Air Slide Table Series MXS

Recommended pneumatic circuit t (mm) Mounting pitch: t Model MXS6 MXS8 MXS12 MXS16 MXS20 MXS25 5 10 10 10 15 15 Air slide table W Vertical use 2. Be sure to use meter-out speed control valves. If it is used in meter-in speed control or without a speed controller, it may result in malfunction. 3. When releasing the end lock manually, be sure that air pressure is released.

SMC Pneumatic Clean Series

6 KA 78 79 77 77 S 16 12 10 8 D 25 18 14 12 E 2 2 2 2 F 40 32 25 20 30 22 22 18 23 0<23> 0 0 10 0 0 0 M5 x 0.8 depth 7.5 M5 x 0.8 depth 8 M14 x 1.5 M6 x 1 depth 12 12 12 1/4 1/4 3/8 1/2 58 58 27 27 32 41 14<12> 14<12> 10 10 10 10 23 20 20 20 11 11 58 72 20<17> 20<17> 16 16 71 71 13 16 89 110 7 7 10 10 55 69 80 100 10 10 10 10 32 38 50 60 150 150 182 182 18 18 22 26 90 90 108 108 20 20 25

Vacuum Pad: Ball Joint Type Series ZPT/ZPR Pad Diameter: ø10, ø13, ø16, ø20, ø25, ø32, ø40, ø50 1

Pad diameter (mm) 10 10 Vacuum entry port (Refer to Table (1) for applications.)

SMC

Actuator driving system Inside of clean room w t e q r t q Cylinder relief port piping w Solenoid valve exhaust piping e Breathing piping of regulator r Drain piping t Exhaust Cleaner for Clean room/AMP series Cylinder relief port piping Series 10-/12-/21(atmospheric release type) Connect the relief port piping with the dedicated duct piping installed outside the clean room or with the exhaust

Fieldbus system EtherNet/IP compatible SI Unit

Unit 1 Disable Does not generate an error. -10..10 V -5..5 V -10..10 V Selects the analogue input range. (AXB: Cannot select -10..10 V/-5..5 V/ -20..20 mA) -20..20 mA (AXA) Sets the analogue input device range. 0..10 V 2 Analogue input range Channel 0..5 V 1..5 V (AXB) 1..5 V 0..20 mA 4..20 mA Offset binary Offset binary. Sign & Magnitude Signed binary.

HRX-OM-X037

.Communication setting screen 36.Contact output 46 Setting screen 10.

Air Slide Table Series MXP

MXP6-5 MXP-AD6-5 MXP6-10 MXP8-10 MXP-AD8-10 MXP8-20 MXP-AD8-20 With magnet and mounting screw MXP10-10 MXP-AD10-10 MXP10-20 MXP-AD10-20 MXP12-15 MXP-AD12-15 MXP12-25 MXP-AD12-25 MXP16-20 MXP-AD10-20 DMXP16-30 MXP-AD12-25 Note) MXP16-20 and MXP10-20 are common. MXP16-30 and MXP12-25 are common. -X Individual -X 197 Series MXP Construction MXP6 @0 !9 !8 !2 !1 t e y !7 !6 !5 i q w !0 !

Fieldbus system EtherNet/IP TM compatible SI Unit IO-Link Master Unit

Enable Generates an error. 1 Unit Disable Does not generate an error. -10..10 V -5..5 V -20..20 mA 0..10 V 2 Analogue input range Sets the analogue input device range. Selects the analogue input range. -10..10 V Channel 0..5 V 1..5 V 0..20 mA 4..20 mA Offset binary Offset binary.

