Electric Actuator Series LJ1H/LJ1S Made to Order Specifications

Vacuuming Graphs Top cover Seal separator LJ1H10 Vacuuming flow characteristics Particle concentration (Particles/ft3) Particle concentration (Particles/ft3) 10 Speed: 400mm/s Dust seal 10 Speed: 600mm/s 10 Side cover 200 150 100 50 25 Vacuuming flow (l/min ANR) LJ1H20 Vacuuming flow characteristics 10 Speed: 500mm/s 10 Speed: 1000mm/s 10 200 150 100 50 25 Vacuuming flow (l/min ANR) Particulate

HRX-OM-S004

When the set circulating fluid temperature and/or the ambient temperature is lower than 10 deg. C, use a 15% aqueous solution of ethylene glycol.

Microspeed Cylinder: Double Acting/Single Rod Series CQSX ø 12, ø 16, ø 20, ø 25 Dimensions and auto switch details are equivalent to those of the standard double acting single rod cylinder.

10 5 10 Note) 15 Note) 20 Note) 5 5 1 pc.

3 Way, 3 Port NVF110 Series Direct Solenoid Operated

Normally Closed SERIES NVF 110 DIRECTIONAL AIR VALVE DIRECT SOLENOID OPERATED CHARACTEFISTICS Port Sizss (NPTO '10-32 P&E; 10-32 or 1/8"A Opelating Prsssure 0'100 PSI; 0-150 PSI (H) ftoof Pre6sur 225 PSIG (15Kgflcm'z) Operailng Temperature 14-140'F(101o + 6O"C) a;a lnrusn s.6 VA (50 Hz),5.0 VA(60 Hz) Holding 3.4 VA (50 Hz),2.3 VA (60 Hz) PowerConaumptlon DC 1 . 8 W c, 0.055 , 0.05 (H Type

IDX-OM-U022

IDFA 100 F 40 C G K 100 125 150 ) 100kW 125kW 150kW ) R V 38 AC380V(50Hz) 40 AC400V(50Hz) C G K R V IDFA100F150F 1 1 1.1 IDX-OM-U022 1. 1.2 1.2.1 (C) 1.2.2 G . 1.2.3 K 1.6MPa 1.2.4 R 30A (IDFA100F, IDFA125F, IDFA150F) 30mA 1.2.5 V ON 1.5 OFF 0.5 IDFA100F150F 1 2 1.2 IDX-OM-U022 1. 1.3 A 3 A IDFA100F150F 1 3 1.3 IDX-OM-U022 1.

VEX-OMY0001

-2No.VEX-OMY0001 / 1 1.5 *3) *3)1 1 () No.VEX-OMY0001 -3- VEX3 3 / / 1 VEX3 DC () () , () ,ON OFF () C-R ( )C-R ( ) DC VEX3121, VEX3122, VEX3221, VEX3222, VEX3 2% VEX3321, VEX3322, VEX3421, VEX3422 VEX3 , VEX3501, VEX3502, VEX3701, VEX3702, 3% VEX3901, VEX3902 AC 15% (SSRTRIAC )AC 1) (C-R ) OFF 2) () 4 No.VEX-OMY0001 VEX3 / / 1) 1 2) 1V 1) M5 0 1/6 1/4

lVFl 10

Normally Closed o SERIES NVF 110 DIRECTIONAL AIR VALVE DIRECT SOLENOID OPERATED CHARACTEFISTICS Port Sizss (NPTO '10-32 P&E; 10-32 or 1/8"A Opelating Prsssure 0'100 PSI; 0-150 PSI (H) ftoof Pre6sur 225 PSIG (15Kgflcm'z) Operailng Temperature 14-140'F(101o + 6O"C) a;a lnrusn s.6 VA (50 Hz),5.0 VA(60 Hz) Holding 3.4 VA (50 Hz),2.3 VA (60 Hz) PowerConaumptlon DC 1 . 8 W c, 0.055 , 0.05 (H Type

