON/OFF (DOWN) -11No.PF-OMP0001CN-F F.S. () 15 V F.S.=5[V]1[V]4[V] 1F.S.4[V]10.04[V] 15 V 15

PFxx-OMS0001CN

V F.S.=5[V]1[V]4[V] 1F.S.4[V]10.04[V] 15 V 15 V 420 mA ON OFF () (0100)() 90 () (0100) ()90ON(OFF) 0 1 atm()[nor] () 10 L/min 10 L ON OFF ON OFF 0 -12No.PF-OMS0001CN-A , , 2 5 10 L/min 5 ,51050 L ON-OFF () 1 L/min ,10 11 12 1 L/min SI SI ON-OFF ON 0 20 1 atm()[Anr] ripple -13No.PF-OMS0001CN-A 9022545 -14No.PF-OMS0001CN-A 2 0.50.7 Nm M4 (4 ) (71 ) M4 -15No.PF-OMS0001CN-A

PFxx-OMY0005

If the installation is using accurate control, wait until the product has warmed up (approximately 10 to 15 minutes) before operation.

4-channel Flow Monitor ( compatible)

For precise flow detection, allow the product to warm up for 10 to 15 minutes. Check if the product satisfies the specified accuracy 10 minutes after supplying power. Warming up inadequate Product failure Replace the product. -94No.PF-OMA1011-A Problem No.

Valve for Water and Chemical Base Fluids (2/3 Port Air Operated Valve)

2 x 6 (for M5 mounting) G1/4, Rc1/4 OUT(2) port 48 6 22 22 6 25 25 43 15 15 M5 leakage detection port 23 30 22 Part number for sub-base VCC12-S02 02F [Rc1/4] [G1/4] 60 0.5 to 2 Sub-base material is aluminum + hard anodized containing PTFE.