Electric Actuator High Rigidity and High Precision Slider Type Circular arc grooves allow for high rigidity and high precision. Moment resistance*1 *2 61% Improved by up to Table displacement*1 50% Reduced by up to With internal battery-less absolute e

200 200 0 0 0 0 10 20 30 40 50 60 70 0 10 20 30 40 50 0 5 10 15 20 25 30 35 Work load [kg] Work load [kg] Work load [kg] 1000 1000 1000 800 800 800 L4 [mm] L4 [mm] L4 [mm] 600 600 600 L4 X 400 400 400 200 200 200 0 0 0 0 10 20 30 40 50 0 10 20 30 40 50 60 70 0 5 10 15 20 25 30 35 Work load [kg] Work load [kg] Work load [kg] 1000 1000 1000 800 800 800 Mey L5 [mm] L5 [mm] L5 [mm] 600 600 600

MGP

P.336 P.1785 (/) (/) 19 18-2. 12 16 20 25 32 40 50 63 80 100 1 2 1 2 1 15 2 15 1 15 2 15 1 2 1 2 1 2 1 2 1 2 1 2 1 2 1 2 2 10 15 5 10 5 10 10 5 10 D-A9 D-A9V D-M9V D-M9 10 10 10 10 D-M9W D-M9WV D-M9AVL 15 10 D-M9AL 15 10 5 D-Z7 D-Z80 D-Y59 D-Y7P D-Y69 D-Y7PV D-Y7W D-Y7WV 15 10 10 15 10 5 5 5 10 15 15 10 15 D-Y7BAL 10 20 75 18-3.

13

Selection Graph (2)-1 Pad Diameter Selection Graph by Lifting Force Vertical Lifting (2 to 50) Selection Graph (1)-1 Pad Diameter Selection Graph by Lifting Force Horizontal Lifting (2 to 50) 50 40 32 25 20 16 13 10 8 50 40 32 25 20 16 13 10 8 -80 kPa -70 kPa -60 kPa -50 kPa -40 kPa -80 kPa -70 kPa -60 kPa -50 kPa -40 kPa Pad diameter (mm) Pad diameter (mm) Pad diameter (mm) 6 6 4 4 2 2 Lifting

VXD21/22/23

DC AC, DC 60 40 1 80 60 10(1) 40 60 60 40 Maximum Minimum 10 5(2) Note 1) Dew point: 10C or less Note 2) 50 cSt or less Note 3) D, E, N, P etc. in parentheses are option symbols.

ZP

F 4-9.5 F 4-8 4-6 3-6.5 4-5 G 3-4 Y 3.5 Y 6 E E E Y 8 10 6 34 40 18 C C C A B D A A B D B D Dimensions Dimensions Dimensions (mm) (mm) (mm) A B C D E F Y A B C D E F G Y A B C D E F Y Model Model Model ZP40HB ZP63HB ZP100HB 40 41.4 28.4 43.2 20.5 30 13 63 65.1 45.5 67.6 31.5 50 4.5 21.5 100 103.1 68.6 106.7 47.5 80 35.5 ZP50HB ZP80HB ZP125HB 50 51.9 35.7 54 24 40.5 16.5 80 83 58.4 85.1 37

KP/KPQ/KPG

M L 8 12 KPQL12-00 KPGL12-00 31.4 7.5 25 50 40 20 20.9 Note 1) D indicates the maximum diameter.

155

D-M9NA D-M9BA D-M9PA Auto switch model In-line In-line In-line Electrical entry direction 3-wire 2-wire Wiring type NPN PNP Output type 24 VDC relay, PLC IC circuit, Relay, PLC Applicable load 5, 12, 24 VDC (4.5 to 28 V) Power supply voltage 10 mA or less Current consumption 24 VDC (10 to 28 VDC) Load voltage 28 VDC or less 2.5 to 40 mA 40 mA or less Load current 4 V or less 0.8 V or

ML1

Note Applicable swich USwitch mounting screw M2.5 X 10 l BMY1-025 D-E73A/76A/80A 25 32 40 USwitch mounting nut USwitch mounting screw M2.5 X 12 l D-M5N/M5P/M5B D-M5NW/M5PW/M5BW D-M5NTL/M5PTL BMY2-025 USwitch mounting nut 4.7-4 Hy-Rodless Cylinder SeriesML1 Cylinder Specifications 25 32 40 Bore size (mm) Guide mechanism Cam follower guide Fluid Air Action Double acting Operating pressure range

Series CQS Compact Cylinder Compact Type ø12, ø16, ø20, ø25

, 15, 20 25, 30, 35, 40 45, 50 12, 16 20, 25 Dimensions ...10 &11 Series CQS How to Order . 1 12 16 20 25 5, 10 Construction . 12 Solid state switch D-M9N, F9NV D-M9P, F9PV D-M9B, F9BV D-F9NW, F9NWV D-F9PW, F9PWV D-F9BW, F9BWV Dimensions ...13 to 16 Series CQSK How to Order . 1 12 16 5, 10, 15, 20, 25, 30 Construction . 17 20 25 5, 10, 15, 20, 25, 30 35, 40, 45, 50 Dimensions ...18 &19 Note