Compact

0.06 ST 15, 20 0.04 0.04 ST 15, 20 0.04 ST 5, 10 0.02 0.02 0.02 ST 5, 10 0.00 0 5 10 15 0.00 0 5 10 15 0.00 0 5 10 15 Load [N] Load [N] Load [N] MXZ16 MXZ16 MXZ16 0.15 0.15 0.15 Table displacement [mm] Table displacement [mm] Table displacement [mm] ST 25, 30 ST 25, 30 ST 25, 30 ST 15, 20 0.10 0.10 0.10 ST 15, 20 ST 15, 20 ST 5, 10 0.05 0.05 0.05 ST 5, 10 ST 5, 10 0.00 0 5 10 15 20 25 0.00

Series 10/11 -CQSX, -CQ2X Microspeed Cylinder for Clean Room Series 10-, 11-

Series 10/11 -CQSX Series10/11 -CQ2X How to Order How to Order Clean room series 10 11 Clean room series 10 11 Relieving type Vacuum type Relieving type Vacuum type C(D)QSX B 20 10 30 A90 C(D)Q2XB 40 10 30 A73 D D With auto switch With auto switch (with built-in magnet) (with built-in magnet) Microspeed cylinder Microspeed cylinder Mounting Cylinder stroke (mm) Bore size Number of auto

5 Port Solenoid Valve/Body Ported, Cassette Type Manifold, Series SY3000/5000/7000

R P R R P R L (10) 8 End plate side End plate side (24) (35) 5.5 Silencer with One-touch fitting This is a silencer which can be attached to the R (exhaust) port of a manifold using a One-touch fitting. Rail mounting hole pitch 12.5 C 9 8 7 6 5 4 3 2 1 0 No.

INFORMATION Modular Connection Type Residual Pressure Relief 3 Port Solenoid Valve For connecting to F.R.L. units AC25-A AC30-A AC40-A VP500 IN OUT VP700 Allows for space saving and reduced piping labor. Power consumption: 0.35 W (Without light) EXH Exam

C [dm3/(sbar)] b Cv C [dm3/(sbar)] b Cv VP517Y G3/8 8.8 0.14 2 8.2 0.15 1.8 VP717Y G1/2 13.8 0.11 2.9 12.9 0.18 2.9 2 VP500/700 Series Spacer Center of F.R.L. body D C B Model A B C D Y300-A 4.2 43.4 21.7 57.9 Y400-A 5.2 53 26.5 68.5 A (Spacer width) Seal Y400-A Spacer with Bracket D K Center of F.R.L. body J H F G E E C B Seal A (Spacer width) Y400T-A Model A B C D E F G H J K Y300T-A 4.2

HRX-OM-W032

Ambient temperature (C) Recommended circulating fluids 10 to 45 Tap water, ethylene glycol aqueous solution 15(wt)% -5 to 10 Ethylene glycol aqueous solution 15(wt)% Circulating fluid temperature(C) Recommended circulating fluids 10 to 35 Tap water, ethylene glycol aqueous solution 15(wt)% 5 to 10 Ethylene glycol aqueous solution 15(wt)% (2) And following instructions must be executed.

Tamper Proof Speed Controller with One-touch Fitting Series AS


1F-T Elbow Type/Universal Type 1

-02 AS321F AS331F AS421F AS431F Model 3.2, 4, 6 Metric size 3.2, 4 6, 8, 10 4 6 8, 10 6 8 10, 12 10 12 Tubing O.D. 1/8", 5/32" 3/16", 1/4" 1/8" 5/32" 3/16", 1/4" 5/16" 1/4", 5/16" 3/8" 1/4" Inch size 5/32" 3/16" 5/16" 3/8" 3/8" 1/2" Flow rate (l/min (ANR)) 100 180 230 260 390 460 660 790 920 1580 1710 Controlled flow (Free flow) 1.5 2.7 3.5 4 6 7 10 12 14 24 26 Effective area (mm2) Note)

CLK1

50 Safety distance (mm) 40 Operational range 30 l1 20 l1 Dangerous range 10 0 5000 10 15000 20 Welding current (A) l2 50 Safety distance (mm) 40 30 l2 l2 Operational range 20 10 0 5000 10 15000 20 Welding current (A) 32 SMC'S GLOBAL MANUFACTURING, DISTRIBUTION AND SERVICE NETWORK EUROPE SPAIN/PORTUGAL SMC Espaa, S.A.