EXxx-OMY0004

Appendix F: Safety Characteristics Operation Output with Two Output with Outputs Two Channel Single Channel Channel Single Channel (only) Input (only) Input (only) Item Input Input SFF 99.98% 99.98% PFDAV (T) 1% of 10-3 1% of 10-2 Average Probability of Dangerous Failure PFH (T) 1% of 10-7 1% of10-6 Probability of dangerous failure per hour Achievable Safety Level SIL3 / PL e SIL2 / PL d

EXxx-OMY0006CN

/PL / 16 108 No.EX##-OMY0006CN 22.F + + SFF 99.98% 99.98% PFDAV (T) Average Probability of -3 1% of 10 -2 1% of 10 Dangerous Failure PFH (T) Probability of dangerous -7 1% of10 -6 1% of 10 failure per hour Achievable Safety Level SIL3 / PL e SIL2 / PL d SIL3/PL e SIL2 PL d 109 No.EX##-OMY0006CN 23.GEX245-FPS EX245-FPS1/2/3 Input delay : tFilter + 2 ms tFilter = Parameterized filter

Digital Flow Switch

L/min 0 to 1 L/min 0 to 3 L/min 0.5 to 0.5 L/min 5 to 500 L/min 5 to 500 L/min 10 to 1000 L/min 20 to 2000 L/min 2 to 200 L/min 1 to 1 L/min 10 to 1000 L/min 3 to 3 L/min 20 to 2000 L/min Power supply voltage 24 VDC 10% 12 to 24 VDC 10% 12 to 24 VDC 10% 24 VDC 10% 12 to 24 VDC 10% 12 to 24 VDC 10% Temperature characteristics 2% F.S. 2% F.S. (15 to 35C) 2% F.S. (15 to 35C) (25C standard)

Stainless Steel High Vacuum, Angle/In-line Valve, Angle type Series XM, In-line type Series XY

10-9 1.3 x 10-8 Kalrez 1.3 x 10-10 (FKM) Q1 R1 R2 R3 S1 T1 4079 SS592 SS630 SSE38 1232-70 Note 1) Values at ambient temperatures, excluding gas permeation.

Title not found

13 7 6 9 8 11 10 3 Connector B terminal no.

CV/MVGQ

with indicator light Conduit terminal with surge voltage suppressor Nil T D DL TZ (Refer to Standard Stroke on page 10-15-58.)

Compact Slide Series MXH

20 1 MXS 20 16 16 0.1 0.01 MXQ 10 10 6 6 MXF 0.01 0.001 0.1 0 20 40 60 80 100 0 20 40 60 80 100 0 20 40 60 80 100 MXW Overhang L (mm) Overhang L (mm) Overhang L (mm) MXJ Graph (5) Load Eccentricity 100 mm Graph (8) Load Eccentricity 100 mm Graph (11) Load Eccentricity 100 mm MXP 1 10 10 MXY Mass m (kg) 0.1 MTS 1 Mass m (kg) Mass m (kg) 20 16 10 6 1 20 20 16 10 16 0.01 0.1 10 6 6 0.001 0.1

3 Port Solenoid Valve

0.015 0.024 0.008 0.016 10-V124A Note 1) Note 1) 10-V124 and 10-V124A: Supply pressure to port 3 and exhaust from port 1.

4 Way • 4 and 5 Port, Rubber Seal • Solenoid Pilot Valve, Series SYJ3000

10 28.4 (Mounting holes) 3.5 25 2.5 5 5 10 22 16.4 10 3.2 222 4 (Mounting holes) Manual override (Non-locking) M3 0.5 (Pilot port) M3 0.5 (Pilot port) A B 11 17.5 1(Bleed port) 1.5 A B 1.5 1.5 5-M3 0.5 (Piping port) 33 36 Manual override (Non-locking) B P R R 7 7 36 2 35 7 13.5 28.5 15 A 21 R2 P R1 13 1(Bleed port) 11 10 4 15 10 10 5-M5 0.8 (Piping port) 14 14 15 (Bracket) 2 Position double

Coolant Valve Series SGH

External pilot solenoid 1 Y A G 1 T Z B1 10 2 1 70 SGH SGHA Air operated 1 A G B1 10 1 2 70 q w e r t y u i o !0 !1 !2 q Series y Port size t Thread type e Seal material 70 r Pressure range w Valve type 1 2 3 4 1 2 A B 10 15 20 25 SGH100 SGH200 SGH300 SGH400 SGH100 SGH200 SGH300 SGH400 N.C. N.O.

AMX-OM-Q015E

Standard dew point -20oC, -15oC : about 10 min.

AMX-OM-Q018E

Standard dew point -20oC, -15oC : about 10 min.