LEH_C

),LEHF20:25(F.S),LEHF32,40:20(F.S) 2) () 3) 5m 5m 10%(15m 20%) 4) 5) () 6) () 7) () 452000Hz 1 () 8) () 9) 2 - 3.2 LEHF 10 K 16 6N 1 2 1 R 2 10 10 DIN 2 0 2 0 D D 32 32 1DIN I/O (m) 40 40 1.5 1 1.5 1 K K 3 3 3 3 5 5 5 5 (mm) LECP6 LECP6 ( NPN NPN 32 16 16 32 10 10 PNP PNP 48 20 24 20 24 48 LECP1 1 LECP1 ( 1 NPN NPN 64 32 32 32 32 64 PNP PNP 1P 1P 80 40 40 40 40 80 AN LECPA

Step Motor Controller

P1 Control Circuit Power Supply Connector: CNP2 Accessory P2 Terminal name Function Function details P P C D L11 L21 Connect between P and D. (Connected at time of shipping.) If regeneration option is required for Model Selection, connect to this terminal.

Low Profile Slide Table Series MXF

H G 5H9 depth 5 +0.030 0 33.5 6 5H9 +0.030 0 depth 5 (mm) N G H NN J M Z ZZ Model MXF20-30 4 29 30 4 57 91 91 104 MXF20-50 4 36 45 4 77 113 113 126 MXF20-75 6 40 45 6 125 162 162 175 MXF20-100 6 59 60 6 175 211 211 224 144 Low Profile Slide Table Series MXF Auto Switch Proper Mounting Position (Detection at Stroke End) Reed Auto Switch: D-A90, D-A93, D-A96, D-A90V, D-A93V, D-A96V (mm) B E

Air Cylinder

16.5 28.5 40.5 16 2.5 8.5 17 29 41 47 71 89 101 6 1.5 8 8 17 21 35 D-A9lV 10 2 9 9 16.5 28.5 40.5 16 2.5 8.5 8.5 17 29 41 47 71 89 101 6 1 7.5 16.5 20.5 34.5 D-H7l/H7C D-H7lW/H7BA D-H7NF 10 1.5 8.5 16 28 40 16 2 8 16.5 28.5 40.5 46.5 70.5 88.5 100.5 6 2 8.5 17.5 21.5 35.5 D-C7l/C80 D-C73C D-C80C 10 2.5 9.5 17 29 41 16 3 9 17.5 29.5 41.5 47.5 71.5 89.5 101.5 D-M9l D-M9lW/M9lWV D-M9lA

LG1H

A: Acceleration time B: Constant velocity time C: Deceleration time D: Resting time (0.4sec.)

Speed Controller with One-touch Fitting

TMH Electroless nickel plated ASD Easy to use AS Larger knob Push-lock type AS-FE Easy to lock KE Body size D [mm] 1 9.4 Unlock Lock AS-FG D 2 12 (Port size 1/8) AS-FP 13 (Port size 1/4) 3 16.6 AS-FM 4 18.8 AS-D AS-T ASP ASN AQ ASV Improved tube insertion/removal AK Max.

SFOD-OMT0009CN

-1 5 + B-3 1 A-3 2 2 1 (5.5) (14) (a) (6.3) B1 A1 (17.7) 5 6 (14.2) (b) A6 B6 (c) (10.2) 2 1 B1 A1 (18) B3 A3 (d) (5.7) 15 16 83 L (11) (30.7) No.SFOD-OMT0009CN-B 10.7 I/O J X C C 2 * L 1 1.5m 40 AWG AWG28 3 3m 5 5m PLC (7.5) R1.25-4(M4 ) 40 20 39 . . . 2 21 1 L PLC 1.27mm No.

High Purity Fluoropolymer

Printed in Japan. 1st printing June, 1999 D-SMC.L.A. P-100 (YG) 4th printing April, 2002 D-DN P-80 (DN)

Series SYJ3000/5000/7000 4, 5 Port Solenoid Valve Rubber Seal

Note 6) At rated voltage Series SYJ7000 Cylinder Maximum Operating Speed 1000 E 900 D 800 B C SY 700 Piping length 1m Max.operating speed (mm/s) SYJ 600 Piping length 5m SX A B 500 VK 400 VZ 300 VF 200 VFR 100 VP7 20 25 32 40 40 50 63 80 100 VP4 CM2 cylinder CA1 cylinder Cylinder bore size (mm) System Figure a VQ Solenoid valve VQ4 Fitting Air cylinder VQZ VQD Silencer VZS Speed controller

NCQ8

Applicable load IC circuit, Relay, PLC Load voltage 24 V or less 48 V or less 100 V or less AC DC AC DC AC DC Maximum load current 50 mA 40 mA 20 mA Contact protection circuit None 1 or less (including lead wire length of 118"(3m)) Internal resistance D-A93, D-A93V, D-A96, D-A96V (With indicator light) D-A93, D-A93V D-A96, D-A96V Auto switch part no.

KP/KPQ/KPG

16 18.5 M L 8 12 KPQL12-00 KPGL12-00 31.4 7.5 25 50 40 20 20.9 Note 1) D indicates the maximum diameter.