EXxx-OMN0027CN

PLC H.T. ) Enable 1 (SC_MonSs) Disable -10..10 V -5..5 V -20..20 mA 0..10 V 2 (Range) -10..10 V 0..5 V 1..5 V 0..20 mA 4..20 mA Offset binary PLC 3 (D_Format) Sign & Magnitude 2S Complement None 2 2AVG 2 4 (Filter) 4AVG 4 8AVG 8 Enable 0.5 5 (Over_Rng) Disable Enable 0.5 6 (Undr_Rng) Disable Enable 1 (Upr_Lmt) 7 Disable Enable 1 (Lwr_Lmt) 8 Disable

Speed Controller Adjustable by Flat Head Screwdriver with One-touch Fitting Series AS


1F-D Elbow Type/Universal Type 1

Flow Direction Symbols on Body Flow Rate and Effective Area Meter-out type Meter-in type AS221F-01 AS231F-01 AS221F-02 AS231F-02 AS321F AS331F AS421F AS431F AS121F AS131F Model Symbol JIS Symbol Metric size 3.2, 4, 6 3.2, 4 6, 8, 10 8, 10 4 6 6 8 10 12 10, 12 Tubing O.D. 1/8", 5/32" 1/8" 3/16", 1/4" 1/4", 5/16" 3/8" 1/4" Inch size 5/32" 3/16" 5/16" 3/8" 1/2" 5/32" 5/16" 3/8" 3/16", 1/4" Controlled

CJP

Bore (mm) Description Mounting nut Rod end nut SNPS-006 NTP-006 SNPS-010 NTP-010 SNPS-015 NTP-015 6 10 15 1.2-9 Series CJP Recommended Mounting Hole Dimensions for Plug Mounting Style Machining dimensions for Mounting When plug mounted Bore (mm) Stroke A B G F C E D 5 16 12.5 10 6 10 23 3 19.5 8.5 M10 X 1.0 17 3.5 15 30 26.5 24 5 17 13.5 10.5 10 10 23.5 4 12 20 M15 X 1.5 3.5 17 15 30.5 27

Speed Controller with Uni One-touch Fitting AS Series Push-lock type

AK Flow Rate and Sonic Conductance VCHC ASR ASQ Model AS22l1F-U01 AS23l1F-U01 AS22l1F-U02 AS23l1F-U02 AS32l1F AS33l1F AS42l1F AS43l1F Flow Direction Symbols on Body Meter-out Meter-in Metric size 3.2 4 6 8 10 3.2 4 6 8 10 6 8 10 12 10 12 16 Symbol Tubing O.D.

AS-FS Series Speed Controller with Indicator/ Elbow Type: Uni Thread Type

Flow Rate and Sonic Conductance Model AS22l1FSl-U01 AS22l1FSl-U02 AS32l1FSl AS42l1FSl Flow Direction Symbols on Body Meter-out Meter-in Metric size 3.2 4 6 8 10 3.2 4 6 8 10 6 8 10 12 10 12 16 Symbol Tubing O.D.

Clean Gas Filter

SFB 02 10 0 Clean gas filter (Straight type) Made to Order PTFE membrane element is made into a cartridge. (Filtration 0.01 m (Filtering efficiency 99.99%)) Made into a cartridge by fluoropolymer holder and fluororubber (FKM) gasket. Description Aluminum case (Refer to page 312.) X8 Symbol Nil Model type Symbol Type 10 Cartridge Elements are replaceable.